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LG16 Liquid Flow Meter Series
Compact Liquid Flow Meter for OEM Applications
Liquid flow rates up to 5000 µl/min
Resolutions down to sub nl/min
Totally non-invasive, pressures up to 200 bar
Digital I²C interface or analog out 0-5 V
Product Summary
The LG16 Liquid Flow Meter series enables fast, non-
invasive measurements of very low liquid flow rates
below 5 ml/min. This product line is especially suited
for OEM volume applications requiring small sized
components with high performance at low cost.
Excellent chemical resistance and bio-compatibility
are ensured: The flow path of the LG16 Liquid Flow
Sensor is formed by a straight-thru glass capillary
and end fittings. There are no obstacles in the flow
path.
Interface Options
Digital
- I2C-Bus
Analog
- Voltage output (0-5 V)
For more information on communication, please refer
to section 3 of this document.
1 Sensor Performance
Table 1: Model specific performance of LG16 (all data for medium H2O, 23 °C, 1 barabs unless otherwise noted)
Parameter
LG16-0025
LG16-0150
LG16-0430
LG16-1000
LG16-2000
H2O full scale flow ratea
1.50
7
80
1000
5000
H2O sensor output limitb for digital version
1.70
8
120
1100
5500
Accuracy below full scale
(whichever error is larger)
10
5.0
5.0
5.0
5.0
0.5
0.3
0.15
0.2
0.2
Repeatability below full scale
(whichever error is larger)
<1
0.5
0.5
0.5
0.5
0.06
0.05
0.01
0.02
0.02
Temperature coefficient
(additional error / °C; whichever is larger)
0.15
0.09
0.13
0.1
0.1
0.007
0.005
0.003
0.004
0.004
Mounting orientation sensitivityd
-
<0.4
<0.4
1.0
1.5
Flow detection response time 63
40
Response time on power-up
120
Operating temperature
+10…+50
Ambient storage temperaturee
-10…+60
Operating pressure
200
100
15
15
Burst pressure
400
200
30
30
aCorresponds with 4.8 V in analog version
bFlow rate at which the sensor output saturates. See section 2 for performance between full scale and saturation point.
cMeasured value
dMaximum additional offset when mounted vertically
eNon-condensing, flow path empty
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Table 2: Model specific performance of LG16, digital version only (all data for medium IPA, 23 °C, 1 barabs unless
otherwise noted)
Parameter
LG16-0150D
LG16-0430D
LG16-1000D
LG16-
2000HC-D
IPA full scale flow rate
70
500
10’000
80
IPA sensor output limita
100
600
11’000
90
Accuracy below full scale
(whichever error is larger)
20
20
20
10
0.3
1
1
0.5
Repeatability below full scale
(whichever error is larger)
1
1
1
1.5
0.01
0.05
0.05
0.03
Temperature coefficient
(additional error / °C; whichever is larger)
0.4
0.5
.5
0.4
0.35
0.025
0.02
aFlow rate at which the sensor output saturates
bMeasured value
1.1 Switching between calibration fields
Different calibrations are available in calibration fields (CF) on digital versions of the flow meter. The factory default is
CF0. If the medium to be measured is different to the factory default calibration field, this has to be changed using
the Sensirion Viewer Software or using digital commands via the I2C or RS485 interface.
Table 3: Available calibrations on CF0 and CF1
Sensor
CF0 (default)
CF1
LG16-0025D
H2O
LG16- 0150D
H2O
IPA
LG16-0430D
H2O
IPA
LG16-1000D
H2O
IPA
LG16-2000D
H2O
LG16-2000-HC-D
IPA
Analog flow meter variants only feature H2O calibration. For communication with the analog variant see section 3.4.
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2 Specifications Charts
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Figure 1: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and
absolute error in µl/min (right column) for H2O.
Figure 2: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and
absolute error in µl/min or ml/min (LG16-2000-HC) (right column) for IPA.
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3 Communication with the Sensor
The OEM flow sensor LG16 shows bi-directional,
linear transfer characteristics. It can be ordered as
analog or digital output version. Please see the
following section for more details and the table on
page 7 for an overview of the available options.
Digital sampling time, 16 bit 74 ms
Digital sampling time, 9 bit 1 ms
3.1 Electrical Specifications
Table 4: DC Characteristics
Parameter
Min.
Typ.
Max.
Units
Power Supply DC, VDD
Digital version
4.0
5.0
12a
V
Analog version
6.0
7.0
12a
V
Operating Current,
VDD = 4.0-12 V, no load
6.8
mA
aUse 9 V max. for best performance
3.2 Electrical Connector and Sensor Pinout
Connector Type: 5 pin Molex PCB Header 53261-
0590 (right angle).
Pin
1
SDA (bi-directional)
2
SCL
3
VDD
4
GND
5
Analog out
3.3 Digital Communication via I²C-Bus
Digital communication between a master and the
LG16 sensor runs via the standard I²C-interface. The
physical interface consists of two bus lines, a data line
(SDA) and a clock line (SCL) which need to be
connected via pull-up resistors to the bus voltage of
the system. By default, the I2C address is set to 64
(hexadecimal: 40, binary: 1000000).
These lines can be used on 3.3V or 5.0V level with a
clock frequency of 100 kHz. For the detailed
specifications of this I²C communication, please refer
to specific I²C Application Notes from Sensirion.
3.4 Analog Communication
The LG16 is available as analog version, with the
voltage output representing the current flow rate.
Analog Out Voltage Range
Negative full scale flow
0.2 V
Zero flow
2.5 V
Positive full scale flow
4.8 V
Minimum load resistance
10 k
The analog sensor’s output limit is 5V, thus the actual
flow rate output limit is lower than the corresponding
digital version’s output limit (noted in Table 1).
1
2
3
4
5
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4 Fluidic Connection
Table 5: Fluidic Specifications and Pressure Rating
Parameter
LG16-0025
LG16-0150
LG16-0430
LG16-1000
LG16-2000
Wetted materials:
Internal sensor tube material
Quartz Glass (Fused Silica)
Borosilicate Glass 3.3
Fitting material
PEEK
Sealing material
None
FEP
Fluid connector ports (Fittings)
UNF 6-40 for 1/32” OD tubing
VICI® Nanovolume™ compatible
¼-28 flat-bottom
for 1/16” or 1/8” OD plastic
tubinga
Pressure drop (at full scale flow rate, H2O, 23°C)
1 bar
3 mbar
1 mbar
>1 mbar
>1 mbar
Pressure drop (at full scale flow rate, IPA, 23°C)
n.a.
60 mbar
7 mbar
5 mbar
2 mbar
Total internal volume
1 µl
1.5 µl
5 µl
25 µl
80 µl
a1/8” OD tubing with 2 mm minimum ID is recommended for the LG16-2000.
For more information on the fluidic connection please find: “Application Note Sensor Ports and Tubing Connections” in the
Download Center on our webpage (www.sensirion.com/liquidflow-download).
5 Mechanical Specifications
Table 6: Mechanical Specifications
Parameter
LG16-0025
LG16-0150
LG16-0430
LG16-1000
LG16-2000
Largest dimensions
53 x 22 x 9 mm
Total mass
6 g
Inner diameter d
25 µm
150 µm
430 µm
1.0 mm
1.8 mm
All dimensions in mm
Attention Fragile
Mechanical shocks and connecting to the fittings without suitable tools leads to stress on the internal thin-walled
glass capillary and can cause it to break.
While tightening the fittings, fix the fluidic ports position with a wrench.
Test for leakage after every time new connections are made.
!
LG16-0025 / LG16-0150 / LG16-0430
LG16-1000 / LG16-2000
53±1
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6 Ordering Information
Each model is available with an analog output (ending “A”) or with a digital output (ending “D”).
Standard shipment includes only the sensor, neither cables for electrical connection nor fluidic connection material
are included. Preassembled 5-pin Molex to pigtail ribbon cables (Molex 1.25 mm Pitch Receptacle Type 51021-0500
(PicoBlade™ 51021), 30 cm) can be ordered optionally.
Product
Signal Output
Calibration
Article
Number
MOQ
Packaging
Unit
analog
digital
H2O
IPA
LG16-0025A
●
●
1-100427-01
25
25
LG16-0025D
●
●
1-100428-01
25
25
LG16-0150A
●
●
1-100409-01
25
25
LG16-0150D
●
●
●
1-100410-01
25
25
LG16-0430A
●
●
1-100852-02
25
25
LG16-0430D
●
●
●
1-100853-02
25
25
LG16-1000A
●
●
1-100405-01
25
25
LG16-1000D
●
●
●
1-100406-01
25
25
LG16-2000A
●
●
1-100403-01
25
25
LG16-2000D
●
●
1-100404-01
25
25
LG16-2000HC-D
●
●
1-100840-01
25
25
5-pin Molex to pigtail
ribbon cable, 30 cm
n/a
n/a
n/a
n/a
1-100482-01
25
n/a
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Important Notices
Warning, personal injury
Do not use this product as safety or emergency stop devices or in
any other application where failure of the product could result in
personal injury (including death). Do not use this product for
applications other than its intended and authorized use. Before
installing, handling, using or servicing this product, please
consult the datasheet and application notes. Failure to comply
with these instructions could result in death or serious injury.
If the Buyer shall purchase or use SENSIRION products for any
unintended or unauthorized application, Buyer shall defend, indemnify
and hold harmless SENSIRION and its officers, employees,
subsidiaries, affiliates and distributors against all claims, costs,
damages and expenses, and reasonable attorney fees arising out of,
directly or indirectly, any claim of personal injury or death associated
with such unintended or unauthorized use, even if SENSIRION shall be
allegedly negligent with respect to the design or the manufacture of the
product.
ESD Precautions
The inherent design of this component causes it to be sensitive to
electrostatic discharge (ESD). To prevent ESD-induced damage and/or
degradation, take customary and statutory ESD precautions when
handling this product.
Warranty
SENSIRION warrants solely to the original purchaser of this product for
a period of 12 months (one year) from the date of delivery that this
product shall be of the quality, material and workmanship defined in
SENSIRION’s published specifications of the product. Within such
period, if proven to be defective, SENSIRION shall repair and/or
replace this product, in SENSIRION’s discretion, free of charge to the
Buyer, provided that:
notice in writing describing the defects shall be given to
SENSIRION within fourteen (14) days after their appearance;
such defects shall be found, to SENSIRION’s reasonable
satisfaction, to have arisen from SENSIRION’s faulty design,
material, or workmanship;
the defective product shall be returned to SENSIRION’s factory at
the Buyer’s expense; and
the warranty period for any repaired or replaced product shall be
limited to the unexpired portion of the original period.
This warranty does not apply to any equipment which has not been
installed and used within the specifications recommended by
SENSIRION for the intended and proper use of the equipment.
EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH
HEREIN, SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS
OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL
WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES
OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED.
SENSIRION is only liable for defects of this product arising under the
conditions of operation provided for in the datasheet and proper use of
the goods. SENSIRION explicitly disclaims all warranties, express or
implied, for any period during which the goods are operated or stored
not in accordance with the technical specifications.
SENSIRION does not assume any liability arising out of any application
or use of any product or circuit and specifically disclaims any and all
liability, including without limitation consequential or incidental
damages. All operating parameters, including without limitation
recommended parameters, must be validated for each customer’s
applications by customer’s technical experts. Recommended
parameters can and do vary in different applications.
SENSIRION reserves the right, without further notice, (i) to change the
product specifications and/or the information in this document and (ii) to
improve reliability, functions and design of this product.
Copyright © 2001-2016, SENSIRION.
CMOSens® is a trademark of SENSIRION.
All rights reserved.
REACH, RoHS and WEEE Statement
The flow meters of the LG16 Series comply with requirements of the
following directives:
EU Directive 1907/2006/EC concerning Registration, Evaluation,
Authorization and Restriction of Chemicals (REACH)
EU Directive 2002/96/EC on waste electrical and electronic
equipment (WEEE), OJ13.02.2003; esp. its Article 6 (1) with Annex II.
EU Directive 2002/65/EC on the restriction of certain hazardous
substances in electric and electronic equipment (RoHS),
OJ01.01.2011
Headquarters and Subsidiaries
SENSIRION AG
Laubisruetistr. 50
CH-8712 Staefa ZH
Switzerland
phone: +41 44 306 40 00
fax: +41 44 306 40 30
info@sensirion.com
www.sensirion.com
Sensirion Inc., USA
phone: +1 805 409 4900
info_us@sensirion.com
www.sensirion.com
Sensirion Japan Co. Ltd.
phone: +81 3 3444 4940
info-jp@sensirion.com
www.sensirion.co.jp
Sensirion Korea Co. Ltd.
phone: +82 31 337 7700-3
info-kr@sensirion.com
www.sensirion.co.kr
Sensirion China Co. Ltd.
phone: +86 755 8252 1501
info-cn@sensirion.com
www.sensirion.com.cn
Sensirion Taiwan Co. Ltd.
info@sensirion.com
www.sensirion.com
To find your local representative, please visit www.sensirion.com/contact