KXR94 Series
Accelerometers and Inclinometers
Small Package - 5x5x1.2mm DFN
Multiplexed Analog or Digital SPI Interface
Internal 1KHz Low Pass Filter
Low Noise
Lead-free Solderability
Excellent Temperature Performance
High Shock Survivability
Low Power Consumption
User Definable Bandwidth
Factory Programmable Offset and Sensitivity
Self-test Function
FEATURES
“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
© Kionix 2012 All Rights Reserved
January 26, 2012 Rev. 2.3
Page 1 of 2
These high-performance silicon micromachined linear accelerometers and
inclinometers consist of a sensor element and an ASIC packaged in a
5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from
single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)
processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The KXR94 series is designed to provide a high signal-to-noise ratio with
integrated temperature compensation that provides excellent performance
over temperature. These sensors can accept supply voltages between 2.5V
and 5.25V. Sensitivity is factory programmable allowing customization for
applications requiring from ±1.0g to ±4.0g ranges. Sensor bandwidth is
user-definable.
The sensor element functions on the principle of differential capacitance.
Acceleration causes displacement of a silicon structure resulting in a
change in capacitance. An ASIC, using a standard CMOS manufacturing
process, detects and transforms changes in capacitance into an analog out-
put voltage, which is proportional to acceleration. The sense element de-
sign utilizes common mode cancellation to decrease errors from process
variation and environmental stress. Available in analog and multiplexed
analog outputs and serial peripheral interface (SPI).
PROPRIETARY TECHNOLOGY
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
MARKETS
APPLICATIONS
\\
Stability Control
Telematics/GPS
Theft and Accident Alarms
Inertial Navigation and Dead Reckoning
Gesture Recognition
Image Stabilization
Platform Stabilization
Drill Orientation
Cell Phones and Handheld PDAs
Automotive
Personal Navigation Devices
Cameras and Video Equipment
Industrial
PERFORMANCE SPECIFICATIONS
PARAMETERS UNITS KXR94-2050 KXR94-2353 CONDITION
Range 1 g ±2.0 Factory programmable
Sensitivity mV/g 660 typical (673 max) Not applicable 12-bit operation
counts/g Not applicable 819 target (835 max)
0g Offset vs. Temp. mg/°C ±0.2 typical
Sensitivity vs. Temp %/°C ±0.01 (xy) ±0.02 (z) typical
Noise Density 45 typical
Bandwidth 2 Hz 800 -3dB
Non-Linearity % of FS 0.1 typical % of full scale output
Ratiometric Error % ±1.25 (xy) ±0.2 (z) typical 3.3V ± 5%
Cross-axis Sensitivity % 2.0 typical
A/D Conversion Time µS Not applicable 40 typical
SPI Communication Rate 3 MHz Not Applicable 5 typical
Power Supply V 3.3 Standard
Current Consumption mA 0.95 typical Operating 1.03 typical
µA 5 max Standby
ENVIRONMENTAL SPECIFICATIONS
PARAMETERS UNITS KXR94-2050 KXR94-2353 CONDITION
Operating Temperature °C -40 to 85 (Consumer/Industrial) Powered
-40 to 125 (Automotive)
Storage Temperature °C -55 to 150 Un-powered
Mechanical Shock g 5000 Powered or un-powered,
0.5 msec halversine
ESD V 3000 Human body model
KXR94 Series
Accelerometers and Inclinometers
PERFORMANCE SPECIFICATIONS
The performance parameters below are programmed and tested at 3.3 volts. However, the device can be factory
programmed to accept supply voltages from 2.5 V to 5.25 V. Performance parameters will change with supply
voltage variations.
NOTES
1 Custom ranges from 1.0g to 4.0g available.
2 Internal low pass filter. Lower frequencies are user definable with external capacitors.
3 SPI communication rate can be optimized for faster communication.
ORDERING GUIDE
Product Axis(es) of
Sensitivity
Range
(g) Sensitivity Offset Operating
Voltage (V)
Temperature
(°C) Package Ouput
KXR94-1050 XYZ 2 560 (mV/g) 1.4 V 2.8 -40 to +85 5x5x1.2 DFN Mux Analog
KXR94-2050 XYZ 2 660 (mV/g) 1.65V 3.3 -40 to +85 5x5x1.2 DFN Mux Analog
KXR94-2283 XYZ 2 1000 (mV/g) 2.5V 5.0 Mux Analog -40 to +85 5x5x1.2 DFN
KXR94-2353 XYZ 2 819 (counts/g) 2048 counts 3.3 -40 to +85 5x5x1.2 DFN Digital SPI
KXR94-7050 XYZ 2 660 (mV/g) 1.65V 3.3 -40 to 125 5x5x1.2 DFN
Mux Analog
Hzg/
© Kionix 2012 All Rights Reserved
January 26, 2012 Rev. 2.3
Page 2 of 2
