Miniature Pressure Sensors Prime Grade Pressure Sensors Features * 0 to 0.3 PSI to 0 to 100 PSI Pressure Ranges * 0.25 % linearity...highest accuracy version * Temperature Compensated * Calibrated Zero and Span Applications * Medical Instrumentation * Environmental Controls * HVAC General Description The Miniature series pressure sensors are based upon a proprietary technology to reduce the size of the sensor and yet maintain a high level of performance. This model provides a calibrated millivolt output with superior output characteristics. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The PRIME GRADE is the highest accuracy version of the millivolt output pressure sensors. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage. Physical Dimensions +Vsupply 3 -Voutput 4 No Pressure Port + Voutput 2 Single Pressure Port -Vsupply 1 Marking: right dot: Red: Prime Grade left dot: L10: yellow Input Resittance 15 k ohm 0.3: pink 1.0: green Output Resistance 3.0 k ohm 05: blue 15: purple 30: orange 100: brown Dual Pressure Port 1-18 Equivalent Circuit Environmental Specifications Pressure Sensor Characteristics Maximum Ratings Supply Supply Voltage VS 16 Vdc Temperature Ranges Common-mode pressure 50 psig Compensated 250C Lead Temperature (soldering 2-4 sec.) 0 to 70 C Operating -25 to 85 C Storage -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges Single Pressure Port No Prssure Port Dual Pressure Port Operating Pressure Part Number Part Number Proof Pressure 0.3 PSI-G-PRIME-MINI 0 - O.3 PSI 0.3 PSI-GF-PRIME-MINI 0.3 PSI-D-PRIME-MINI 3 PSI 10 INCH-G-PRIME-MINI Part Number 0 - 10 "H2O 10 INCH-GF-PRIME-MINI 10 INCH-D-PRIME-MINI 5 PSI 1 PSI-G-PRIME-MINI 0 - 1 PSI 1 PSI-GF-PRIME-MINI 1 PSI-D-PRIME-MINI 10 PSI 5 PSI-G-PRIME-MINI 0 - 5 PSI 5 PSI-GF-PRIME-MINI 5 PSI-D-PRIME-MINI 20 PSI 15 PSI-A-PRIME-MINI 0 - 15 PSIA 15 PSI-AF-PRIME-MINI 15 PSI-G-PRIME-MINI 0-15 PSIG 15 PSI-GF-PRIME-MINI 15 PSI-D-PRIME-MINI 30 PSI-D-PRIME-MINI 30 PSI-G-PRIME-MINI 0-30 PSIG 30 PSI-GF-PRIME-MINI 100 PSI-G-PRIME-MINI 0-100 PSIG 100-PSI-GF-PRIME-MINI 60 PSI 60 PSI 60 PSI 150 PSI Performance Characteristics for 0.3 PSI-G-PRIME-MINI Parameter, note 1 Minimum Nominal Maximum PSI 0.3 Operating Range, differential pressure 19 Units 21 mV Offset Voltage @ zero differential pressure 0.3 mV Offset Temperature Shift (0C-70C), note 2 250 uV 0.25 %fs 1 %fs Maximum Units Output Span, note 5 20 0.1 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 Performance Characteristics for 10 INCH-G-PRIME-MINI Parameter, note 1 Minimum Nominal 10.0 Operating Range, differential pressure 19 Output Span, note 5 20 "H2O 21 mV Offset Voltage @ zero differential pressure 0.3 mV Offset Temperature Shift (0C-70C), note 2 250 uV 0.25 %fs 1 %fs 0.1 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 1-19 1 Performance Characteristics for 1 PSI-G-PRIME-MINI Parameter, note 1 Minimum Nominal Output Span, note 5 Maximum 17.82 Units PSI 1.0 Operating Range, differential pressure 18.18 mV Offset Voltage @ zero differential pressure 0.3 mV Offset Temperature Shift (0C-70C), note 2 250 uV 0.25 %fs 1 %fs Maximum Units 18.0 0.1 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 Performance Characteristics for 5 PSI-G-PRIME-MINI Parameter, note 1 Minimum Nominal 59.4 60.0 PSI 5.0 Operating Range, differential pressure 60.6 mV Offset Voltage @ zero differential pressure 0.3 mV Offset Temperature Shift (0C-70C), note 2 250 uV 0.25 %fs 1 %fs Maximum Units Output Span, note 5 Linearity, hysteresis error, note 4 0.1 Span Shift (0C-70C), note 2 Performance Characteristics for 15 PSI-A-PRIME-MINI Parameter, note 1 Minimum PSIA 15.0 Operating Range, absolute pressure Output Span, note 5 Nominal 89.1 90.0 Offset Voltage @ zero differential pressure Offset Temperature Shift (0C-70C), note 2 Linearity, hysteresis error, note 4 0.1 Span Shift (0C-70C), note 2 1-20 90.9 mV 0.3 mV 250 uV 0.25 %fs 1 %fs Performance Characteristics for 15 PSI-G-PRIME-MINI Parameter, note 1 Minimum Nominal 89.1 Units PSIG 15.0 Operating Range, gage pressure Output Span, note 5 Maximum 90.9 mV Offset Voltage @ zero gage pressure 0.3 mV Offset Temperature Shift (0C-70C), note 2 250 uV 0.25 %fs 1 %fs Maximum Units 90.0 0.1 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 Performance Characteristics for 30 PSI-G-PRIME-MINI Parameter, note 1 Minimum Nominal PSIG 30.0 Operating Range, gage pressure 90.9 mV Offset Voltage @ zero gage pressure 0.3 mV Offset Temperature Shift (0C-70C), note 2 250 uV 0.25 %fs 1 %fs Maximum Units Output Span, note 5 90.0 89.1 0.1 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 Performance Characteristics for 100 PSI-G-PRIME-MINI Parameter, note 1 Minimum PSIG 100.0 Operating Range, gage pressure Output Span, note 5 Nominal 99.0 100.0 101.0 mV 0.3 mV Offset Voltage @ zero gage pressure Offset Temperature Shift (0C-70C), note 2 250 uV 0.25 %fs 1 %fs 0.1 Linearity, hysteresis error, note 4 Span Shift (0C-70C), note 2 Specification Notes NOTE 1: ALL 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. SHIFT IS RELATIVE TO 25C. SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. PARAMETERS ARE MEASURED AT ROOM TEMPERATURE UNLESS OTHERWISE SPECIFIED. 2: 3: NOTE 4: NOTE 5: NOTE NOTE Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 100 useconds. All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 1-21 1