Miniature Basic Pressure Sensors Offset Compensated Pressure Sensors Features * 0 to 1 "H2O to 0 to 30 "H2O Pressure Ranges * 0.5 % linearity * Offset Compensated Applications * Medical Instrumentation * Environmental Controls * HVAC General Description The Miniature BASIC series pressure sensors are based upon a proprietary technology to reduce the size of the sensor and yet maintain a high level of performance. The technology is currently being patented. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These offset compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage up to +6V is acceptable. Physical Dimensions 1-42 Environmental Specifications Pressure Sensor Characteristics Maximum Ratings Supply Supply Voltage VS 6 Vdc Temperature Ranges Common-mode pressure 5 psig Compensated Lead Temperature (soldering 2-4 sec.) 250C Operating 1 0 to 70 C -25 to 85 C Storage -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges Single in Line Packages-SIP Two Ports Same Side Two Ports Opposite Side Operating Pressure Part Number Part Number 0 - 1 "H2O 1 INCH-D1-BASIC 1 INCH-D2-BASIC One Port Part Number 1 INCH-G-BASIC 5 INCH-G-BASIC 0 - 5 "H2O 5 INCH-D1-BASIC 5 INCH-D2-BASIC 10 INCH-G-BASIC 0 - 10 "H2O 10 INCH-D1-BASIC 10 INCH-D2-BASIC 20 INCH-G-BASIC 0 - 20 "H2O 20 INCH-D1-BASIC 20 INCH-D2-BASIC 30 INCH-G-BASIC 0 - 30 "H2O 30 INCH-D1-BASIC 30 INCH-D2-BASIC Performance Characteristics for 1 INCH-x-BASIC Parameter, note 1 Minimum Operating Range, differential pressure Output Span, @ 1 "H2O, note 5 Nominal Maximum 1.0 4.0 7.0 Offset Voltage @ zero differential pressure Units "H2O 10.0 mV 10 mV Offset Temperature Shift (0C-70C), note 2 0.1 mV Offset Warm-up Shift, note 3 10 uV Offset Position Sensitivity (1g) 15 uV Offset Long Term Drift (one year) 80 uV Linearity, hysteresis error, note 4 0.1 1-43 0.5 %fs Performance Characteristics for 5 INCH-x-BASIC Parameter, note 1 Minimum Nominal 15 22.5 Maximum "H2O 5.0 Operating Range, differential pressure Output Span, @ 5 "H2O, note 5 Offset Voltage @ zero differential pressure Units 30 mV 10 mV Offset Temperature Shift (0C-70C), note 2 0.1 mV Offset Warm-up Shift, note 3 10 uV Offset Position Sensitivity (1g) 15 uV Offset Long Term Drift (one year) 80 uV Linearity, hysteresis error, note 4 0.1 0.5 %fs Nominal Maximum Units Performance Characteristics for 10 INCH-x-BASIC Parameter, note 1 Minimum "H2O 10.0 Operating Range, differential pressure Output Span, @ 10 "H2O, note 5 15 30 Offset Voltage @ zero differential pressure 145 mV 10 mV Offset Temperature Shift (0C-70C), note 2 0.1 mV Offset Warm-up Shift, note 3 10 uV Offset Position Sensitivity (1g) 10 uV Offset Long Term Drift (one year) 80 Linearity, hysteresis error, note 4 0.1 0.5 %fs Nominal Maximum Units uV Performance Characteristics for 20 INCH-x-BASIC Parameter, note 1 Minimum Operating Range, differential pressure 20.0 15 Output Span, @ 20 "H2O, note 5 30 Offset Voltage @ zero differential pressure "H2O 145 mV 10 mV Offset Temperature Shift (0C-70C), note 2 0.1 mV Offset Warm-up Shift, note 3 10 uV 5 uV Offset Position Sensitivity (1g) Offset Long Term Drift (one year) 80 Linearity, hysteresis error, note 4 0.1 1-44 uV 0.5 %fs Performance Characteristics for 5 INCH-x-BASIC Parameter, note 1 Minimum Nominal 15 22.5 Maximum "H2O 5.0 Operating Range, differential pressure Output Span, @ 5 "H2O, note 5 Offset Voltage @ zero differential pressure Units 30 mV 10 mV Offset Temperature Shift (0C-70C), note 2 0.1 mV Offset Warm-up Shift, note 3 10 uV Offset Position Sensitivity (1g) 15 uV Offset Long Term Drift (one year) 80 uV Linearity, hysteresis error, note 4 0.1 0.5 %fs Nominal Maximum Units Performance Characteristics for 10 INCH-x-BASIC Parameter, note 1 Minimum "H2O 10.0 Operating Range, differential pressure Output Span, @ 10 "H2O, note 5 15 30 Offset Voltage @ zero differential pressure 145 mV 10 mV Offset Temperature Shift (0C-70C), note 2 0.1 mV Offset Warm-up Shift, note 3 10 uV Offset Position Sensitivity (1g) 10 uV Offset Long Term Drift (one year) 80 Linearity, hysteresis error, note 4 0.1 0.5 %fs Nominal Maximum Units uV Performance Characteristics for 20 INCH-x-BASIC Parameter, note 1 Minimum Operating Range, differential pressure 20.0 15 Output Span, @ 20 "H2O, note 5 30 Offset Voltage @ zero differential pressure "H2O 145 mV 10 mV Offset Temperature Shift (0C-70C), note 2 0.1 mV Offset Warm-up Shift, note 3 10 uV 5 uV Offset Position Sensitivity (1g) Offset Long Term Drift (one year) 80 Linearity, hysteresis error, note 4 0.1 1-45 uV 0.5 %fs 1