Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 PRECAUTIONS TO BE TAKEN WHEN USING MULTILAYER PIEZOELECTRIC ACTUATORS Please read these precautions before using our products 1. Before using our products or designing a system using our products, read the precautions and specificationssuch as level of qualityfor the products you intend to use on the last page of this manual. 2. The main failures with multilayer piezoelectric actuators are deterioration of insulation resistance, short-circuit, and open-circuit. Before using the products, design systems carefully to ensure redundancy, prevention of the spread of fire, and prevention of faulty operation allowing for the occurrence of failures. 3. Use the products after checking the working conditions and rated performance of each of the multilayer piezoelectric actuator series. Selection of AE seriesa resin-coated typeor ASB, ASL and AHB seriesa metal-sealed typeshould be based on the intended working temperature and humidity. All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 CONTENTS Resin coated type multilayer piezoelectric acutuators AE series ............................ 5 Metal sealed type multilayer piezoelectric actuators ................................................. ASB series85 rated , ASL series150 rated , AHB seriesHigh displacement model 11 Reliability ................................................................................................................. 19 Guide to use ............................................................................................................ 21 Precautions ............................................................................................................. 23 Multilayer Piezoelectric Actuators Vol.07 3 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 NEC TOKINs multilayer piezoelectric actuators are available in four series. Resin-coated type General-purpose 85 rated AE series Metal case type High-performance General-purpose 85 rated ASB series 150 rated ASL series High displacement model AHB series *AE series is resin-coated products. Therefore we recommend using metal case type, ASB, ASL and AHB series in high humidity condition. NEC TOKINs multilayer piezoelectric actuators are designed using unique element structure technology and using ceramic materials with high electrostrictive factors developed by NEC TOKIN. *For detail information of piezoelectric ceramic material, please refer to a catalogue of "Piezoelectric ceramics". Features Special ceramics developed by NEC TOKIN are used in piezoelectric ceramic elements. As compared with conventional actuator elements, NEC TOKINs multilayer piezoelectric actuators have advantages as follows. Insulator Direction of displacement Advantages over electromagnetic actuators Faster response High resolution for positioning Large generated force Low power consumption No electromagnetic noise Advantages over bimorph piezoelectric actuators High energy conversion efficiencyaround 7 times the energy conversion efficiency of the bimorph type actuator, and low power consumption Large generated force Stable displacement, and reduced shift and creep phenomena Response speedmore than 100 times the response speed of the bimorph piezoelectric actuator Advantages over stacked piezoelectric actuators Compact sizeless than 1/10 the specific volume of the stacked piezoelectric actuator Low drive voltage, and ease of use Inexpensive Internal electrode External electrode Ceramic Structure of NEC TOKINs Multilayer Piezoelectric Actuato 4 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Resin coated type multilayer piezoelectric actuators AE Series Outline Features Large generated force: 3,500 N/cm2typ. High-speed response: Driving up to about 1/3 of selfresonant frequencyin several ten kHzis possible. Accurate positioning: Controllable in nm order. Low power consumption: Can be retained at the leakage current state100A or less. Very small size: 1/10 or smaller than conventional multilayer actuatorsspecific volume Multilayer piezoelectric actuators are ceramic elements for converting electrical energy into mechanical energy such as displacement or force by utilizing the piezoelectric longitudinal effect. NEC TOKIN's multilayer piezoelectric actuators are produced based on our unique element structure design and using originally developed piezoelectric ceramic materials with high electrostrictive factors. Compared to conventional piezoelectric actuators, they are smaller in size but can generate higher displacement and force at low voltages. Especially, the resin-coated AE series actuators feature compact size and wide variety in shape for applications such as ultra-fine positioning mechanisms and drive sources. Applications Auto focusing of cell phone camera, Image stabilization of DSC, Positioning, Motors, Pumps, Valves, Vibration source, Vibration controls, Sensors, Mirror / Prism positioning, Manipulators, AFM, Printer, etc Numbering system Example: AE 0505 D16 XXX F Comply with RoHS *Compliant to RoHS directive in effect as of February, 2013 Additional codeoptional Example: H40Overall length is 40mm DThin coating type Nominal displacement: Indicated by two digits in micrometersm in succession to D Example: D1616m Ceramic cross section: Unit: Millimetersmm Example: 05055 mmx5 mm *Coating area is not include. Series name: AEResin-coated type Multilayer Piezoelectric Actuators Vol.07 5 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Standard Parts List Displacementm Model Maximum driving voltage 150VDC Overall length mm Generated force N Stiffness N/um Resonance frequency kHz Capacitance F Insulation resistance M 4.6 1.5 5 200 43.5 261 0.09 100 9.1 1.5 10 200 22.0 138 0.18 100 17.4 2.0 20 200 11.5 69 0.35 50 42.0 6.6 40 200 4.8 34 0.82 20 9.1 1.5 10 850 93.4 138 0.75 50 17.4 2.0 20 850 48.9 69 1.4 10 42.0 6.6 40 850 20.2 34 3.4 5 18.4 3.5 20 3,500 190.2 69 5.4 5 42.0 6.6 40 3,500 83.3 34 13.6 2 AE0203D04F AE0203D04DF AE0203D08F AE0203D08DF AE0203D16F AE0203D16DF AE0203D44H40F AE0203D44H40DF AE0505D08F AE0505D08DF AE0505D16F AE0505D16DF AE0505D44H40F AE0505D44H40DF AE1010D16F AE1010D16DF AE1010D44H40F AE1010D44H40DF AE1414D16F 18.4 3.5 20 7,000 380.4 69 10.8 2 AE2525D15F 15.6 2.0 20 20,000 1,282.0 69 30.5 0.4 *Tow coating types are available. AE D DF has thinner coating thickness. *For detail information of measurement conditions and outer dimension, please refer to "Performance" and "Outer Dimension" sections. Performance Item Standard Conditions Operating temperature range 25 to 85 When applied with a DC voltage: Ambient temperature When driven by an AC voltage: Ambient temperature + Temperature rise due to generated heat Recommended Storage condition 5 to 40 / less than 40%R.H Recommend storage at room temperature. No condensation. Maximum driving voltage 150VDC Displacement See the standard parts list At 150VDC See the standard parts list The force required for restricting the displacement to 0 when the maximum driving voltage is applied. Generated force compression resistance Capacitance See the standard parts list Capacitance allowance / 20 % Dissipation factor 5% or less f 1kHz, V 1Vrms Insulation resistance See the standard parts list Value obtained in 1 minute at 150 VDC Resonance frequency See the standard parts list With both ends of element in free state Typical value of the element under our test conditions Tensile strength 1/10 of generated force Typical value of the element under our test conditions Young's modulus 4.4 x 1010N/m2 Typical value of the element under our test conditions Temperature cycle test Displacement: Initial value 20% Capacitance: Initial value 30% tan: Less than initial rated value Insulation resistance: 1M or more Appearance: No noticeable defect Room temperature3 min -2530 min. Room temperature3 min +8530 min Repetition of 10 cycles of the above 6 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Outer Dimensions H Direction of displacement H W1 T1 W2 T2 Note: Factory-shipped polarization : Red lead wire , White lead wire Above drawings do not include dimension of wire Direction of displacement Overall length 40mm ProductAE D44H40F/DF Overall length 5,10 and 20mm Products W1 T1 W2 T2 connection area and diameter of the wire. Please contact us for details. Unitmm Model AE0203D04F AE0203D04DF AE0203D08F AE0203D08DF AE0203D16F AE0203D16DF AE0203D44H40F AE0203D44H40DF AE0505D08F AE0505D08DF AE0505D16F AE0505D16DF AE0505D44H40F AE0505D44H40DF AE1010D16F AE1010D16DF AE1010D44H40F AE1010D44H40DF T1 W1 H 2 0.1 3 0.1 5 0.1 2 0.1 3 0.1 10 0.1 2 0.1 3 0.1 20 0.1 2 0.1 3 0.1 40 0.1 5 0.1 5 0.1 10 0.1 5 0.1 5 0.1 20 0.1 5 0.1 5 0.1 40 0.1 10 0.1 10 0.1 20 0.1 10 0.1 10 0.1 40 0.1 T2 W2 3.5Max. 4.5Max. 2.4Max. 3.4Max. 3.5Max. 4.5Max. 2.4Max. 3.4Max. 3.5Max. 4.5Max. 2.4Max. 3.4Max. 3.5Max. 4.5Max. 2.4Max. 3.4Max. 6.5Max. 6.5Max. 5.4Max. 5.4Max. 6.5Max. 6.5Max. 5.4Max. 5.4Max. 6.5Max. 6.5Max. 5.4Max. 5.4Max. 11.5Max. 11.5Max. 10.4Max. 10.4Max. 11.5Max. 11.5Max. 10.4Max. 10.4Max. L 100 100 100 100 100 100 100 100 100 AE1414D16F 14.2 0.1 14.2 0.1 20 0.1 15.7Max. 15.7Max. 100 AE2525D15F 25.1 0.1 25.1 0.1 20 0.1 26.6Max. 26.6Max. 100 *L Length of lead wire Multilayer Piezoelectric Actuators Vol.07 7 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Wire diameter Unitmm Model Number L d D L AWG UL number 0.3 0.5 100 32 1993 0.3 0.5 100 32 1993 0.3 0.5 100 32 1993 0.3 0.5 100 32 1993 0.3 0.5 100 32 1993 0.5 0.8 100 26 1371 0.5 0.8 100 26 1371 0.5 0.8 100 26 1371 0.5 0.8 100 26 1371 AE0203D04F AE0203D08F D d AE0203D04DF AE0203D08DF d =Diameter of lead wire AE0203D16F D =Outer diameter including the thickness of coating AE0203D16DF AE0203D44H40F L =Length of lead wire AE0203D44H40DF Lead wire: Copper wire with Tin plating Coating: PTFEPolytetrafluoroethylene AE0505D08F AE0505D08DF AE0505D16F AE0505D16DF AE0505D44H40F AE0505D44H40DF AE1010D16F AE1010D16DF AE1010D44H40F AE1010D44H40DF AE1414D16F 0.5 0.8 100 26 1371 AE2525D15F 0.5 0.8 100 26 1371 Special Design Parts Non-standard parts are available per order basis. Please use the guideline below as reference regarding generated displacement and generated force. Displacement: Roughly proportional to the element length Generated force: Roughly proportional to the sectional area of the element Shape: Product cross-section: 1mmx1mm square or larger Product length: 1mm or longer Can be provided in cylindrical ring or other shapes. Please contact us for further details. Example of special design parts Ceramic Dimension AL1.65 x 1.65 x 5DF AE1.65 x 1.65 x 5DF 1.65 x 1.65 x 5mm 1.65 x 1.65 x 5mm Condition Maximum Operating VoltageV 10V 150VDC Displacement 300nm p-p 4m At maximum operating voltage CapacitancenF 90 43 f=1kHz, V=1Vrms Operating Temperature Small size piezo actuator 25 +85 8 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Characteristic Data Fig-1 Voltage vs. Displacement Fig-2 Generated force vs. Displacement of AE0505D16F in Driving voltage 50 20 16 Displacementm Displacementm AE0505D44H40 30 AE0505D16 20 AE0505D08 10 14 100V 12 10 8 Generated force 50V 6 4 AE0203D04 0 150V 18 40 0 50 VoltageV 100 2 0 150 0 200 Fig-3 Generated force vs. Displacement-1 400 600 Generated forceN Fig-4 Generated force vs. Displacement-2 Driving voltage: 150VDC Driving voltage: 150VDC 40 40 05 D4 4H F H40 D44 05 20 A E0 Displacementm AE 203 30 AE0203D04F AE0203D08F AE0203D16F 40 F 505D 10 AE0505D 16F 20 AE25 25D1 5F 10 0 30 08F 200 400 600 Generated forceN 800 1000 AE1010D16F AE1414D16F F 4H40 10D4 AE10 AE0 Displacementm 1000 50 50 0 800 0 0 10000 Generated forceN 20000 Fig-5 Temperature vs. Displacement 60 Driving voltage: 150VDC AE0505D44H40 Displacement 50 40 30 AE0505D16 20 AE0505D08 10 0 40 AE0203D04 20 0 20 40 Temperature 60 80 100 * Listed data are reference values. For the voltage vs. displacement characteristic, the same length of piezo series shows the same voltage vs. displacement characteristic. * Definition of generated force for Fig-2, Fig-3 and Fig-4; Force is the force required for restricting the displacement to 0 when the maximum driving voltage is applied. Multilayer Piezoelectric Actuators Vol.07 9 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Fig-7 Voltage vs. Displacement in time Fig-6 Temperature vs. Displacement 50 40 Displacement 30 L150 20 15 10 L150L0 5 0 Displacementm Displacementm 30 AE0505D16 5x5x20mm L0 5 0 20 75 VoltageV 150 L150L0 Ambient Temperature23 Model AE0505D16F 20 10 L150 10 0 0 L0 10 160 140 20 0 20 40 Temperature 60 80 Voltage 120 100 Voltage 20 40 100 80 60 40 20 0 20 20 1 kHz Heat generation 500 Hz Heat generation T 70 60 50 40 Timesec 60 80 100 Model: AE0505D16F Temperature measurement5 minutes later from operation 100 T 80 20 Fig-9 Heat generation vs. Drive frequency-2 Fig-8 Heat generation vs. Drive frequency-1 Driving signal waveform: Sine wave (150Vp-p) ModelAE0505D16F 0 80 Peak voltage DC bias 40 V 20 V 100 V 50 V 150 V 75 V Symbol 60 40 20 200 Hz 40 10 30 100 1000 Driving frequencyHz 100 Hz 20 50 Hz 10 0 100 200 Timesec 300 10 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Metal sealed type multilayer piezoelectric actuators ASB Series85C rated , ASL series150C rated , AHB seriesHigh displacement model Outline Features High reliability: Realization of MTTF 36,000 hours at 85 and 100 V Easier installation into equipments thanks to the built-in pre-load mechanism and mounting attachment Minimum mechanical abrasion Large generated force: 800 N Accurate positioning: Controllable in nm order Numbering system Multilayer piezoelectric actuators convert electrical energy into mechanical energy such as displacement or force by making use of the piezoelectric longitudinal effect. NEC TOKINs multilayer piezoelectric actuators are produced based on our unique element structure design by making use of originally developed piezoelectric ceramic materials with high electrostrictive factors. Compared to conventional piezoelectric actuators, they are smaller in size but can generate higher displacements and forces at low voltages. Especially, the metal sealed ASB/ASL and AHB series actuators are much less influenced by ambient humidity because of insulation from the atmosphere. As a result, long service life and high performance never experienced in the past have been attained to allow use in various applications such as semiconductor device production equipment and optical communication equipment which require high reliability. Applications Fine adjustment of various X-Y tables steppers, Mirror/prism positioning, Linear motors, Fluid flow control valve drive, Vibration source, Manipulators, etc. Example: AS B 170 C 801 N P 0 LF Comply with RoHS *Compliant to RoHS directive in effect as of February, 2013 New design No. Sequentially numbered starting from 0 Configuration of drive block PPlane, DV grooveRefer to page 14 for detail. Configuration of mount NFemale thread type FFlange typerefer to page 12 for details WWithout a flange Generated force Unit: NewtonN The first two digits are effective numerals. The last digit is an exponent of 10. Example: 801800 N80 kgf Maximum drive voltage C150 VDC Nominal displacement Unit: Micrometersm The first two digits are effective numerals. The last digit is an exponent of 10. Example: 17017m Construction of housing and operating temperature range BBellowspre-load, maximum operating temperature: 85 LBellowspre-load, maximum operating temperature: 150 Series name ASEncapsulated in metal case AHEncapsulated in metal caseHigh displacement model Multilayer Piezoelectric Actuators Vol.07 11 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Standard Parts List ASB series Model Displacementm Generated force N Resonance frequency kHz Capacitance F Insulation resistance M 17.0 3 800 14 1.5 30 34.0 6 800 12 3.0 15 51.0 9 800 10 4.5 10 68.0 12 800 8 6.0 5 20.0 3 200 37 0.5 100 Maximum driving voltage 150VDC ASB170C801 0LF ASB170C801W 1-A0LF ASB340C801 0LF ASB340C801W 1-A0LF ASB510C801 0LF ASB510C801W 1-A0LF ASB680C801 0LF ASB680C801W 1-A0LF ASB170C201WP1-A0LF *Note: in model number has "N" or "F" letter. in model number has "P" or "D" letter. ExampleASB170C801NP0LF, ASB510C801WD1-A0LF *Model number, ASB C801W 1-A1LF is the model without a flange. *For detail information of measurement conditions and outer dimension, please refer to "Performance" and "Outer Dimension" sections. ASL series Model Displacementm Maximum driving voltage 150VDC Generated force N Resonance frequency kHz Capacitance F Insulation resistance M ASL170C801 0LF 19.0 3 800 14 1.34 30 ASL340C801 0LF 39.0 6 800 12 2.55 15 ASL510C801 0LF 58.0 9 800 10 3.84 10 ASL680C801 0LF 77.0 12 800 8 5.07 5 Generated force N Resonance frequency kHz Capacitance F Insulation resistance M *Note: in model number has "N" or "F" letter. in model number has "P" or "D" letter. ExampleASL170C801FP0LF *No flange type is also available for ASL-series. Please contact us for detail. AHB series Model Displacementm Maximum driving voltage 150VDC AHB550C801 0LF 55.0 8 800 12 6.4 10 AHB700C801 0LF 70.0 15 800 8 8.2 5 AHB800C801 0LF 80.0 15 800 8 9.3 5 AHB800C302WD1-A0LF 80.0 15 3000 8 37.0 2 *Note: in model number has "N" or "F" letter. in model number has "P" or "D" letter. ExampleAHB800C801NP0LF *No flange type is also available for AHB-series. Please contact us for detail. *For detail information of measurement conditions and outer dimension, please refer to "Performance" and "Outer Dimension" sections. Flange type No flange type Product appearance example 12 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Performance Item Standard Conditions When applied with DC voltage: Ambient temperature When driven by pulse: Ambient temperature + Temperature rise due to generated heat Operating temperature range ASB/AHB : 25 to 85 ASL : 40 to 150 Recommended Storage condition 5 to 40 Maximum driving voltage 150VDC Displacement See the standard parts list At 150VDC See the standard parts list The force required for restricting the displacement to 0 when the maximum driving voltage is applied. Generated force compression resistance Capacitance See the standard parts list Capacitance tolerance / 20% Dissipation factor 5% or less Insulation resistance See the standard parts list Value obtained in 1 minute at 150 VDC Resonance frequency See the standard parts list With both ends of element in free state Typical value of the element under our test conditions Airtightness 1 x 10 8 atm cc/sec or less Temperature cycle test Displacement: Initial value 30% Capacitance: Initial value 30% tan : Less than initial rated value Insulation resistance: 1 M or more Appearance: No noticeable defect High-temperature shelf test Displacement: Initial value 30% Capacitance: Initial value 30% tan : Less than initial rated value Insulation resistance: 1 M or more Appearance: No noticeable defect Solvent resistance test Displacement: Initial value 30% Capacitance: Initial value 30% tan : Less than initial rated value Insulation resistance: 1 M or more Appearance: No noticeable defect Mark: Easily legible Solvent: Isopropyl alcohol Temperature: 23 5 Time: Immersion for 1 min Heat resistance test Displacement: Initial value 30% Capacitance: Initial value 30% tan : Less than initial rated value Insulation resistance: 1 M or more Appearance: No noticeable defect Mark: Easily legible Temperature: 150 3 Time: 96 4 h f 1kHz, V 1Vrms ASB, AHB ASL Room temperature3 min Room temperature3 min 2530 min 4030 min Room temperature3 min Room temperature3 min 8530 min 15030 min Repetition of 10 cycles of the above Temperature Time ASB, AHB: 85 2 ASL: 150 2 1,000 48 h Multilayer Piezoelectric Actuators Vol.07 13 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 DimensionsCommon to ASB, ASL and AHB Series Female thread type TOP VIEW 17 Enlarged of section A Model P type ASL170C801NP0LF 2.2 Direction of displacement 11.50.5 ASB340C801NP0LF D type Section A ASB170C801NP0LF ASL340C801NP0LF ASB510C801NP0LF ASL510C801NP0LF 90 ASB680C801NP0LF ASL680C801NP0LF L0.5 2.50.2 13010 2 190.5 [mm] 38.4 58.4 78.4 98.4 Model Lmm AHB550C801NP0LF 58.4 AHB700C801NP0LF 78.4 AHB800C801NP0LF 78.4 Both P type and D type have the same overall lengths 19.60.5 90.2 Lmm 17 Lead wire: AWG26, UL1371 Red color: White color: M4 screw of min. 3 deep Prepared hole of max. 5 deep BOTTOM VIEW Flange type Enlarged of section A TOP VIEW 17 Model P type ASL170C801FP0LF 2.2 ASB340C801FP0LF D type Direction of displacement 43.5 ASB170C801FP0LF ASL340C801FP0LF ASB510C801FP0LF 11.50.5 Section A 90 ASL510C801FP0LF ASB680C801FP0LF ASL680C801FP0LF L0.5 13010 2.50.2 2 [mm] 13.00.5 P.C.D.28 3.00.2 45 45 Lmm 32.4 52.4 72.4 92.4 Model Lmm AHB550C801FP0LF 52.4 AHB700C801FP0LF 72.4 AHB800C801FP0LF 72.4 Both P type and D type have the same overall lengths Lead wire: AWG26, UL1371 Red color: White color: 350.5 BOTTOM VIEW 14 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Without flange type TOP VIEW Enlarged of section A ASB340C801W 1-A0LF 44.4 ASL340C801W 1-A0LF D type Section A 24.4 ASL170C801W 1-A0LF 2.2 11.50.5 Lmm Model ASB170C801W 1-A0LF P type ASB510C801W 1-A0LF ASB680C801W 1-A0LF 84.4 L0.5 ASL680C801W 1-A0LF 51 1.50.2 Model Lmm AHB550C801W 1-A0LF 44.4 AHB700C801W 1-A0LF 64.4 AHB800C801W 1-A0LF 64.4 Note: in model number has "P" or "D" letter. 11.20.2 ExampleAHB800C801NP0LF. 130.5 1005 64.4 ASL510C801W 1-A0LF 90 Lead wire: AWG26, UL1371 Red color: White color: [mm] 7.20.2 BOTTOM VIEW ASB170C201WP1-A0LF AHB800C302WD1-A0LF TOP VIEW TOP VIEW 3.60.1 90 CO.5 MAX6.5 20.00.3 5.90.1 Section A 0.80.2 650.5 Lead wire: AWG32, UL1993 Red color: White color: 20.00.3 1.50.1 MAX8.2 24.50.5 2.00.1 2.6 Enlarged of section A CO. 20.1 0 0.1 L1000.5 6.6 Lead wire Lead wire (L=100) 1005 Lead wire (L=100) Lead wire 0.3 [mm] 21.60.1 51 0.5 0.5 19.50.1 51 0.8 Lead wire: AWG26, UL1371 Red color: White color: [mm] 12.70.1 BOTTOM VIEW Multilayer Piezoelectric Actuators Vol.07 15 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Example of fixing method for without flange type Metal sealed actuator (Without flange type) The base of the actuator should be settled to pedestal. Keep caution on the electrical insulation for the lead wire. Lead wire Characteristic Data ASB series 60 70 ASB680C801*P0 60 50 B6 AS 60 C8 10 40 30 20 C8 01 AS B3 ASB 40 ASB170C801*P0 0 50 100 0 0 01 *P 0 801*P 10 150 DC voltageV *P C8 170C 10 Displacement (m) Displacement (m) ASB340C801*P0 20 B5 0 30 AS *P ASB510C801 *P0 40 01 50 50 200 Crest value of voltage 150V (SIN waveform) DC bias : 75V ASB510C801*P0 Applied voltage 150VDC 80 Displacement (m) Fig-12 Drive frequency vs. Displacement Fig-11 Compression load vs. Displacement Fig-10 Voltage vs. Displacement 70 0 40 ASB340C801*P0 30 20 ASB170C801*P0 10 400 600 Generated forceN 0 10 800 100 1000 Drive frequencyHz Fig-15 Temperature vs. Insulation resistance Fig-14 DC bias vs. Capacitance Fig-13 Temperature vs. Displacement 6 60 5 ASB340C801*P0 20 4 ASB510C801*P0 3 ASB340C801*P0 2 ASB170C801*P0 ASB170C801*P0 -20 0 20 40 Temperature 60 80 0 108 ASB510C801*P0 107 10 1 10 0 Insulation resistance () 40 30 ASB170C801*P0 9 10 ASB510C801*P0 Capacitance (F) Displacement (m) 50 Measured voltage : 150VDC 1010 Measured frequency : 1kHz Applied voltage 150VDC 50 100 DC bias voltageV 150 6 -25 -15 -5 5 25 45 65 Temperature 85 105 125 16 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 ASL series performance compare with ASB series Fig-17 Temperature vs. Capacitance Fig-16 Temperature vs. Displacement 2500 50 CapacitancenF Displacementm 60 ASB510C801*** 40 30 ASL510C801*** 20 10 0 2000 ASB Type 1500 1000 ASL Type 500 0 -40 -20 0 20 80 100 40 60 Temperature 120 140 160 -40 -20 0 20 40 60 80 100 120 140 160 SAMPLE:5x5x20mm Temperature AHB series Fig-18 Voltage vs. Displacement Fig-19 Compression load vs. Displacement 100 100 90 AHB800C801 90 70 AHB700C801 60 50 40 AHB550C801 30 60 40 30 10 10 50 100 DC VoltageV 0 150 AHB700C801 50 20 0 AHB800C801 70 20 0 Voltage: 150VDC 80 Displacementm Displacementm 80 AHB550C801 0 200 400 600 800 1000 Generated ForceN Fig-20 Heat generation vs. Drive frequency 90 Model: AHB800C801NP0LF 0150Vp-p Surface temperature 80 70 0100Vp-p 60 050Vp-p 50 40 Driving waveform: SIN wave 0~Vp-p Temperature measurement 10 minutes after the device is in operation 30 20 0 100 200 300 400 Driving frequencyHz 500 600 Multilayer Piezoelectric Actuators Vol.07 17 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Application Example Semiconductor manufacturing system Positioning of stepper, Clamping actuator of wire bonding, Valve actuation of mass flow controller, Actuator of shaker, Actuator of damping system, Positioning of light source. Precision machinery, Mechatronics Sewing machine, Robot, Vibration of parts feeder, Positioning of equipment, Pressure sensor Home appliance, Audio equipment Actuator of pump, Speaker Imaging equipment Actuator of resolution improvement, Actuator of autofocusing, Actuator of damping Computer, OA equipment Pressure sensor, Positing of memory devicedata storage or others Optical equipment Positioning of stage, Actuator of autofocusing, Actuator of shaker and damping system Communications Polarization control, Wavelength control Medical equipment Micropump, Ultrasonic transducer Measuring instrument Pressure sensor, Acceleration sensor, Fine positioning Automobile Vibration control 18 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Reliability Majority of failure mode of multilayer piezoelectric actuators is the short circuit due to degraded insulation. Though the cause of degradation of insulation has not been clarified perfectly, it has been found that the failure rate varies greatly between statistic usesDC voltage applicationand dynamic usespulse voltage application. Like other electrical components, piezo actuators can be influenced by humidity as well as applied voltage and ambient temperature. NEC TOKIN has added the metal sealed type piezo actuators featuring high reliability by eliminating influence of the ambient atmosphere. This section describes reliability guidelines for static and dynamic usages of the resin-coated and metal sealed types actuators. Reliability of our multilayer piezoelectric actuators is represented by MTTFmean time to failurein case of static usage. Though the number of repetitions is considered to be used to represent the reliability in the case of dynamic usage, the accurate relationship between the indicator and cause has not been determined because of various influential causes and the mutual action between them. For the present, therefore, only the obtained data and our concept are described. 1Resin-coated TypeAE Series a. DC voltage application The acceleration factors have been obtained empirically for each of the drive voltage, ambient temperature and relative humidity based on many experimental result. The MTTFr in actual applications is estimated using equation1below with MTTFs observed under accelerated condition as the reference value. MTTF r=MTTF sxA vxA hxA t * * * (1) MTTF r : Estimated value MTTF s : Reference value (=500h) A v : Acceleration factor for drive voltage= 150 3.2 V r : Actual voltage (V) Vr A h : Acceleration factor for relative humidity= 90 4.9 H r : Actual relative humidity (RH%) Hr A t : Acceleration factor for ambient temperature=1.5 40-Tr 10 T r : Actual ambient temperature() [Example] The following calculation is made for the case of use at 25, 60% RH and 100 V: MTTF r =500x 150 100 3.2 x 90 4.9 60 x1.5 40-25 10 =500x3.66x7.29x1.84 24,500h (2.8years) b. Pulse voltage application When this element is driven by a pulse voltage, temperature rises as a result of heating due to dielectric loss of ceramics. Therefore, the element is not likely to be influenced by the humidity, thus extending the service life greatly. Since this effect is affected by the element shape, pulse waveform and frequency, it cannot be calculated by an equation as in the case of DC voltage application. In NEC TOKINs testing on the AE0203D08, there was no failure confirmed after 0-150 V rectangular pulse wave was applied with 500 Hz for 500 hoursequivalent to 900 million pulses were applied. Please pay attention to the physical damage due to ringing phenomenon caused by the fixed method of the element and the speed of the voltage rise. Please refer to the separately printed literature, " NEC TOKIN Multilayer Piezoelectric Actuators Users Manual" for more detail. Multilayer Piezoelectric Actuators Vol.07 19 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 2Metal Sealed TypeASB, ASL and AHB Series a. DC voltage application MTTFr of the metal sealed type under the actual operating conditions is calculated/estimated from the reference MTTFs and the acceleration factor as in the case of the resin-coated type. However since the internal element is sealed from the atmosphere, it is not influenced by the atmospheric humidity. Therefore, equation2below is used. MTTF r =MTTF sxA vxA t * * * (2) MTTF r : Estimated value MTTF s : Reference value (=36,000h) A v : Acceleration factor for drive voltage= 100 2 V r : Actual operating voltage (V) Vr A t :Acceleration factor for ambient temperature=1.5 85-Tr 10 T r : Actual operating temperature () [Example] The following calculation is made for use at 25(c and 150 V: MTTF r=36,000x 100 150 2 x1.5 85-25 10 =36,000x0.44x11.3 179,000h (20.4years) b. Pulse voltage application Like the resin-coated type, it is extremely difficult to estimate reliability by using an equation in the metal sealed type because of the influence of the pulse waveform, frequency, etc. in addition to the voltage and ambient temperature. In NEC TOKINs testing on the ASB170C801NP0, there was no failure confirmed up to 1000 hours equivalent to 100 million pulses were appliedunder the conditions below. [Conditions for evaluation] Temperature: 85 2 Humidity: 90 to 95% RH Load: 200 N to 500 N20 kgf to 50 kgf Drive voltage waveform: Rectangular wave, 30 Hz, 0 V to 100 V, duty ratio at 30% 20 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Guide to Use Fixing Method: Carefully prevent the piezo actuators from being bent, being twisted, or being applied tensile force. Reference: Guide for tolerance of twisting and tension Reference value Twisting force 3 x 10 1Nm or less Tension 50 N or less Remarks For an actuator which generates a force of 800 N compression resistance Install the actuator so that the center axis of generated displacement is aligned with the center axis of the load. a. Resin-coated type * Epoxy-based adhesives are recommended for bonding. Select adhesives that have high rigidity and allow minimum thickness so that the generation force and displacement cannot be deteriorated. Also do not form adhesives at the side of actuator. * When thermosetting resin is used, perform polarizing treatmentsee the caution sectionagain after the adhesive is settled. * The resin-coated type is weak to tensile force because of its structure and may be broken when tensile force is applied onto the device. Using the device in the state that constantly applies compression is effective against any mechanical damage. The pressure applied to this element should be kept at 20 to 50% of the force generated by this elementcompression resistance. * Install the element so that the axis of generated displacement is vertical to the mounting surface. b. Metal sealed type * Select the mounting bracketfemale thread type or flange typeaccording to the mounting method, and install the element utilizing the bracket. * Fix the element securely so that the generated force and displacement cannot be deteriorated. * Connect the driven item at the displacement generating end after securing the mounting portion so that it avoids unnecessary stress applied at the time of installation. * Though this product is designed to apply a compressive force to the internal element by the metal case, avoid any usages that cause bending, twisting, or tension force when the device is in use Example of Actuator mounting Moving part or load Moving part or load Spherical surface Hinge Only one side is touching the actuator. (Stress is concentrated on one edge and generates share mode stress) Piezo Actuator The actuator may break. a) Example of wrong mounting Imperfect alignment between actuator and load <Actuator will be broken> Piezo Actuator Piezo Actuator b) Example of correct mounting Mount the device so that the load is uniformly applied by the spherical surface or the hinge Driving Method: Connect the red lead wire to the positiveterminal of the power supply. Also prevent reverse voltage application. Basically the voltage controls the aimed displacement and generated force. In driving, however, it is also necessary to take ringing due to the resonance or hysteresis of the element itself into consideration. In pulse driving, it is further necessary to pay sufficient attention to heat generation due to dielectric loss, charge/discharge current due to the capacitive component and the power output impedance as well. Please refer to the separately printed literature, "NEC TOKIN Multilayer Piezoelectric Actuators Users Manual" Multilayer Piezoelectric Actuators Vol.07 21 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Generated force and load relation: Static load: No load value change when actuator moves. 20 400N static load is applied Displacementm 15 M 10 5 0 5 M Model: AE0505D16 10 0 50 100 Voltage 400N 150 Piezo Actuator 20 Total displacement is not changed. Displacementm 15 10 5 Zero point shift. 150V 0 5 10 15 20 Static load: Initial position (0V position) is dropped by spring constant but total displacement has the same value under static load. 0V 0 200 400 600 800 1000 Load Fluctuating load: Load value changes by spring reaction when actuator moves. 20 Displacementm 18 Spring load of 14.3N/m 16 14 12 10 Reduction of displacement 8 6 4 Model: AE0505D16 2 0 0 50 100 150 Voltage Reduction of displacement 20 Displacementm 18 Piezo Actuator Spring load of 14.3N/m 16 14 12 Load-Displacement line of actuator 10 8 6 4 Displacement loss 2 0 0 200 400 600 800 1000 Load Spring load (Fluctuating load): Displacement is changed by relation between generated force and spring constant of actuator. 22 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Precautions Connect the red lead wire to the positiveterminal of the power supply. Carefully avoid electric shock since a high voltage is in use. Never apply excessive tension to a lead wire. Do not handle the product by picking up or moving the lead wire. Do not disassemble the case of the metal sealed type. Machining of the actuator element and replacement of the lead wire are prohibited. Do not handle the resin-coated typeAE serieswith bare hands. Otherwise, the reliability of the element would be degraded. Do not wash resin-coated typeAE seriesby organic solvant. Avoid excessive physical shock resulting from, for example, dropping. Otherwise, the internal piezoelectric ceramic element may be damaged. If the actuator is exposed to high temperature above 100 or if it is used after long storage periodmore than three months, it should be polarized by using the circuit configuration and conditions shown below. R1 V S PA R2 Protective resistor R11k Protective resistor R21k Polarizing conditions: DC voltage application 0V1500.2V (to be retained for 10 seconds) 0 Do not apply voltage exceeding maximum rating voltage, or do not do rapid charging and discharging. These might lead to degradation of the reliability or mechanical fracture. Do not use the actuator in high concentration of highly inflammable gas. Otherwise, ignition may occur. Use the actuator so as not to cause bending, twisting or tension. Furthermore, align the center axis of displacement of the actuator with the center axis of the mechanical load. Drive the actuator so that the rising speed is more than three times as much as the resonance period in order to prevent the device from damaging by ringing. Store the resin-coated typeAE seriespreferably in a dry atmospheredesirably below 40% RHat ordinary temperatures 5 to 40C. Avoid condensation on the product surface. Store actuators where there is no vibration. These products must be handled properly as industrial waste. When disposing, please contact your local waste disposal service. Piezo actuator is industrial wastes, make sure disposal method under the laws. Multilayer Piezoelectric Actuators Vol.07 23 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 24 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 Multilayer Piezoelectric Actuators Vol.07 25 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 26 Multilayer Piezoelectric Actuators Vol.07 All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1 When using our products, the following precautions should be taken. 1 Safety designing of an apparatus or a system allowing for failures of electronic components used in the system In general, failures will occur in electronic components at a certain probability. NEC TOKIN makes every effort to improve the quality and reliability of electronic component products. However, it is impossible to completely eliminate the probability of failures. Therefore, when using NEC TOKIN' s electronic component products, systems should be carefully designed to ensure redundancy in the event of an accident which would result in injury or death, fire, or social damage, to ensure the prevention of the spread of fire, and the prevention of faulty operation. Please refer to precautions to be taken when using multilayer piezoelectric actuators for the details of failures. 2 Quality level of various kinds of parts, and equipment in which the parts can be utilized Electronic components have a standard quality level unless otherwise specified. NEC TOKIN classifies the level of quality of electronic component products into three levels, in order from a lower level, a standard quality level, a special quality level, and a custom quality level in which a customer individually specifies a quality assurance program. Each of the quality levels has recommended applications. If a user wants to use the electronic parts having a standard quality level in applications other than the applications specified for the standard quality level, they should always consult a member of our company's sales staff before using the electronic parts. Standard quality level Special quality level Custom quality level : Computers, office automation equipment, communications equipment, measuring instruments, AV equipment, household electrical appliances, machine tools, personal equipment, industrial robots : Transportation equipment automobiles, railways, shipping, or the like, traffic signals, disaster prevention/crime prevention systems, a variety of safety devices, and medical equipment which is not directly intended for life-support purposes : Equipment for airplanes, aerospace equipment, nuclear power control systems, and medical equipment, apparatus or system for life-support purposes Unless otherwise shown, the quality level of NEC TOKIN's electronic component products included in documents such as catalogues, data sheets or data books is the standard quality level. 3 This manual is subject to change without notice. The contents of this manual are based on data which is correct as of February, 2013, and they may be changed without notice. If our products are used for mass-production design, please cousult with a member of our company's sales staff by way of precaution. 4 Reprinting and copying of this manual without prior written permission from NEC TOKIN Corporation are not permitted. 5 Industrial property problems In the event any problems associated with industrial property of a third party arising as a result of the use of our products, NEC TOKIN assumes no responsibility for problems other than problems directly associated with the constitution and manufacturing method of the products. 6 Should any of these products come under the category of strategic goods or servicesaccording to Japan's foreign trade and foreign exchange regulations, the sender must obtain an export license from the Japanese Government before said products can be exported outside Japan. All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data. Please request for a specification sheet for detailed product data prior to the purchase. Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog. 2013.03.13 9470MPAVOL07E1303H1