Whilst e2v technologies has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences of any use thereof
and also reserves the right to change the specification of goods without notice. e2v technologies accepts no liability beyond the set out in its standard conditions of sale in
respect of infringement of third party patents arising from the use of tubes or other devices in accordance with information contained herein.
e2v technologies (uk) limited, Waterhouse Lane, Chelmsford, Essex CM1 2QU United Kingdom Telephone: +44 (0)1245 493493 Facsimile: +44 (0)1245 492492
e-mail: enquiries@e2v.com Internet: www.e2v.com Holding Company: e2v technologies plc
e2v technologies inc. 520 White Plains Road, Suite 450, Tarrytown, NY10591 USA Telephone: (914) 592-6050 Facsimile: (914) 592-5148 e-mail: enquiries@e2vtechnologies.us
© e2v technologies (uk) limited 2009 A1A-MiCS-5914 Version 1, September 2009
Template: DF764388A-2 106915
This datasheet describes the use of the MiCS-5914. The
package and the mode of operation illustrated in this
document target the detection of ammonia (NH3).
FEATURES
Low heater current
Wide detection range
Wide temperature range
High sensitivit y
Miniature dimensions
High resistance to shocks and vibrations
OPERATING MODE
The recommended mode of operation is constant power.
The nominal power is PH = 66 mW. The resulting
temperature of the sensing layer is about 320 °C, in air at
approximately 20 °C.
Detection of the pollution gases is achieved by measuring
the sensing resistance of the sensor. The resistance
decreases in the presence of NH3.
SENSOR CONFIGURATION
The silicon gas sensor structure consists of an accurately
micro machined diaphragm with an embedded heating
resistor and the sensing layer on top.
The internal connections are shown below.
Pin Connection
A
B
C Rh1
D Rs1
E
F Rh2
G Rs2
H
J
K
Figure 1: MiCS-5914 configuration (bottom view)
MiCS-5914
NH3 Sensor
Rs: sensor resistance
Rh: heater resistance
© e2v technologies (uk) limited 2009 Document subject to disclaimer on page 1 A1A-MiCS-5914 Version 1, page 2
POWER CIRCUIT EXAMPLE
As shown below, one external load resistor can be used to
power the heater with a single 5 V power supply.
Figure 2: MiCS-5914 with recommended supply circuit
(top view)
R1 is typically a E96 resistor at 93.1 Ω. This resistor is
necessary to obtain the right temperature on the heater
while using a single 5 V power supply. The resulting
voltages is typically VH = 2.2 V.
SENSOR CHARACTERISTICS
0.01
0.1
1
10
0.1 1 10
NH3 concentrat ion [ppm]
R
s
/R
0
Figure 4: Rs/R0 as a function of NH3 concentration at
40% RH and 25 °C, measured on an engineering test
bench
MEASUREMENT CIRCUIT EXAMPLE
As shown below, the sensitive resistance shall be read by
using a load resistor.
Figure 3: MiCS-5914 with measurement circuit (top
view)
The voltage measured on the load resistor is directly linked
to the resistance of the sensor. RLOAD must be 820 Ω at
the lowest in order not to damage the sensitive la yer.
© e2v technologies (uk) limited 2009 Document subject to disclaimer on page 1 A1A-MiCS-5914 Version 1, page 3
ELECTRICAL CHARACTERISTICS
Rating Symbol Value/Range Unit
Maximum heater power dissip ation PH 88 mW
Maximum sensitive layer power dissipation PS 8 mW
Voltage supply Vsupply 4.9 / 5.1 V
Relative humidity range RH 5 / 95 %RH
Ambient operating temperature Tamb -30 / 85 °C
Storage temperature range Tsto -40 / 120 °C
Storage humidity range RHsto 5 / 95 %RH
OPERATING CONDITIONS
Parameter Symbol Typ Min Max Unit
Heating power PH 66 60 73 mW
Heating voltage VH 2.2 - - V
Heating current IH 30 - - mA
Heating resistance at nominal power RH 72 64 80 Ω
SENSITIVITY CHARACTERISTICS
Characteristic Symbol Typ Min Max Unit
NH3 detection range FS 0.1 100 ppm
Sensing resistance in air (see note 1) R0 - 10 1500
kΩ
Sensitivity NH3 1 ppm (see no te 2) S1 - 1.5 15 -
Notes:
1. Sensing resistance in air R0 is measured under c ontrolled ambient conditions, i.e. synth etic air at 23 ± 5 °C and 50 ± 10 %.
Sampling test.
2. Sensitiv ity NH3 1 ppm is defined as R S in air (R0) divided by RS at 1 ppm NH3. Test conditions are 2 3 ± 5 °C and 50 ± 10%
RH. Indicative values only, sampling test.
IMPORTANT PRECAUTIONS
Read the following instructions carefully before using the MiCS-5914 described in this document to avoid erroneous
readings and to prevent the device from permanent damage.
The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours.
The sensor must not be exposed to high concentrations of organic solvents, silicone vapour or cigarette-smoke in order to
avoid poisoning the sensitive layer.
Heater voltages above the specifie d maximum rating will destroy the sensor due to overheating.
This sensor is to be placed in a filtered p acka ge that protects it against water and dust projections.
e2v strongly recommends using ESD protect ion equipment to handle the sensor.
For any additional questions, contact e2v.
© e2v technologies (uk) limited 2009 Document subject to disclaimer on page 1 A1A-MiCS-5914 Version 1, page 4
PACKAGE OUTLINE DIMENSIONS
The package is compatible with SMD assembly process.
SOLDERING PADS GEOMETRY
© e2v technologies (uk) limited 2009 Document subject to disclaimer on page 1 A1A-MiCS-5914 Version 1, page 5
PACKAGING TAPE AND REEL FOR EXPEDITION
The sensors are placed in a carrier tape. The dimensions of the cavity are 5.5 x 7.5 x 2.55 mm (the tolerance is +/- 0.2 mm).
The outside diameter of t he r eel is either 178 + /- 1 mm (for a ma ximum of 700 se nsors) or 330 + 0.25 / -4 mm (for a m aximum of
2000 sensors).
e2v semiconductor gas sensors are well suited for leak detection and applications requiring limited accuracy. Their use for absolute gas concentration detection is
more complicated because they typically require temperature compensation, calibration, and sometimes as well, humidity compensation. Their base resistance in
clean air and their sensitivity can vary overtime depending on the environment they are in. This effect must be taken into account for any application development
(1108-1.0).