Honeywell ZephyrTM
Digital Airflow Sensors:
HAF Series–High Accuracy
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM or 300 SLPM
Datasheet
2sensing.honeywell.com
What makes our sensors better?
Precise measurement: The industry’s smallest
Total Error Band, fast response time, and high
accuracy provide precise measurement and high
performance in the customer’s application
Saves time: Configurable and customizable
with a choice of port styles simplifies design and
reduces production time
Cost-effective: Reduces printed circuit board
(PCB) size and overall design and production
costs
Honeywell ZephyrTM Digital Airflow Sensors
HAF Series - High Accuracy
Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and
compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors
provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The
sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).
The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The
state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge
Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films
of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to
provide repeatable response to flow.
Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability
to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable
substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.
TIGHT TOTAL ERROR BAND • HIGH AccuRAcy • fAsT REspONsE
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sensing.honeywell.com
TOTAL ERROR BAND (TEB)*
Honeywell specifies TEB, the most comprehensive, clear, and meaningful
measurement that provides the sensor’s true accuracy (see Figure 1). TEB allows
for precise airflow measurement, often ideal for demanding applications with high
accuracy requirements for precise airflow measurement.
•10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
– 0 %FS to 12.5 %FS = 0.5% FS
– 12.5 %FS to 100 %FS = 4.0% reading
•300SLPMonly:
– 0 SLPM to 199 SLPM = 0.5% FS or 4.0% reading
– 200 SLPM to 300 SLPM = 7.0% reading
HIGH ACCURACY
Ideal for use in demanding applications that require high accuracy.
•10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
– 0 %FS to 14.3 %FS = 0.5% FS
– 14.3 %FS to 100 %FS = 3.5% reading
•300SLPMonly:
– 0 %FS to 14.3 %FS = 0.5% FS
– 14.6 %FS to 100 %FS = 3.5% reading
*Competitive Differentiator
Precise measurement maximizes performance.
Features
and Benefits
Figure 1. Total Error Band vs. Accuracy
Other airflow sensor manufacturers only report on accuracy, while Honeywell
reports Total Error Band.
+
+
+
+
+
Linearity
Flow Hysteresis
Repeatability
All Possible Errors
+
+
Offset
Full Scale Span
Temperature Offset
Temperature Span
Thermal Hysteresis
Total
Error Band
Accuracy
=
=
4sensing.honeywell.com
FAST RESPONSE TIME (1 MS)
Allows the customer’s application to respond quickly to a change in airflow, important
in critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications.
HIGH STABILITY
Reduces errors due to thermal effects and null shift, providing accurate readings
over time and often eliminating the need for system calibration after PCB mount and
periodically over time.
HIGH SENSITIVITY AT VERY LOW FLOWS
Provides a fast response time at the onset or cessation of flow.
HIGH 12-BIT RESOLUTION
Increases the ability to sense small airflow changes, allowing customers to more
precisely control their application.
WIDE AIRFLOW RANGE*
The industry’s broadest airflow range measures mass flow with standard flow ranges
of 0-10 SLPM, 0-15 SLPM, 0-20 SLPM, 0-50 SLPM, 0-100 SLPM, 0-200 SLPM, and
0-300 SLPM, or custom flow ranges, increasing the options to integrate the sensor
into the application.
CHOICE OF PORT STYLES*
Manifold mount, 22 mm OD tapered male fitting, and G 3/8 female threaded fitting
provide flexibility to choose the pneumatic connection that is best for the customer’s
application.
LINEAR OUTPUT*
Provides a more intuitive sensor signal than the raw output of basic airflow sensors,
which can help reduce production costs, design, and implementation time.
WIDE SUPPLY VOLTAGE RANGE [3 VDC TO 10 VDC]
Flexible regulated power circuit allows the designer the flexibility to choose the supply
voltage that works best in the system.
ASIC-BASED I2C DIGITAL OUTPUT
Simplifies integration to microprocessors or microcontrollers, reducing PCB complexity
and component count.
FACTORY OR CUSTOM CALIBRATION FOR MULTIPLE GAS TYPES
Can be factory calibrated for gas types such as dry air, helium (He), argon (Ar),
nitrogen (N2), nitrous oxide (N2O), and carbon dioxide (CO2), or custom calibrated for
the end customer, eliminating the need to implement gas correction factors.
ROHS-COMPLIANT MATERIALS
Meet Directive 2002/95/EC.
Features
and Benefits
*Competitive Differentiator
Simplifies design and integration while reducing costs.
5
sensing.honeywell.com
MEDICAL
ANESTHESIA DELIVERY MACHINES
VENTILATORS
VENTRICULAR ASSIST DEVICES (HEART PUMPS)
SPIROMETERS
LAPAROSCOPY
INDUSTRIAL
ANALYTIC INSTRUMENTATION (SPECTOMETRY, CHROMATOGRAPHY)
AIR-TO-FUEL R ATIO
FUEL CELLS
FUME HOODS
GAS LEAK DETECTION
PROCESS CONTROL GAS MONITORING
VACUUM PUMP MONITORING
Potential Applications
6sensing.honeywell.com
Honeywell ZephyrTM Digital Aiflow Sensors
HAF Series–High Accuracy
CAUTION
IMPROPER USE
Do not use these products to sense liquid flow
Failure to comply with these insturctions may result in product
damage.
Table 1. Absolute Maximum Ratings1
Characteristic Parameter
Supply voltage -0.3 Vdc to 11.0 Vdc
Voltage on digital I/O output pins -0.3 Vdc to 3.0 Vdc2
Storage temperature range -40 °C to 100 °C [-40 °F to 212 °F]
Maximum flow change 10,000 SLPM/s
Maximum common mode pressure 60 psi at 25 °C [77 °F]
Maximum flow 350 SLPM
1Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical
characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily
operate at absolute maximum ratings.
2Digital I/O pins are diode protected at this voltage up to 2 mA. Digital bus voltage may exceed this value if the maximum digital bus current is limited to
2 mA or less. The maximum bus current is generally determined by the bus pull-up resistors
CAUTION
PRODUCT DAMAGE
Do not dissamble these products.
Failure to comply with these insturctions may result in product
damage.
Table 2. Operating Specifications
Characteristic Parameter
Supply voltage 3 Vdc to 10 Vdc
Supply current 20 mA max.
Power:
3 Vdc
10 Vdc
60 mW max.
200 mW max.
Calibrated temperature range10 °C to 50 °C [32 °F to 122 °F]
Operating temperature range -20 °C to 70 °C [-4 °F to 158 °F]
Full scale (FS) flow210 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM, 300 SLPM
Calilbrated flow range 0 to 10 SLPM, 0 to 15 SLPM, 0 to 20 SLPM, 0 to 50 SLPM,
0 to 100 SLPM, 0 to 200 SLPM, 0 to 300 SLPM
Calibration gas3clean, dry air
Accuracy4
0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
0 %FS to 14.3 %FS
14.3 %FS to 100 %FS
300 SLPM only:
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM)
14.6 %FS to 100 %FS (44 SLPM to 300 SLPM)
0.5% FS
3.5% reading
0.5% FS
3.5% reading
7
sensing.honeywell.com
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Table 3. Operating Specifications (continued)
Characteristic Parameter
Total Error Band:5
0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
0 %FS to 12.5 %FS
12.5 %FS to 100 %FS
300 SLPM only:
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM)
14.6 %FS to 66.3 %FS (44 SLPM to 199 SLPM)
66.6 %FS to 100 %FS (200 SLPM to 300 SLPM)
0.5% FS
4.0% reading
0.5% FS
4.0% reading
7.0% reading
Null accuracy6±0.5 %FS
Flow response time71 ms
Warm up time835 ms
Resolution:
10 SLPM
15 SLPM
20 SLPM
50 SLPM
100 SLPM
200 SLPM
300 SLPM
0.002 SLPM
0.003 SLPM
0.003 SLPM
0.008 SLPM
0.015 SLPM
0.020 SLPM
0.030 SLPM
Bus standards9I2C fast mode (up to 400 kHz)
Proof pressure 150 psig
Burst Pressure 200 psig
Reverse polarity protection no
1Custom and extended temperature compensated ranges are possible. Contact Honeywell for details.
2Honeywell standard for mass flow rate units is SLPM, which has reference conditions of 0 °C and 1 atm. Custom units are given as LPM with listed
reference conditions at the first mention.
3Contact Honeywell for requirements with other custom gases for calibration. See the Technical Note “Gas Media Compatibility and Correction Factors”.
4Accuracy is the maximum deviation in output from nominal over the entire calibrated flow range at 25 ºC. Errors include Offset, Full Scale Span,
Linearity, Flow Hysteresis, and Repeatability. (See Figures 1 and 5.)
5Total Error Band (TEB) is the maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Total Error Band
includes all Accuracy errors, as well as all temperature effects over the compensated temperature range, including Temperature Offset, Temperature
Span and Thermal Hysteresis. (See Figures 1 and 5.)
6Null Accuracy is the maximum deviation in output from nominal at null flow over the entire calibrated temperature range.
7Response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be
affected by the pneumatic interface).
8Warm-up time: time to the first valid flow measurement after power is applied.
9Refer to the Technical Note “I2C Communications with Honeywell Digital Airflow Sensors” for I2C protocol information.
8sensing.honeywell.com
Honeywell ZephyrTM Digital Aiflow Sensors
HAF Series–High Accuracy
Table 4. Compatible Gases
Gas Calibration Type
Dry air standard
Helium (He)
optimized calibration available
Argon (Ar)
Nitrogen (N2)
Nitrous oxide (N2O)
Carbon dioxide (CO2)
Oxygen (O2)
See the Technical Note “Gas Media Compatibility and Correction Factors”.
80/20 He/O2 Mix
Methane (CH4)
Xenon (Xe)
Table 5. Environmental Specifications
Characteristic Parameter
Humidity 0% to 95% RH, non-condensing
Shock 30 g, 6 ms
Vibration 1.33 g at 10 Hz to 500 Hz
ESD ESD IEC6100-4-2 air discharge up to 8 kV, or direct contact discharge up to 4 kV
Radiated immunity:
test conditions for ≥20 SLPM
test conditions for ≤20 SLPM
Level 3 from 80 MHz to 1000 MHz per IEC61000-4-3
1 meter shielded cable with 3 cm exposed leads at connector
1 meter shielded cable with 3 cm exposed leads at connector and 280 Ohm at 1 MHz ferrite bead
Table 6. Materials Specifications
Characteristic Parameter
Wetted materials glass reinforced (GR) thermoplastic polymer, gold, silicon, silicon dioxide, silicon nitride, epoxy,
PCB epoxy composite
Housing GR thermoplastic polymer
Substrate PCB
Adhesives epoxy
Electronic components silicon, gold
Compliance RoHS, WEEE
9
sensing.honeywell.com
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Table 7. Recommended Mounting and Implementation
Characteristic Parameter
Mounting screw size 10-32
Mounting screw torque 1,13 N m [20 in-lb]
Electrical connection 6 pin SIP connector
Pneumatic connection manifold mount, 22 mm OD tapered male fitting, G 3/8 female threaded fitting
Figure 2. Nomenclature and Order Guide1
Figure 3. All Available Standard Configurations
Manifold mount 22 mm OD tapered male fitting G 3/8 female threaded fitting
HAF
Product Series
0020
Flow Range
U
Unidirectional
Flow
Direction
U
Honeywell ZephyrTM Airow Sensors, HAF Series-High Accuracy,
20 SLPM or 200 SLPM, Product Nomenclature
008270-1-EN IL50 GLO
December 2012
Copyright © 2012 Honeywell International Inc. All Rights Reserved.
Notes:
1. The long port style with the snap mount housing style is not a valid configuration.
2. The 200 SCCM flow range is available in the long and short port styles.
3. Apart from the general configuration required, other customer-specific requirements are also possible.
Please contact Honeywell.
For example, a HAFUHM0020L4AXT part number defines a Honeywell ZephyrTM Airflow Sensor, unidirectional flow, long port, manifold mount, 20 SLPM, I2C output with
custom 0x49 address, 10% to 90% transfer function, 3 Vdc to 10 Vdc supply voltage.
HAF Series
high accuracy
airflow sensor
HH
HM Manifold
mount
22 mm OD
tapered male
fitting per
ISO 5356
HM
Port Style
L
L
Unit
SLPM X
X
Reserved for
Future Use
XXXXX
A
A
Transfer
Function
10% to 90% of input T
T
Supply Voltage
3 Vdc to 10 Vdc
0010
0015
10
15
4
Output Format
2Digital I2C address:
0x29
HT
G 3/8 female
threaded
fitting per
ISO 1179
3Digital I2C address:
0x39
4Digital I2C address:
0x49
5Digital I2C address:
0x59
6Digital I2C address:
0x69
7Digital I2C address:
0x79
0020 20
0050 50
0100 100
0200 200
0300 300
1Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell.
10 sensing.honeywell.com
Honeywell ZephyrTM Digital Aiflow Sensors
HAF Series–High Accuracy
Figure 5. Accuracy and Total Error Band
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM
300 SLPM only
Figure 4. Nominal Digital Output: 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, or 300 SLPM
Error (%FS)
0%
%FS
10
100
Ideal
Accuracy
0 %FS to 14.3 %FS = 0.5%
14.3 %FS to 100 %FS = 3.5%
20 50 90700
4.00%
3.00%
2.00%
1.00%
-1.00%
-2.00%
-3.00%
-4.00%
30 40 60 80
Total Error Band
0 %FS to 12.5 %FS = 0.5%
12.5 %FS to 100 %FS = 4%
Error (%FS)
0%
%FS
10 100
Ideal
Accuracy
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) = 0.5%
14.6 %FS to 100 %FS (44 SLPM to 300 SLPM) = 3.5%
20 50 90
70
0
4.00%
3.00%
2.00%
1.00%
-1.00%
-2.00%
-3.00%
-4.00%
30 40 60 80
Total Error Band
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) = 0.5%
14.6 %FS to 66.3 %FS (44 SLPM to 199 SLPM) = 4% reading
66.6 %FS to 100 %FS (200 SLPM to 300 SLPM) = 7% reading
-5.00%
-6.00%
-7.00%
-8.00%
5.00%
6.00%
7.00%
8.00%
TEB = 0.5%
at 43 SLPM
TEB =
2
.
65%
at 199 SLPM
TEB
= 4. 67
%
at 200
SLPM
TEB = 7.00%
at 300 SLPM
Digital Output (counts)
Full Scale Flow (%)
0
0 100
3276
4914
6552
8190
9828
11466
13104
14742
16380
18018
1638
11
sensing.honeywell.com
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Digital Interface
For additional details on the use of Zephyr with digital output see the Technical Note “I2C Communications with Honeywell Digital Airflow
Sensors”.
The sensor uses the I2C standard for digital communication with a slave address specified in the Nomenclature and Order Guide in Figure
2. Following sensor power-up, each of the first two read sequences shown in Figure 7 will respond with 2 bytes of the unique 4-byte Serial
Number. The first read after power-up will respond with the two most significant bytes of the Serial Number, while the second read will
respond with the two least significant bytes of the Serial Number. For reliable performance, allow sensor to be powered for the sensor
startup time before performing the first read, then allow a 10 ms command response time before performing the second read.
Figure 6. Flow vs Pressure Drop: 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, or 300 SLPM
N
Flow
(SLPM)
Typical Pressure Drop
mbar psi inH2O
0 0 0.00000 0.04153338
10.103 4586 0.00150 0.04153338
20.20582424 0.00298 0.04153338
40.39645192 0.00575 0.04153338
80.80254866 0.0116 3 0.04153338
10 1.02721818 0.01489 0.04153338
12 1.27909578 0.01854 0.04153338
14 1.54899066 0.02245 0.04153338
15 1.68593772 0.02443 0.04153338
16 1.82026278 0.02638 0.04153338
18 2.12584 308 0.03081 0.04153338
20 2.44420632 0.03542 0.04153338
25 3.32048838 0.04812 0.04153338
50 9.3139443 0.13 498 3.73907619
75 17.55251808 0.13 498 7.046445664
100 27.97855332 0.13498 11.23196996
125 40.53260928 0.13498 16.27178662
150 54.8812269 0.79538 22.03202877
175 71.15758 30 8 1.03127 28.5661601
200 89.5064674 1.29720 35.93230649
225 109.3632281 1.58497 43.90378866
250 131.0373825 1.89909 52.60486225
275 154.388940 2.23752 61.97932838
300 179.2351535 2.59761 71.95382248
Table 8. Ideal Transfer Function
Item Equation
Digital Output Code 16384 * [0.1 + 0.8 * (Flow Applied/Full Scale Flow)]
Flow Applied Full Scale Flow * [(Digital Output Code/16384) - 0.1]/0.8
0.00000
0.50000
1.00000
1.50000
2.00000
2.50000
3.00000
050100 150200 250300 350
Pressure Drop (psi)
Flow (SLPM)
Flow vs. Pressure Drop: 0 to 300 SLPM
psi
12 sensing.honeywell.com
Honeywell ZephyrTM Digital Aiflow Sensors
HAF Series–High Accuracy
Table 10. Sensor Response Descriptions
Sensor Response
(Hexadecimal) Response Name Response Description
0xCCA5 POSACK non-response command was executed successfully
0xCC99 BadCommand command byte was not recognized
0xCC9A BadParam command sent with incorrect parameter bytes
0xCC9B Failure command failed during execution
0xCC90 BadChecksum checksum did not match stored value
0xCCBB Busy sensor is busy calculating the checksum value
Table 9. User Command Descriptions
Command Byte
(Hexadecimal) Command Name Command Description Command Response Time
(Max.)
0x01 GetSerialNumber Next two read requests will each return two bytes of the
sensor’s unique 4-byte Serial Number. 10 ms
0x02 PowerOnReset Force Power-On reset of sensor microcontroller. 20 ms
0x03 Checksum
Calculates EEPROM Checksum and compares to
production Checksum value. If the values match, the next
read request will respond with 0xCCA5. Otherwise, the
next read will respond with 0xCC90.
1 s
10
Figure 7. Sensor I2C Read and Write Sequences
Start condition
SA6 A5 A4 A3 A0A2 A1 1SA D7 D6 D5 D3 D2 D1 D0 MA D6 D4 D3 D2 D1 D0 MN SD4 D5D7
SD
A
SC
L
SA6 A5 A4 A3 A0A2 A1 1SA D7 D6 D5 D3 D2 D1 D0 SA SD4
SD
A
SC
L
Stop condition
Address bit
Read/write bit
Data bit
Slave ACK
Master ACK
Master NACK
S
S
D7
A6
1
SA
MA
MN
Master pulls SDA from high to low while SCL remains high
Master allows SDA to float from low to high while SCL remains high
I
2
C Slave Address is the 7 Most Significant Bits for the first transmitted byte
Read = 1, Write = 0
Slave pulls SDA low
Master pulls SDA low
Master allows SDA to float high
I2C Read: Slave responds to Master with data
Data Byte 0 (Most Significant) Data Byte 1 (Least Significant)
Command Byte
I2C Read: Master sends data to Slave
Bit Name Description
The maximum sink current on SCL or SDA is 2 mA. Therefore, if the pull-up resistors are biased by VDD, and if VDD reaches the maximum
supply voltage of 6 V, then the pull-up resistors for SCL and SDA must be greater than 3.0 kΩ to limit the sink current to 2 mA. The typical value
for SCL and SDA pull-up resistors is 4.7 kΩ (this value depends on the bus capacitance and the bus speed).
After the power-up read sequence described above, the sensor will respond to each I2C read request with a 16-bit (2 byte) digital flow reading.
Read requests taken faster than the Response Time (1 ms) are not guaranteed to return fresh data. The first two bits of each flow reading will be
‘00’, while non-flow responses (such as error and status codes) will begin with ‘11’. There are several user commands available as shown in Table
9. Following an I2C write sequence of a user command, the sensor will respond to the next I2C read request with a 16-bit response. Possible
responses to user commands can be seen in Table 10.
13
sensing.honeywell.com
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Port Style: 22 mm OD Tapered Male Fitting per ISO 5356
Figure 8. Mounting Dimensions (For reference only: mm [in].)
Port Style: Manifold Mount
68
[2.7]
30
[1.2]
110
[4.3]
39,5
[1.56]
18,3
[0.72]
14
[0.6]
21,0
[0.83]
2X 5,70
[0.22]
14,8
[0.58]
2X 21,0
[0.83]
35
[1.4]
42,4
[1.67]
54
[2.1]
51,5
[2.03]
18,0
[0.71]
2X 4,50
[0.177]
68
[2.7]
2X 18,3
[0.72]
14,5
[0.57]
14,8
[0.58]
14
[0.6]
39.5
[1.56]
2X 5,20
[0.205]
14,5
[0.57] 44,0
[1.73]
54,4
[2.14] 35,1
[1.38]
44,0
[1.73] 54,4
[2.1
4]
B
C
AA
51,5
[2.03]
54
[2.1]
4X 4,50
[0.177]
33
[1.3]
42,4
[1.67]
8
[0.3]
4,0
[0.16]
63,2
[2.49] 87
[3.4]
4X 15,0
[0.59]
34,5
[1.36]
4,0
[0.16]
63,2
[2.49]
87
[3.4]
71,2
[2.80]
4X 5,20
[0.205]
8
[0.3]
16,0
[0.63]
55,2
[2.17]
44,0
[1.73]
54,4
[2.14]
14,5
[0.57]
30,0
[1.2]
14,6
[0.58]
4X 5,60
[0.220]
33,0
[1.30]
44,0
[1.73] 54,4
[2.14]
22,0
[0.87]
30,6
[1.20]
55,2
[2.17]
71,2
[2.80]
D
C
B
A
2X 13,0 DIA.
[0.51]
A
22,0
[0.87]
16,0
[0.63]
Pin 1.
4X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
2X Gland for O-Ring AS568-113, 13,94 mm ID x 2,62 mm
[0.549 in ID x 0.103 in W. Two O-rings, AS568A-113 Durometer
A65 to A80 Silicon or Viton, are required to seal sensor to
manifold. O-rings are not included.
Flow channel.
B
A
C
D
Pin 1.
2X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
15 mm ID/22 mm OD tapered fitting per ISO 5356.
B
A
C
Mounting Footprint
Mounting Footprint
14 sensing.honeywell.com
Honeywell ZephyrTM Digital Aiflow Sensors
HAF Series–High Accuracy
54
[2.1]
51,5
[2.03]
18,0
[0.71]
35
[1.4]
42,4
[1.67]
71
[2.8]
14,5
[0.57]
16
[0.63]
39,5
[1.56]
14,8
[0.58]
35,1
[1.38]
44,0
[1.73]
54,4
[2.14
]
2X 1. 5
[0.06]
30,0
[1.18]
71,4
[2.81]
34,5
[1.36]
54,4
[2.14]
44,0
[1.73]
14,5
[0.57]
39,5
[1.56]
14,8
[0.58]
2X 18,3
[0.72]
2X 4,50
[0.177]
2X 18,3
[0.72]
2X 5,70
[0.22]
2X 1,5
[0.06]
2X 5,20
[0.205]
16
[0.63]
BC
A
A
Figure 8. Mounting Dimensions (For reference only: mm [in], continued.)
Port Style: G 3/8 Female Threaded Fitting per ISO 1179
Pin 1.
2X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
ISO 1179 G3/8, recommended torque is 1,7 ±0,6 N m
[15 ±5 in lb]. Electrical connector part number is JST
(Japan Solderless Terminals) B6B-PH-K-S. Mating
connector part numbers are JST PHR-6 (socket) and
JST SPH-002T-P0.5L (crimp terminal).
B
A
C
Table 11. Pinout (Digital Function)
Pin 1 Pin 2 Pin 3 Pin 4 Pin 5 Pin 6
NC SCL VVDD ground SDA NC
Mounting Footprint
15
sensing.honeywell.com
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
ADDITIONAL INFORMATION
The following associated literature is available at
sensing.honeywell.com:
•Productlineguide
•ProductPartListing/NomenclatureTree
•ProductRangeGuide
•TechnicalInformation
– I2C Communications with Honeywell Digital Airflow
Sensors
– Gas Media Compatibility and Correction Factors
•Datasheet
•ApplicationSpecificInformation
WARRANTY/REMEDY
Honeywell warrants goods of its manufacture as being free of
defective materials and faulty workmanship. Honeywell’s standard
product warranty applies unless agreed to otherwise by Honeywell
in writing; please refer to your order acknowledgement or consult
your local sales office for specific warranty details. If warranted
goods are returned to Honeywell during the period of coverage,
Honeywell will repair or replace, at its option, without charge
those items it finds defective. The foregoing is buyer’s sole
remedy and is in lieu of all other warranties, expressed or
implied, including those of merchantability and fitness for
a particular purpose. In no event shall Honeywell be liable
for consequential, special, or indirect damages.
While we provide application assistance personally, through our
literature and the Honeywell website, it is up to the customer to
determine the suitability of the product in the application.
Specifications may change without notice. The information we
supply is believed to be accurate and reliable as of this issue;
however, we assume no responsibility for its use.
WARNING
PERSONAL INJURY
DO NOT USE these products as safety or emergency stop
devices or in any other application where failure of the product
could result in personal injury.
Failure to comply with these instructions could result in
death or serious injury.
WARNING
MISUSE OF DOCUMENTATION
• Theinformationpresentedinthisproductsheetisfor
reference only. Do not use this document as a product
installation guide.
• Completeinstallation,operation,andmaintenance
information is provided in the instructions supplied with
each product.
Failure to comply with these instructions could result in
death or serious injury.
008268-4-EN
January 2014
2014 Honeywell International Inc. All rights reserved.
Sales and Service
Honeywell serves its customers through
a worldwide network of sales offices,
representatives and distributors. For
application assistance, current
specifications, pricing or name of the
nearest Authorized Distributor, contact
your local sales office or email us at
info.sc@honeywell.com. Visit us on
the Web at sensing.honeywell.com
Phone and Fax:
Asia Pacific +65 6355-2828
+65 6445-3033 Fax
Europe +44 (0) 1698 481481
+44 (0) 1698 481676 Fax
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+1-305-883-8257 Fax
USA/Canada +1-800-537-6945
+1-815-235-6847
+1-815-235-6545 Fax
Sensing and Control
Honeywell
1985 Douglas Drive North
Golden Valley, MN 55422
honeywell.com