S9682 and S9683 are Si photodiodes specifically designed to detect VUV (vacuum ultraviolet) radiation with high reliability. These photodiodes
are hermetically sealed in a metal package with a quartz window. There is no outgassing from the inside of the package, eliminating the cause of
decrease in VUV sensitivity.
Features
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Highly stable sensitivity and dark current against
ArF excimer laser radiation (λ=193 nm)
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Hermetically sealed metal package with quartz window
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Large active area:
S9682: 5.8 × 5.8 mm (TO-8 metal package)
S9683: 10 × 10 mm (1 inch metal package)
Applications
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ArF excimer laser detection
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UV detection
PHOTODIODE
Si photodiode
Highly reliable photodiode for VUV detection
S9682, S9683
1
■ Absolute maximum ratings (Ta=25 °C)
Parameter Symbol Value Unit
Reverse voltage VR Max. 5 V
Operating temperature Topr -40 to +100 °C
Storage temperature Tstg -55 to +125 °C
■ Electrical and optical characteristics (Ta=25 °C)
S9682 S9683
Parameter Symbol Condition Min. Typ. Max. Min. Typ. Max. Unit
Spectral response range λ-193 to
1000 --
193 to
1000 -nm
Peak sensitivity wavelength λp-760 - - 760 -nm
Photo sensitivity S λ=193 nm 45 60 - 45 60 - mA/W
Dark current IDVR=10 mV -0.02 0.5 -0.05 1.0 nA
Terminal capacitance Ct VR=0 V, f=10 kHz - 1.0 - - 4.0 - nF
Rise time tr VR=0 V, RL=1 kΩ
10 to 90 % - 2 - - 9 - µs
Si photodiode
S9682, S9683
2
■ Variation in sensitivity due to VUV exposure
KSPDA0165EC
■ Dimensional outlines (unit: mm)
S9682 S9683
KSPDA0166EA
CONVENTIONAL TYPE
S9682, S9683
RELATIVE SENSITIVITY (%)
NUMBER OF SHOT
[Typ. ArF excimer laser, 0.1 mJ/cm
2
/pulse, f=100 Hz, λ=193 nm, pulse width=15 ns (FWHM)]
5 × 106
1 × 106
01 × 107
40
20
60
80
100
120
KSPDB0254EA
Y
13.9 ± 0.2
12.35 ± 0.1
9.1 ± 0.1
X
0.085
ACTIVE AREA
5.8 × 5.8
2.0
(15.0) 4.5 ± 0.2
0.5 MAX.
PHOTOSENSITIVE
SURFACE
QUARTZ WINDOW
0.45
LEAD
7.5 ± 0.2
Center of active area relative
to center of cap
-0.485≤X≤+0.315
-0.4≤Y≤+0.4
ANODE TERMINAL MARK
1.4
COMMON TO CASE
42.0 ± 0.3
34.0 ± 0.2
WINDOW
16.0 ± 0.2
(2 ×) 4
7.1 ± 0.3
19 ± 0.5
QUARTZ WINDOW (t=1.0)
PHOTOSENSITIVE
SURFACE
7.62 ± 0.2 (1.9)
( 24.5)
27.4 ± 0.2
COMMON TO CASE
ACTIVE AREA
10 × 10
Si photodiode
S9682, S9683
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1 int. 6, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741
Information described in this material is current as of June, 2011. Product specifications are subject to change without pr ior notice due to improvements or other reasons. Before assembly into final products, please contact us for the
delivery specification sheet to check the latest information.
Type numbers of products listed in the delivery specification sheets or supplied as samples may hav e a suffix "(X)" which means preliminary specifications or a suffix "(Z)" which means developmental specifications.
The product warranty is valid for one year after deliver y and is limited to product repair or replacement for defects discovered and repor ted to us within that one year period. However, even if within the warranty period we accept
absolutely no liability for any loss caused by natural disasters or improper product use.
Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission.
Cat. No. KSPD1069E03
Jun. 2011 DN 3
