Force Sensor HSFPAR003A_ Datasheet 1 / 18 Rev.1.8 Mar/28/2019 Force Sensor HSFPAR003A Data sheet 1. Product No. HSFPAR003A 2. General description This product is a force sensor using effect of piezo resistive bridge circuit formed on silicon diaphragm. Piezo resistance is changed according to strain by applying force to the diaphragm. 3. Feature PKG 0.01N 100 Small Footprint and Low Profile User design flexibility by small package. High Sensitivity and Good Linearity Precisely detect micro force less than 0.01 N. High Durability No characteristics change after 1 million cycles. HEAD OFFICE 1-7, YUKIGAYA-OTSUKA-MACHI, OTA-KU, TOKYO, 145-8501, JAPAN PHONE +81(3)3726-1211 FAX +81(3)3728-1741 NAGAOKA PLANT 1-3-5, HIGASHITAKAMI-MACHI, NAGAOKA-CITY, NIIGATA-PREF, 940-0006, JAPAN PHONE +81 258-24-4111 FAX +81 258-24-4110 This specification is subject to change without notice. Force Sensor 2 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 4. Sensor structure and measurement principle Fig-1 sensor package and sensor element Piezo element Vout2 B Vdd A D C GND Vout2 A:Up Vdd D:Dow B:Down Vout1 GND C:Up Fig-2 sensor structure Piezo element Force Diaphragm Fig-3 measurement principle (1) Diaphragm is strained by getting force from outside. (2) Resistance of Piezo element on the diaphragm is changed by getting the strain diaphragm deformation 3) Analog voltage is outputted in response to the force change. (Vout=Vout1-Vout2) Vout1 Force Sensor 3 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 5. Functional block diagram No1 Vdd /Pin No. /Name No2 V2 0 No3 GND No4 V1 No1 Vdd No2 V2 No3 GND No4 V1 *Output = V1-V2 /Function /Supply Voltage -/Output(-) GND +/Output(+) 6. Full view 0.20mm 0.10mm 0.66mm 2.0mm 1.6mm 2 2 1 1.2mm 1 5 2.0mm 1.4mm 0.56mm 0.4mm 4 1.6mm 3 3 4 0.2mm 0.56mm TOP VIEW /Pin No. /Name 1 2 3 4 5 Vdd V2 GND V1 GND BOTTOM VIEW /Function /Supply Voltage -/Output(-) GND +/Output(+) GND Force Sensor 4 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 7. Recommended circuit 7-1. Example circuit for analog output. Vcc AD623 7 Sensor Vdd 3 1 V1 C RG OUTPUT RG 8 2 Vout REF -VS 4 GND RG 6 5 V2 R1 +VS R2 GND GND Recommended value Source Voltage Vcc [V] 3.3 *1 Instrumentation amplifier Gain adjustment Resistance Offset adjustment Resistance *1 AD623 AD8237 *1 AD8420 *1 INA317 *1 *1 INA333 - RG [k] 1.3 R1 [k] 10.0 R2 [k] 3.0 C [uF] 0.1 Capasitance Sens [mV/N] ( 952 ) Sensitivity The listed amplifier is an example. Our company does not guarantee the operation for the products listed above. These are depend on the circuit design, please check in advance. Reference Gain = ( 1 + 100k / RG ) Offset voltage = R2 / ( R1+R2 ) * Vcc OUTPUT = Gain*Vin + Offset voltage Force Sensor 5 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 7-2. Example circuit for digital output. Vdd2 Vdd1 Sensor Vdd C Vdd V1 GND C V2 IN_P(+) IN_N(-) SDA AD Converter *1 SCL GND GND *1 AD Please select the appropriate AD converter to meet the requirements of the system. *2 Please add the Instrumentation amplifier or some components as needed. Force Sensor 6 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 8. Evaluation example Force gauge Notes When the gauge is touched to the sensor, it does slowly. The gauge is vertically touched to the sensor. Force more than the maximum ratings is not added. (IMADA Co., Ltd.) DC power supply unit Multi-meter V1 V2 GND Force gauge Metal plate Force Sensor 15mm Multi-meter Output [mV] Force Sensor Vdd GND V1 V2 Force-gauge Output [N] t=1mm 11mm sample board Vdd Force Sensor 7 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 9. Design guide 9-1 Precautions Please do not apply the static force and the impact force of 40N or more to this sensor. Recommendation SUS440C,t=0.2mm F < 40N Please do not apply force at an angle to the sensor. <5deg. The dust such as sand must not enter. Something that corrode solder must not enter. Dust Solder corrosion Force Sensor HSFPAR003A_ Datasheet 8 / 18 Rev.1.8 Mar/28/2019 9-2 Design Guide for Stylus-pen Stopper Metal plate Nib X Pre-tension < 8[N] Spring Force Sensor This structure detects load force of pen tip as opposite direction. Therefore impact stress doesn't apply directly to the sensor projection. Spring is recommended below. Coil spring Displacement is limited to X[mm] by the stopper. Limit the impact force applied to the sensor by the stopper. Recommendation) Limit force : F < 8[N] Spring constant : k[N/mm] , Displacement : X[mm] F = kX < 8[N] Pre-tension - F > 0[N] Metal plate is recommended stainless steel. e.g.) Metal plate : SUS440C Sensor Output[mV] The output of sensor is changed as below figures. Load Force[N] Force Sensor HSFPAR003A_ Datasheet 9 / 18 Rev.1.8 Mar/28/2019 10. Package dimensions Ref A B C D Dimension in millimeters Min. Typ. 1.90 2.00 1.50 1.60 0.18 0.20 0.62 0.66 Top view Max. 2.10 1.70 0.22 0.70 Side view Ref E F G H I J Dimension in millimeters Min. Typ. Max. 0.17 0.20 0.23 0.37 0.40 0.43 0.53 0.56 0.59 0.53 0.56 0.59 1.17 1.20 1.23 1.37 1.40 1.43 Bottom view Force Sensor 10 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 11. Electrical specifications Item Symbol Absolute Maximum Ratings Vlim min. Specification Typ. max. [V] -4.0 - 4.0 Llim [N] - - 40 Tstr [C] -55 - +125 HBM [V] -1000 - +1000 Drbl [Cycles] 1000k - - [N] 0 - 8 [V] 1.5 - 3.6 [C] -40 - +85 2.7 3.7 4.7 - - 2.0 -8 -4 0 4.5 5.5 6.5 Absolute limits supply voltage Max Load Rating Storage temperature ESD ESD Durability Unit. Operating conditions Frng Force range Vdd Suppl voltage Topr Operating temperature Electrical specifications (T=25C) Sens [mV/V/N] Sensitivity Lin [%FS] Linearity V0 [mV/V] Null Offset Rbrg [k] Bridge Resistance Notes 1-8N,5Hz, sine curve *FS:Full Span Output [mV] B Linear fitting curve : [Output] = [Force] x [Vdd] x + [Vdd] x A FS *Sensitivity : *Null Offset : *Linearity : (A+B)/FS x 100 Force [N] Force Sensor HSFPAR003A_ Datasheet 11 / 18 Rev.1.8 Mar/28/2019 12. Recommended land pattern 1.2mm 0.5mm 0.6mm 0.7mm 1.4mm 0.6mm 0.6mm 0.3mm Basically devices shall be mounted by the mounting machine. In case of manual mounting,do not touch knob. Force Sensor HSFPAR003A_ Datasheet 13. Recommended soldering conditions 25010sec Peak temperature 250 or less, within 10 seconds. 12 / 18 Rev.1.8 Mar/28/2019 Force Sensor 13 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 14. Laser marking specifications Unit : mm Laser Mark No 1 2 3 4 5 Indication item Content of indication Manufacturing No. 0 ~ 9, A ~ Z (00 ~ ZZ) Production month Identification number 1pin mark 19, A, B, C AZ Fix Force Sensor HSFPAR003A_ Datasheet 14 / 18 Rev.1.8 Mar/28/2019 15. & Tape & Reel specifications 15-1. Storage direction of the products Emboss Tape 1Pin mark Direction of tape drawing out 15-2. Direction of tape drawing out Products Direction of tape drawing out 15-3. Taping Leader area Trailer area storage area Empty area Cover tape area End tape 160mm min. 160mm min. More than 40 pockets More than 40 pockets 400mm min. 15-4. Peel strength - Peel strength of cover tape shall be 0.1N(10g)0.7N(70g) for 300mm/min. Peel direction of Top cover tape The emboss tape is fixed. 15-5. Top cover tape offset Emboss tape Top cover tape Overlay of cover tape to the hole (A) is allowed by 0.5mm Bulge of top cover tape (B) is allowed by 0.5mm Force Sensor HSFPAR003A_ Datasheet 15-6. Emboss Tape Dimensions (Unit mm) 15-7. Reel Dimensions (Unit : mm) 15 / 18 Rev.1.8 Mar/28/2019 Force Sensor 16 / 18 Rev.1.8 Mar/28/2019 HSFPAR003A_ Datasheet 15-8. Packing For oversea This product is packed by tape wrapping (3,000 pcs/reel). The barcode label is put on each reel. One reel is stored in one Bag. 15 bags are put in 1 carton (max.45,000pcs/carton) The cushion is stored in the top and bottom of the carton. Cushion label Bag Cushion *Dimension of carton outside. For Japan This product is delivered by the taping wrapping (3,000 pcs/reel). This product is delivered by a non damp-proof packing. The barcode label is put on each reel. 1 reel stored in the carton box. ( carton/with 3,000pcs) *Dimension of carton Recommended storage condition MSL1 Damp-proof packing None Stacking height of carton For oversea : Maximum 5cartons For Japan : Maximum 10cartons Minimum Order Quantity Standard Packing Quantity 3,000 pcs Force Sensor HSFPAR003A_ Datasheet 17 / 18 Rev.1.8 Mar/28/2019 16. Legal Disclaimer 1. For the export of products which are controlled items subject to foreign and domestic export laws and regulations, you must obtain approval and/or follow the formalities of such laws and regulations. 2. Products must not be used for military and/or antisocial purposes such as terrorism, and shall not be supplied to any party intending to use the products for such purposes. 3. AV Unless provided otherwise, the products have been designed and manufactured for application to equipment and devices which are sold to end-users in the market, such as AV (audio visual) equipment, home electric equipment, office and commercial electronic equipment, information and communication equipment or amusement equipment. The products are not intended for use in, and must not be used for, any application of nuclear equipment, driving control equipment for aerospace or any other unauthorized use. With the exception of the above mentioned banned applications, for applications involving high levels of safety and liability such as medical equipment, burglar alarm equipment, disaster prevention equipment and undersea equipment, please contact an our company's sales representative and/or evaluate the total system on the applicability. Also, implement a fail-safe design, protection circuit, redundant circuit, malfunction protection and/or fire protection into the complete system for safety and reliability of the total system. 4. Before using products which were not specifically designed for use in automotive applications, please contact an our compnay's sales representative. Force Sensor HSFPAR003A_ Datasheet 18 / 18 Rev.1.8 Mar/28/2019 17. Notes concerning patent Except for the structure of this product, Our company will not indemnify, defend and hold harmless you from and against any third party's intellectual properties rights such as patents even if examples of use for this product are shown in this documents, you shall do patent clearance search for your product incorporating this product.