Flat panel sensor C10322D High sensitivity, high-speed imaging, bare bone type Photodiode area: 124.8 x 124.8 mm The C10322D is a digital X-ray image sensor assembled on a board that can be easily installed in an equipment enclosure. It operates at a frame rate of 30 frames/s, making it suitable for high-speed X-ray imaging such as cone beam CT. Features Applications For assembly into equipment (supplied without case) Cone beam CT High sensitivity: 6000 LSB/mR (directly deposited CsI scintillator) Digital radiography, etc. High-speed imaging: 30 frames/s 12 x 12 cm (624 x 624 pixel) Flat panel structure wituout image distortion 13-bit digital output Wide dynamic range Structure The C10322D is comprised of a sensor board and a control board. Mounted on the sensor board is a CMOS image sensor chip made up of a twodimensional photodiode array, row-scanning vertical shift register, and 8 charge amplifier arrays. Each charge amplifier array has a horizontal shift register and consists of 78 ch charge amplifiers with CDS circuit. CsI scintillator is directly deposited on the two-dimensional photodiode array. X-rays incident on the scintillator are converted to fluorescence, which then enters the two-dimensional photodiode array where electric charge is accumulated in each pixel according to the light intensity. The accumulated charge on each row is sequentially selected by the row-scanning vertical shift register, transferred to the amplifiers through the data line, and converted to a voltage signal. Then an analog signal is sent out from each amplifier array by scanning the horizontal shift register. The control board converts the analog signal into a 13-bit digital signal, which is then sent to a frame grabber board as a 13-bit parallel output through one port. Block diagram (C9250DP, C10322D) Sensor board Pixel number 1 2 623 625 1247 1248 Vertical shift register 624 Photodiode array with directly deposited CsI scintillator 389375 Charge amp array No. 1 (with horizontal shift register, 78 ch) 389376 External power supply A.vdd, D.vdd (not attached) IntExt Timing pulse generator Charge amp array No. 8 (with horizontal shift register, 78 ch) Oscillator ExtTrgGrb Vsync Hsync Pclk Bias generator Buffer amp Processing amp A/D FIFO Buffer amp Processing amp A/D FIFO Video output (13-bit digital) Control board Note: Signals are read out in order of pixel number. KACCC0237EB KACCC0237EB www.hamamatsu.com 1 Flat panel sensor C10322D General ratings Parameter Pixel size Photodiode area Number of pixels Number of active pixels Readout Video output (Data1-13) Output data rate Synchronous signal (Vsync, Hsync, Pclk) ExtTrgGrb, IntExt Scintillator Specification 200 x 200 124.8 x 124.8 624 x 624 608 x 616 Charge amplifier array LVDS (differential), 13-bit 15.15 LVDS (differential) TTL Directly deposited CsI Unit m mm pixels pixels MHz - Absolute maximum ratings (Ta=25 C) Parameter Supply voltage for digital circuitry (+5 V) Supply voltage for analog circuitry (+5 V) Input voltage (ExtTrgGrb, IntExt) Operating temperature *1 Storage temperature *1 Incident X-ray energy Symbol D.vdd A.vdd Vin Topr Tstg - Value +6.0 +6.0 0 to 6.0 0 to +35 0 to +50 90 Unit V V V C C kVp *1: No condensation Specifications (Ta=25 C, A.vdd=5.0 V, D.vdd=5.0 V) Symbol Sf(int) Sf(ext) N(rms) Csat S Reso - Internal trigger mode, single operation At 80 kVp, acrylic filter 170 mm Spatial frequency at CTF=5 % A defect line is a horizontal or vertical line containing 4 or more cosecutive pixels located at the opposite side of an amplifier array or a shift register, that produce 5/8 of the average sensitivity of the surrounding pixels. Adjacent defective lines are not allowed in the vertical or horizontal directions. *6: See P. 6, 7, "Description of terms" *7: Average of all effective pixels in single operation at Sf(int) Note: X-ray energy range is 20 k to 90 kVp. *2: *3: *4: *5: Min. 28.5 4800 2 - Typ. 30 Sf(int) to 10 2600 8.3 6000 2.5 3200 Not allowed 130 - Max. 10 600 4 Unit frames/s frames/s electrons M electrons LSB/mR line pairs/mm lines m % % LSB 120 400 Resolution (Ta=25 C, A.vdd=5.0 V, D.vdd=5.0 V) 100 90 80 70 CTF (%) Parameter Frame rate (single operation) Frame rate external Noise (rms) *2 Saturation charge Sensitivity *3 Resolution *4 Dynamic range Defect line *5 Blemish *6 Non-uniformity of sensitivity *6 Defect cluster *6 Bright line output adjacent to a defect line *6 Output offset *7 60 50 40 30 20 10 0 0 0.5 1 1.5 2 2.5 Spatial frequency (line pairs/mm) KACCB0188EA 2 Flat panel sensor C10322D Timing chart Internal trigger mode To acquire images through a frame grabber board, write parameters in the software program or parameter file by referring to the following timing chart and description. 1 frame (Tvc) Dummy lines Vsync+ (grabber) 1st row 2nd row Tvdpw 1st row 2nd row He Last row All pulses are counted in the "High" period of Hsync+ Hsync+ (grabber) Enlarged view Vsync+ (grabber) 1st row 2nd row Hsync+ (grabber) Phe Pg Phe Phd Phe Phd Pclk+ (grabber) All pulses are counted at the riging edge of Pclk+. The effective video output is only included in the "Phe" period. Hsync+ are output continuously while Vsync+ is low. KACCC0361EC Parameter Count 616 8 608 16 177 157 Effective line Dummy line Effective pixel Dummy pixel He Phe Phd Pg Note: "He" is the Hsync count. Phe, Phd and Pg are the Pclk count. External trigger mode To acquire images in external trigger mode, input an external trigger pulse as shown below. When the time Tvd has passed after the rising edge of the external trigger pulse, synchronous signals and video signals are obtained. When used in synchronization with a pulsed X-ray source, X-rays should be irradiated during the Txray period. Mode Internal trigger mode External trigger mode 40-pin receptacle Pin No. A17 Pin No. B17 (ExtTrgGrb) (IntExt) (Input signal is Low ignored) Rectangular signal High (See the right figure.) Frame time (Tvc to Tmax) Recommendation: 50 % of frame time ExtTrgGrb (TTL) Tvd Tvc - Tvdpw Txray Tvl Vsync+ (LVDS) Hsync+, Pclk+ and effective video output are the same as internal trigger mode. * Tmax is defined as the reciprocal of the minimum value of Sf (ext). * Txray = Frame time - Tvd - (Tvc - Tvdpw) * Tvl = Frame time - (Tvc - Tvdpw) KACCC0393EB (Typ.) Vsync Parameter Delay time (only external trigger mode) Cycle time (internal trigger mode) Pulse width of Vsync+ in low period (internal trigger mode) Symbol Tvd Tvc Tvdpw Single operation 65 33.3 240 Unit s ms s Note: The numbers of significant figures is two. (except Tvc) 3 Flat panel sensor C10322D System requirements To operate the C10322D at full performance, the following system and peripherals are required. O PC: IBM compatible PC running on Windows XP O Frame grabber board: Monochrome 16 bits or more, pixel clock 15.15 MHz or more, LVDS interface synchronous signal * See the frame grabber board manual. * Operation of the C10322D has been verified with the following frame grabber boards. IMAQ PCI-1424 (NI parts No.777662-02 *8) + Optional memory 64 MB (NI parts No.920130-64 *8) IMAQ PCI-1422 (NI parts No.777959-02 *8) * You can utilize the demonstration software that comes with the frame grabber board as a simple viewer, to acquire and save an image. Refer to the frame grabber board user's guide for how to use the camera information file for the demonstration software. O Power source: A.vdd = +5.0 0.1 V (900 mA), D.vdd = +5.0 0.1 V (250 mA) * The voltages described above are specified at the flat panel sensor side. * Please use a low noise series power supply. (Avoid using a switching power supply.) * Install a noise filter on the AC power input line to prevent surges on the AC line. * Always ground the fixing plate to avoid the effects of noise from peripheral devices. The power cable, frame grabber board cable, earth cable, image acquisition software, and image processing libraries are excluded from with the flat panel sensor. *8: Made by NI (National Instruments Corporation) Pin connection [Table 1] Pin assignment of 40-pin receptacle B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 B11 B12 B13 B14 B15 B16 B17 B18 B19 B20 BOARD SIDE A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 KACCC0356EA Pin No. A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 Signal Data1+ (LSB) Data2+ Data3+ Data4+ Data5+ Data6+ Data7+ Data8+ Data9+ Data10+ Data11+ Data12+ Data13+ (MSB) Reserved Reserved Reserved ExtTrgGrb (TTL) Vsync+ Hsync+ Pclk+ Pin No. B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 B14 B15 B16 B17 B18 B19 B20 Signal Data1- (LSB) Data2Data3Data4Data5Data6Data7Data8Data9Data10Data11Data12Data13- (MSB) Reserved GND GND IntExt (TTL) VsyncHsyncPclk- Unless otherwise noted, signal level is LVDS. 40-pin receptacle: 8931E-040-178LF (KEL Corporation) Mating plug: 8925R-040-179F (KEL Corporation) Pins described "Reserved" are prepared for an extention of the future. Do not connect any signal or power or GND to this plug. 4 Flat panel sensor C10322D [Table 2] Power pin assignment Pin No. 1 2 3 4 5 Signal Digital GND Digital +5 V Analog GND Analog +5 V Shield (analog GND) Power plug: 51067-0500 (Molex Japan Co., Ltd.) Power receptacle: 53259-0529 (Molex Japan Co., Ltd.) Connection Install the frame grabber board into the PC by the manufacture's instructions. When a general-purpose frame grabber board with I/O control is used, the trigger mode can be set by controlling IntExt and ExtTrgGrb through the I/O line. OS + image acquisition software Video output (13-bit digital) Vsync, Hsync, Pclk Frame grabber board PC/AT (Rear view) Monitor IntExt ExtTrgGrb C10322D X-ray source Voltage source (A.vdd, D.vdd) Object KACCC0357EA 5 Flat panel sensor C10322D Dimensional outline (unit: mm, tolerance: 1 mm unless otherwise noted) 16 6.6 4 168 0.6 18 14 11 40.3 43.3 7 1.5 36.5 35.3 50.5 3.5 3 5.9 4 168 Active area 121.6 17.5 31.5 62 48 73.8 177 Active area 123.2 (607, 615) Scintillator to top cover 2.5 22 29 14 (0, 0) Top cover is made of carbon fiber (1.0 mm thickness). Weight: 1.2 kg KACCA0198EB Description of terms Blemish Length of pixel cluster which has less sensitivity than 90 % of the average sensitivity of the surrounding pixels. Bright line output adjacent to a defect line A B C D E F G H I The relative sensitivity ratio "a/b" should be 120 % or less for both vertical and horizontal lines, where "a" and "b" are defined as follows: Example: See the right figure Defect region in defect line: From pixel (J, 1) to pixel (J, 15) a: Average sensitivity from pixel (I, 1) to pixel (I, 15) or from pixel (K, 1) to pixel (K, 15) b: Average sensitivity from pixel (H, 1) to pixel (H, 15) or from pixel (L, 1) to pixel (L, 15) Row a: Average sensitivity of bright line (Line A) adjacent to defect line b: Average sensitivity of standard line (Line B) adjacent to Line A Note that the average sensitivity of the bright line is calculated from the region adjacent to the defect region in the defect line. Column 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 J K L M N O P Q R S Line B (Column H, L) Line A (Column I, K) Defect line (Column J) KACCC0385EB Defect cluster Formed with more than 3 x 3 pixels which have less sensitivity than 5/8 of the average sensitivity of the surrounding pixels. This is defined as defect cluster. Normal pixel This is not defined as defect cluster. Defective pixel KACCC0384EB 6 Flat panel sensor C10322D Non-uniformity of sensitivity 16 x 16 segments are 16 x 16-divided active area excluded 1 mm from the whole edge. Xij is defined as the average sensitivity of each segment. Uniformity of sensitivity is calculated as following equation. Non-unifomity of sensitivity = x : standard deviation of 16 x 16 "Xij" x : average value of 16 x 16 "Xij" 38 pixels 38 pixels 5 28 pixels PIXELS 5 38 pixels 38 pixels pixels 1 mm 5 pixels 38 pixels *********** 5 pixels 36 pixels 38 pixels Active area *********** *********** 16 segments 16 segments *********** 1 mm *********** 1 mm 1 mm Active area KACCC0429EA Notice * Do not subject the flat panel sensors to strong vibration or shock. (Strong shock such as drop impacts may cause permanent damage to these sensors.) * Users must take responsibility for implementing X-ray shielding safety measures to avoid the risk of X-ray exposure. * Data listed in this datasheet was measured at the time of shipment. Characteristics may vary somewhat due to exposure to X-rays so take proper countermeasures such as making periodic image correction. * This product is warranted for a period of 12 months after the date of the shipment. The warranty is limited to replacement or repair of any defective product due to defects in workmanship or materials used in manufacture. The warranty does not cover loss or damage caused by natural disaster, misuse (including modifications and any use not complying with the environment, application, usage and storage conditions described in this datasheet), or total radiation dose over 25000 Roentgen (incident X-ray energy: less than 90 kVp) even within the warranty period. * As described above, flat panel sensors have limited resistance to radiation. This must be taken into account when using a flat panel sensor under continuous irradiation (in-line non-destructive inspection, etc.) When using flat panel sensors in non-destructive inspection equipment, please contact us and provide information such as irradiation conditions. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. (c)2008 Hamamatsu Photonics K.K. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvagen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 Cat. No. KACC1132E06 Jul. 2008 DN 7