Millivolt Output Low Pressure Sensors Low Pressure (1" H2O to 30 " H2O) Sensors 1 Features * 0 to 1" H2O to 0 to 30" H2O Pressure Ranges * Temperature Compensated * Calibrated Zero and Span Applications * Medical Instrumentation * Environmental Controls * HVAC General Description The Millivolt Output pressure sensors is based upon a proprietary technology to reduce all output offset or common mode errors. This model provides a calibrated millivolt output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage up to +16 V is acceptable. Physical Dimensions 0.25 (6.4) 0.10 Typical (2.54) Pin Size 0.010 x 0.020 (0.25 x 0.50) 0.174 to 0.190 (4.4 to 4.8) Pin 1 2 3 4 5 6 0.21 (5.3) 1 A 1.08 (27.4) 0.42 (10.5) pin 1: N/C pin 2: +V supply pin 3: +Voutput pin 4: -Vsupply 0.66 (16.0) B pin 5: -Voutput pin 6: N/C 0.48 (12.2) 0.55 (14.0) NOTES: 1) Dimensions in inches (millimeters) 0.80 (20.3) 0.85 (21.6) 1.10 (27.9) 1-3 Environmental Specifications Pressure Sensor Ratings 16 Vdc Supply Voltage VS, max -10 to +10 psig Common-mode pressure 250C Lead Temperature, max (soldering 2-4 sec.) Temperature Ranges Compensated 0 to 50(70) C -25 to 85 C Operating -40 to 125 C Storage Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges Part Number Operating Pressure Nominal Span Proof Pressure Burst Pressure 10 mV 100 "H2O 200 "H2O 1 INCH-D-MV 0 - 1 "H2O 2 INCH-D-MV 0 - 2 "H2O 10 mv 100 "H2O 200 "H2O 5 INCH-D-MV 0 - 5 "H2O 20 mV 200 "H2O 300 "H2O 10 INCH-D-MV 0 - 10 "H2O 20 mV 200 "H2O 300 "H2O 20 INCH-D-MV 0 - 20 "H2O 20 mV 200 "H2O 500 "H2O 30 INCH-D-MV 0 - 30 "H2O 20 mV 200 "H2O 800 "H2O Performance Characteristics for 1 INCH-D-MV Parameter, note 1 Minimum Nominal Maximum 1 to 4 Operating Range, differential pressure Output Span, @ 1"H2O, note 5 9.0 10.0 Output Span, @ 4"H2O, note 5 36.0 40.0 Units "H2O 11.0 mV 44.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-50C), note 2 250 uV Offset Warm-up Shift, note 3 100 uV Offset Position Sensitivity (1g) 50 uV 200 uV Offset Long Term Drift (one year) 0.05 Linearity, hysteresis error, note 4 Full Scale Shift (0C-50C), note 2 0.25 %fs 200 uV Maximum Units Performance Characteristics for 2 INCH-D-MV Parameter, note 1 Minimum Operating Range, differential pressure Output Span, note 5 Nominal 2.0 9.0 11.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-50C), note 2 250 uV Offset Warm-up Shift, note 3 100 uV Offset Position Sensitivity (1g) 50 uV Offset Long Term Drift (one year) 200 uV 0.25 %fs 200 uV Linearity, hysteresis error, note 4 10.0 "H2O 0.05 Full Scale Shift (0C-50C), note 2 1-4 Performance Characteristics for 5 INCH-D-MV Parameter, note 1 Nominal Minimum Maximum "H2O 5.0 Operating Range, differential pressure Units 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-50C), note 2 150 uV Offset Warm-up Shift, note 3 50 uV Offset Position Sensitivity (1g) 10 uV Output Span, note 5 20.0 19.0 Offset Long Term Drift (one year) 0.05 Linearity, hysteresis error, note 4 Full Scale Shift (0C-50C), note 2 100 uV 0.25 %fs 200 uV Maximum Units Performance Characteristics for 10 INCH-D-MV Parameter, note 1 Minimum Nominal "H2O 10.0 Operating Range, differential pressure 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-70C), note 2 150 uV Offset Warm-up Shift, note 3 50 uV Offset Position Sensitivity (1g) 5 uV Output Span, note 5 19.0 20.0 Offset Long Term Drift (one year) 0.05 Linearity, hysteresis error, note 4 Full Scale Shift (0C-70C), note 2 100 uV 0.25 %fs 200 uV Maximum Units Performance Characteristics for 20 INCH-D-MV Parameter, note 1 Minimum Operating Range, differential pressure Output Span, note 5 Nominal 5.0 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-70C), note 2 150 uV Offset Warm-up Shift, note 3 50 uV Offset Position Sensitivity (1g) 5 uV 19.0 20.0 "H2O Offset Long Term Drift (one year) Linearity, hysteresis error, note 4 0.05 Full Scale Shift (0C-70C), note 2 1-5 100 uV 0.25 %fs 200 uV 1 Performance Characteristics for 30 INCH-D-MV Parameter, note 1 Minimum Nominal Maximum "H2O 30.0 Operating Range, differential pressure Units 21.0 mV Offset Voltage @ zero differential pressure 500 uV Offset Temperature Shift (0C-70C), note 2 150 uV Offset Warm-up Shift, note 3 50 uV Output Span, note 5 19.0 20.0 Offset Position Sensitivity (1g) Offset Long Term Drift (one year) 0.05 Linearity, hysteresis error, note 4 Full Scale Shift (0C-70C), note 2 5 uV 100 uV 0.25 %fs 200 uV Specification Notes NOTE 1: ALL PARAMETERS ARE MEASURED AT 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. NOTE 2: S HIFT IS RELATIVE TO 25C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: M EASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. OTHERWISE SPECIFIED. Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 100 useconds. Input Resittance 15 k ohm Output Resistance 1.5 k ohm Equivalent Circuit Optional 90 degree lead bend All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 1-6