Amplified Low Pressure Sensors 1 mbar (0.4 In H2O) to 30 In H2O Pressure Sensors Industrial Temperature Grade Features * 0 to 1 mbar to 0 to 30 In H2O Pressure Ranges * Ratiometric 4V Output * Temperature Compensated (-25C to 85C) * Calibrated Zero and Span Applications * Medical Instrumentation * Environmental Controls * HVAC General Description The Amplified line of low pressure sensors is based upon a proprietary technology to reduce all output offset or common mode errors. This model provides a ratiometric 4-volt output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The output of the device is ratiometric to the supply voltage over a supply voltage range of 4.5 to 5.5 volts. Physical Dimensions 0.25 (6.4) Pin Size 0.010 x 0.020 (0.25 x 0.50) 0.10 Typical (2.54) 0.174 to 0.190 (4.4 to 4.8) Pin 1 2 3 4 pin 1: Vsupply 0.21 (5.3) 1 0.42 (10.5) A 1.08 (27.4) pin 2: Common pin 3: Voutput pin 4: do not 0.66 (16.0) 0.48 (12.2) 0.55 (14.0) NOTES: 1) Dimensions in inches (millimeters) connect B 0.80 (20.3) 0.85 (21.6) 1.10 (27.9) 2-3 2 Environmental Specifications Pressure Sensor Ratings +4.5 to +5.5 Vdc Supply Supply Voltage VS Temperature Ranges -10 to +10 psig Common-mode pressure Compensated 250C Lead Temperature, max (soldering 2-4 sec.) -25 to 85 C Operating -40 to 125 C Storage -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges Operating Pressure Nominal Span Proof Pressure Burst Pressure 1 mbar 4V 100 In H2O 200 In H2O 1 INCH-D-4V-PRIME 1 In H2O 4V 100 In H2O 200 In H2O 1 INCH-G-4V-PRIME 0 - 1 In H2O 4V 300 In H2O 200 In H2O 5 INCH-D-4V-PRIME 5 In H2O 4V 200 In H2O 300 In H2O 5 INCH-G-4V-PRIME 0 - 5 In H2O 4V 200 In H2O 300 In H2O 10 INCH-D-4V-PRIME 10 In H2O 4V 200 In H2O 300 In H2O 10 INCH-G-4V-PRIME 0 - 10 In H2O 4V 200 In H2O 300 In H2O 20 INCH-D-4V-PRIME 20 In H2O 4V 300 In H2O 500 In H2O 20 INCH-G-4V-PRIME 0 - 20 In H2O 4V 300 In H2O 500 In H2O 30 INCH-D-4V-PRIME 30 In H2O 4V 500 In H2O 800 In H2O 30 INCH-G-4V-PRIME 0 - 30 In H2O 4V 500 In H2O 800 In H2O Part Number 1 MBAR-D-4V-PRIME Performance Characteristics for: 1 MBAR-D-4V-PRIME Parameter, NOTE 1 Minimum Operating Range, differential pressure Output Span, NOTE 5 Offset Warm-up Shift, NOTE NOTE 2.0 2.20 volt 2.25 2.50 volt 120 mvolt 2 20 mvolt 40 mvolt Offset Long Term Drift (one year) 20 Linearity, hysteresis error, 0.05 4 NOTE mbar 2.00 Offset Position Sensitivity (1g) Span Shift (-25C to 85C), Units 1.80 3 NOTE Maximum 1.0 Offset Voltage @ zero differential pressure Offset Temperature Shift (-25C to 85C), Nominal 2 2-4 mvolt 0.25 %fs 4 %span Performance Characteristics for 1 INCH-D-4V-PRIME Minimum Parameter, note 1 Output Span, note 5 NOTE NOTE Units "H2O 1.90 2.0 2.10 volt 2.15 2.25 2.35 volt 60 mvolt Offset Voltage @ zero differential pressure Offset Warm-up Shift, Maximum 1.0 Operating Range, differential pressure Offset Temperature Shift (-25C to 85C), Nominal 2 3 10 mvolt 5 mvolt Offset Long Term Drift (one year) 10 mvolt Linearity, hysteresis error, 0.05 Offset Position Sensitivity (1g) NOTE Span Shift (-25C to 85C), 4 NOTE 2 0.25 %fs 2 %span Maximum Units Performance Characteristics for 1 INCH-G-4V-PRIME Minimum Parameter, note 1 Nominal "H2O 1.0 Operating Range, gage pressure Output Span, note 5 Offset Voltage @ zero pressure Offset Temperature Shift (-25C to 85C), NOTE volt 3.90 4.0 4.10 0.15 0.25 0.35 volt 60 mvolt 2 10 mvolt Offset Position Sensitivity (1g) 15 mvolt Offset Long Term Drift (one year) 10 mvolt Linearity, hysteresis error, 0.05 Offset Warm-up Shift, NOTE 3 NOTE Span Shift (-25C to 85C), 4 NOTE 2 0.25 %fs 2 %span Maximum Units Performance Characteristics for 5 INCH-D-4V-PRIME Parameter, note 1 Minimum Operating Range, differential pressure 5.0 Output Span, note 5 Offset Warm-up Shift, NOTE NOTE 2.0 2.10 volt 2.15 2.25 2.35 volt 40 mvolt 2 3 Offset Position Sensitivity (1g) Offset Long Term Drift (one year) Linearity, hysteresis error, NOTE Span Shift (-25C to 85C), 5 mvolt 5 mvolt 5 4 NOTE "H2O 1.90 Offset Voltage @ zero differential pressure Offset Temperature Shift (-25C to 85C), Nominal 0.05 2 2-5 mvolt 0.25 %fs 1 %span 2 Performance Characteristics for: 5 INCH-G-4V-PRIME Parameter, NOTE Minimum 1 Nominal NOTE 5 Offset Voltage @ zero pressure Offset Temperature Shift (-25C to 85C), NOTE Units "H2O 5.0 Operating Range, gage pressure Output Span, Maximum volt 3.90 4.0 4.10 0.15 0.25 0.35 volt 40 mvolt 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE Linearity, hysteresis error, 3 NOTE Span Shift (-25C to 85C), 0.05 4 NOTE 2 0.25 %fs 1 %span Maximum Units Performance Characteristics for: 10 INCH-D-4V-PRIME Parameter, NOTE Minimum 1 Nominal Output Span, NOTE 5 NOTE volt 1.90 2.0 2.10 2.15 2.25 2.35 volt 20 mvolt Offset Voltage @ zero differential pressure Offset Temperature Shift (-25C to 85C), "H2O 10.0 Operating Range, differential pressure 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE Linearity, hysteresis error, 3 NOTE Span Shift (-25C to 85C), 0.05 4 2 NOTE 0.25 %fs 1 %span Maximum Units Performance Characteristics for: 10 INCH-G-4V-PRIME Parameter, NOTE 1 Minimum Operating Range, gage pressure Output Span, NOTE 10.0 5 Offset Voltage @ zero pressure Offset Temperature Shift (-25C to 85C), Offset Warm-up Shift, NOTE NOTE 3 Offset Long Term Drift (one year) NOTE Span Shift (-25C to 85C), 4.0 4.10 volt 0.15 0.25 0.35 volt 20 mvolt 5 mvolt 5 mvolt 5 4 NOTE "H2O 3.90 2 Offset Position Sensitivity (1g) Linearity, hysteresis error, Nominal 0.05 2 2-6 mvolt 0.25 %fs 1 %span Performance Characteristics for 20 INCH-D-4V-PRIME Minimum Parameter, note 1 Maximum Output Span, note 5 volt 1.90 2.0 2.10 2.15 2.25 2.35 volt 20 mvolt Offset Voltage @ zero differential pressure NOTE Units "H2O 20.0 Operating Range, differential pressure Offset Temperature Shift (-25C to 85C), Nominal 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE Linearity, hysteresis error, 3 NOTE Span Shift (-25C to 85C), 0.05 4 NOTE 2 0.25 %fs 1 %span Maximum Units Performance Characteristics for 20 INCH-G-4V-PRIME Minimum Parameter, note 1 Nominal "H2O 20.0 Operating Range, gage pressure Output Span, note 5 3.90 4.0 4.1 volt Offset Voltage @ zero pressure 0.15 0.25 0.35 volt 20 mvolt Offset Temperature Shift (-25C to 85C), Offset Warm-up Shift, NOTE NOTE 2 3 Offset Position Sensitivity (1g) NOTE Span Shift (-25C to 85C), mvolt 0.05 4 NOTE mvolt 5 mvolt 5 Offset Long Term Drift (one year) Linearity, hysteresis error, 5 2 0.25 %fs 1 %span Maximum Units Performance Characteristics for 30 INCH-D-4V-PRIME Parameter, note 1 Minimum Operating Range, differential pressure 30.0 Output Span, note 5 Offset Warm-up Shift, NOTE "H2O 1.90 2.0 2.10 volt 2.15 2.25 2.35 volt 20 mvolt Offset Voltage @ zero differential pressure Offset Temperature Shift (-25C to 85C), Nominal 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt NOTE Linearity, hysteresis error, 3 NOTE Span Shift (-25C to 85C), 4 NOTE 0.05 2 2-7 0.25 %fs 1 %span 2 Performance Characteristics for 30 INCH-G-4V-PRIME Parameter, NOTE Minimum 1 NOTE Maximum 5 Offset Voltage @ zero pressure Offset Temperature Shift (-25C to 85C), NOTE Units "H2O 30.0 Operating Range, gage pressure Output Span, Nominal 3.9 4.0 4.1 volt 0.15 0.25 0.35 volt 20 mvolt 2 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Offset Warm-up Shift, NOTE Linearity, hysteresis error, 3 NOTE Span Shift (-25C to 85C), 0.05 4 NOTE 2 0.25 %fs 1 %span Equivalent Circuit Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 500 useconds. Specification Notes NOTE 1: ALL PARAMETERS ARE MEASURED AT UNLESS OTHERWISE SPECIFIED. 5.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. 2: SHIFT IS RELATIVE TO 25C. 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. NOMINALLY THE OUTPUT VOLTAGE RANGE IS 0.25 TO 4.25 VOLTS FOR MINUS TO PLUS FULL SCALE PRESSURE. NOTE NOTE All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 2-8