Silicon Pressure Sensors Compensated Pressure Sensing FEATURES * Pressure Ranges from 4 in H2O, 10 in H2O and 1 psi through 240 psi * Calibrated offset * Listings Calibrated for Full Scale span to 1.0 % Over Compensated Temperature Range * High Grade Listings Calibrated for Full Scale span to 0.5 % Over Compensated Temperature Range * Temperature Compensated over 0 C to 70 C [32 F to 158 F] * Gage, Differential, and Absolute Pressure * Ratiometric mV Output TYPICAL APPLICATIONS * Medical Applications * Applications Requiring Small Size * Applications Requiring Vacuum, Positive Pressure or Both XCX, XCXL Series GENERAL DESCRIPTION The XCXL, XCX Series integrates silicon micromachined sensing technology, temperature compensation, and calibration in an improved performance industry standard package. A unique stress isolating design protects against torque induced. Additional stability and long term accuracy improvements are gained through simplified compensation techniques, which eliminate temperature dependent thermal compensation. This series is available in a commercial (XCX-DNC) performance level. This performance level provides the calibration accuracy of offset thermal compensation, and linearity providing added flexibility to meet critical performance budgets. The XCA and XCR Series provide amplified output as well as integrated compensation. WARNING PERSONAL INJURY DO NOT USE these products as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Failure to comply with these instructions could result in death or serious injury. Sensing and Control WARNING MISUSE OF DOCUMENTATION * The information presented in this product sheet is for reference only. Do not use this document as a product installation guide. * Complete installation, operation, and maintenance information is provided in the instructions supplied with each product. Failure to comply with these instructions could result in death or serious injury. Silicon Pressure Sensors Compensated Pressure Sensing XCX, XCXL Series 1 ELECTRICAL SPECIFICATIONS at 12 Vdc excitation at 25 C [77 F] Excitation Voltage Null Temperature Error on Offset 2 0 C to 50 C [32 F to 122 F] (4 in H2O) Temperature Error on Offset 2 0 C to 70 C [32 F to 158 F] (all except 4 in H2O) Temperature Error on Span 2 0 C to 50 C [32 F to 122 F] (4 in H2O) Temperature Error on Span 2 0 C to 70 C [32 F to 158 F] (all except 4 in H2O) 3 Linearity, Hysteresis Error Repeatability Input Resistance Output Resistance Compensated Temperature Range Storage Temperature Range Relative Humidity (non-condensing) Common Mode Pressure Shock (Duration 11 ms any axis) XCX and XCXL - C grade Min. Typ. Max. 3.0 12.0 16.0 --1.0 Units Vdc mV -- -- 1.0 -- -- 0.5 mV -- -- 1.0 -- -- 0.5 mV -- -- 2.0 -- -- 1.0 % Span -- -- 2.0 -- -- 1.0 % Span ----0 [32] -40 [-40] 0 -- 0.5 0.1 15 3.0 25 [77] -- 1.0 ---70 [158] 125 [257] 95 50 10 --- 0.3 0.1 15 3.0 25 [77] -- 0.5 ---70 [158] 125 [257] 95 50 10 % Span % Span k k C [F] C [F] % RH psig g -- 2 Weight Note 1: Note 2: Note 3: XCX and XCXL - H grade Min. Typ. Max. 3.0 12.0 16.0 -0.5 1.0 -- -0 [32] -40 [-40] 0 -- -- -- -2 -- gram All parameters are measured at 12 Vdc excitation, pressure specs obtained with pressure applied to the front of the sensor. Shift is relative to 25 C [77 F] Measured at 1/2 full scale rated pressure using BFSL DIFFERENTIAL AND GAGE OUTPUT at 12 Vdc excitation at 25 C [77 F] Full Scale Pressure 4 in H2O 10 in H2O 0.3 psi 1 psi 5 psi 15 psi 30 psi 60 psi 100 psi 150 psi 240 psi XCX C- Grade Output Full Scale Span, (mV) Min. Typ. Max. 38 40 42 19 20 21 19 20 21 17 18 19 57 60 63 85 90 95 85 90 95 85 90 95 95 100 105 85 90 95 95 100 105 2 Honeywell * Sensing and Control XCX H Grade Output Full Scale Span, (mV) Min. Typ. Max. ---19.8 20.0 20.2 19.8 20.0 20.2 17.8 18.0 18.2 59 60 61 89 90 91 89 90 91 89 90 91 99 100 101 89 90 91 99 100 101 Max. Overpressure (psi) 5 5 5 5 15 45 90 180 200 300 300 Silicon Pressure Sensors Compensated Pressure Sensing XCX, XCXL Series ABSOLUTE OUTPUT at 12 Vdc excitation at 25 C [77 F] FS Pressure 5 psi 15 psi 30 psi 60 psi 100 psi XCX Output Full Scale Span, (mV) Min. Typ. Max. 57 60 63 85 90 95 85 90 95 85 90 95 95 100 105 Max. Overpressure (psi) 15 45 90 180 200 PHYSICAL DIMENSIONS for reference only mm [In] Equivalent Circuit Pinout Media Compatibility 1. N/C 2. +V Excitation 3. -V Output Signal 4. -V Excitation 5. - Output Signal 6. N/C Media Compatibility, Wetted Materials (Apply clean, dry gases only) P1 Port: Front side of silicon diaphragm, silicone gel passivation, glass filled nylon alumina. P2 Port: Silicon diaphragm, glass filled nylon, and alumina ceramic. Port not used for absolute devices Honeywell * Sensing and Control 3 Silicon Pressure Sensors Compensated Pressure Sensing XCX, XCXL Series CPC/CPCL/CPX/CPXL SERIES ORDER GUIDE Note:1. Gage and Differential use "D" suffix. Product is the same. Not all combinations are available. WARRANTY/REMEDY Honeywell warrants goods of its manufacture as being free of defective materials and faulty workmanship. Contact your local sales office for warranty information. If warranted goods are returned to Honeywell during the period of coverage, Honeywell will repair or replace without charge those items it finds defective. The foregoing is Buyer's sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. Specifications may change without notice. The information we supply is believed to be accurate and reliable as of this printing. However, we assume no responsibility for its use. Sensing and Control www.honeywell.com/sensing Honeywell 11 West Spring Street Freeport, Illinois 61032 008047-2-EN IL50 GLO 1004 Printed in USA Copyright 2004 Honeywell International Inc. All Rights Reserved. While we provide application assistance personally, through our literature and the Honeywell web site, it is up to the customer to determine the suitability of the product in the application. For application assistance, current specifications, or name of the nearest Authorized Distributor, contact a nearby sales office. Or call: 1-800-537-6945 USA/Canada 1-815-235-6847 International FAX 1-815-235-6545 USA INTERNET www.honeywell.com/sensing info.sc@honeywell.com