MiCS-2714 1107 rev 6 Data Sheet The MiCS-2714 is a compact MOS sensor. The MiCS-2714 is a robust MEMS sensor for nitrogen dioxide and leakage detection. Features 100.00 NO2 10.00 Hydrogen Rs/R0 * Smallest footprint for compact designs (5 x 7 x 1.55 mm) * Robust MEMS sensor for harsh environments * High-volume manufacturing for low-cost applications * Short lead-times 1.00 NO 0.10 Detectable gases * Nitrogen dioxide * Hydrogen NO2 H2 0.01 0.01 0.05 - 10ppm 1 - 1000ppm 0.1 1 10 Concentration [ppm] Continuous power ON, 25C, 50% RH For more information please contact: info.em@sgxsensortech.com SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondreche Switzerland www.sgxsensortech.com Page 1 of 5 100 MiCS-2714 1107 rev 6 Data Sheet Performance sensor Characteristic OX sensor Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 0.8 20 k Typical NO2 detection range FS 0.05 10 ppm Sensitivity factor (see note 2) S60 2 - - - Notes: 1. Sensing resistance in air R0 is measured under controlled ambient conditions, i.e. synthetic air at 23 5C and 50 10% RH. Sampling test. 2. Sensitivity factor is defined as Rs at 0.25 ppm NO2, divided by RS in air. Test conditions are 23 5C and 5% RH. Indicative values only. Sampling test. IMPORTANT PRECAUTIONS: Read the following instructions carefully before using the MiCS-2714 described here to avoid erroneous readings and to prevent the device from permanent damage. * The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours. * The sensor must not be exposed to high concentrations of organic solvents, silicone vapours or cigarette-smoke in order to avoid poisoning the sensitive layer. * Heater voltage above the specified maximum rating will destroy the sensor due to overheating. * This sensor is to be placed in a filtered package that protects it against water and dust projections. * SGX sensortech strongly recommends using ESD protection equipment to handle the sensor. Page 2 of 5 MiCS-2714 1107 rev 6 Data Sheet MiCS-2714 with recommended supply circuit (top view) MiCS-2714 with measurement circuit (top view) temperature on the heater while using a single 5 V power supply. The resulting voltages is typically VH = 1.7 V. The voltage measured on the load resistor is directly linked to the resistance of the sensor. RLOAD must be 820 W at the lowest in order not to damage the sensitive layer. Power circuit and measurement circuit R is 131 . This resistor is necessary to obtain the right Parameter Symbol Typ Min Max Unit Heating power PH 43 30 50 mW Heating voltage VH 1.7 - - V Heating current IH 26 - - mA Heating resistance at nominal power RH 66 59 73 Rating Symbol Value / Range Unit Maximum heater power dissipation PH 50 mW Maximum sensitive layer power dissipation Ps 8 mW Vsupply 4.9 - 5.1 V RH 5 - 95 %RH Ambient operating temperature Tamb -30 - 85 C Storage temperature range Tsto -40 - 120 C RHsto 5 - 95 %RH Voltage supplyHeating current Relative humidity range Storage humidity range Page 3 of 5 Data Sheet MiCS-2714 1107 rev 6 Package outline dimensions The package is compatible with SMD assembly process. Pin Connection OperatingAconditions Rh1 B Rs1 C D E F G H Rh2 J Rs2 K MiCS-2714 configuration (bottom view) Sensor configuration The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top. The internal connections are shown above. Page 4 of 5 Data Sheet MiCS-2714 1107 rev 6 Power circuit The two resistors (82 ohm for RED and 51+82 Packaging ohm for OX) are necessary to obtain the right The sensors are in a tape andheaters reel for temperatures onpackaged the two independent expedition. while using a 5V power supply. The sensors are placed in a carrier type. The dimensions of the cavity are 5.5 x 7.5 x 2.55 mm (the tolerance is +/- 0.2 mm). The outside dimension of the reel is either 178 +- mm (for a maximum of 700 sensors ) or 330 + 0.25 / -4 mm (for a maximum of 2000 sensors). For more information please contact: info.em@sgxsensortech.com SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondreche Switzerland www.sgxsensortech.com Whilst SGX sensortech has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences of any use thereof and also reserves the right to change the specification of goods without notice. SGX sensortech accepts no liability beyond the set out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance with information contained herein. Page 5 of 5