MEMS
flow sensors
We have introduced a new generation of MEMS based flow
sensors used for gas flow velocity and mass flow rate
measurements. The 3D MEMS structure offers outstanding
characteristics in terms of resolution and repeatability
even at very low flow rates.
The D6F-V, D6F-W and D6F-P products incorporate a patent
pending Dust Segregation System (DSS) allowing it to be used to
monitor the performance of fans and air intakes and to detect
clogged filters in general. Precision performance is maintained
over the product life time with an integral DSS that separates up
to 99.5% of dry air borne particulates (simulation result).
MEMS flow sensors you can rely on
Precise, dependable mass
flow measurement in a
small package.
Inside each D6F there is a highly sensitive MEMS flow chip that is only
1.55mm x 1.55mm x 0.4mm thick. The MEMS flow chip has two thermopiles
either side of a tiny heater element used to measure the deviations in heat
symmetry caused by the passing gas flow in either direction. A thin layer of
insulating film protects the sensor chip from exposure to the gas.
When there is no flow present, temperature distribution concentrated around
the heater is uniform and the differential voltage over the two thermopiles is
0V (Diagram 1).
When even the smallest flow is present, temperature on the side of the heater
facing the flow cools, and warms up on the other side of the heater - heat
symmetry collapses (Diagram 2).
The difference of temperature appears as a differential voltage between the 2
thermopiles - the flow velocity, direction and mass flow rate can be measured.
Gas/Air Flow
Flow measurement principle
Omron has been a leading manufacturer of MEMS
based components and modules for measurement
and control applications since 1990 and has
shipped more than 20 million products.
We concentrate on bulk micro-machining such as anodic
bonding, electro chemical etch (ECE), silicon processes
such as thin film deposition, wet and dry etching,
electrode formation & fine plastic replication and glass
wafer processes.
FEM Simulation
Thermistor (poly-Si)
Lower thermopile (poly-Si, Al)
Heater (poly-Si)
Upper thermopile (poly-Si, Al)
Flow
Electrode Pad
Cavity Base Thermopile
Upper side insulator film
Under side insulator film
Heater
Upstream thermopile Downstream thermopile
Diagram 2 No flow conditionHeater
Diagram 1 Flow condition
Flow
Intelli
Gas and Air Flow Sensors
Supersensitive gas flow sensors based on
proprietary MEMS technology are able to measure
gas velocity, direction and mass flow rate for both
extremely low and high flow rates. Capable of
highly accurate measurements over a wider temperature range
compared with conventional mass flow metering, the D6F can detect
mass flows with a repeatability of up to +/- 0.1% and an accuracy of
up to +/-3% full scale deflection. The extreme
sensitivity is achieved with a tiny heating element,
associated with temperature sensors on both sides.
Custom specific models could be made for quantities
of approx. 100k pcs/year.
Our family of MEMS
Flow Sensors
includes intelligent
compact models
capable of
measuring flow
velocity and mass
flow rate movement
with highly
repeatable accuracy
at flow rates from
1LPM to 50LPM (Litre
per minute). High
sensitivity is
achieved with the
MEMS Flow Chip.
gent
Home Appliance
Gas Meter
Gas Leak Detector
Building Ventilation
Boiler/Combustion Control
Smoke Detector
Fan Assisted Heater
Medical
Chest Drainage
Ventilator
Anaesthetic device
CPAP
Oxygen Concentrator
Ozone Generator
Laparoscopic Surgery
Gas Chromatograph
Capnograph
Industrial
Process Control
Environmental Monitor/Gas Sniffer
Pressurised Cable Monitoring
Ventilator control
Clogged filter detection
Gas welding machine
Pick and Place
Fuel Cell
Scientific Devices
Gas flow controller
Fans
Mass Flow Sensors
D6F-01A1 / 02A1
High accuracy mass flow sensor
Flow Range 1LPM (D6F-01A1-110)
2LPM (D6F-02A1-110)
Compact Size 66(L) x 36(W) x 15.1(H)mm
Supply Voltage 10.8 - 26.4VDC
Analogue Output 1 to 5V
Accuracy +/- 3% F.S.
Temp Range -10 to +60°C
Gas Type Air
0.0 0.2 0.4 0.6 0.8 1.0
D6F-01A1-110
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0 0.4 0.8 1.2 1.6 2.0
D6F-02A1-110
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
D6F-P
Uni-directional mass flow sensor*
Flow Range 1LPM, PCB terminal type (D6F-P0010A1) 1LPM, connector type (D6F-P0010A2)
Compact Size 27.2(L) x 17.2(W) x 35(H)mm
Supply Voltage 4.75 – 5.25VDC
Analogue Output 0.5 to 2.5V
Accuracy +/- 5% F.S.
Temp Range -10 to +60°C
Gas Type Air
0.0 0.25 0.50 0.75 1.0
D6F-P0010A1/D6F-P0010A2
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
3.00
2.50
2.00
1.50
1.00
0.50
0.0
* Bi-directional mass flow sensor available on request.
D6F-03A3
D6F-01N2 / 02L2 / 05N2
High accuracy mass flow sensor
Flow Range 3LPM (D6F-03A3-000)
Ultra-Compact Size 36.6(L) x 8(W) x 16.8(H)mm
Supply Voltage 10.8 - 26.4VDC
Analogue Output 1 to 5V
Accuracy +/-5% F.S.
Temp Range 0 to 50°C
Gas Type Air
High accuracy mass flow sensor
Flow Range 1LPM (D6F-01N2-000), 2LPM (D6F-02L2-000), 5LPM (D6F-05N2-000)
Compact Size 62 (L) x 21.6(W) x 22.1 (H)mm
Supply Voltage 10.8 - 26.4VDC
Analogue Output 1 to 5V
Accuracy +/- 3% F.S.
Temp Range -10 to +60°C
Gas Type N2 type LNG (Liquified Natural Gas)
L2 type LPG (Liquified Propane Gas)
0,0 0,6 1,2 1,8 2,4 3,0
D6F-03A3-000
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6,0
5,0
4,0
3,0
2,0
1,0
0,0
0.0 1.0 2.0 3.0 4.0 5.0
D6F-05N2-000
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0 0.2 0.4 0.6 0.8 1.0
D6F-01N2-000
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
D6F-02L2-000
Operating Characteristics
0.0 0.4 0.8 1.2 1.6 2.0
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Perf
Mass Flow Sensors
Our D6F-W and D6F-V
Sensors incorporate a
Dust Segregation System
(DSS) that helps maintain
sensing performance in a
variety of applications.
The housing design is based on a centrifugal principle to segregate
particulates from the air. Most particulates cannot pass through the sensing
area and are discharged through the exhaust route. As a result of the
numerical analysis, the efficiency of the Dust Segregation System separates
up to 99.5% of dry particulates.The D6F-W01A1 and D6F-W04A1 airflow
sensors can measure air velocity from 0-1m/s and 0-4m/s with an
accuracy of +/-5% full scale deflection. The D6F-V03A1
measures 0-3m/s. Each is supplied as standard,
optimally adjusted at the factory so easy and rapid
user application is guaranteed.
Dust Segregation System (D6F-W)
Air Velocity Sensors
D6F-10A5 / 20A5 / 50A5-10A6 / 20A6 / 50A6
High accuracy mass flow sensor
Flow Range 10LPM (D6F-10A5/10A6-000), 20LPM (D6F-20A5/20A6-000)
50LPM (D6F-50A5/A6-000)
Compact Size 78(L) x 30(W) x 30 (H)mm
Supply Voltage 10.8 - 26.4VDC
Analogue Output 1 to 5V
Accuracy +/- 3% F.S.
Temp Range -10 to +60°C
Gas Type Air
0.0 2.0 4.0 6.0 8.0 10.0
D6F-10A5/10A6-000
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0 4.0 8.0 12.0 16.0 20.0
D6F-20A5/20A6-000
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0 10.0 20.0 30.0 40.0 50.0
D6F-50A5/50A6-000
Operating Characteristics
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
A5 type
A6 type
Cassette (ceiling/suspended) Multimodular Air Conditions
Duct Connected Heating and Air Conditioning Systems
Alternative for Single Point Pitot tube
Air & Water Air Conditioning Systems
Air Purifiers/ Dehumidifiers
Fan Assisted Heaters
Air Cooled, High Power Indoor Lighting
Mission Critical PC, Workstation Ventilation
19” Rack Ventilation Systems
LCD Projectors
AV Electronics Equipment
ormance
D6F-W01A1 / W04A1
Air Velocity Sensors
Precision air flow detection sensor
Flow Range 1m/s (D6F-W01A1)
4m/s (D6F-W04A1)
Ultra Compact Size 20(L) x 39(W) x 9(H)mm
Supply Voltage 10.8 - 26.4VDC
Analogue Output 1 to 5V
Accuracy +/- 5% F.S.
Temp Range -10 to +60°C
Gas Type Air
0.0 0.25 0.50 0.75 1.00
D6F-W01A1
Operating Characteristics
Output voltage(V)
Flow velocity(m/s)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0 1.0 2.0 3.0 4.0
D6F-W04A1
Operating Characteristics
Output voltage(V)
Flow velocity(m/s)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
D6F-V03A1
Precision air flow detection sensor
Flow Range 3m/s (D6F-V03A1)
Ultra Compact Size 24(L) x 14(W) x 8(H)mm
Supply Voltage 3.15 - 3.45VDC
Analogue Output 0.5 to 2V
Accuracy +/- 10% F.S.
Temp Range -10 to +60°C
Gas Type Air
0.0 0.75 1.50 2.25 3.00
Output Voltage [V]
Flow velocity (m/s)
2.5
2.0
1.5
1.0
0.5
0.0
D6F-V03A1
Operating Characteristics
Filter clogging can be detected,
also using the bypass-like
configuration. The differential
pressure between upstream
and downstream of the filter
grows in proportion to the
The sensor detects the pressure
drop over the filter. The moment
this drop exceeds a given
threshold, a warning signal
Clogged Filter Detection (Configuration 1)
Clogged Filter Detection (Configuration 2)
Clogged Filter
Clogged Filter
accumulation of dirt in the filter,
and the output voltage of the
sensor located on the bypass
channel increases.
indicating the need for filter
replacement is sent out.
1 3 5 7 9 11
Warning Signal is sent out Filter Replacement
Threshold
Sensor Output [V]
Months
6
5
4
3
2
1
0
1 3 5 7 9 11
Warning Signal is sent out
Filter Replacement
Sensor Output [V]
Months
6
5
4
3
2
1
0
Threshold
Omron Electronic Components Europe BV reserves the right to make any changes to the specifications of the products described in
this brochure at its sole discretion and without prior notice.
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