Miniature Low Pressure Sensors Low Pressure (2" H2O to 30 " H2O) Sensors Features * * * * 0 to 2" H2O to 0 to 30" H2O Pressure Ranges Matched pressure port volumes Temperature Compensated Calibrated Zero and Span Applications * Medical Instrumentation * Environmental Controls * HVAC General Description The Millivolt Output pressure sensors is based upon a proprietary technology to reduce all output offset or common mode errors. This model provides a calibrated millivolt output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage up to +16 V is acceptable. Equivalent Circuit +Vsupply 3 Input Resittance 15 k ohm Output Resistance 1.5 k ohm -Voutput 4 + Voutput 2 -Vsupply 1 1-30 Pressure Sensor Characteristics Maximum Ratings Environmental Specifications Supply Supply Voltage VS 16 Vdc Temperature Ranges Common-mode pressure 10 psig Compensated 250C Lead Temperature (soldering 2-4 sec.) 1 0 to 50(70) C Operating Standard Pressure Ranges -25 to 85 C Storage -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Single in Line Packages-SIP Operating Two Ports Same Side Two Ports Opposite Side Pressure Part Number Part Number 2 INCH-G-MV-MINI 0 - 2 "H2O 2 INCH-D1-MV-MINI 2 INCH-D2-MV-MINI 5 INCH-G-MV-MINI One Port Part Number 0 - 5 "H2O 5 INCH-D1-MV-MINI 5 INCH-D2-MV-MINI 10 INCH-G-MV-MINI 0 - 10 "H2O 10 INCH-D1-MV-MINI 10 INCH-D2-MV-MINI 20 INCH-G-MV-MINI 0 - 20 "H2O 20 INCH-D1-MV-MINI 20 INCH-D2-MV-MINI 0 - 30 "H2O 30 INCH-D1-MV-MINI 30 INCH-D2-MV-MINI 30 INCH-G-MV-MINI Dual in Line Packages Two Ports Same Side Two Ports Opposite Side Two Ports Same Side Part Number Operating Pressure Part Number Part Number Part Number 2 INCH-GDIP-MV-MINI 0 - 2 "H2O 2 INCH-D1DIP-MV-MINI 2 INCH-D2DIP-MV-MINI 2 INCH-SDXL-MV-MINI 5 INCH-GDIP-MV-MINI 0 - 5 "H2O 5 INCH-D1DIP-MV-MINI 5 INCH-D2DIP-MV-MINI 5 INCH-SDXL-MV-MINI 10 INCH-GDIP-MV-MINI 0 - 10 "H2O 10 INCH-D1DIP-MV-MINI 10 INCH-D2DIP-MV-MINI 10 INCH-SDXL-MV-MINI 20 INCH-GDIP-MV-MINI 0 - 20 "H2O 20 INCH-D1DIP-MV-MINI 20 INCH-D2DIP-MV-MINI 20 INCH-SDXL-MV-MINI 30 INCH-GDIP-MV-MINI 0 - 30 "H2O 30 INCH-D1DIP-MV-MINI 30 INCH-D2DIP-MV-MINI 30 INCH-SDXL-MV-MINI One Port Performance Characteristics for 2 INCH-D-MV-MINI Parameter, note 1 Minimum Nominal 9.0 10.0 Operating Range, differential pressure 2.0 Output Span, @ 2 "H2O, note 5 Operating Range, differential pressure Output Span, @ 4 "H2O, note 5 Maximum "H2O 11.0 4.0 18.0 20.0 Units mV "H2O 22.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-50C), note 2 250 uV Offset Warm-up Shift, note 3 100 uV 50 uV Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, note 4 0.05 Span Shift (0C-50C), @ 2 "H2O, note 2 1-31 200 uV 0.25 %fs 200 uV Performance Characteristics for 5 INCH-D-MV-MINI Parameter, note 1 Minimum Nominal 19.0 20.0 Maximum "H2O 5.0 Operating Range, differential pressure Units 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-50C), note 2 150 uV Offset Warm-up Shift, note 3 50 uV Offset Position Sensitivity (1g) 10 uV Offset Long Term Drift (one year) 100 uV 0.25 %fs 200 uV Maximum Units Output Span, note 5 0.05 Linearity, hysteresis error, note 4 Span Shift (0C-50C), note 2 Performance Characteristics for 10 INCH-D-MV-MINI Parameter, note 1 Minimum Nominal "H2O 10.0 Operating Range, differential pressure 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-70C), note 2 150 uV Offset Warm-up Shift, note 3 50 uV Offset Position Sensitivity (1g) 5 uV Output Span, note 5 19.0 20.0 Offset Long Term Drift (one year) 0.05 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 100 uV 0.25 %fs 200 uV Maximum Units Performance Characteristics for 20 INCH-D-MV-MINI Parameter, note 1 Minimum Operating Range, differential pressure Output Span, note 5 Nominal 5.0 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-70C), note 2 150 uV Offset Warm-up Shift, note 3 50 uV Offset Position Sensitivity (1g) 5 uV 19.0 20.0 "H2O Offset Long Term Drift (one year) Linearity, hysteresis error, note 4 0.05 Span Shift (0C-70C), note 2 1-32 100 uV 0.25 %fs 200 uV Performance Characteristics for 30 INCH-D-MV-MINI Parameter, note 1 Minimum Nominal Units Maximum "H2O 30.0 Operating Range, differential pressure 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-70C), note 2 150 uV 50 uV Output Span, note 5 19.0 20.0 Offset Warm-up Shift, note 3 5 uV 100 uV 0.25 %fs 200 uV Offset Position Sensitivity (1g) Offset Long Term Drift (one year) 0.05 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 Specification Notes NOTE 1: ALL 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO THE B-PORT CONFIGURATION. SHIFT IS RELATIVE TO 25C. SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. PARAMETERS ARE MEASURED AT UNLESS OTHERWISE SPECIFIED. 2: 3: NOTE 4: NOTE 5: NOTE NOTE Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 100 useconds. Physical Dimensions Dual in Line (SDXL) 0.280 (7.1) 0.50 (12.7) 6 5 4 0.62 (15.7) Pin 1 2 3 0.10 Typical (2.54) 0.080 O.D. (2.00) Dual in Line (DIP) Two Pressure Port Same Side 1-33 1