High Performance Flow Sensor Module
FS2012 Series
Datasheet
© 2018 Integrated Device Technology, Inc.
1
August 24, 2018
Description
The FS2012 mass flow sensor module measures the flow across a
sensing surface using the thermo-transfer (calorimetric) principle.
The FS2012 is capable of measuring gas or liquid medium.
The FS2012 offers key advantages over other flow solutions. The
sensor utilizes series of MEMS thermocouples, which provide
excellent signal-to-noise ratio. The solid thermal isolation along
with the silicon-carbide film coating offers excellent abrasive wear
resistance and long-term reliability.
The high temperature material used in the flow channel housing
and base allows for a wide operating temperature.
Wetted materials consist of a glass fiber-reinforced PA66 resin,
epoxy, and silicon carbide.
Typical Applications
Process controls and monitoring
Oil and gas leak detection
HVAC and air control systems
CPAP and respiratory devices
Liquid dispensing systems
Features
Gas or liquid mediums
Robust solid isolation technology
Resistant to surface contamination
No cavity to cause clogging
Resistant to vibration and pressure shock
Low-power application
High-temperature flow housing
Analog output: 0V to 5V
Digital output: I2C
Supply voltage: 5V
Module operating temperature range: 0°C to +85°C
52.8 x 24.0 mm module with 6-pin header
FS2012 Flow Sensor Module
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
2
August 24, 2018
Contents
1. Pin Assignments ...........................................................................................................................................................................................3
2. Pin Descriptions ............................................................................................................................................................................................3
3. Absolute Maximum Ratings ..........................................................................................................................................................................4
4. Operating Conditions ....................................................................................................................................................................................4
5. Electrical Characteristics ..............................................................................................................................................................................5
6. Functional Description ..................................................................................................................................................................................6
7. I2C Sensor Interface .....................................................................................................................................................................................6
7.1 Sensor Slave Address .........................................................................................................................................................................6
7.2 Data Read ...........................................................................................................................................................................................6
8. Calculating Flow Sensor Output ...................................................................................................................................................................6
9. Analog Output ...............................................................................................................................................................................................7
10. Package Drawings and Land Pattern ...........................................................................................................................................................8
11. Ordering Information .....................................................................................................................................................................................8
12. Revision History ............................................................................................................................................................................................9
List of Figures
Figure 1. Pin Assignments for Module – Top View .............................................................................................................................................3
Figure 2. Analog Output Example .......................................................................................................................................................................7
List of Tables
Table 1. Pin Descriptions ...................................................................................................................................................................................3
Table 2. Absolute Maximum Ratings .................................................................................................................................................................4
Table 3. Operating Conditions ...........................................................................................................................................................................4
Table 4. Electrical Characteristics .....................................................................................................................................................................5
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
3
August 24, 2018
1. Pin Assignments
Figure 1. Pin Assignments for Module – Top View
2. Pin Descriptions
Table 1. Pin Descriptions
Pin Number
Pad Name
Description
1
VIN
Supply voltage
2
SDA
Serial data
3
SCL
Serial clock
4
GND
Ground
5
MOSI
Do not connect
6
VOUT
Analog output
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
4
August 24, 2018
3. Absolute Maximum Ratings
The absolute maximum ratings are stress ratings only. Stresses greater than those listed below can cause permanent damage to the device.
Functional operation of the FS2012 at absolute maximum ratings is not implied. Exposure to absolute maximum rating conditions may affect
device reliability.
Table 2. Absolute Maximum Ratings
Symbol
Parameter
Conditions
Minimum
Maximum
Units
VIN
Supply Voltage
-0.3
5.5
V
TSTOR
Storage Temperature
-50
130
°C
PBURST
Burst Pressure
10
bar
4. Operating Conditions
Table 3. Operating Conditions
Symbol
Parameter
Minimum
Typical
Maximum
Units
VIN
Supply Voltage
4.75
5.0
5.25
V
TAMB
Ambient Operating Temperature
0
–
85
°C
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
5
August 24, 2018
5. Electrical Characteristics
Table 4. Electrical Characteristics
Note: See important notes at the end of the table.
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
IVIN
Current Consumption
30
mA
Gas Flow[a], [c], [d], [d]
FNG
Gas Flow Range
FS2012-1020-NG
0.015
2
(2000)
SLPM
(SCCM)
FS2012-1100-NG
0.015
10
(10000)
SLPM
(SCCM)
ENG
Flow Accuracy
FS2012-1020-NG; 0.2 to 2 SLPM,
at 25°C
±2
±5
% Reading
FS2012-1100-NG; 1 to 10 SLPM,
at 25°C
VOUT_ANG
Analog Voltage Output
Min to Max of Flow Range
0
–
5
V
OFFZERO_NG
Analog Zero Offset
0.03
0.045
0.05
V
tSAMPLE_G
Gas Sample Rate
Per measurement
0.4096
Sec
Liquid Flow[a], [b], [c], [d], [d]
FLQ
Liquid Flow
FS2012-1001-LQ
0.025
0.5
(500)
SLPM
(SCCM)
FS2012-1002-LQ
0.025
1.0
(1000)
SLPM
(SCCM)
ELQ
Flow Accuracy
FS2012-1001-LQ; 25 to 500 SCCM, at
25°C
±2
±6
% Reading
FS2012-1002-LQ; 50 to 1000 SCCM, at
25°C
VOUT_ALQ
Analog Voltage Output
Min to Max of Flow Range
0
—
5
V
OFFZERO_LQ
Zero Offset
0.03
0.045
0.05
V
tSAMPLE_L
Liquid Sample Rate
Per measurement
0.7168
Sec
[a] Direction of flow is from P1 In to P2 Out.
[b] Board circuitry is not protected from liquids.
[c] SLPM: Standard liter per minute.
[d] SCCM: Standard cubic centimeter per minute.
[e] Standard Flow Controller Reference: 25°C, 1atm.
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
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August 24, 2018
6. Functional Description
The FS2012 digital flow sensor accurately measures the mass flow rate of a liquid or gaseous medium across the sensor using the calorimetric
principle.
The MEMS flow sensor comprises a resistive heater and two clusters of thermocouples (thermopiles), each positioned symmetrically upstream
and downstream of the heater. The thermopile output changes according to the rate of flow, and it is proportional to the amount of heat sensed
from the heater.
7. I2C Sensor Interface
The FS2012 operates as a slave device via the digital I2C compatible communication protocol bus with support for 100kHz and 400kHz bit
rates. To accommodate multiple devices, the protocol uses two bi-directional open-drain lines: a Serial Data Line (SDA) and a Serial Clock Line
(SCL). Pull-up resistors to VDD are required. Several slave devices can share the bus, and multiple master devices on the same bus are
supported. If two or more masters attempt to initiate a data transfer simultaneously, an arbitration scheme is employed with a single master
always winning the arbitration. Note that it is not necessary to specify one device as the master in a system; any device that transmits a START
bit and a slave address becomes the master for the duration of that transfer.
7.1 Sensor Slave Address
The FS2012 default I2C address is 07HEX. The device will respond only to this address.
7.2 Data Read
The FS2012 is programmed to continuously output data to the I2C bus.
Number of bytes to read out: 2
First returned byte: MSB
Second returned byte: LSB
8. Calculating Flow Sensor Output
The entire output of the FS2012 is 2 bytes. The flow rate for gas and liquid parts is calculated as follows:
Output Data
Number of bytes to read out: 2
First returned byte: MSB
Second returned byte: LSB
Gas Part Configurations (-NG ending for part code number)
Conversion to SLPM
Flow in SLPM = [(MSB << 8) + LSB] / 1000
Liquid Part Configurations (-LQ ending for part code number)
Conversion to SCCM
Flow in SCCM = [(MSB << 8) + LSB] / 10
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
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August 24, 2018
Example:
Output data = 1F 2A (hex)
Then = (1F + 2A) = 1F2A = 7978 (decimal)
Flow (Liquid) = 7978/10 = 797.80 SCCM
9. Analog Output
The voltage output is ratiometric to the full scale span. Use the following conversion for the range examples.
Gas (SLPM)
Typical OFFZERO_NG = 0.045V
0 to 2 SLPM: Flow = 0.4 [Output (V) – OFFZERO_NG]
0 to 10 SLPM: Flow = 2 [Output (V) – OFFZERO_NG]
Liquid (SCCM)
Typical OFFZERO_LQ = 0.045V
0 to 500 SCCM: Flow = 100 [Output (V) – OFFZERO_LQ]
0 to 1000 SCCM: Flow = 200 [Output (V) – OFFZERO_LQ]
Figure 2. Analog Output Example
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
8
August 24, 2018
10. Package Drawings and Land Pattern
The package outline drawings are appended at the end of this document and are accessible from the link below. The package information is
the most current data available.
https://www.idt.com/document/psc/fs2012-package-outline-drawing-5280-x-3317-mm-body-254-mm-pitch-mod0
11. Ordering Information
Note: The part code depends on the application. In the part code, NG refers to “non-corrosive gas” and LQ refers to “liquid.”
For NG parts, the calibration gas is nitrogen. Other calibration gases are available on request.
For LQ parts, the calibration fluid is DI water.
Orderable Part Number
Description and Package
Carrier Type
Temperature
FS2012-1020-NG
0 to 2 SLPM calibrated gas flow sensor mounted on a circuit
board with a flow housing; digital I2C and analog output
Box
0°C to +85°C
FS2012-1100-NG
0 to 10 SLPM calibrated gas flow sensor mounted on a circuit
board with a flow housing; digital I2C and analog output
Box
0°C to +85°C
FS2012-1001-LQ
0 to 0.5 SLPM (500 SCCM) calibrated liquid flow sensor mounted
on a circuit board with a flow housing; digital I2C and analog
output
Box
0°C to +85°C
FS2012-1002-LQ
0 to 1.0 SLPM (1000 SCCM) calibrated liquid flow sensor
mounted on a circuit board with a flow housing; digital I2C and
analog output
Box
0°C to +85°C
FS2012 Series Datasheet
© 2018 Integrated Device Technology, Inc.
9
August 24, 2018
12. Revision History
Revision Date
Description of Change
August 24, 2018
Update for Table 4.
Update for module drawing.
Add flow calculation example.
Minor edits .
September 11, 2017
Update for module width on page 1.
Update for module dimensions drawing.
Update for Table 4.
July 19, 2017
Initial release of the preliminary datasheet.
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