High Stability, Low Noise
Vibration Rejecting Yaw Rate Gyroscope
Data Sheet
ADXRS646
Rev. B Document Feedback
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FEATURES
12°/hr bias stability
Z-axis (yaw rate) response
0.01°/√sec angle random walk
High vibration rejection over wide frequency
Measurement range extendable to a maximum of ±450°/sec
10,000 g powered shock survivability
Ratiometric to referenced supply
6 V single-supply operation
−40°C to +105°C operation
Self-test on digital command
Ultrasmall and light (<0.15 cc, <0.5 gram)
Temperature sensor output
Complete rate gyroscope on a single chip
RoHS compliant
APPLICATIONS
Industrial applications
Severe mechanical environments
Platform stabilization
GENERAL DESCRIPTION
The ADXRS646 is a high performance angular rate sensor
(gyroscope) that offers excellent vibration immunity. Bias
stability is a widely-recognized figure of merit for high
performance gyroscopes, but in real-world applications,
vibration sensitivity is often a more significant performance
limitation and should be considered in gyroscope selection. The
ADXRS646 offers superior vibration immunity and acceleration
rejection as well as a low bias drift of 12°/hr (typical), enabling it
to offer rate sensing in harsh environments where shock and
vibration are present.
The ADXRS646 is manufactured using the Analog Devices,
Inc., patented high volume BiMOS surface-micromachining
process. An advanced, differential, quad sensor design provides
the improved acceleration and vibration rejection. The output
signal, RATEOUT, is a voltage proportional to angular rate
about the axis normal to the top surface of the package. The
measurement range is a minimum of ±250°/sec. The output is
ratiometric with respect to a provided reference supply. Other
external capacitors are required for operation.
A temperature output is provided for compensation techniques.
Two digital self-test inputs electromechanically excite the sensor
to test proper operation of both the sensor and the signal condi-
tioning circuits.
The ADXRS646 is available in a 7 mm × 7 mm × 3 mm CBGA
chip-scale package.
FUNCTIONAL BLOCK DIAGRAM
Figure 1.
V
DD
AGND
PGND
AV
CC
ST2 ST1 TEMP V
RATIO
R
OUT
CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT
DEMOD
180kΩ ±1%
22nF 100nF
22nF
100nF
100nF
100nF
DRIVE
AMP
MECHANICAL
SENSOR
CHARGE P UMP
AND VO LTAGE
REGULATOR
C
OUT
6V
6V
3V TO 6V
(ADC REF )
AC
AMP
VGA
25kΩ
@ 25°C
ADXRS646
25kΩ
SELF-TEST
09771-001
ADXRS646 Data Sheet
Rev. B | Page 2 of 12
TABLE OF CONTENTS
Features .............................................................................................. 1
Applications ....................................................................................... 1
General Description ......................................................................... 1
Functional Block Diagram .............................................................. 1
Revision History ............................................................................... 2
Specifications ..................................................................................... 3
Absolute Maximum Ratings ............................................................ 4
Rate Sensitive Axis ....................................................................... 4
ESD Caution .................................................................................. 4
Pin Configuration and Function Descriptions ............................. 5
Typical Performance Characteristics ............................................. 6
Theory of Operation .........................................................................9
Setting Bandwidth .........................................................................9
Temperature Output and Calibration .........................................9
Supply Ratiometricity ................................................................ 10
Null Adjustment ......................................................................... 10
Self-Test Function ...................................................................... 10
Continuous Self-Test .................................................................. 10
Modifying the Measurement Range ........................................ 10
Immunity to Vibration .............................................................. 11
Outline Dimensions ....................................................................... 12
Ordering Guide .......................................................................... 12
REVISION HISTORY
1/14—Rev. A to Rev. B
Changes to Table 1 ............................................................................ 3
Changes to Figure Captions, Typical Performance
Characteristics Section ..................................................................... 6
Replaced Figure 8 ............................................................................. 6
Changes to Continuous Self-Test Section ................................... 10
9/12—Rev. 0 to Rev. A
Changes to Figure 1 .......................................................................... 1
Changes to Figure 9 .......................................................................... 6
9/11—Revision 0: Initial Version
Data Sheet ADXRS646
Rev. B | Page 3 of 12
SPECIFICATIONS
All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed.
TA = 25°C, VS = AVCC = VDD = 6 V, V RATIO = AVCC, angular rate = 0°/sec, bandwidth = 80 Hz (COUT = 0.01 µF), IOUT = 100 µA, ±1 g, unless
otherwise noted.
Table 1.
Parameter Test Conditions/Comments Min Typ Max Unit
SENSITIVITY1 Clockwise rotation is positive output
Measurement Range2 Full-scale range over specifications range ±250 ±300 °/sec
Initial 8.5 9 9.5 mV/°/sec
Temperature Drift3 ±6.5 %
Nonlinearity Best fit straight line 0.01 % of FS
NULL1
Null −40°C to +105°C 2.7 3.0 3.3 V
Temperature Drift3 ±3 °/sec
Linear Acceleration Effect Any axis 0.015 °/sec/g
Vibration Rectification 25 g rms, 50 Hz to 5 kHz 0.0001 °/sec/g2
NOISE PERFORMANCE
Rate Noise Density TA ≤ 25°C 0.01 °/sec/√Hz
Rate Noise Density TA ≤ 105°C 0.015 °/sec/√Hz
Resolution Floor TA = 25
°
C, 1 minute to 1 hour in-run 12 °/hr
FREQUENCY RESPONSE
Bandwidth4 ±3 dB user adjustable up to specification 1000 Hz
Sensor Resonant Frequency
15.5
17.5
20
kHz
SELF-TEST1
ST1 RATEOUT Response ST1 pin from Logic 0 to Logic 1 −50 °/sec
ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 50 °/sec
ST1 to ST2 Mismatch5 −5 ±0.5 +5 %
Logic 1 Input Voltage ST1 pin or ST2 pin 4 V
Logic 0 Input Voltage 2 V
Input Impedance ST1 pin or ST2 pin to common 40 50 100 kΩ
TEMPERATURE SENSOR1
VOUT at 25°C Load = 10 MΩ 2.8 2.9 3.0 V
Scale Factor6 25°C, VRATIO = 6 V 10 mV/°C
Load to V
S
25
kΩ
Load to Common 25 kΩ
TURN-ON TIME6 Power on to ±0.5°/sec of final with CP5 = 100 nF 50 ms
OUTPUT DRIVE CAPABILITY
Current Drive For rated specifications 200 µA
Capacitive Load Drive 1000 pF
POWER SUPPLY
Operating Voltage (VS) 5.75 6.00 6.25 V
Quiescent Supply Current 4 mA
TEMPERATURE RANGE
Specified Performance −40 +105 °C
1 Parameter is linearly ratiometric with VRATIO.
2 Measurement range is the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies.
3 From +25°C to −40°C or +25°C to +105°C.
4 Adjusted by external capacitor, COUT. Reducing bandwidth below 0.01 Hz does not result in further noise improvement.
5 Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2).
6 Based on characterization.
ADXRS646 Data Sheet
Rev. B | Page 4 of 12
ABSOLUTE MAXIMUM RATINGS
Table 2.
Parameter Rating
Acceleration (Any Axis, 0.5 ms)
Unpowered
10,000 g
Powered 10,000 g
VDD, AVCC −0.3 V to +6.6 V
VRATIO AVCC
ST1, ST2 AVCC
Output Short-Circuit Duration
(Any Pin to Common)
Indefinite
Operating Temperature Range −55°C to +125°C
Storage Temperature Range −65°C to +150°C
Stresses above those listed under the Absolute Maximum
Ratings may cause permanent damage to the device. This is a
stress rating only; functional operation of the device at these or
any other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
Drops onto hard surfaces can cause shocks of greater than
10,000 g and can exceed the absolute maximum rating of the
device. Care should be exercised in handling to avoid damage.
RATE SENSITIVE AXIS
This is a Z-axis rate-sensing device (also called a yaw rate-
sensing device). It produces a positive going output voltage
for clockwise rotation about the axis normal to the package
top, that is, clockwise when looking down at the package lid.
Figure 2. RATEOUT Signal Increases with Clockwise Rotation
ESD CAUTION
RATE
AXIS
LONGITUDINAL
AXIS
LATERAL AX IS
+
ABCD G 1
7
EF
A1
RATE OUT
RATE IN
4.75V
0.25V
AV
CC
= 5V
V
RATIO
/2
GND
09771-002
Data Sheet ADXRS646
Rev. B | Page 5 of 12
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
Figure 3. Pin Configuration
Table 3. Pin Function Descriptions
Pin No. Mnemonic Description
6D, 7D CP5 HV Filter Capacitor, 100nF (±5%).
6A, 7B CP4 Charge Pump Capacitor, 22 nF (±5%).
6C, 7C
CP3
Charge Pump Capacitor, 22 nF (±5%).
5A, 5B CP1 Charge Pump Capacitor, 22 nF (±5%).
4A, 4B CP2 Charge Pump Capacitor, 22 nF (±5%).
3A, 3B AVCC Positive Analog Supply.
1B, 2A RATEOUT Rate Signal Output.
1C, 2C SUMJ Output Amp Summing Junction.
1D, 2D DNC Do Not Connect to this Pin.
1E, 2E VRATIO Reference Supply for Ratiometric Output.
1F, 2G AGND Analog Supply Return.
3F, 3G TEMP Temperature Voltage Output.
4F, 4G ST2 Self-Test for Sensor 2.
5F, 5G
ST1
Self-Test for Sensor 1.
6G, 7F PGND Charge Pump Supply Return.
6E, 7E VDD Positive Charge Pump Supply.
09771-003
PGND
ST1
ST2
TEMP
AGND V
RATIO
DNC SUMJ RATEOUT
AV
CC
CP2
CP1
CP4
CP3CP5V
DD
GFE D C BA
7
6
5
4
3
2
1
NOTES
1. DNC = DO NO T CO NNE CT T O T HIS PIN.
BOTTOM VIEW
ADXRS646 Data Sheet
Rev. B | Page 6 of 12
TYPICAL PERFORMANCE CHARACTERISTICS
N > 1000 for all typical performance plots, unless otherwise noted.
Figure 4. Null Bias at 25°C
Figure 5. Null Drift over Temperature
Figure 6. Null Output over Temperature, 16 Parts in Sockets
Figure 7. Sensitivity at 25°C
Figure 8. Sensitivity over Temperature, 16 Parts in Sockets
Figure 9. Typical Root Allan Deviation at 25°C vs. Averaging Time
30
0
5
10
15
20
25
PERCENT OF POPULATION (%)
RATE OUT ( V )
2.75
2.80
2.85
2.90
2.95
3.00
3.05
3.10
3.15
3.20
3.25
09771-004
30
0
5
10
15
20
25
PERCENT OF POPULATION (%)
DRIFT ( °/ sec/° C)
–0.30
–0.25
–0.20
–0.15
–0.10
–0.05
0
0.05
0.10
0.15
0.20
0.25
0.30
09771-005
3.5
2.5
2.6
2.7
2.8
2.9
3.0
3.1
3.2
3.3
3.4
NULL (V)
TEMPERATURE (°C)
–60 –40 –20 020 40 60 80 100 120 140
09771-100
35
30
25
20
15
10
5
0
PERCENT OF POPULATION (%)
SENSITIVI T Y (mV/° / sec)
8.5 8.6 8.7 8.8 8.9 9.0 9.1 9.2 9.3 9.4 9.5
09771-010
7.5
8.0
8.5
9.0
9.5
10.0
10.5
–50 –30 –10 10 30 50 70 90 110
SENSITIVITY (mV/°/sec)
TEMPERATURE ( °C)
09771-105
1k
100
1
10
ROOT ALLAN DE V IATI ON (°/ Hou r rms)
AVERAGING TIME (Seconds)
0.01 0.1 110 100 1k
09771-012
Data Sheet ADXRS646
Rev. B | Page 7 of 12
Figure 10. ST1 Output Change at 25°C
Figure 11. ST1 Output Change vs. Temperature, 16 Parts in Sockets
Figure 12. Self-Test Mismatch at 25°C
Figure 13. ST2 Output Change at 25°C
Figure 14. ST2 Output Change vs. Temperature, 16 Parts in Sockets
Figure 15. ADXRS646 Frequency Response with a 2.2 kHz Output Filter
25
0
5
10
15
20
PERCENT OF POPULATION (%)
ST1Δ (mV)
–650
–630
–610
–590
–570
–550
–530
–510
–490
–470
–450
–430
–410
–390
–370
–350
09771-006
–0.30
–0.35
–0.40
–0.45
–0.50
–0.55
–0.60
–0.65
–0.70
–0.75
ST1Δ (V)
TEMPERATURE (°C)
–60 –40 –20 020 40 60 80 100 120 140
09771-104
70
60
50
40
30
20
10
0
PERCENT OF POPULATION (%)
MI S M ATCH (%)
–4 –3 –2 –1 01234
09771-008
25
0
5
10
15
20
PERCENT OF POPULATION (%)
ST2Δ (mV)
350
370
390
410
430
450
470
490
510
530
550
570
590
610
630
650
09771-007
0.75
0.30
0.35
0.40
0.45
0.50
0.55
0.60
0.65
0.70
ST2Δ (V)
TEMPERATURE (°C)
–60 –40 –20 020 40 60 80 100 120 140
09771-103
9
–18
–15
–12
–9
–6
–3
0
3
6
0
–90
–80
–70
–60
–50
–40
–30
–20
–10
MAGNITUDE RESPONSE (dB)
PHASE RE S P ONSE ( Degrees)
FRE QUENCY ( kHz )
0.1 110
09771-101
C
OUT
= 470pF
MAGNITUDE
PHASE
ADXRS646 Data Sheet
Rev. B | Page 8 of 12
Figure 16. VTEMP Output at 25°C
Figure 17. VTEMP Output vs. Temperature
Figure 18. Current Consumption at 25°C
80
70
60
50
40
30
20
10
0
PERCENT OF POPULATION (%)
VTEMP OUTPUT (V)
2.70
2.75
2.80
2.85
2.90
2.95
3.00
3.05
3.10
3.15
3.20
3.25
3.30
09771-009
4.5
0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
V
TEMP
(V)
TEMPERATURE (°C)
–100 –50 050 100 150
09771-102
35
30
25
20
15
10
5
0
PERCENT OF POPULATION (%)
CURRENT CONSUMP TI ON (mA)
2.8 2.9 3.0 3.1 3.2 3.3 3.4
09771-013
Data Sheet ADXRS646
Rev. B | Page 9 of 12
THEORY OF OPERATION
The ADXRS646 operates on the principle of a resonator
gyroscope. Figure 19 shows a simplified version of one of
four polysilicon sensing structures. Each sensing structure
contains a dither frame that is electrostatically driven to
resonance. This produces the necessary velocity element to
produce a Coriolis force when experiencing angular rate. The
ADXRS646 is designed to sense a Z-axis (yaw) angular rate.
When the sensing structure is exposed to angular rate, the
resulting Coriolis force couples into an outer sense frame,
which contains movable fingers that are placed between fixed
pickoff fingers. This forms a capacitive pickoff structure that
senses Coriolis motion. The resulting signal is fed to a series of
gain and demodulation stages that produce the electrical rate
signal output. The quad sensor design rejects linear and angular
acceleration, including external g-forces, shock, and vibration.
The rejection is achieved by mechanically coupling the four
sensing structures such that external g-forces appear as
common-mode signals that can be removed by the fully
differential architecture implemented in the ADXRS646.
Figure 19. Simplified Gyroscope Sensing Structure—One Corner
The electrostatic resonator requires 21 V for operation. Because
only 6 V are typically available in most applications, a charge
pump is included on chip. If an external 21 V supply is
available, the two capacitors on CP1 to CP4 can be omitted,
and this supply can be connected to CP5 (Pin 6D, Pin 7D).
CP5 should not be grounded when power is applied to the
ADXRS646. No damage occurs, but under certain conditions,
the charge pump may fail to start up after the ground is removed
without first removing power from the ADXRS646.
SETTING BANDWIDTH
The combination of an external capacitor (COUT) and the
on-chip resistor (ROUT) creates a low-pass filter that limits the
bandwidth of the ADXRS646 rate response. The −3 dB
frequency set by ROUT and COUT is
fOUT = 1/(2 × π × ROUT × COUT)
and can be well controlled because ROUT is trimmed during
manufacturing to 180 kΩ ± 1%. Any external resistor applied
between the RATEOUT pin (1B, 2A) and SUMJ pin (1C, 2C)
results in
ROUT = (180 kΩ × REXT)/(180 kΩ + REXT)
An additional external filter is often added (in either hardware
or software) to attenuate high frequency noise arising from
demodulation spikes at the 18 kHz resonant frequency of the
gyroscope. An RC output filter consisting of a 3.3 kΩ series
resistor and 22 nF shunt capacitor (2.2 kHz pole) is
recommended.
TEMPERATURE OUTPUT AND CALIBRATION
It is common practice to temperature-calibrate gyroscopes
to improve their overall accuracy. The ADXRS646 has a
temperature-dependent voltage output that provides input
to such a calibration method. The temperature sensor structure
is shown in Figure 20. The temperature output is characteristi-
cally nonlinear, and any load resistance connected to the
TEMP output results in decreasing the TEMP output and its
temperature coefficient. Therefore, buffering the output is
recommended.
The voltage at TEMP (3F, 3G) is nominally 2.9 V at 25°C, and
VRATIO = 6 V. T he temperature coefficient is 10 mV/°C (typical)
at 25°C; the output response over the full temperature range is
shown in Figure 17. Although the TEMP output is highly
repeatable, it has only modest absolute accuracy.
Figure 20. Temperature Sensor Structure
X
Y
Z
09771-015
V
RATIO
V
TEMP
R
FIXED
R
TEMP
09771-016
ADXRS646 Data Sheet
Rev. B | Page 10 of 12
SUPPLY RATIOMETRICITY
The null output voltage (RATEOUT), sensitivity, self-test
responses (ST1 and ST2), and temperature output (TEMP)
of the ADXRS646 are ratiometric to VRATIO. Therefore, using
the ADXRS646 with a supply-ratiometric ADC results in self-
cancellation of errors resulting from minor supply variations.
There remains a small, usually negligible, error due to non-
ratiometric behavior. Note that, to guarantee full measurement
range, VRATIO should not be greater than AVCC.
NULL ADJUSTMENT
The nominal 3.0 V null output voltage is true for a symmetrical
swing range at RATEOUT (1B, 2A). However, an asymmetric
output swing may be suitable in some applications. Null adjust-
ment is possible by injecting a suitable current to SUMJ (1C, 2C).
Note that supply disturbances may cause some null instability.
Digital supply noise should be avoided, particularly in this case.
SELF-TEST FUNCTION
The ADXRS646 includes a self-test feature that actuates each
of the sensing structures and associated electronics in the same
manner as if the gyroscope were subjected to angular rate.
Self-test is activated by applying the standard logic high level ST1
pin (5F, 5G), the ST2 pin (4F, 4G), or both. Applying a logic high
to Pin ST1 causes the voltage at RATEOUT to change by −450 mV
(typical), and applying a logic high to Pin ST2 causes an opposite
change of +450 mV (typical). The voltage applied to the ST1 and
ST2 pins must never be greater than AVCC. The self-test response
follows the temperature dependence of the viscosity of the
package atmosphere, approximately 0.25%/°C.
Activating both ST1 and ST2 simultaneously is not damaging.
The output responses generated by ST1 and ST2 are closely
matched (±2%), but actuating both simultaneously may result
in a small apparent null bias shift proportional to the degree of
self-test mismatch.
CONTINUOUS SELF-TEST
The on-chip integration of the ADXRS646, as well as the
mature process with which it is manufactured, have provided
the gyroscope with field-proven reliability.
As an additional failure detection measure, self-test can be
performed at power-up or occasionally during operation. However,
some applications may require continuous self-test while sensing
rotation rate.
MODIFYING THE MEASUREMENT RANGE
The ADXRS646 scale factor can be reduced to extend the
measurement range to as much as ±450°/sec by adding a
single 225 kΩ resistor between RATEOUT and SUMJ. If
an external resistor is added between RATEOUT and SUMJ,
COUT must be proportionally increased to maintain correct
bandwidth.
Data Sheet ADXRS646
Rev. B | Page 11 of 12
IMMUNITY TO VIBRATION
Gyroscopes are designed to respond only to rotation. However,
all gyroscopes respond to linear motion as well, to varying
degrees. While bias stability is often used as the primary figure
of merit for evaluating high performance gyroscopes, many
additional error sources are present in real-world applications.
Especially in applications that require motion sensors, vibration
and acceleration are present, and the resulting errors often
overwhelm bias drift.
Its differential, quad-sensor design makes the ADXRS646
inherently resistant to vibration, without the need for
compensation. The excellent vibration immunity of the
ADXRS646 is demonstrated in Figure 21 and Figure 22.
Figure 21 shows the ADXRS646 output response with and
without random 15 g rms vibration applied at 20 Hz to 2 kHz.
Performance is similar regardless of the direction of input
vibration.
Figure 21. ADXRS646 Output Response With and Without Random Vibration
(15 g RMS, 20 Hz to 2 kHz); Gyroscope Bandwidth Set to 1600 Hz
To further improve immunity to vibration and acceleration,
some g-sensitivity compensation can be performed using an
accelerometer. This technique is most successful when the
response to vibration is constant regardless of vibration
frequency. Figure 22 demonstrates the ADXRS646 dc bias
response to a 5 g sinusoidal vibration over the 20 Hz to 5 kHz
range. This figure shows that there are no sensitive frequencies
present and that vibration rectification is vanishingly small.
Accordingly, g-sensitivity compensation using an accelerometer
is possible where needed, but the inherent device performance
is sufficient for many applications.
Figure 22. ADXRS646 Sine Vibration Output Response (5 g, 20 Hz to 5 kHz);
Gyroscope Bandwidth Set to 1600 Hz
1
0.1
0.01
0.001
0.0001
0.00001
(°/sec)
2
/ Hz
FRE QUENCY ( Hz )
10 100 1k 10k
09771-017
WITH VIBRATION
NO VIBRATION
0.12
–0.04
–0.02
0
0.02
0.04
0.06
0.08
0.10
(°/sec)
FRE QUENCY ( Hz )
10 100 1k 10k
09771-018
ADXRS646 Data Sheet
Rev. B | Page 12 of 12
OUTLINE DIMENSIONS
Figure 23. 32-Lead Ceramic Ball Grid Array [CBGA]
(BG-32-3)
Dimensions shown in millimeters
ORDERING GUIDE
Model1 Temperature Range Package Description Package Option
ADXRS646BBGZ –40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3
ADXRS646BBGZ-RL –40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3
EVAL-ADXRS646Z Evaluation Board
1 Z = RoHS Compliant Part.
A
B
C
D
E
F
G
7 6 5 4 3
TOP VI EW
3.80 M AX
DETAI L A
BALL DIAM E TER
0.60
0.55
0.50
0.60 M AX
0.25 M IN
COPLANARITY
0.15
2 1
*A1 CORNE R
INDE X ARE A
3.20 M AX
2.50 M IN
*BALL A1 IDE NTI FI E R IS GOLD PLAT E D AND CONNECTED
TO THE D/A PAD INT E RNALL Y V IA HOLES .
7.05
6.85 S Q
6.70
A1 BALL
CORNER
BOTTOM VIEW
DETAIL A
0.80
BSC
4.80
BSC SQ
SEATING
PLANE
07-11-2012-B
©2011–2014 Analog Devices, Inc. All rights reserved. Trademarks and
registered trademarks are the property of their respective owners.
D09771-0-1/14(B)
