1. 弊社製品番号 HSFPAR003A
Product No.
2. 製品概要
General description
3.製品の特徴 ・小型低背です。
Feature
PKGサイズが小さくスペースを取らないため、様々な製品
デザインに対応出来ます。
・感度が高く、直線性に優れます。
0.01Nレベルの小さな応力から検出可能です。
・信頼性に優れます。
100万回の荷重試験後で、特性の変化は有りません。
・Small Footprint and Low Profile
User design flexibility by small package.
・High Sensitivity and Good Linearity
Precisely detect micro force less than 0.01 N.
・High Durability
No characteristics change after 1 million cycles.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
本製品は、シリコンダイアフラム上にピエゾ抵抗が形成されており、荷重
が加わるとダイアフラムが撓むことでピエゾ抵抗に応力が発生し、抵抗率
が変化するピエゾ抵抗効果を利用した荷重センサ。
・This product is a force sensor using effect of piezo resistive bridge
circuit formed on silicon diaphragm.
・Piezo resistance is changed according to strain by applying force to
the diaphragm.
Force Sensor
HSFPAR003A
Data sheet
This specification is subject to change without notice.
HEAD OFFICE
1-7, YUKIGAYA-OTSUKA-MACHI, OTA-KU, TOKYO, 145-8501, JAPAN
PHONE +81(3)3726-1211 FAX +81(3)3728-1741
NAGAOKA PLANT
1-3-5, HIGASHITAKAMI-MACHI, NAGAOKA-CITY, NIIGATA-PREF, 940-0006, JAPAN
PHONE +81 258-24-4111 FAX +81 258-24-4110
4.センサの構造と動作原理
Sensor structure and measurement principle
Fig-1 sensor package and sensor element
Fig-2 sensor structure
Fig-3 measurement principle
(1) Diaphragm is strained by getting force from outside.
(2) Resistance of Piezo element on the diaphragm is changed
by getting the strain diaphragm deformation
（3) Analog voltage is outputted in response to the force change.
(Vout=Vout1-Vout2)
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Rev.1.8
Mar/28/2019
Force Sensor
HSFPAR003A_ Datasheet
Piezo
element
Diaphragm
Force
GND
Vout1
Vdd
Vout2
A:Up
C:Up
D:Dow
B:Down
Piezo
element
GND
Vdd
Vout2
Vout1
C
A
B D
5. ブロック図
Functional block diagram
*Output = V1-V2
6. 外形図
Full view
TOP VIEW BOTTOM VIEW
+出力信号/Output(+)
No1
Vdd
No2
V2
-出力信号/Output(-)
No4
V1
No3
GND
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
機能/Function
電源/Supply Voltage
GND
端子番号/Pin No.
記号/Name
5
GND
GND
3
V2
機能/Function
-出力信号/Output(-)
端子番号/Pin No.
記号/Name
4
V1
+出力信号/Output(+)
1
Vdd
電源/Supply Voltage
2
GND
GND
No1 Vdd
No2 V2
No3 GND
No4 V1
0
2.0mm 1.6mm
0.66mm
0.10mm
0.20mm
1
2
3 4
5
1.4mm
1.2mm
0.56mm
0.4mm
0.2mm
0.56mm
12
3
41.6mm
2.0mm
7. 推奨回路
Recommended circuit
7-1. アナログ回路例
Example circuit for analog output.
推奨値 Recommended value
*1
記載アンプは一例です。
上記リストの製品は当社にて動作を保証するものではございません。
動作は回路設計に依存しますので事前に確認をお願いします。
The listed amplifier is an example.
Our company does not guarantee the operation for the products listed above.
These are depend on the circuit design, please check in advance.
参考 Reference
増幅率 Gain = ( 1 + 100kΩ / RG )
オフセット
Offset voltage = R2 / ( R1+R2 ) * Vcc
出力 OUTPUT = Gain*Vin + Offset voltage
AD8420 *1
INA317 *1
INA333 *1
-
計装アンプ
Instrumentation amplifier
AD623 *1
AD8237 *1
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
電源電圧
Vcc
[V]
3.3
Source Voltage
1.3
C
オフセット調整抵抗
R1
[kΩ]
10.0
Offset adjustment Resistance
増幅率調整抵抗
RG
[kΩ]
Gain adjustment Resistance
コンデンサ
0.1
Capasitance
R2
[kΩ]
3.0
[uF]
感度
Sens
[mV/N]
( 952 )
Sensitivity
3
2
1
8
6
47
5
OUTPUT
+VS
REF
-VS
RG
RG
Vdd
V1
V2
GND
GND
Vcc
C
R1
R2
AD623Sensor
RG
GND
Vout
7-2. デジタル回路例
Example circuit for digital output.
*1 システムの要求に合致するように適切なADコンバータを選択下さい。
Please select the appropriate AD converter to meet the requirements of the system.
*2 必要により計装アンプ及びその他の部品を追加下さい。
Please add the Instrumentation amplifier or some components as needed.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
AD Converter
*1
Vdd1
GND
C
V1
V2 IN_P(+)
IN_N(-)
Vdd
SDA
SCL
GND
Vdd2
CVdd
GND
Sensor
8. 評価方法例
Evaluation example
Notes
・When the gauge is touched to the sensor,
it does slowly.
・The gauge is vertically touched to the sensor.
・Force more than the maximum ratings
is not added.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
Multi-meter
DC power supply unit
Force gauge
(IMADA Co., Ltd.)
GND Vdd
V1
V2
Force-gauge Output [N]
Multi-meter Output [mV]
Metal plate
Force gauge
Force Sensor
Force Sensor
Vdd GND
V1 V2
15mm
11mm
t=1mm
sample board
9. デザインガイド
Design guide
9-1 Precautions
・Please do not apply the static force and the impact force of 40N or more to this sensor.
・Please do not apply force at an angle to the sensor.
・The dust such as sand must not enter.
・Something that corrode solder must not enter.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
F < 40N
θ<5deg.
Dust
Solder corrosion
Recommendation：
SUS440C,t=0.2mm
9-2 Design Guide for Stylus-pen
➢This structure detects load force of pen tip as opposite direction.
➢Therefore impact stress doesn’t apply directly to the sensor projection.
➢Spring is recommended below.
Coil spring
➢Displacement is limited to X[mm] by the stopper.
➢Limit the impact force applied to the sensor by the stopper.
Recommendation) Limit force : F < 8[N]
Spring constant : k[N/mm] , Displacement : X[mm]
F = kX < 8[N]
Pre-tension - F > 0[N]
➢Metal plate is recommended stainless steel.
e.g.) Metal plate : SUS440C
➢The output of sensor is changed as below figures.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
Force Sensor
Spring
Pre-tension < 8[N]
Metal plate
Nib
X
Stopper
Sensor Output[mV]
Load Force[N]
10. パッケージ寸法
Package dimensions
Dimension in millimeters Dimension in millimeters
Ref Min. Typ. Max. Ref Min. Typ. Max.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
0.17
0.20
0.23
B
1.50
1.60
1.70
F
0.37
0.40
0.43
A
1.90
2.00
2.10
E
0.53
0.56
0.59
D
0.62
0.66
0.70
H
0.53
0.56
0.59
C
0.18
0.20
0.22
G
1.17
1.20
1.23
J
1.37
1.40
1.43
I
Top view Side view Bottom view
11.電気特性
Electrical specifications
使用条件 Operating conditions
電気的仕様 Electrical specifications (T=25ºC)
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
ESD耐圧
ESD
Null Offset
動作荷重範囲
Sensitivity
感度
-55
Llim
オフセット電圧
[N]
最大定格荷重
Max Load Rating
Drbl
保存温度範囲
Storage temperature
寿命
+125
Durability
Tstr
[ºC]
電源電圧
Force range
[V]
Operating temperature
動作温度範囲
Sens
[mV/V/N]
Linearity
リニアリティー
Lin
[%FS]
V0
3.6
[Cycles]
1-8N,5Hz,
sine curve
-
+85
8
-
1.5
-
Frng
[N]
0
Vdd
Supplｙ voltage
定格電源電圧
Absolute limits supply voltage
-
HBM
[V]
-1000
-
-
-
40
+1000
Vlim
[V]
4.0
[ºC]
-40
[mV/V]
2.7
Symbol
-4.0
*FS:Full Span
-
4.7
-
2.0
3.7
-
1000k
Bridge Resistance
ブリッジ抵抗
Rbrg
[kΩ]
4.5
5.5
6.5
Item
最大定格 Absolute Maximum Ratings
Unit.
Notes
Specification
Typ.
max.
-
min.
-8
-4
0
-
Topr
*Null Offset : β
Linear fitting curve :
[Output] = [Force] x [Vdd] x α+ [Vdd] x β
Force [N]
Output [mV]
A
B
FS
*Linearity : (A+B)/FS x 100
*Sensitivity : α
12. 推奨ランドパターン
Recommended land pattern
基板搭載は基本的に実装機にて行って下さい。 補修などで手のせをする場合は、受圧部に
手や物が触れないようご注意下さい。
Basically devices shall be mounted by the mounting machine.
In case of manual mounting,do not touch knob.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
1.2mm
0.6mm
0.6mm
0.3mm
0.6mm
0.5mm
1.4mm
0.7mm
13. 推奨温度プロファイル
Recommended soldering conditions
ピーク温度： 250℃以下、10sec以内
Peak temperature： 250 ℃ or less, within 10 seconds.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
14. レーザーマーキング仕様
Laser marking specifications
Unit : mm
Identification number
1pin mark
A～Z
『●』 Fix
4
5
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
Laser Mark No
1
2
3
0 ~ 9, A ~ Z (00 ~ ZZ)
1～9, A, B, C
Content of indication
Indication item
Manufacturing No.
Production month
①
②
③
④
⑤
15. テープ&リール仕様
Tape & Reel specifications
15-1. Storage direction of the products
Direction of tape drawing out
15-2. Direction of tape drawing out
Direction of tape drawing out
15-3. Taping
15-4. Peel strength
- Peel strength of cover tape shall be 0.1N(10g)～0.7N(70g) for 300mm/min.
Peel direction of
Top cover tape
The emboss tape is fixed.
15-5. Top cover tape offset
Emboss tape
Top cover tape
・Overlay of cover tape to the hole (A) is allowed by 0.5mm
・Bulge of top cover tape (B) is allowed by 0.5mm
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
Trailer area
storage area
Empty area
Leader area
Cover tape area
End tape
More than 40 pockets
More than 40 pockets
400mm min.
160mm min.
160mm min.
Products
Emboss Tape
1Pin mark
15-6. Emboss Tape Dimensions (Unit mm)
15-7. Reel Dimensions (Unit : mm)
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
15-8. Packing
●For oversea
・This product is packed by tape wrapping (3,000 pcs/reel).
・The barcode label is put on each reel.
・One reel is stored in one Bag.
・15 bags are put in 1 carton (max.45,000pcs/carton)
・The cushion is stored in the top and bottom of the carton.
●For Japan
・This product is delivered by the taping wrapping (3,000 pcs/reel).
・This product is delivered by a non damp-proof packing.
・The barcode label is put on each reel.
・1 reel stored in the carton box. ( carton/with 3,000pcs)
●Recommended storage condition ●Damp-proof packing
MSL1 None
●Stacking height of carton ●Minimum Order Quantity、
・For oversea : Maximum 5cartons
Standard Packing Quantity
・For Japan : Maximum 10cartons
3,000 pcs
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
label
Bag
Cushion
Cushion
*Dimension of carton outside.
*Dimension of carton
16. Legal Disclaimer
1.
国内外の輸出関連法規により規制されている製品の輸出に際しては、同法規を遵守の上、
必要な許可、手続き等をとってください。
2.
軍事用途又はテロ等の反社会活動目的では、当製品を一切使用しないでください。
また、最終的にそれら用途・目的で使用されるおそれがある法人・団体・個人等へも当製品
を一切供給しないでください。
3.
当製品は、特に用途を指定していないかぎり、本来、AV、家電、事務機、情報機器、通信
機器、アミューズメント機器等の一般電子機器用に設計、製造されたものです。
したがいまして、原子力制御機器、宇宙・航空機で運行にかかわる機器等の用途では一切
使用しないでください。
上記の使用禁止の用途以外で、医療機器、防犯機器、防災機器、海底用機器等の高度の
安全性・信頼性を必要とする機器でのご使用の際は、弊社営業担当迄ご相談いただくか、
またはセットでの十分な適合性の確認を行っていただいた上で、フェールセーフ設計、保護
回路、冗長回路、誤動作防止設計、延焼対策設計等のセットでの安全対策設計を設けてく
ださい。
4. 車載対応製品以外の製品を車載用にご使用される場合は、事前に弊社へご相談ください。
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
For the export of products which are controlled items subject to foreign and domestic
export laws and regulations, you must obtain approval and/or follow the formalities of
such laws and regulations.
Products must not be used for military and/or antisocial purposes such as terrorism,
and shall not be supplied to any party intending to use the products for such purposes.
Unless provided otherwise, the products have been designed and manufactured for
application to equipment and devices which are sold to end-users in the market, such
as AV (audio visual) equipment, home electric equipment, office and commercial
electronic equipment, information and communication equipment or amusement
equipment. The products are not intended for use in, and must not be used for, any
application of nuclear equipment, driving control equipment for aerospace or any other
unauthorized use.
With the exception of the above mentioned banned applications, for applications
involving high levels of safety and liability such as medical equipment, burglar alarm
equipment, disaster prevention equipment and undersea equipment, please contact
an our company's sales representative and/or evaluate the total system on the
applicability. Also, implement a fail-safe design, protection circuit, redundant circuit,
malfunction protection and/or fire protection into the complete system for safety and
reliability of the total system.
Before using products which were not specifically designed for use in automotive
applications, please contact an our compnay's sales representative.
17. Notes concerning patent
当社では、当製品の構造を除いて、本資料における使用例を含めまして当製品の利
用に関し、第三者が保有する一切の特許等の知的財産権を侵害していないことにつ
いて保証しかねますので、貴社にて調査含めましてご対応くださるようお願いします。
Except for the structure of this product, Our company will not indemnify, defend and hold
harmless you from and against any third party’s intellectual properties rights such as
patents even if examples of use for this product are shown in this documents, you
shall do patent clearance search for your product incorporating this product.
Force Sensor
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HSFPAR003A_ Datasheet
Rev.1.8
Mar/28/2019
