D6F-A1 MEMS Flow Sensor A Compact, High-accuracy Sensor That Measures Low Flow Rates. * High accuracy of 3% FS. * Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01A1-110 0 to 1 L/min Air 0 to 2 L/min 6.0 6.0 D6F-01A1-110 5.0 5.0 D6F-02A1-110 Accessory (included) Type Model Cable D6F-02A1-110 Model D6F-CABLE1 Output voltage (V) Flow rate range Output voltage (V) Applicable fluid 4.0 3.0 2.0 1.0 0.0 0.0 0.2 0.4 0.6 Flow rate (L/min) 0.8 1.0 4.0 3.0 2.0 1.0 0.0 0.0 0.4 0.8 1.2 Flow rate (L/min) 1.6 2.0 D6F-01A1-110 Connections D6F-01A1-110 D6F-02A1-110 Pin No. Connector 1: Vcc 2: Vout 3: GND 53398 (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 Tubes Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 12 mm and an inner diameter of 8 mm are recommended. 2: Vout 1: Vcc 3: GND Enlarged View 8 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 0.2 0.4 0.6 0.8 1.0 2.31 0.12 3.21 0.12 3.93 0.12 4.51 0.12 5.00 0.12 0.4 0.8 1.2 1.6 2.0 2.59 0.12 3.53 0.12 4.18 0.12 4.65 0.12 5.00 0.12 D6F-02A1-110 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 Measurement conditions: Power supply voltage of 120.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. D6F-A1 MEMS Flow Sensor Characteristics/Performance Model D6F-01A1-110 Flow Range (See note 1.) D6F-02A1-110 0 to 1 L/min 0 to 2 L/min. Calibration Gas (See note 2.) Air Flow Port Type Bamboo joint Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.42 kPa Operating Temperature (See note 4.) -10 to 60C 1.06 kPa Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 12.8 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) D6F-01A1-110 D6F-02A1-110 8.6 dia. 7.4 dia. 3.5-dia. through hole 15.1 4 Mounting Hole Dimensions R4 Two, M3 screws 8 66 300.1 41 300.05 (3.7) R1.75 4.5 (7.45) 9.5 280.05 R4.25 3.5 4 Through hole (6) 20 280.1 Cable (included): D6F-CABLE1 20035 20 10015 Brown wire Black wire 0.5 1. Vcc 2. Vout 4.5 6.5 Blue wire 3. GND 9