ZS-LD350S-0.5M - Omron - Datasheet.Live

2D CMOS Laser Type

High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields.

ZS-HLDS150

ZS-HLDS60

1500±500mm

1500

600

100

10 600±350mm 100±20mm 50±5mm 20±1mm 25±2mm 15±0.75mm

10±0.5mm

ZS-HLDS10

ZS-LD10GT/LD15GT

ZS-HLDS5T

ZS-HLDS2T ZS-HLDS2VT

Measuring center distance

Highly Advanced Sensing Fu

More P.18

Enables onsite high-speed logging of data in external

memory (compact flash card) for the Sensor Controller or

Multi-Controller.

Effective for building traceability systems, statistical

process control (SPC), and much more.

Ideal for ZS Series Data Logging

Data Storage Unit ZS-DSU

ZS-DSU

High-speed sampling rate: 150 µs

Powerful support for logging data using various

trigger functions.

More P.17

Enables full application of Sensor

Controller information.

Multi-Controller ZS-MDC

Transfers data between multi-connected Sensor

Controllers and performs high-speed

multiprocessing.

Connects to up to nine Sensor Controllers.

More P.6

Range of models with measuring center distance of 20 to 1,500 mm.

Achieves maximum resolution of 0.25 µm.

Maximum response speed of 110 µs.

Parallel output supported.

Very High-performance Sensors that Support Core Quality

from Very Long-range to Extremely Precise Measurements

ZS-HL Series

See Record Control

USB

Business card size

nctions in a Compact Package

More P.14

Diffuse Reflective Sensors

Regular

Reflective Sensors

Measuring

center distance

200

350

130

ZS-LD130

ZS-LD200

ZS-LD350S

ZS-LD50/LD50S

ZS-LD80

ZS-LD40T

ZS-LD20T/LD20ST

Spot beam Line beam Line beam Line beam

Line/spot beam

Line beam

More P.12

Enable maximum sensing performance with fully digital

processing.

Sensor Controllers ZS-HLDC/LDC

Culmination of OMRON's lead-edge digital technology. Enables easy

utilization of the ultimate in measurement performance.

Business card size

USB provided as a standard feature.

Beam Shapes

Spot and line beam selection.

Wide Range of Products

Long-range, middle-range, and short-range models.

ZS-L Series

Manipulate

Monitor

More P.19

Setting Software for the ZS Series

SmartMonitor

Professional ZS-SW11E V3

Meets a wide range of logging needs.

Supports high-speed simultaneous multichannel waveform

graphs.

Excel macros provided for simple analysis.

ZS-LDC

Standard Sensors Most Suitable for a Variety of High-precision

Displacement Measurements, Including Spot Detection,

Wide-range Detection, and Long-distance Detection.

+XX-XX-XXX-XXX

High-performance Sensors

Standard Sensors

Ratings and Specifications

Expansion Units

Advanced technology is carried

Smart Sensor

High Performance

ZS-HL Series

Standard

ZS-L Series

Very High-performance Sensors that Support Core Quality from Very Long-range to

Extremely Precise Measurements

Standard Sensors Ideal for a Variety of High-precision Displacement Measurements,

Including Spot Detection, Wide-range Detection, and Long-distance Detection

ZS-LD20ST

Ideal for measurements

requiring discrimination

between minute parts or

fine shape repeatability.

ZS-LD40T

Ideal for measuring glass

thickness and nozzle

gaps when coating glass

with resist or sealer.

ZS-LD50/LD80

Ideal for measuring the

warp of resin blades in

copy machine toners.

ZS-LD200

Ideal for checking the

precision of door

installations.

ZS-LD350S

Ideal for checking the

flatness of robot arms

that transport wafers in

load ports.

Main Applications

3D shape measurement using

automatic X-Y stage

Sealer coating Glass substrate

ZS-LD10GT/LD15GT

Ideal for measuring

and controlling

dispenser nozzle gaps

when applying sealer.

ZS-HLDS2T

Ideal for measuring

the thickness of sili-

cone or compound

semiconductor wafers

in polishing and testing

processes.

ZS-HLDS5T

Ideal for measuring

liquid gasket (FPIG)

application amounts.

Prevents defects such

as insufficient seal.

ZS-HLDS10

Ideal for confirming

positioning and

repeatability accuracy

of XY stages.

ZS-HLDS60

Ideal for level

detection for liquid

crystal coaters and

PDP fluorescent

substances.

ZS-HLDS150

Protruding objects and

steps can be measured

from a distance for

measurement objects

that cannot be

accessed easily.

ZS-HLDS2VT

Ideal for measuring

the potting resin height

for electronic

components.

Measuring Car Bodies

Measuring Door Attachment Offsets

Measuring Tire Exteriors

Measuring Electrode Thickness

on Compound Semiconductors Measuring Wafer Warping

and Thickness Measuring Arm Inclination

Measuring Glass Undulation

Measuring Glass Surfaces

Inspecting Glass Heights (Autofocus)

Inspecting Board Heights

Inspecting for Board Coplanarity

Measuring Shape for

Positioning Laminated Ceramics

Simultaneous Measuring of Touch

Panel Film Thickness and Gap

DVD Chassis Flatness Inspections

Digital Camera Tube Lens Inspection

Measuring Electrode

Thickness on Dielectrics

Moving Workpieces (Black Rubber)

Measuring Depth of O-Ring Insertion

Automobile and Automotive Parts Electronic Components

Semiconductors Household Appliances and Audio-visual

LCDs and PDPs Rubber, Resin, and Film

Applications by Industry

SmartMonitor graph screen

Spot beam

1 axis scan

Capacitor

PCB

Line beam

Advanced technology is carried

Smart Sensor

Wide lineup of products from 0.25 µm high-resolution models

to 1,500 mm long-range models.

Advanced sensing technology packed into the best Sensor Head for the highest sensing precision

ZS-HL Series Product Lineup 2D CMOS High-end Displacement Sensors

High-performance Sensors

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-HLDS150

1500±500 mm

500 µm

±0.2%F.S.

1.5 mm × 40 mm

ZS-HLDS60

600±350 mm

8 µm

±0.07%F.S.

0.3 mm × 16 mm

ZS-HLDS10

100±20 mm

1 µm

±0.1%F.S.

60 µm × 3.5 mm

ZS-HLDS5T

50±5 mm

0.25 µm

±0.1%F.S.

30 µm × 1 mm

ZS-HLDS2T

20±1 mm

0.25 µm

±0.05%F.S.

20 µm × 1 mm

ZS-HLDS2VT

25±2 mm

0.6 µm

±0.2%F.S.

45 µm × 2.2 mm

ZS-LD10GT/LD15GT

10±0.5 mm /15±0.75 mm

0.25 µm

±0.1%F.S.

25 µm × 900 µm

High-performance Sensors

High grade

Extreme Stability

Ideal Size and Stability

Head Size Superior Moving Resolution

Increased Lens Resolution

Reduced Error for Different Materials

2D CMOS

Complete sensing stability with optimum Sensor Head

size for best performance and holding mechanism

secured at 3 points. (See note.)

Moving resolution (error based on workpiece surface

position) has been reduced dramatically by optimizing

the optical system with increased sensitivity and

resolution of the light receiving lenses.

With a CCD, the charge overflows to the next pixel when

excessive light is received. This phenomenon does not occur

with CMOS, so there are no effects from light fluctuations

from different materials or excessive light reception.

Note: ZS-HLDS2T not applicable.

2D CMOS Laser Image

Sensing Element

The three basics of sensing -

precision, speed, and sensitivity

- can be balanced because

ideal measurement settings can

be made for light reception

area.

Digital Sensing

Totally reliable measurements

with completely digital sensing.

Extremely Sensitive Lenses

High Resolution at 0.001 µm

(ZS-LD10GT)

OMRON's digital sensing technology

achieves unbelievably high

resolution.

Super-high-speed Sampling at

110 µs

(ZS-HLDS@@/LD@@)

You get exact sensing with superior

workpiece following performance.

CMOS high-speed data reading

accurately catches moving

workpieces inline.

±0.05% FS Linearity

(ZS-HLDS2T)

Unique OMRON algorithms reduce

detection error to improve workpiece

measurement accuracy.

All Models Are Class 2 Lasers.

Very high

resolution

High

precision High

speed

Extreme

stability

ZS-HLDS5T/

HLDS10

ZS-HLDS2T

−5

−10

ZS-HLDS5T

Error (µm)

0.7 µmp-p

−10

−15

Error (µm)

Previous OMRON models

10 µmp-p

SUS Glass

−5

−10

1000 2000 3000 4000 5000 6000

Measurement value (µm)

Moving resolution when measuring SUS

13.5 µm

−5

−10

Travel distance

Travel

distance

(mm)

Travel

distance

(mm)

Travel distance

500 1000 1500 2000 2500 3000

4.5 µm

Measurement value (µm)

Moving resolution when measuring SUS ZS-HLDS5T

Previous OMRON models

ZS-HL Series

Previous OMRON models

ZS-HL Series

Constant

distance

Sampling: 4 ms Sampling: 4 ms

Constant

distance

High-performance Sensors

ZS-HLDS60/HLDS150

Glass

Advanced technology is carried

Smart Sensor

High-performance Sensors

High grade

High-performance Sensors

Linearity Characteristic Measuring Car Body Widths

(ZS-HLDS10)

Manage trends by measuring

widths of each car model.

Simple Long-distance Step Measurement

Note: This function may not be

applicable in bright surrounds.Peak/bottom measurement

ZS-HLDS5T/HLDS10

Detect Essentially Any Object Reduced Variation in Linearity between Different Objects, and Linearity

Determines Measurement Accuracy.

Makes it easier to introduce a variety of detection objects.

First 1,500 mm long range sensing in the industry enables measurement of previously

impossible points.

No.1 No.2 No.3 No.4 No.5

Sample-A Sample-B Sample-C Sample-D Sample-E

Peak

Bottom

ZS-HLDS60/HLDS150

A Long Range That Handles Essentially Any Installation Site

−0.15

−0.10

−0.05

0.00

0.05

0.10

0.15

40 42 44 46 48

−0.15

−0.10

−0.05

0.00

0.05

0.10

0.15

40.0 42.0 44.0 46.0 48.0

Peak

Bottom

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-HLDS150

1500±500 mm

500 µm

±0.2%F.S.

1.5 mm × 40 mm

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-HLDS60

600±350 mm

8 µm

±0.07%F.S.

0.3 mm × 16 mm

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-HLDS10

100±20 mm

1 µm

±0.1%F.S.

60 µm × 3.5 mm

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-HLDS5T

50±5 mm

0.25 µm

±0.1%F.S.

30 µm × 1 mm

Measuring range (mm)

Note: Typical examples

ZS-HLDS5T Regular reflection

Specified range

Previous OMRON models Regular reflection

Linearity (% F.S.)

Measuring range (mm)

Advanced technology is carried

Smart Sensor

High-performance Sensors

Angle Characteristics

ZS-HLDS2VT

Ideal for Measuring the Height and Thickness

of Transparent Objects

Tilted and moving workpieces can also be stably measured.

Horizontal

direction

Vertical

direction

A special aspherical lens was

developed for the ZS-HLDS2VT,

and the design of the optical

structure was optimized for

regular-reflective workpieces.

This has greatly increased the

allowable degree of tilt and

improved stability for measuring

transparent and regular-

reflective workpieces.

Vertical + direction Vertical - direction Horizontal + direction Horizontal - direction

Previous OMRON model ZS-HLDS2VT

Limit angle (˚)

Aspherical lens (newly developed)

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-HLDS2VT

25±2 mm

0.6 µm

±0.2%F.S.

45 µm × 2.2 mm

ZS-HLDS2T/ZS-LD10GT/LD15GT

The Only Way to Very High-precision Measurements

Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision

Simultaneous Measuring of Touch Panel Film Thickness and Gap

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-HLDS2T

20±1 mm

0.25 µm

±0.05%F.S.

20 µm × 1 mm

Model

Measuring center distance

Resolution

Linearity

Beam shape

ZS-LD10GT/LD15GT

10±0.5 mm/15±0.75 mm

0.25 µm

±0.1%F.S.

25 × 900 µm

An unbelievable stationary measurement precision of 0.25 µm, the highest in this product class.

Inspection of Disk Play on HDD Motor Rotating Plate

Height Control of Sealant Dispensers

400

350

300

250

200

150

100

00.80.60.40.201

Gap [µm]

100

60 0.80.60.40.20.201

Thickness [µm]

ZS-LD10GT

-1

-2

-3

-4

-5 1 251 501 751 Number

of data

Travel distance (mm)Travel distance (mm)

Displacement [µm]

Simultaneous measurement of transparent object thickness and gap

Measures amplitude undulations of 5 µm.

Slim

26.4 mm

Reduced pattern influence for moving

measurement, the best in the moving

resolution industry.

Possible to match nozzle drip point and

measurement point then measure.

Sensor Head with separate light emission

and reception in one unit to create nozzle

space.

High-performance Sensors

Film Gap

Thickness

Glass

Ideal for Measuring Nozzle Gaps!

Nozzle Gap Sensor

Nozzle

Measurement

point

Emitter Receiver

Sealant supply nozzle

ZS-LD10GT/LD15GT

Sealant application Glass substrate

High-performance Sensors

High grade

Technology

With OMRON's sensing technology and newly developed algorithms, stable, high-precision measurement is possible of workpieces that were difficult

to measure using laser displacement meters due to laser light penetration, transmission, excessive reflection, or insufficient light.

Measurement cycle time 1/8 better than

previous models with addition of received light

waveform captured by 2D CMOS and

simultaneous measurement of front and back

glass surfaces with separate sensitivities.

Large

Small

(Near) (Far)

Received light surface

Received light amount

Real peak position on

surface

Incorrect peak

calculation as a

result of laser light

penetration

Received light

waveform

disruption due to

penetration

Then with digital processing...

ZS-HL Series

Received light amount

Detects the measurement

position after adding the

received light lines.

Position

Removed

Received light amount

Detects the measurement position

for each received light line.

Light noise

products

ZS Series

One line at a time

Adding and averaging

Sensitivity

switching

Measurement error

Previous products

31 levels

Large

Small

Small (Black rubber)

Reflection coefficient

No measurement error

10,000 levels min. (essentially infinite)

Laser power

ZS Series

Mirror (Large)

Light quantity adjustment algorithms have

evolved for stable measurement of a variety of

measurement objects.

Even if the workpiece status changes

suddenly, the sensitivity can compensate at

any level so there is no measurement error

from sensitivity switching.

Stable measurement using laser power algorithms

that can be adjusted to any value.

Real surface displacement detected by

eliminating penetration effects for PCBs,

plastic, and other workpieces penetrated by

laser light.

Stable measurements are achieved by correctly

recognizing the light reception distribution on the

2D CMOS.

High-speed digital communications (LVDS)

used between Sensor and Controller.

Image signal stabilizes because the clock

error between the control signal from the

Controller and the light reception device

disappears. Optimum light quantity

adjustment is possible with laser power

algorithms that can be adjusted to any level,

which facilitates super high resolution.

Digital processing technology between the

Sensor and Controller provides high resolution.

Stable measurement by adding received light

waveform in 2D image and digital zoom

processing.

(Near)

(Far)

80 ns min.

Laser Pulse Control

Digital communications

Light quantity adjustment to any level.

Light quantity

fluctuation error

No error

Error

between

clocks

products

ZS Series

No clock offset.

Received Light Signal Control

Large

Small

(Near) (Far)

Received light amount

Received light surface

(1)

(2)

(3)

(2)

(1) (3)

High-performance Sensors

Mechanisms for Stable Measurement

No more errors due to reflection

coefficients between glass gaps

Patent Pending

Mechanisms for Stable Measurement

No more errors due to workpiece

reflection coefficients.

Patent Pending

Mechanisms for Stable MeasurementMechanisms for High Resolution

Patent Pending

No more error due to penetration.

No more resolution errors.

Advanced technology is carried

Smart Sensor

Outline of Functions

Sensor Controllers ZS-HLDC (Multitasking)

Enables maximum sensing performance with fully digital processing and multitasking functions.

A controller the size of a business card filled with OMRON's leading-edge digital technology.

Enables easy utilization of the ultimate in measurement performance.

ZS-HLDC ZS-LDC

Top Operation Menu

Sensing

Filter

Output

I/O Settings I/O Settings

Sensing

Multitask Mode

Single Task Mode (Standard Mode)

Measurement

point

Filter

Output

High-performance Sensing (Multitasking)

Control Using CompoWay/F*

Control Using No-protocol

Communications

Data Confirmation and

Analysis

• Checks sensing screen.

•

Checks measurement values.

•

Logs measurement values.

Data collection, control,

and changeovers

•

Gets measurement results.

• Resets to zero.

• Switches banks.

RS-232CUSB

Simultaneous Measurement and Output of Up to 4 Features

Simultaneous Control in 2 Systems of Data Confirmation and Analysis and

Data Collection, Control, and Changeovers

Improved Total Cycle Time with 1-second High-speed Bank Switching

Setting example

■Task 1: Average

■Task 2: Thickness

Setting example

■Task 1: Step

Setting example

■Task 1: Average, Average hold

■Task 2: Average, Point-to-point hold

Setting example

■Task 1: Average

Self-down trigger

Average hold

With delay

■Task 2: Average

Average hold

With delay

■Task 3: Calculation (Task 2 - Task 1)

Trigger level

Delay time 2

Delay time 1

Enlarged

High-performance Sensors

* OMRON's unique communications protocol.

TASK2 TASK3 TASK4TASK1 TASK1

When simultaneous

measurement of distance to

glass, glass thickness, gap, etc.,

required in glass measurement

applications

For detection of small

recesses and protrusions in

measurement location

For measurement of steps in

different locations with

moving Sensor or workpiece

For simultaneous measurement

of HDD surface deflection and

distance to HDD surface

High-performance Sensors

High grade

ZS-LDC

Single Task Controller

Simple Operation

Reasonable Price

Easy Sensing with an HMI That Couldn't Be Easier to Use (Common Functions)

Information at the Touch of a Button

In RUN (measurement) Mode, measured values and information are displayed using

2 rows of 8-segment LEDs. The large LED display improves visibility. Measurement

information includes the threshold, current, resolution, and received light amount

and is available with simple key operations. LCD screens can be customized to

change the display of desired information to easier-to-understand terminology.

Mount to DIN Track or

directly to control

panels.

Set Sensing Directly

In FUN (setting) Mode, setting menus are displayed on the 2 rows of

the LCD. Easy-to-understand guidance simplifies setting the many

display capabilities of the LCD. Function keys correspond to

displayed menu items for intuitive setting of measurement conditions

and other parameters. You can also easily switch between Japanese

and English displays. Communication with the operator is better than

ever before.

Connect directly to a PC using USB.

USB 2.0 and RS-232C provided as standard features.

LVDS, a new-generation digital high-speed

communications interface, is used between the Sensor

Head and Controller, an industry first. If USB is used to

connect to the computer, high-speed all digital

measurement data transfer is possible.

Firmware can be updated easily using the

SmartMonitor WarpEngine.

FUN (setting mode)

Direct setting with

function keys.

Patent Pending

USB Connection

Panel Mounting Adapter (Option, Sold Separately)

High-performance Sensors

RUN

(measurement mode)

Measured value displayed.

Threshold, current, resolution,

received light amount, etc.

Switch measurement information

at the touch of a button.

Example of

Display Customization

Threshold Current

Resolution

Received light

amount

MAIN:MEASURE

SUB :THRESH

MAIN:MEASURE

SUB :THRESH

MAIN:MEASURE

SUB :CURRENT

MAIN:MEASURE

SUB :RESOLU

LD POWER 80.0%

SUB:BRIGHT

Device:

OMRON #1

Advanced technology is carried

Smart Sensor

∗1. Spot Beam Sensors.

More than

sufficient

range

2D CMOS

image sensor

Laser Class 2

Degree of Protection: IP67

(Models with 2 m cable)

Measurement range: 30 mm

Measurement range: 10 mm

Super Sensitive Lens

Note: The ZS-LD50 uses

high-precision

ganged lenses.

Measurement range: 270 mm

ZS-LD80

Measuring center: 80 mm

ZS-LD130

Measuring center: 130 mm

ZS-LD200

Measuring center: 200 mm

ZS-LD350S ∗1

Measuring center: 350 mm

ZS-LD50

Measuring center: 50 mm

Measurement range: 30 mm

Measurement range: 100 mm

Diffuse Reflection Sensor

Diffuse Reflection Sensors

2D CMOS

image sensing

element

Laser Class 2

Degree of Protection: IP67

(Models with 2 m cable)

High-precision

ganged lenses

ZS-LD40T

Measuring center: 40 mm

Resolution: 0.4 μm

Line beam

(2000 × 35 μm)

ZS-LD20T

Measuring center: 20 mm

Resolution: 0.25 μm

Line beam

(900 × 25 μm)

Regular Reflection

Sensors

Regular reflection

Sensors

Measurement range:

5 mm

Measurement range:

2 mm

ZS-LD20ST

Measuring center: 20 mm

Measurement range: 2 mm Spot beam

(25 μm dia.)

ZS-LD50S

Measuring center: 50 mm

Measurement range:

10 mm Spot beam

(50 μm dia.)

Note: Sensor Head can be installed to for either

diffuse reflection or regular reflection.

(except ZS-LD350S)

Correctly compensates measurement values

to suit different applications.

Smallest size in this class (65 × 65 mm)

Uniform Sensor Head size

Line/spot beam type

Detects black rubber, mirror, and transparent workpieces

ZS-L Series Product Lineup 2D CMOS Low-end Displacement Sensors

Advanced sensing technology packed into the smallest Sensor Heads in this class.

ZS-LD50/LD80/LD130/LD200/LD350S

ZS-LD20T/LD40T ZS-LD20ST/LD50S

Spot Beam Sensors

Standard Sensors

Standard

Standard Sensors

Response: 8 ms, High-precision mode,

Black gain: 0, Red gain: 5 (max.)

1.75

Height (mm)

1.73

1.71

1.69

1.67

1.65

Penetration mode and gain settings used.

Gain setting: 5

15.000

10.000

5.000

0.000

−5.000

−10.000

−15.000

Height (mm)

Number of data

Complete measurement data will be obtained at angles of up to 40°.

Measuring the Shape of Black Resin Workpieces

PCB shapes can be measured without burs or waveform disruptions.

Measuring the Shape PCB Surfaces

Ideal for measuring glass thickness and slit nozzle gaps when coating glass with resist or sealer.

Measuring Glass Surfaces

FUN (setting mode)

Set Sensing Directly

Measurements for Moving Glass

Response for glass 8 ms

0.2 μm

[μm]

−1

−2

−3

−4

All you need to do is select the proper mode to achieve stable sensing of PCBs, resins, black

rubber, and other light-penetrating workpieces (these could not be easily handled with

previous reflective laser displacement meters.)

Easy Sensing with an HMI That Couldn't Be Easier to Use

Stable Measurements for PCBs, Black Resin, and Metal

Line Beam Sensors for Emphasis

on Stable Measurement

Spot Beam Sensors Ideal for Minute

Workpieces and Shape Measurement

Stably measure height and undulations in transparent, coated, or colored glass on work tables.

Stable detection at 40 mm with a line beam of 2 mm.

A 2-mm line beam reduces the influence of black and white patterns on granite work tables to achieve

stable measurements.

Stable Measurements for Glass

ZS-LD80

ZS-LD50

ZS-LD40T

Ideal for measurements requiring minute

shape repeatability while matching laser

beam position with a minute target

measurement area.

Line beams produce an averaging affect that is

less likely to be affected by surface irregularities,

creating stable measurements.

Ideal for stable measurements that do not rely on

the surface of the target workpiece.

Beam width Beam diameter

Travel

Amount of

displacement Amount of

displacement

Beam diameter

25 μm 35 μm 60 μm 60 μm 70 μm 100 μm

Beam width 0.9 mm 2 mm 0.9 mm 0.9 mm 0.6 mm 0.9 mm

Line Beam

sensors ZS-

LD20T ZS-

LD40T ZS-

LD50 ZS-

LD80 ZS-

LD130 ZS-

LD200

Spot Beam sensors

ZS-LD20ST ZS-LD50S ZS-LD350S

Beam width 25 μm dia. 50 μm dia. 240 μm dia.

Travel

distance Travel

distance

Beam

diameter

Standard Sensors

Just select High-precision Mode to stably measure black rubber.

Just select Penetration Mode to stably measure PCBs or black resin.

Direct setting with

function keys.

Advanced technology is carried

Smart Sensor

ZS-HL Series

Multi-Controllers Data Storage

Units

Sensor Controllers

SmartMonitor (PC)

ZS-SW@@V3E ZR-MDR10

Mobile Data Recorder

Data logger

ZS-CRT Sensor Communications Unit

PLCs etc.

PLC

PLCs etc.

High-speed Input Boards (PC)

RS-232C

Analog

USB

Parallel I/O

Sensors Controllers Peripheral Devices

System Configuration

ZS-L Series

ZS-HL-series Long-distance Extension Cable

ZS-DSU

Log measurement Values.

ZG-RPD

Sensor Head

ZS-HLDS@

Controller

ZS-HLDC@

High-speed

binary output

of measurement data.

∗

Connection Cable

ZS-XC02D

ZS-XEQ

Digital Equalizer ∗4Digital Equalizer

ZS-XEQ ∗4

Flexible Long-distance Extension Cable

ZS-XC15CR/XC25CR

ZS-HLDC ∗1

ZS-LDC ∗2

ZS-MDC

Calculating measurement

results for each sensor.

∗1: The ZS-HLDC can be connected to a ZS-HL/L-series Sensor Head.

∗2: The ZS-LDC can be connected only to a ZS-L-series Sensor Head.

∗3: The ZG-RPD Expansion I/O Unit can be connected only to a ZS-HL-series Sensor Controller.

∗4: ZS-XEQ Digital Equalizer can be connected to ZS-HL Series only.

25 m max.

Expansion I/O Units

Expansion Units

Enhancing unit

Expansion Units

CompoNet

Expansion Units

Multi-calculations of Data

Multipoint measurement

High-speed data transfer

Multi-Controller ZS-MDC

Centralized Controller Information Calculations

High-speed Connections for Up To 9 Controllers

See the difference in applications requiring multipoint measurement, such as thickness, steps, and flatness

measurements. Connect up to 9 Controllers with the fastest high-speed bus in the industry. Digital processing

prevents data dropouts to provide the capability to measure exactly what is seen.

Sampling speed with 3 Controllers connected: 110 μs, Sampling speed with 9 Controllers connected: 380 μs

Note: When using communications commands.

ZS-MDC

Monitor connected Controllers

together

Multipoint measurement

(flatness of resins or metals)

Transfers data between multi-connected Controllers and performs high-speed multiprocessing.

Processing results

SmartMonitorMulti-Controllers

Sensor Head

USB

B D F

Flatness Calculations

Calculating the difference between the

maximum and minimum values.

Processing Enabled by the Multi-Controller

Number of Sensor

Controllers: 3 to 9

Calculation:

Task 1 = Max. (A, B, ···) − Min. (A, B, ···)

Reference Step Calculations

Calculating the difference between a

reference point (A) and other points.

Number of Sensor

Controllers: 3 to 9

Individual judgments

Calculation:

TASK1 = A − B

TASK2 = A − C

Relative Step Calculations

Calculating the difference between all points.

Multipoint Thickness Calculations

Calculating the difference between pairs of points.

C E

Average Height Calculations

Calculating the average surface height.

Number of Sensor

Controllers: 2 to 9

Calculation: Task 1 = Average (A, B, C, ···)

Warp Calculations

Calculating warping of selected sides

Number of Sensor

Controllers: 3

Calculation: Task 1 = B − (A + C)/2

Twisting Calculations

Calculating twisting between opposing sides.

Number of Sensor

Controllers: 4

Calculation: TASK1 = (A − B) − (D − C)

···

Individual judgments

Number of Sensor

Controllers: 2, 4, 6, or 8

Individual judgments

Calculation:

TASK1 = K + (A − B)

TASK2 = K + (C − D)

TASK3 = K + (E − F)

User-set Calculations

Formulas can be flexibly set.

[K + mX + nY]

Number of Sensor

Controllers: 3 to 9

Calculation:

TASK1 = A − B

TASK2 = B − C

TASK3 = C − A

Advanced technology is carried

Smart Sensor

Enhancing unit

Expansion Units

Multipoint data collection

Traceability

Changeover Unit

Sensor Controller

(ZS-LDC) Sensor Controller

(ZS-LDC)

Data Storage Unit

(ZS-DSU)

CF Card

Data Storage Unit ZS-DSU

Logging Software for Onsite Installed

Number of

connectable Controllers

Config-

uration

Perform-

ance

Functions

Software (included)

Connectable Controllers

Data resolution

Sampling rate

Trigger functions

Other functions

10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.)

ZS-HLDC@, ZS-LDC@, ZS-MDC@

32 bits

Start and end triggers can be set separately.

External trigger/data trigger (self-trigger)

Time triggers

Data Storage UnitZS-DSU

Efficiently stores sensing data using a variety of logging functions.

High-speed, long term logging settings can be used to precisely process the required sensing

data, which can be reliably and completely collected using USB and an all-digital bus.

Sensor setting data can also be stored.

Data for up to 128 banks can be stored and transferred to the Master Unit for changeovers.

High-speed sampling rate: 150 μs max.

Powerful support for logging data using various trigger functions.

Typical examples

• Connected to ZS-LDC

∗1) For One-shot Mode

Min. sampling interval Longest logging time

150 μs

200 μs

350 μs

650 μs

10 min

6.5 min

5.5 min

4.5 min Typical examples

• Example for 64-MB Memory Card

∗2) For Repeat Mode (Logging time depends on capacity of Memory Card.)

10 ms

20 h

10 h

5 h

2 h Typical examples

• Connected to ZS-MDC

350 μs

400 μs

500 μs

700 μs

20 min

12 min

8 min

5 min

• Shortest high-speed logging mode (One-shot Mode) ∗1

• Long-term logging mode (Repeat Mode) ∗2

• Sampling period: 10 ms to 1 h (at 1-ms intervals)

• CSV file generation Software

• Excel macros for simple analysis

(Equivalent to software provided with SmartMonitor Professional.)

• External bank function

• Alarm output function

• Saved data format customization function

• Time function (timestamps)

Number of

channels Min. sampling interval Longest logging time

Number of

channels Min. sampling interval Longest logging time

Number of

channels

Advanced technology is carried

Smart Sensor

Expansion Units

Meets a wide range of logging needs.

High-speed simultaneous multichannel waveform graphs.

Excel macro provided for simple analysis.

More Powerful Setting Support

Setting Software for ZS Series SmartMonitor

V3 Professional ZS-SW11V3E

Use a Computer for Everything from Ideal ZS Settings to Powerful Support of Data Collection and Analysis.

Easy Settings Using USB.

Log measurement results at various times to leave judgment

and inspection results.

The fastest sampling interval is 500 μs (see note).

Note: Data may be skipped, depending on the computer system.

Use a computer that meets the recommended system requirements.

High-speed display: 2-ms interval at max. speed (see note);

Simultaneous multichannel waveform display: Up to 9

waveforms can be displayed.

Note: Data may be skipped, depending on the computer system. Use a computer

that meets the recommended system requirements.

Data collected by logging can be processed with an Excel

macro using filters, slope compensation, filter median transitions,

differentiation, integration, and arithmetic functions and then

used for nominal judgments and other determinations.

The CMOS light reception image and the received light

waveform can be displayed. The real power of the

SmartMonitor is seen when measuring transparent objects and

other workpieces that create multiple received light waveforms.

●Received Light Monitor

●Multi-channel Waveform Display ●Analysis

●Logging

Received light

waveform

(Light Brightness)

Light reception image

Recommended System Requirements

SmartMonitor Professional

OS: Windows 7 (32-bit/64-bit version)

Windows XP (Service Pack3 or higher, 32-bit version)

CPU: Intel Pentium III 1 GHz or faster (2 GHz min. recommended.)

Memory: 1 GB min.

Available hard disk space: 50 MB min.

Display screen: 1,024 × 768 dots min., 16 million colors min.

Note: If the recommended system requirements are not met, data

may be interrupted and waveforms not displayed correctly

when using the logging, high-speed graph drawing, and multi-

channel waveform drawing functions.

SmartAnalyzer Macro Edition

For Microsoft Excel Macro Programming

Microsoft Excel 2000 or later required.

- Window is registered trademarks of Microsoft Corporation in the

USA and other countries.

- Other company names and product names in this document are the

trademarks or registered trademarks or their respective companies.

Specification

Ratings and Specifications

Ordering Information

Smart Sensor

ZS-HL-series Sensor Heads

Data Storage Units

Shape Supply voltage Control outputs Model

24 VDC

NPN outputs

PNP outputs

ZS-DSU11

ZS-DSU41

Multi-Controllers

Shape Supply voltage Control outputs Model

24 VDC

NPN outputs

PNP outputs

ZS-MDC11

ZS-MDC41

ZS-HL-series Sensor Controllers

Shape Supply voltage Control outputs Model

24 VDC

NPN outputs

PNP outputs

ZS-HLDC11

ZS-HLDC41

ZS-L-series Sensor Controllers

Shape Supply voltage Control outputs Model

24 VDC

NPN outputs

PNP outputs

ZS-LDC11

ZS-LDC41

Resolution (see note 1.)

Model

Regular Reflective Models

Diffuse Reflective

Models

Optical system Sensing distance Beam shape Beam diameter

Line beam

25±2 mm

50±5 mm

600±350 mm

1500±500 mm

2.2 mm × 45 μm

1.0 mm × 30 μm

1 μm

8 μm

0.6 μm

0.25 μm

500 μm

40 mm × 1.5 mm

16 mm × 0.3 mm

ZS-HLDS150

ZS-HLDS60

ZS-HLDS5T

ZS-HLDS2VT

Line beam20±1 mm 1.0 mm × 20 μm 0.25 μmZS-HLDS2T

100±20 mm 3.5 mm × 60 μmZS-HLDS10

Note 1: Refer to the table of ratings and specifications for details.

2: Specify the cable length when ordering.

Note 1: Refer to the table of ratings and specifications for details.

2: Specify the cable length when ordering.

ZS-HL-series Sensor Heads (For Nozzle Gaps)

Regular Reflective

Models

Optical system Line beam

Line beam

10±0.5 mm

15±0.75 mm

0.25 μm

900 × 25 μm

ZS-LD15GT

ZS-LD10GT

Resolution (see note 1.)

ModelSensing distance Beam shape Beam diameter

Note 1: No. of samples to average: 128 when set to High-precision Mode.

2: Specify the cable length when ordering.

ZS-L-series Sensor Heads

Diffuse Reflective

Models

Regular Reflective

Models

Line beam

Spot beam

Line beam

Spot beam

50±5 mm

80±15 mm

130±15 mm

40±2.5 mm

20±1 mm

350±135 mm

200±50 mm

900 × 60 μm

50 μm dia.

2 μm

3 μm

0.8 μm

5 μm

20 μm

0.25 μm

0.4 μm

0.25 μm

25 μm dia.

240 μm dia.

900 × 60 μm

900 × 25 μm

2000 × 35 μm

900 × 100 μm

600 × 70 μm

ZS-LD40T

ZS-LD20ST

ZS-LD20T

ZS-LD350S

ZS-LD200

ZS-LD130

ZS-LD80

ZS-LD50S

ZS-LD50

Optical system

Resolution (see note 1.)

ModelSensing distance Beam shape Beam diameter

Ratings and Specifications

Advanced technology is carried

Smart Sensor

Accessories (Sold Separately)

Memory Cards

F160-N256S 256 Mbytes

Controller Link Unit

Panel Mount Adapter

RS-232C Cables

Logging Software

Shape Model

Shape

Connected to Model Qty

Model

Name Model

ZS-XCN

ZS-XPM1 For 1st Controller

ZS-XRS2

Personal computer

(2 m)

PLC/PT

(2 m)

1ZS-XPT2 ZS-SW11V3ESmartMonitor Professional

Extension Cables for Sensor Heads

1 m ZS-XC1A 1

4 m ZS-XC4A 1

5 m ZS-XC5B (∗1, ∗2) 1

8 m ZS-XC8A 1

10 m ZS-XC10B (∗1) 1

ZS-XPM2 For expansion

(from 2nd Controller on)

∗1. Up to two ZS-XC@B Cables can be connected. (22 m max.)

∗2. A Robot Cable (ZS-XC5BR) is also available.

Model Capacity

ZG-RPD11NPN outputs

PNP outputs ZG-RPD41

Realtime Parallel Output Unit (for ZS-HL Series)

CompoNet-compatible Sensor Communications Unit.

ModelControl outputsShape

Cable length Model Qty

Long Extension Cables for Sensor Heads

(Used with a Digital Equalizer

for ZS-HL Series

)

Digital Equalizer (Relay) ZS-XEQ 1

Extension Cable (long distance, flexible 15 m cable) ZS-XC15CR 1

Extension Cable (long distance, flexible 25 m cable) ZS-XC25CR 1

Digital Equalizer Connection Cable (0.2 m) ZS-XC02D 1

Name Model Qty

ZS-CRT

ModelShape

Ratings and Specifications

Item Model

ZS-HLDC11/LDC11 ZS-HLDC41/LDC41

No. of samples to average

Number of mounted Sensors

Connection method

USB 2.0

RS-232C

Output

Status indicators

Main digital

Sub-digital

LCD

Setting keys

Slide switch

Power supply voltage

Current consumption

Ambient temperature

Ambient humidity

Degree of protection

Materials

Cable length

Weight

Accessories

1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096

1 per Sensor Controller

Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)

1 port, Full Speed (12 Mbps max.), MINI-B

1 port, 115,200 bps max.

HIGH/PASS/LOW 3 outputs HIGH/PASS/LOW: 3 outputs

NPN open collector, 30 VDC, 50 mA max., residual voltage 1.2 V max. PNP open collector, 50 mA max., residual voltage 1.2 V max.

Selectable from 2 types of output, voltage or current (selected by slide switch on bottom).

• V oltage output: −10 to 10 V, output impedance: 40 Ω

• Current output: 4 to 20 mA, maximum load resistance: 300 Ω

ON: Short-circuited with 0 V terminal or 1.5 V or less ON: Short-circuited to supply voltage or within 1.5 V of supply voltage.

OFF: Open (leakage current: 0.1 mA max.) OFF: Open (leakage current: 0.1 mA max.)

HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and ENABLE (green)

8-segment red LED, 6 digits

8-segment green LEDs, 6 digits

16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix

Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)

Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)

21.6 V to 26.4 VDC (including ripple)

0.5 A max. (when Sensor Head is connected)

Operating: 0 to 50°C, Storage: −15 to +60°C (with no icing or condensation)

Operating and storage: 35% to 85% (with no condensation)

IP20 (IEC60529)

Case: Polycarbonate (PC)

2 m

Approx. 280 g (excluding packing materials and accessories)

Ferrite core (1), instruction sheet

Inputs

External interface

Serial I/O

Judgment

output

Linear

output

Laser OFF, ZERO reset timing,

RESET

Segment display

Setting inputs

Functions

Ratings and Specifications

ZS-HL/L-series Sensor Controllers

∗1. Can be used with ZS-HLDC@1 when Multitask Mode selected.

∗2. Terminal block output is a function of the ZS-HLDC@1.

Ratings and Specifications

Display: Measured value, threshold value, voltage/current, received light amount, and resolution/terminal block output ∗2

Sensing: Mode, gain, measurement object, head installation

Measurement point ∗1: Average, peak, bottom, thickness, step, and calculations

Filter: Smooth, average, and differentiation

Outputs: Scaling, various hold values, and zero reset

I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-measurement, and bank (switching and clear) ∗2

System: Save, initialization, measurement information display, communications settings, key lock, language, and data load

Task: ZS-HLDC@1: Single task or multitask (up to 4)

ZS-LDC@1: Single task

Advanced technology is carried

Smart Sensor

Ratings and Specifications

ZS-HL-series Sensor Heads

Item Model

ZS-HLDS2T ZS-HLDS2VT ZS-HLDS5T ZS-HLDS10 ZS-HLDS60 ZS-HLDS150

Applicable Controllers

Optical system

Measuring center distance

Measuring range

Light source

Beam shape

Beam diameter ∗1

Linearity ∗2

Resolution ∗3

Temperature characteristic ∗4

Sampling cycle

NEAR indicator

LED Indicators

FAR indicator

Operating ambient illumination

Ambient temperature

Ambient humidity

Degree of protection

Materials

Cable length

Weight

Accessories

∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.

∗2. This is the error in the measured value with respect to an ideal straight line.

Linearity may change according to the workpiece.

The following options are available.

∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode

when the number of samples to average is set to within the graph.

The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.

∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. (typical example)

∗5. Ask your OMRON representative about Sensor Heads with IP67 protection.

Ratings and Specifications

Model Diffuse reflection Mirror reflection

ZS-HLDS2T SUS block Glass

ZS-HLDS2VT --- Glass

ZS-HLDS5T White alumina ceramic Glass

ZS-HLDS10 White alumina ceramic

ZS-HLDS60/HLDS150 White alumina ceramic ---

Model Diffuse reflection Mirror reflection

ZS-HLDS2T SUS block Glass

ZS-HLDS2VT --- Glass

ZS-HLDS5T White alumina ceramic Glass

ZS-HLDS10 White alumina ceramic

ZS-HLDS60/HLDS150 White alumina ceramic ---

8 μm (No. of samples to average: 64 at 250 mm),

40 μm (No. of samples to average: 64 at 600 mm)

Illumination on received light surface:

1000 lx or less (incandescent light) Illumination on received light surface:

500 lx or less (incandescent light)

0.25 μm (No. of samples to average: 256)

ZS-HLDC series

Regular reflection

20 mm

±1 mm

Regular reflection

25 mm

±2 mm

Diffuse reflection

5.2 mm

±1 mm

Diffuse reflection

50 mm

±5 mm

Regular reflection

44 mm

±4 mm

Diffuse reflection

100 mm

±20 mm

Regular reflection

94 mm

±16 mm

Diffuse reflection

600 mm

±350 mm

Diffuse reflection

1500 mm

±500 mm

Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2) Visible semiconductor laser (wavelength: 658 nm, 1 mW max., JIS Class 2)

Line beam

1.0 mm × 20 μm 2.2 mm × 45 μm 1.0 mm × 30 μm 3.5 mm × 60 μm 16 × 0.3 mm (at 500 mm) 40 × 1.5 mm (at 1,500 mm)

0.25 μm

(No. of samples to average: 512)

0.6 μm

(No. of samples to average: 128)

1 μm (No. of samples to average: 64) 500 μm (No. of samples to average: 64)

±0.05%F.S. ±0.2%F.S. ±0.1%F.S.

±0.07%F.S. (250 to 750 mm), ±0.1%F.S. (750 to 950 mm)

±0.2%F.S.

0.01%F.S./°C0.1%F.S./°C0.01%F.S./°C

110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 μs (High-precision Mode), 4.4 μs (High-sensitivity Mode)

Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.

Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.

Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

Illumination on received light surface: 3000 lx or less (incandescent light)

Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)

Operating and storage: 35% to 85% (with no condensation)

IP64 IP67 IP66

∗5

Approx. 350 g

0.5 m, 2 m 0.5 m, 2 m2 m

Case: Aluminum die-cast, Front cover: Glass

Cable length 0.5 m: IP66, cable length 2 m: IP67

Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet

Approx. 600 g Approx. 800 g

Ratings and Specifications

ZS-L-series Sensor Heads

Item Model

ZS-LD20T ZS-LD20ST ZS-LD40T ZS-LD10GT ZS-LD15GT

Applicable Controllers ZS-HLDC/LDC Series

Optical system Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection

Measuring center distance 20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm

Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5 mm ±0.75 mm

Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)

Beam shape Line beam Spot beam Line beam

Beam diameter ∗1 900 × 25 μm 25 μm dia. 2000 × 35 μm Approx. 25 × 900 μm

Linearity ∗2 ±0.1% FS

Resolution ∗3 0.25 μm 0.25 μm 0.4 μm 0.25 μm 0.25 μm

Temperature characteristic ∗4 0.04% FS/°C 0.04% FS/°C 0.02% FS/°C 0.04% FS/°C

Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)

NEAR indicator Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.

LED Indicators Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.

Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

Operating ambient illumination Illumination on received light surface: 3000 lx or less (incandescent light)

Ambient temperature Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)

Ambient humidity Operating and storage: 35% to 85% (with no condensation)

Degree of protection Cable length 0.5 m: IP66, cable length 2 m: IP67 IP40

Materials Case: Aluminum die-cast, Front cover: Glass

Cable length 0.5 m, 2 m

Weight Approx. 350 g Approx. 400 g

Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet Laser safety labels (1 each for JIS/EN), ferrite cores (2), insure locks (2)

∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the regular reflection mode. Linearity may change according to the workpiece.

∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.

The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.

∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.(typical example)

Ratings and Specifications

Advanced technology is carried

Smart Sensor

Ratings and Specifications

Item Model

ZS-LD50 ZS-LD50S ZS-LD80 ZS-LD130 ZS-LD200 ZS-LD350S

Applicable Controllers ZS-HLDC/LDC Series

Optical system Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection

Measuring center distance 50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm

Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm

Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)

Beam shape Line beam Spot beam Line beam Line beam Line beam Spot beam

Beam diameter ∗1 900 × 60 μm 50 μm dia. 900 × 60 μm 600 × 70 μm 900 × 100 μm 240 μm dia.

Linearity ∗2 ±0.1% FS ±0.1% FS ±0.25% FS ±0.1% FS ±0.25% FS ±0.1% FS

Resolution ∗3 0.8 μm 0.8 μm 2 μm 3 μm 5 μm 20 μm

Temperature characteristic ∗4 0.02% FS/°C 0.02% FS/°C 0.01% FS/°C 0.02% FS/°C 0.02% FS/°C 0.04% FS/°C

Sampling cycle ∗5 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)

NEAR indicator Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.

LED Indicators Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.

Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.

Operating ambient illumination Illumination on received light surface: 3000 lx or less (incandescent light) Illumination on received light surface: 3000 lx or less (incandescent light)

Ambient temperature Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)

Ambient humidity Operating and storage: 35% to 85% (with no condensation)

Degree of protection Cable length 0.5 m: IP66, cable length 2 m: IP67

Materials Case: Aluminum die-cast, Front cover: Glass

Cable length 0.5 m, 2 m

Weight Approx. 350g

Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet

ZS-L-series Sensor Heads

∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode. Linearity may change according to the workpiece.

The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.

∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.

∗5. This value is obtained when the measuring mode is set to the high-speed mode.(typical example)

Illumination on received light surface:

2000 lx or less (incandescent light)

Ratings and Specifications

ZS-MDC@1 Multi-Controllers Controller Link Units

ZS-DSU@1 Data Storage Unit

Item ZS-DSU11 ZS-DSU41

Number of mounted Sensor Heads

Number of connectable Controllers

Connectable Controllers

Connection method

USB 2.0

External interface RS-232C

Output

Inputs

Data resolution

Logging trigger functions

Other functions

Status indicators

Segment display

LCD

Setting keys

Slide switch

Power supply voltage

Current consumption

Ambient temperature

Ambient humidity

Materials

Weight

Accessories

Serial I/O

32 bits

Start and stop triggers can be set separately; external triggers, data triggers (self-triggers), and time triggers

External banks, alarm outputs, saved data format customization, and clock

OUT (orange), PWR (green), ACCESS (orange), and ERR (red)

8-segment green LEDs, 6 digits

16 digits x 2 rows, Color of characters: green, Resolution per character: 5 × 8 pixel matrix

Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)

Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)

21.6 V to 26.4 VDC (including ripple)

0.5 A max.

Operating: 0 to 50°C, Storage: 0 to 60°C (with no icing or condensation)

Operating and storage: 35% to 85% (with no condensation)

Case: Polycarbonate (PC)

Approx. 280 g (excluding packing materials and accessories)

Ferrite core (1), instruction sheet for Data Storage Unit: CSV File Converter for Data Storage Unit/Smart Analyzer Macro Edition

Functions

Setting inputs

Cannot be connected

10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.) ∗1

ZS-HLDC@@, ZS-LDC@@, ZS-MDC@@

Serial I/O: connector, Other: pre-wired (standard cable length: 2 m)

1 port, Full Speed (12 Mbps max.), MINI-B

1 port, 115,200 bps max.

3 outputs: HIGH, PASS, and LOW; PNP open-collector, 50 mA max., residual voltage: 1.2 V max.

ON: Short-circuited to supply voltage or within 1.5 V of supply voltage; OFF: Open (leakage current: 0.1 mA max.)

3 outputs: HIGH, PASS, and LOW; NPN open-collector, 30 VDC, 50 mA max., residual voltage: 1.2 V max.

ON: Short-circuited with 0 V terminal or 1.5 V or less; OFF: Open (leakage current: 0.1 mA max.)

Basic specifications are the same as those for the ZS-LDC@1 Sensor Controllers. The following points, however, are different.

1. Sensor Heads cannot be connected.

2. Control Link Units are required to connect up to 9 Controllers.

Control Link Units are required to connect Controllers.

3. Processing functions between Controllers: Arithmetic functions

Connection Using the ZS-XCN Controller Link Units

Multi-ControllerData Storage Unit Sensor Controllers

∗1. Control Link Units are required to connect Controllers.

Ratings and Specifications

Model

Advanced technology is carried

Smart Sensor

Ratings and Specifications

Dimensions

Sensor Controllers

ZS-HLDC@1/LDC@1Multi-Controllers

ZS-MDC@1Data Storage Units

ZS-DSU@1

23.20

4.30

52.50

11.7 dia.

24.20

13 10

32.90

4.61

10.80

3.90

11.7 dia.

24.20

13 10

32.90

4.30

52.50

3.90

10.80

4.84.7

10.80

5.2

4.30

52.50

59.85

3.90

11.7 dia.

24.20

13 10

32.90

Heat-resistive vinyl chloride, 5.2 mm dia.

Standard length: 2 m

Heat-resistive vinyl chloride, 5.2 mm dia.

Standard length: 2 m

Heat-resistive vinyl chloride, 5.2 mm dia.

Standard length: 2 m

Dimensions

Sensor Heads

ZS-HLDS2T Sensor Heads

ZS-HLDS5T/HLDS10

Sensor Heads

ZS-HLDS60/HLDS150

Mounting hole dimensions

Reference surface

Vinyl insulated round cable, 6.8 mm dia.

Standard length: 0.5 m and 2 m

Emission axis

Reception

axis

Measuring

center

Three, 4.5 mm dia.

mounting holes

Operation indicators

Optical

axis

Reference surface

Emitter

L (See note.)

A° (See note.)

Note: L = 50 and A = 30° for the ZS-HLDS5T.

L = 100 and A = 25° for the ZS-HLDS10.

45.1

16.9

9.5

Receiver

Three, M4

22.7 70±0.1

69±0.1

9.5±0.1

13 dia.

92.1

2569100

82(5)

(15)

9.5

16.4

30.1

26.4

206.5

25°

18.1

56.5

6520

57±0.1

Mounting hole dimensions

Two, M4

Reference

surface

Receiver

Emitter

Operation indicators

Emission axis

Reception

axis

Reference surface

Measuring

center

30.1

Vinyl insulated round cable, 6.8 mm dia.

Standard length: 0.5 m and 2 m

Two, 4.5 mm dia.

mounting holes

(Unit: mm)

Operation indicators

Optical axis

Reference surface

Emitter

Receiver

Reference

surface

Reception axis

Emission axis

Measuring

center

Mounting hole dimensions

Vinyl insulated round cable, 6.8 mm dia.

Standard length: 0.5 m and 2 m

22.7

L (See note.)

A° (See note.)

28 47 8

65±0.1

45±0.1

Three, M4

13 dia.

115.06

16.4

120

102

(5)

88.75 9.5

25 38

57 2

Note: L = 600 and A = 7° for the ZS-HLDS60.

L = 1500 and A = 3° for the ZS-HLDS150.

30.1

(Unit: mm)

Ratings and Specifications

Advanced technology is carried

Smart Sensor

Dimensions

29±0.1

20±0.1

30±0.1

Four, M 4.50

820

Four, 4.5 mm dia. mounting holes

Four, 8 mm dia. countersunk, depth: 4

Vinyl insulated round cable, 6.2 mm dia.

Standard length: 0.5 m and 2 m

Connector

8.5

115

12 45

16.5

11.5

11.5 16.5

Two, C14

Measuring

center

Emission axis Reception

axis

90°

Mounting hole dimensions Receiver

Emitter

36±0.3

Three, 4.5 mm dia. mounting holes

26±0.3

46±0.1

Three, M4

76±0.1

40±0.25

26±0.1

96±0.1

105±0.3

Vinyl insulated round cable, 6.2 mm dia.

Standard length: 0.5 m and 2 m 30

8.5

Connector

85±0.3

55±0.3

Reception axis

Measuring

center

Emission axis

Reference

surface

12.50

17.50

1010

90°

ReceiverMounting hole dimensions Emitter

Ratings and Specifications

(Unit: mm)(Unit: mm) ZS-LD15GT

Sensor Heads

ZS-LD10GT

8.5

564.5

56±0.1

Two, M4

Reference

surface

Two, 4.5 mm dia. mounting holes

Connector Vinyl insulated round cable, 6.2 mm dia.

Standard length: 0.5 m and 2 m

15.30

30.1

L (See note.)

Mounting hole dimensions

Receiver

A° (See note.)

Reception

axis

Emission

axis

Emitter

Measur-

ing

center

27.1

Range

indicator

4.5

65 (Unit: mm)(Unit: mm) ZS-HLDS2VT/LD20T/LD20ST/LD40T

Note: L = 50 and A = 30° for the ZS-LD50/50S.

L = 80 and A = 15° for the ZS-LD80.

L = 130 and A = 12° for the ZS-LD130.

L = 200 and A = 8° for the ZS-LD200.

L = 350 and A = 5° for the ZS-LD350S.

Note: L = 25 and A = 34.5° for the ZS-HLDS2VT.

L = 20 and A = 45° for the ZS-LD20T/20ST.

L = 40 and A = 32° for the ZS-LD40T.

8.5

8 8

56 4.5

564.5

Reference

surface

Two, 4.5 mm dia. mounting holes

Connector Vinyl insulated round cable, 6.2 mm dia.

Standard length: 0.5 m and 2 m

15.3

30.1

L (See note.)

Receiver

A (See note.)

Reception

axis

Emission

axis

Emitter

Measur-

ing

center

27.1

Range

indicator

Sensor Heads

ZS-LD50/LD50S/LD80/LD130/LD200/LD350S

56±0.1

Two, M4

Mounting hole dimensions

Reference

surface

Dimensions

(Unit: mm)

(60 × n) + 8

116±1

n: Number of gang-mounted Controllers (1 to 11)

Panel cutout dimensions

Panel Mount Adapter

ZS-XPM1/XPM2 (Dimensions for Panel Mounting)

Realtime Parallel Output Unit

ZG-RPD@1

122

Panel

Panel Mount Adapter

Panel

Note: Dimensions are shown for a panel thickness of 2.0 mm.

(60 × n) + 12

60 × n

(37.5)

(140)

DIN Track

133

(2)

(See note.)

Digital Equalizer

ZS-XEQ

Two, M4

10.50 dia.

16.50

11.50

Mounting bracket

25.5

15° +1°

4.5

43 5.5

4.5

Three, R2.25

4.5

5.5

90°±1°

(Unit: mm)

15° +1°

Ratings and Specifications

(14.15) (2.85)

13 70

(

150

)

35.20

11.5

32.90

29.60 28.40

Two mounting holes

15.65

66.50

15.85

10.25

(Unit: mm)

Advanced technology is carried

Smart Sensor

Ratings and Specifications

READ AND UNDERSTAND THIS DOCUMENT

Please read and understand this document before using the products. Please consult your OMRON representative if you have

any questions or comments.

WARRANTY

OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year

(or other period if specified) from date of sale by OMRON.

OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT,

MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER

ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY

MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR

IMPLIED.

LIMITATIONS OF LIABILITY

OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS

OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON

CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.

In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.

IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE

PRODUCTS UNLESS OMRON's ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED,

INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE

MODIFICATION OR REPAIR.

SUITABILITY FOR USE

THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED

FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR

PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON's safety rated products.

OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of

products in the customer's application or use of the product.

At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of

use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the

products in combination with the end product, machine, system, or other application or use.

The following are some examples of applications for which particular attention must be given. This is not intended to be an

exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the

products:

• Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in

this document.

• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement

machines, vehicles, safety equipment, and installations subject to separate industry or government regulations.

• Systems, machines, and equipment that could present a risk to life or property.

Please know and observe all prohibitions of use applicable to the products.

NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT

ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON

PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR

SYSTEM.

PERFORMANCE DATA

Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a

warranty. It may represent the result of OMRON's test conditions, and the users must correlate it to actual application

requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.

CHANGE IN SPECIFICATIONS

Product specifications and accessories may be changed at any time based on improvements and other reasons.

It is our practice to change model numbers when published ratings or features are changed, or when significant construction

changes are made. However, some specifications of the product may be changed without any notice. When in doubt, special

model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with

your OMRON representative at any time to confirm actual specifications of purchased products.

DIMENSIONS AND WEIGHTS

Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.

ERRORS AND OMISSIONS

The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is

assumed for clerical, typographical, or proofreading errors, or omissions.

PROGRAMMABLE PRODUCTS

OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof.

This document shall not be copied for sales or promotions without permission.

This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us before

copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this document to another,

please copy or transmit it in its entirety.

Safety Precautions for Using Laser Equipment

Do not expose your eyes to the laser radiation

either directly or indirectly (i.e., after reflection

from a mirror or shiny surface).

The laser radiation has a high power density

and exposure may result in loss of sight.

Attach the following warning

label to the side of the ZS series

Sensor Head.

Laser Label Indications

WARNING

Authorized Distributor:

In the interest of product improvement,

specifications are subject to change without notice.

Printed in Japan

OMRON Corporation Industrial Automation Company

OMRON ELECTRONICS LLC

One Commerce Drive Schaumburg,

IL 60173-5302 U.S.A.

Tel: (1) 847-843-7900/Fax: (1) 847-843-7787

Regional Headquarters

OMRON EUROPE B.V.

Sensor Business Unit

Carl-Benz-Str. 4, D-71154 Nufringen, Germany

Tel: (49) 7032-811-0/Fax: (49) 7032-811-199

Contact: www.ia.omron.com

Tokyo, JAPAN

OMRON ASIA PACIFIC PTE. LTD.

No. 438A Alexandra Road # 05-05/08 (Lobby 2),

Alexandr a Technopark,

Singapore 119967

Tel: (65) 6835-3011/Fax: (65) 6835-2711

OMRON (CHINA) CO., LTD.

Room 2211, Bank of China Tower,

200 Yin Cheng Zhong Road,

PuDong New Area, Shanghai, 200120, China

Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200

This document provides information mainly for selecting suitable models. Please read the manual carefully for information that the user must

understand and accept before purchase, including information on warranty, limitations of liability, and precautions.

Cat. No. E375-E1-02

CSM_1_7_1012