Flat panel sensor
Photodiode area: 52.8 × 52.8 mm, 1.1 Mpixel
C7921CA-09
www.hamamatsu.com 1
The C7921CA-09 is a compact, light-weight digital X-ray image sensor developed as a key device for non-destructive inspection, bio-
chemical imaging, and X-ray microscopy. High-resolution, high-de nition digital X-ray images can be acquired in real time.
Features Applications
High quality image: 1.1 Mpixels (Pixel size: 50 × 50 μm) Non-destructive inspection
Digital X-ray photography
Flat panel structure without image distortion
12-bit digital output
High-speed imaging:
4 frames/s (single binning), 16 frames/s (4 × 4 binning)
Wide dynamic range
High cost performance
Structure
The C7921CA-09 is comprised of a sensor board and a control board. Mounted on the sensor board is a CMOS image sensor chip made up of a two-
dimensional photodiode array, row-scanning vertical shift register, and 8 charge amplifier arrays. Each charge amplifier array has a horizontal shift
register and consists of 132 ch charge amplifiers with CDS circuit.
A CsI scintillator plate is mounted on the two-dimensional photodiode array. X-rays incident on the scintillator are converted to fluorescence,
which then enters the two-dimensional photodiode array where electric charge is accumulated in each pixel according to the light intensity. The
accumulated charge on each row is sequentially selected by the row-scanning vertical shift register, transferred to the amplifiers through the data
line, and converted to a voltage signal. Then an analog signal is sent out from each amplifier array by scanning the horizontal shift register.
The control board converts the analog signal into a 12-bit digital signal, which is then sent to a frame grabber board as a 12-bit parallel output
through one port.
Charge amp array
No. 1
(with horizontal shift
register, 132 ch)
KACCC0358EB
Vertical shift register
Timing
pulse
generator
Oscillator
ExtTrgGrb
Pixel number
Sensor board
Control board
Vsync
Hsync
Pclk
A/D
IntExt Binning
(bin0, bin1)
External power supply
A.vdd, D.vdd (not attached)
Photodiode
array
Note: Signals are read out in order of pixel number.
Buffer
amp
Buffer
amp
Processing
amp
Processing
amp
12
11151361115135
10561055
211221111057
CsI
scintillator
Bias
generator
ExtTrgLemo
FIFO
A/D FIFO
Video output
(12-bit digital)
Charge amp array
No. 8
(with horizontal shift
register, 132 ch)
KACCC0358EB
Flat panel sensor C7921CA-09
2
General ratings
Absolute maximum ratings (Ta=25 °C)
Specification (Ta=25 °C, A.vdd=5.0 V, D.vdd=5.0 V)
Parameter Specification Unit
Pixel size 50 × 50 μm
Photodiode area 52.8 × 52.8 mm
Number of pixels 1056 × 1056 pixels
Number of active pixels 1032 × 1012 pixels
Readout Charge amplifier array -
Video output (Data1-12) RS-422 (differential), 12-bit -
Output data rate 6.25 MHz
Synchronous signal (Vsync, Hsync, Pclk) RS-422 (differential) -
bin0/1,
ExtTrgGrb, ExtTrgLemo, IntExt TTL -
Scintillator CsI -
Parameter Symbol Value Unit
Supply voltage for digital circuitry (+5 V) D.vdd +6.0 V
Supply voltage for analog circuitry (+5 V) A.vdd +6.0 V
Input voltage (bin0/1, ExtTrgGrb, ExtTrgLemo, IntExt) Vin 0 to 6.0 V
Operating temperature *
1
Topr 0 to +35 °C
Storage temperature *
1
Tstg 0 to +50 °C
Incident X-ray energy - 100 kVp
*1: No condensation
Parameter Symbol Min. Typ. Max. Unit
Frame rate (single operation) Sf(int) 3.8 4 - frames/s
Frame rate (2 × 2 binning) - - 8 - frames/s
Frame rate (4 × 4 binning) - - 16 - frames/s
Frame rate external (single operation) Sf(ext) - Sf(int) to 0.1 - frames/s
Noise (rms) *
2
N(rms) - 1000 - electrons
Sensitivity *
3
S 14.4 18 - LSB/mR
Saturation charge Csat - 2.9 - M electrons
Resolution *
4
Reso 7.1 8 - line pairs/mm
Dynamic range - - 2900 - -
Defect line *
5
- - - 10 lines
Blemish *
6
- - - 600 μm
Non-uniformity of sensitivity *
6
---4%
Defect cluster *
6
- Not allowed -
Bright line output adjacent to a defect line *
6
- - - 120 %
Output offset *
7
- - 65 200 LSB
*2: Internal trigger mode, single operation
*3: At 80 kVp without filter
*4: Spatial frequency at CTF=5 %
*5: A defect line is a horizontal or vertical line containing 4 or more
cosecutive pixels located at the opposite side of an amplifier array
or a shift register, that produce 1/8 of the average sensitivity of
the surrounding pixels.
Adjacent defective lines are not allowed in the vertical or
horizontal directions.
*6: See P. 7, 8, “Description of terms”
*7: Average of all effective pixels in single operation at Sf(int)
Note: X-ray energy range is 20 k to 100 kVp.
Resolution
012345678910
Spatial frequency (line pairs/mm)
CTF (%)
0
100
90
80
70
60
50
40
30
20
10
(Ta=25 °C, A.vdd=5.0 V, D.vdd=5.0 V)
KACCB0156EB
Flat panel sensor C7921CA-09
1 frame (Tvc)
1st row 2nd row
He
Enlarged view
Dummy lines Tvdpw
Phe Pg Phe Phd PhdPhe
1st row
2nd row
1st row
2nd row
All pulses are counted in the
“High” period of Hsync+.
All pulses are counted at the riging edge of Pclk+.
The effective video output is only included in the “Phe” period.
Last row
Vsync+ (grabber)
Vsync+ (grabber)
Hsync+ (grabber)
Hsync+ (grabber)
Pclk+ (grabber)
3
Recommendation: 50 % of frame time
Frame time (Tvc to Tmax)
Tvd Txray
Tvl
Tvc - Tv dp w
ExtTrgLemo
ExtTrgGrb
(TTL)
Vsync+
(RS-422)
Hsync+, Pclk+ and effective video output are the same as internal trigger mode.
· Tmax is defined as the reciprocal of the minimum value of Sf(ext).
· Txray = Frame time - Tvd - (Tvc - Tvdpw)
· Tvl = Frame time - (Tvc - Tvdpw)
To acquire images through a frame grabber board, write parameters in the software program or parameter file by referring to the following
timing chart and description.
KACCC0362EC
KACCC0393EB
Timing chart
Internal trigger mode
Parameter Count
Single operation (1 × 1) 2 × 2 binning 4 × 4 binning
He Effective line 1012 506 253
Dummy line 44 22 11
Phe Effective pixel 1032 516 258
Dummy pixel 25 13 7
Phd 366 894 1158
Pg 17 17 17
Note: “He” is the Hsync count. Phe, Phd and Pg are the Pclk count.
(Typ.)
Parameter Symbol
Single operation
(1 × 1) 2 × 2 binning 4 × 4 binning Unit
Vsync
Delay time (only external trigger mode) Tvd 450 450 450 μs
Cycle time (internal trigger mode) Tvc 240 122 62 ms
Pulse width of Vsync+ in low period (internal trigger mode) Tvdpw 920 920 920 μs
Note: The numbers of significant figures is two. (except Tvc)
Mode
36-pin receptacle 2-pin receptacle
Pin No. 15
(ExtTrgGrb)
Pin No. 33
(IntExt)
Pin No. 1
(ExtTrgLemo)
Internal trigger
mode
-
(Input signal is
ignored.)
Low
-
(Input signal is
ignored.)
External trigger
mode
Rectangular signal
(See the right figure.)
High
High or Open
High or Open
Rectangular signal
(See the right figure.)
To acquire images in external trigger mode, input an external trigger pulse as shown below. When the time Tvd has passed after the rising
edge of the external trigger pulse, synchronous signals and video signals are obtained.
When used in synchronization with a pulsed X-ray source, X-rays should be irradiated during the Txray period.
External trigger mode
Flat panel sensor C7921CA-09
4
To operate the C7921CA-09 at full performance, the following system and peripherals are required.
O PC: IBM compatible PC running on Windows XP
O Frame grabber board: Monochrome 16 bits or more, pixel clock 7 MHz or more, RS-422 interface synchronous signal
· See the frame grabber board manual.
· Operation of the C7921CA-09 has been verified with the following frame grabber boards.
IMAQ PCI-1424 (NI parts No.777662-01 *8) + Optional memory 64 MB (NI parts No.920130-64 *8)
IMAQ PCI-1422 (NI parts No.777959-01 *8)
· You can utilize the demonstration software that comes with the frame grabber board as a simple viewer, to acquire and save an image.
Refer to the frame grabber board user's guide for how to use the camera information file for the demonstration software.
O Power source: A.vdd = +5.0 ± 0.1 V (700 mA), D.vdd = +5.0 ± 0.1 V (800 mA)
· The voltages described above are specified at the flat panel sensor side. The impedance of the power cable attached with the flat panel
sensor is low enough but it causes 0.1 V approx. drop. Therefore the voltage at the power source side should be set 0.1 V higher than
the voltage specified above.
· Please use a low noise series power supply. (Avoid using a switching power supply.)
· Install a noise filter on the AC power input line to prevent surges on the AC line.
· Always ground the ground terminal to avoid the effects of noise from peripheral devices.
O Frame grabber board cable (sold separately, see P.8): For synchronous signal, video output and external control (see Table 1.)
*8: Made by NI (National Instruments Corporation)
O Power cable (terminated with an FGG.2B.307.CLAD92Z plug at one end and open at the other end; 2 m; see Table 2.)
O External trigger cable (terminated with an FFA.0S.302.CLAC37 plug at one end and open at the other end; 5 m; see Table 3.)
O Earth cable (AWG18; 4 m)
The image acquisition software and image processing libraries are excluded from the flat panel sensor.
System requirements
Accessories
[Table 1] Pin assignment of 36-pin receptacle
Pin No. Signal Pin No. Signal
1 Data12+ (MSB) 19 Data12- (MSB)
2 Data11+ 20 Data11-
3 Data10+ 21 Data10-
4 Data9+ 22 Data9-
5 Data8+ 23 Data8-
6 Data7+ 24 Data7-
7 Data6+ 25 Data6-
8 Data5+ 26 Data5-
9 Data4+ 27 Data4-
10 Data3+ 28 Data3-
11 Data2+ 29 Data2-
12 Data1+ (LSB) 30 Data1- (LSB)
13 bin0 (TTL) 31 GND
14 bin1 (TTL) 32 GND
15 ExtTrgGrb (TTL) 33 IntExt (TTL)
16 Vsync+ 34 Vsync-
17 Hsync+ 35 Hsync-
18 Pclk+ 36 Pclk-
Unless otherwise noted, signal level is RS-422.
36-pin receptacle: TX20A-36R-D2GF1-A1L made by JAE (Japan Aviation Electronics Industry limited)
Mating plug: TX20A-36PH1-D2P1-D1E made by JAE (Japan Aviation Electronics Industry limited)
Flat panel sensor C7921CA-09
[Table 2] Power pin assignment and cable color
[Table 3] External trigger pin assignment and cable color
[Table 4] Binning mode setting (Grabber interface: 36-pin receptacle)
Pin No. Color Signal
1 Brown Reserved
2 Red Reserved
3 Orange Reserved
4 Yellow Analog GND
5 Green Analog +5 V
6 Blue Digital GND
7 Purple Digital +5 V
Shield - Analog GND
7-pin power receptacle: ECG.2B.307.CLV made by LEMO S.A.
Mating power plug: FGG.2B.307.CLAD92Z made by LEMO S.A.
Pin No. 1 to 3 are not connected to the electrical circuit inside of flat panel sensor.
Therefore, previous power source and cable for the C7921CA-02 can be used without modification.
Pin No. Color Signal
1 Red ExtTrgLemo (TTL)
2 Black Signal GND
Shield - Analog GND
2-pin receptacle: ECP.0S.302.CLL made by LEMO S.A.
Mating plug: FFA.0S.302.CLAC37 made by LEMO S.A.
Operating mode Pin No.
No. 13 (bin0) No. 14 (bin1)
Single operation (1 × 1)
Low Low
2 × 2
binning
High Low
4 × 4
binning
High High
The C7921CA-09 has binning mode for reading out signals from multiple pixels at a time. The binning mode setting can be changed by using I/O port.
Binning mode
5
Flat panel sensor C7921CA-09
Install the digital frame grabber board into the PC by the manufacturer’s instructions. When a general-purpose frame grabber board with I/O
control is used, the binning mode or trigger mode can be set by controlling bin0, bin1, IntExt, and ExtTrgGrb through the I/O line.
Connection
Dimensional outline (unit: mm, tolerance: ±1 mm unless otherwise noted)
Video output
(12-bit digital)
Vsync, Hsync,
Pclk
Binning
(bin0, bin1)
IntExt
ExtTrgGrb
X-ray source
Frame
grabber
board
Monitor
PC/AT
(Rear view)
ExtTrgLemo
OS +
Image acquisition
software
Voltage
source
(A. vdd, D. vdd)
CMOS FLAT PANEL SENSOR C7921CA-09
C7921CA-09
142 30
142
33
Active area
51.6
Active area
50.6
EXT.TRG.
POWER
DIGITAL OUT
33 10
Scintillator to
top cover
9.3 *
(0, 0)
(1031, 1011)
13 96 *29 *
108 *
17.1
*
15
41
118 *
502417
12.4
11 *
(4 ×) M3
depth 4
Top cover is made of aluminum 1.0 mm thickness.
Weight: 1.3 kg
* ±0.5
CMOS FLAT PANEL SENSOR C7921CA-09
CMOS FLAT PANEL SENSOR C7921CA-09
KACCC0354EA
KACCA0201EA
6
Flat panel sensor C7921CA-09
Description of terms
7
· Do not subject the flat panel sensors to strong vibration or shock. (Strong shock such as drop impacts may cause permanent damage to
these sensors.)
· Users must take responsibility for implementing X-ray shielding safety measures to avoid the risk of X-ray exposure.
· Data listed in this datasheet is defined at the time of shipment. Characteristics may vary somewhat due to exposure to X-rays so take proper
countermeasures such as making periodic image correction.
· This product is warranted for a period of 12 months after the date of the shipment.
The warranty is limited to make a replacement or repair of any defective product due to defects in workmanship or materials used in
manufacture. It does not cover loss or damage caused by natural disaster, misuse (including modifications and any use not complying with
the environment, application, usage and storage conditions described in this datasheet), or total radiation dose over 1 million Roentgen
(incident X-ray energy: less than 100 kVp) even within the warranty period.
· As described above, flat panel sensors have limited resistance to radiation. This must be taken into account when using a flat panel sensor
under continuous irradiation (in-line non-destructive inspection, etc.)
When using flat panel sensors in non-destructive inspection equipment, please contact us and provide information such as irradiation
conditions.
Notice
C7921CA-09 conforms to European EMC directives:
EN61326 Class A
ABCDEFGHI J
Column
Row
KLMNOPQRS
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
Line B
(Column H, L)
Defect line
(Column J)
Line A
(Column I, K)
KACCC0385EB
Length of pixel cluster which has less sensitivity than 90 % of the average sensitivity of the surrounding pixels.
Formed with more than 3
×
3 pixels which have less sensitivity
than 1/8 of the average sensitivity of the surrounding pixels.
The relative sensitivity ratio “a/b” should be 120 % or less for both vertical and horizontal
lines, where “a” and “b” are defined as follows:
a: Average sensitivity of bright line (Line A) adjacent to defect line
b: Average sensitivity of standard line (Line B) adjacent to Line A
Note that the average sensitivity of the bright line is calculated from the region adjacent to
the defect region in the defect line.
Example: See the right figure
Defect region in defect line: From pixel (J, 1) to pixel (J, 15)
a: Average sensitivity from pixel (I, 1) to pixel (I, 15) or from pixel (K, 1) to pixel (K, 15)
b: Average sensitivity from pixel (H, 1) to pixel (H, 15) or from pixel (L, 1) to pixel (L, 15)
Blemish
Defect cluster
Bright line output adjacent to a defect line
KACCC0384EB
This is defined as defect cluster.
Normal pixel Defective pixel
This is not defined as defect cluster.
www.hamamatsu.com
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2008 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741
Cat. No. KACC1138E05 Jul. 2008 DN
Flat panel sensor C7921CA-09
8
KACCC0404EA
Non-unifomity of sensitivity =
σ: standard deviation of 16 × 16 “Xij”
x : average value of 16 × 16 “Xij”
σ
x
···········
···········
···········
···········
···········
16 segments
20
pixels
20
pixels
20
Pixels
20
pixels
62 Pixels
61 pixels61 pixels61 pixels57 pixels
62 pixels 62 pixels 62 pixels
16 segments
1 mm
Active area
1 mm
1 mm 1 mm
Active area
Optional cable for frame grabber board
Frame grabber board Cable type No. Cable length Cable end
General-purpose
A8406-31 5 m
TX20A-36PH1-D2P1-D1E *10
Open
A8406-36 7 m
A8406-37 10 m
A8406-38 12 m
IMAQ PCI-1424 *9
A8406-32 5 m
PCS-XE100MA+ *11
A8406-33 7 m
A8406-34 10 m
A8406-35 12 m
*9: Made by NI (National Instrument Corporation)
*10: Made by JAE (Japan Aviation Electronics Industry, Limited)
*11: Made by Honda Tsushin Kogyo Co.Ltd.
Note: The detailed information for these optional cables is shown in the datasheet of the A8406 series.
16
×
16 segments are 16
×
16-divided active area excluded 1 mm from the whole edge. Xij is defined as the average sensitivity of each
segment.
Uniformity of sensitivity is calculated as following equation.
Non-uniformity of sensitivity