Amplified Low Pressure Sensors 1 mbar (0.4 In H2O) to 30 In H2O Pressure Sensors Military Temperature Grade Features * 0 to 1 mbar to 0 to 30 In H2O Pressure Ranges * Ratiometric 4V Output * Temperature Compensated (-40C to 125C) * Calibrated Zero and Span Applications * Medical Instrumentation * Environmental Controls * HVAC General Description The Amplified line of low pressure sensors is based upon a proprietary technology to reduce all output offset or common mode errors. This model provides a ratiometric 4-volt output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The output of the device is ratiometric to the supply voltage over a supply voltage range of 4.5 to 5.5 volts. Physical Dimensions 0.25 (6.4) Pin Size 0.010 x 0.020 (0.25 x 0.50) 0.10 Typical (2.54) 0.174 to 0.190 (4.4 to 4.8) Pin 1 2 3 4 pin 1: Vsupply 0.21 (5.3) 1 pin 2: Common pin 3: Voutput A 1.08 (27.4) 0.66 (16.0) 0.48 (12.2) 0.55 (14.0) NOTES: 1) Dimensions in inches (millimeters) B 0.80 (20.3) 0.85 (21.6) 1.10 (27.9) 3-3 0.42 (10.5) pin 4: do not connect 3 Environmental Specifications Pressure Sensor Ratings +4.5 to +5.5 Vdc Supply Supply Voltage VS Temperature Ranges -10 to +10 psig Common-mode pressure 250C Lead Temperature, max (soldering 2-4 sec.) Compensated -40 to 125 C Operating -40 to 125 C Storage -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges Operating Nominal Span Proof Pressure Burst Pressure Pressure 4V 100 In H2O 200 In H2O 1 INCH-D-4V-MIL 1 mbar 4V 100 In H2O 200 In H2O 1 INCH-G-4V-MIL 1 In H2O 4V 300 In H2O 200 In H2O 5 INCH-D-4V-MIL 0 - 1 In H2O 4V 200 In H2O 300 In H2O 5 INCH-G-4V-MIL 5 In H2O 4V 200 In H2O 300 In H2O 10 INCH-D-4V-MIL 0 - 5 In H2O 4V 200 In H2O 300 In H2O Part Number 1 MBAR-D-4V-MIL 10 INCH-G-4V-MIL 10 In H2O 4V 200 In H2O 300 In H2O 20 INCH-D-4V-MIL 0 - 10 In H2O 4V 300 In H2O 500 In H2O 20 INCH-G-4V-MIL 20 In H2O 4V 300 In H2O 500 In H2O 30 INCH-D-4V-MIL 0 - 20 In H2O 4V 500 In H2O 800 In H2O 30 INCH-G-4V-MIL 30 In H2O 4V 500 In H2O 800 In H2O 0 - 30 In H2O Performance Characteristics for: 1 MBAR-D-4V-MIL Parameter, NOTE 1 Minimum Operating Range, differential pressure Output Span, NOTE 5 Offset Warm-up Shift, NOTE Maximum 1.0 NOTE Units mbar 1.80 2.0 2.20 volt 2.00 2.25 2.50 volt 120 mvolt Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Nominal 2 3 Offset Position Sensitivity (1g) 20 mvolt 40 mvolt Offset Long Term Drift (one year) 20 Linearity, hysteresis error, NOTE 4 0.05 Span Shift (-40C-125C), NOTE 2 3-4 mvolt 0.25 %fs 4 %span Performance Characteristics for 1 INCH-D-4V-MIL Minimum Parameter, note 1 Maximum Output Span, note 5 1.90 2.0 2.10 volt 2.15 2.25 2.35 volt 60 mvolt Offset Voltage @ zero differential pressure NOTE Units "H2O 1.0 Operating Range, differential pressure Offset Temperature Shift (-40C-125C), Nominal 2 10 mvolt 5 mvolt Offset Long Term Drift (one year) 10 mvolt Linearity, hysteresis error, NOTE 4 0.05 Span Shift (-40C-125C), NOTE 2 Offset Warm-up Shift, NOTE 3 Offset Position Sensitivity (1g) 0.25 %fs 2 %span Maximum Units Performance Characteristics for 1 INCH-G-4V-MIL Minimum Parameter, note 1 Nominal "H2O 1.0 Operating Range, gage pressure Output Span, note 5 Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), NOTE volt 3.90 4.0 4.10 0.15 0.25 0.35 volt 60 mvolt 2 10 mvolt Offset Position Sensitivity (1g) 15 mvolt Offset Long Term Drift (one year) 10 mvolt Linearity, hysteresis error, NOTE 4 0.05 Span Shift (-40C-125C), NOTE 2 Offset Warm-up Shift, NOTE 3 0.25 %fs 2 %span Maximum Units Performance Characteristics for 5 INCH-D-4V-MIL Parameter, note 1 Minimum Operating Range, differential pressure 5.0 Output Span, note 5 Offset Warm-up Shift, NOTE NOTE 2.0 2.10 volt 2.15 2.25 2.35 volt 40 mvolt 2 3 Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 "H2O 1.90 Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Nominal 5 mvolt 5 mvolt 5 0.05 3-5 mvolt 0.25 %fs 1 %span 3 Performance Characteristics for: 5 INCH-G-4V-MIL Parameter, NOTE Minimum 1 NOTE Maximum 5 Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), NOTE Units "H2O 5.0 Operating Range, gage pressure Output Span, Nominal 3.90 4.0 4.10 volt 0.15 0.25 0.35 volt 40 mvolt 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE 3 Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 0.05 0.25 %fs 1 %span Maximum Units Performance Characteristics for: 10 INCH-D-4V-MIL Parameter, NOTE Minimum 1 NOTE 5 NOTE volt 1.90 2.0 2.10 2.15 2.25 2.35 volt 20 mvolt Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), "H2O 10.0 Operating Range, differential pressure Output Span, Nominal 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE 3 Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 0.05 0.25 %fs 1 %span Maximum Units Performance Characteristics for: 10 INCH-G-4V-MIL Parameter, NOTE 1 Minimum Operating Range, gage pressure Output Span, NOTE 10.0 5 Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), Offset Warm-up Shift, Nominal NOTE 3.90 4.0 4.10 0.15 0.25 0.35 volt 20 mvolt 2 volt 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt NOTE 3 "H2O Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 0.05 3-6 0.25 %fs 1 %span Performance Characteristics for 20 INCH-D-4V-MIL Minimum Parameter, note 1 Maximum Output Span, note 5 1.90 2.0 2.10 volt 2.15 2.25 2.35 volt 20 mvolt Offset Voltage @ zero differential pressure NOTE Units "H2O 20.0 Operating Range, differential pressure Offset Temperature Shift (-40C-125C), Nominal 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE 3 Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 0.05 0.25 %fs 1 %span Maximum Units Performance Characteristics for 20 INCH-G-4V-MIL Minimum Parameter, note 1 Nominal "H2O 20.0 Operating Range, gage pressure Output Span, note 5 Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), NOTE volt 3.90 4.0 4.1 0.15 0.25 0.35 volt 20 mvolt 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE 3 Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 0.05 0.25 %fs 1 %span Maximum Units Performance Characteristics for 30 INCH-D-4V-MIL Parameter, note 1 Minimum Operating Range, differential pressure 30.0 Output Span, note 5 Offset Warm-up Shift, NOTE NOTE 2.0 2.10 volt 2.15 2.25 2.35 volt 20 mvolt 2 3 Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 "H2O 1.90 Offset Voltage @ zero differential pressure Offset Temperature Shift (-40C-125C), Nominal 5 mvolt 5 mvolt 5 0.05 3-7 mvolt 0.25 %fs 1 %span 3 Performance Characteristics for 30 INCH-G-4V-MIL Parameter, NOTE Minimum 1 NOTE Maximum 5 Offset Voltage @ zero pressure Offset Temperature Shift (-40C-125C), NOTE Units "H2O 30.0 Operating Range, gage pressure Output Span, Nominal 3.9 4.0 4.1 volt 0.15 0.25 0.35 volt 20 mvolt 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE 3 Linearity, hysteresis error, NOTE 4 Span Shift (-40C-125C), NOTE 2 0.05 0.25 %fs 1 %span Equivalent Circuit Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 500 useconds. Specification Notes NOTE 1: ALL PARAMETERS ARE MEASURED AT UNLESS OTHERWISE SPECIFIED. 5.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. 2: SHIFT IS RELATIVE TO 25C. 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. NOMINALLY THE OUTPUT VOLTAGE RANGE IS 0.25 TO 4.25 VOLTS FOR MINUS TO PLUS FULL SCALE PRESSURE. NOTE NOTE All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 3-8