2611B-US - KEITHLEY - Datasheet.Live

SMU INSTRUMENTS

www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Conﬁdence

The Series 2600B System SourceMeter SMU Instruments are the industry’s leading current/voltage

source and measure solutions, and are built from Keithley’s third generation SMU technology. The

Series 2600B offers single- and dual-channel models that combine the capabilities of a precision

power supply, true current source, 6½-digit DMM, arbitrary waveform generator, pulse generator,

and electronic load – all into one tightly integrated instrument. The result is a powerful solution that

significantly boosts productivity in applications ranging from bench-top I-V characterization through

highly automated production test. For bench-top use, Series 2600B SMU instruments feature built-

in, Java-based software that enables plug & play I-V testing through any browser, on any computer,

from anywhere in the world. For automated system applications, the Series 2600B’s Test Script

Processor (TSP®) runs complete test programs from inside the instrument for industry-best through-

put. In larger, multi-channel applications, Keithley’s TSP-Link® Technology works together with TSP

Technology to enable high-speed, SMU-per-pin parallel testing. Because Series 2600B SourceMeter

SMU Instruments have fully isolated channels that do not require a mainframe, they can be easily

reconfigured and re-deployed as your test applications evolve.

Java-based Plug & Play I-V Test Software

The Series 2600B are the only SMU instruments to feature built-in, Java-based test software that

enables true plug & play I-V characterization through any browser, on any computer, from anywhere

in the world. This unique capability boosts productivity across a wide range of applications such as

R&D, education, QA/FA, and more. Simply connect the 2600B to the internet via the supplied LAN

cable, open a browser, type in the 2600B’s I.P. address, and begin testing. Resulting data can be

downloaded to a spreadsheet such as Excel for further analysis and formatting, or for inclusion in

other documents or presentations.

• Tightly integrated, 4-quadrant

voltage/current source and

measure instruments offer

best in class performance with

6½-digit resolution

• Family of models offer

industry’s widest dynamic

range: 10A pulse to 0.1fA and

200V to 100nV

• Built-in, Java-based test

software enables true plug &

play I/V characterization and

test through any browser.

• TSP (Test Script Processing)

technology embeds complete

test programs inside the

instrument for best-in-class

system-level throughput

• TSP-Link expansion technology

for multi-channel parallel test

without a mainframe

• Software emulation for

Keithley’s Model 2400

SourceMeter SMU Instrument

• USB 2.0, LXI-C, GPIB, RS-232,

and digital I/O interfaces

• Free software drivers and

development/debug tools

• Optional ACS-Basic

semiconductor component

characterization software

Series 2600B

System SourceMeter® SMU Instruments

Scalable, integrated source and measure solutions

Built-in, Java-based test software runs directly

from any web browser to boost productivity.

SMU INSTRUMENTS

A Greater Measure of Conﬁdence

www.keithley.com

1.888.KEITHLEY (U.S. only)

Ordering Information

2601B Single-channel System

SourceMeter SMU Instrument

(3A DC, 10A Pulse)

2602B Dual-channel System

SourceMeter SMU Instrument

(3A DC, 10A Pulse)

2604B Dual-channel System

SourceMeter SMU

Instrument (3A DC, 10A

Pulse, Benchtop Version)

2611B Single-channel System

SourceMeter SMU Instrument

(200V, 10A Pulse)

2612B Dual-channel System

SourceMeter SMU Instrument

(200V, 10A Pulse)

2614B Dual-channel System

SourceMeter SMU

Instrument (200V, 10A

Pulse, Benchtop Version)

2634B Dual-channel System

SourceMeter SMU

Instrument (1fA, 10A Pulse,

Benchtop Version)

2635B Single-channel System

SourceMeter SMU Instrument

(0.1fA, 10A Pulse)

2636B Dual-channel System

SourceMeter SMU Instrument

(0.1fA, 10A Pulse)

Accessories Supplied

Operators and Programming Manuals

2600-ALG-2: Low Noise Triax

Cable with Alligator Clips, 2m

(6.6 ft.) (two supplied with 2634B

and 2636B, one with 2635B)

2600-Kit: Screw Terminal

Connector Kit (2601B/

2602B/2604B/2611B/2612B/2614B)

2600B-800A: Series 2400 Emulation

Script for Series 2600B (supplied

on USB memory stick)

7709-308A: Digital I/O Connector

CA-180-3A: TSP-Link/Ethernet

Cable (two per unit)

TSP Express Software Tool (embedded)

Test Script Builder Software (supplied

on CD)

LabVIEW Driver (supplied on CD)

ACS Basic Edition Software (optional)

Unmatched Throughput for

Automated Test with TSP Technology

For test applications that demand the highest

levels of automation and throughput, the Model

2600B’s TSP technology delivers industry-best

performance. TSP technology goes far beyond

traditional test command sequencers… it fully

embeds then executes complete test programs

from within the SMU instrument itself. This

virtually eliminates all the time-consuming bus

communications to and from the PC control-

ler, and thus dramatically improves overall

test times.

• Conditional branching

• Advanced calculations

and flow control

• Variables

• Pass/Fail test

• Prober/Handler control

• Datalogging/

Formatting

Test Script

DUT

TSP technology executes complete test pro-

grams from the 2600B’s non-volatile memory.

SMU-Per-Pin Parallel Testing

with TSP-Link Technology

TSP-Link is a channel expansion bus that enables

multiple Series 2600B’s to be inter-connected

and function as a single, tightly-synchronized,

multi-channel system. The 2600B’s TSP-Link

Technology works together with its TSP technol-

ogy to enable high-speed, SMU-per-pin parallel

testing. Unlike other high-speed solutions such

as large ATE systems, the 2600B achieves parallel

test performance without the cost or burden of

a mainframe. The TSP-Link based system also

enables superior flexibility, allowing for quick

and easy system re-configuration as test require-

ments change.

Model 2400 Software Emulation

The Series 2600B is compatible with test

code developed for Keithley’s Model 2400

SourceMeter SMU instrument. This enables

an easier upgrade from Model 2400-based

test systems to Series 2600B, and can improve

test speeds by as much as 80%. In addition, it

provides a migration path from SCPI program-

ming to Keithley’s TSP technology, which when

implemented can improve test times even more.

For complete support of legacy test systems, the

Model 2400’s Source-Memory-List test sequencer

is also fully supported in this mode.

Third-generation SMU Instrument

Design Ensures Faster Test Times

Based on the proven architecture of earlier Series

2600 instruments, the Series 2600B’s SMU instru-

ment design enhances test speed in several ways.

For example, while earlier designs used a parallel

current ranging topology, the Series 2600B uses a

patented series ranging topology, which provides

faster and smoother range changes and outputs

that settle more quickly.

SMU1

<500ns

SMU2

SMU3

SMU4

All channels in the TSP-Link system are

synch ronized to under 500ns.

Scalable, integrated source and measure solutions

Series 2600B

System SourceMeter® SMU Instruments

Test 1

running

Device 1

GPIB, USB, or Ethernet

TSP-Link

Test 2

running

Device 2

Test 3

running

Device 3

SMU-Per-Pin Parallel Testing using TSP and TSP-Link improves test throughput and lowers the

cost of test.

SMU INSTRUMENTS

www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Conﬁdence

The Series 2600B SMU instrument design sup-

ports two modes of operation for use with a vari-

ety of loads. In normal mode, the SMU instru-

ment provides high bandwidth performance

for maximum throughput. In high capacitance

(high-C) mode, the SMU instrument uses a slow-

er bandwidth to provide robust performance

with higher capacitive loads.

Simplify Semiconductor Component

Test, Verification, and Analysis

The optional ACS Basic Edition software

maximizes the productivity of customers who

perform packaged part characterization dur-

ing development, quality verification, or failure

analysis. Key features include:

• Rich set of easy-to-access test libraries

• Script editor for fast customization of

existing tests

• Data tool for comparing results quickly

• Formulator tool that analyzes captured curves

and provides a wide range of math functions

For more information about the ACS Basic

Edition software, please refer to the ACS Basic

Edition data sheet.

Powerful Software Tools

In addition to the embedded Java-based plug &

play software and optional ACS Basic Edition

software, the free Test Script Builder software

tool is provided to help users create, modify,

debug, and store TSP test scripts. Table 1

describes key features of Series 2600B soft-

ware tools.

Three New Dual-Channel Bench-

Top Models of Series 2600B Offer

Industry-Best Value and Performance

For applications that do not require leading-edge

system-level automation capabilities, Keithley

has expanded the Series 2600B to include 3 new

value-priced “bench-top” models – the 2604B,

2614B, and 2634B. These models offer similar

performance to Models 2602B, 2612B, and

2636B, respectively, however do not include TSP-

Link, Contact Check, and Digital I/O capabilities.

Complete Automated

System Solutions

Keithley’s S500 Integrated Test Systems are

highly configurable, instrument-based systems

for semiconductor characterization at the

device, wafer, or cassette level. Built on our

proven Series 2600B System SourceMeter SMU

instruments, our S500 Integrated Test Systems

Scalable, integrated source and measure solutions

Series 2600B System SourceMeter® SMU Instruments

When you need to acquire data on a packaged

part quickly, the wizard-based user interface

of ACS Basic Edition makes it easy to find and

run the test you want, like this common FET

curve trace test.

Table 1. Series 2600B software tools

Feature/

Functionality

ACS Basic Edition

Java-based Plug & Play Test Script Builder (TSB)

Description

Semiconductor

characterization software for

component test, verification,

and analysis

Quick Start Java-based Plug &

Play Tool for fast and easy I-V

testing, primarily for bench and

lab users

Custom script writing tool for

TSP instruments

Supported

hardware

Series 2400, Series 2600B,

4200-SCS Series 2600B Series 2600B, Series 3700

Supported

buses GPIB, LAN/LXI LAN/LXI GPIB, RS-232, LAN/LXI, USB

Functionality

Intuitive, wizard-based GUI,

Rich set of test libraries,

curve trace capability

Linear/Log Sweeps, Pulsing,

Custom sweeps, Single point

source-measures. Note: Uses

new 2600B’s new API’s for

precision timing and channel

synchronization

Custom scripts with total

ﬂexibility, full featured

debugger

Data

management

Formulator tool with wide

range of math functions .csv export User deﬁned

Installation Optional purchase Not necessary.

Embedded in the instrument.

Free Download or CD Install

on PC.

The flexible software architecture of ACS Basic

Edition allows configuring systems with a wide

range of controllers and test fixtures, as well as the

exact number of SourceMeter SMU instruments the

application requires.

provide innovative measurement features and

system flexibility, scalable to your needs. The

unique measurement capability, combined

with the powerful and flexible Automated

Characterization Suite (ACS) software, provides

a comprehensive range of applications and fea-

tures not offered on other comparable systems

on the market.

SMU INSTRUMENTS

A Greater Measure of Conﬁdence

www.keithley.com

1.888.KEITHLEY (U.S. only)

TYPICAL APPLICATIONS

I-V functional test and characterization of a wide

range of devices, including:

• Discrete and passive components

–Two-leaded – Sensors, disk drive heads,

metal oxide varistors (MOVs), diodes, zener

diodes, sensors, capacitors, thermistors

–Three-leaded – Small signal bipolar junction

transistors (BJTs), field-effect transistors

(FETs), and more

• Simple ICs – Optos, drivers, switches, sensors,

converters, regulators

• Integrated devices – small scale integrated (SSI)

and large scale integrated (LSI)

–Analog ICs

–Radio frequency integrated circuits (RFICs)

–Application specific integrated circuits (ASICs)

–System on a chip (SOC) devices

• Optoelectronic devices such as light-emitting

diodes (LEDs), laser diodes, high brightness

LEDs (HBLEDs), vertical cavity surface-emitting

lasers (VCSELs), displays

• Wafer level reliability

–NBTI, TDDB, HCI, electromigration

• Solar Cells

• Batteries

• And more...

Series 2600B System SourceMeter® SMU Instruments

Scalable, integrated source and measure solutions

+1.5A

+3A

+5A

–3A

–5A

+10A

–10A

–1A

+1A

–1.5A

+40V+6V

–6V +20V–20V 0V

+35V–35V–40V

Pulse

+1.5A

+10A

–10A

–1A

+1A

+0.1A

–0.1A

–1.5A

+200V+5V

–5V +20V–20V 0V

+180V–180V–200V

Pulse

+1.5A

+10A

–10A

–1A

+1A

+0.1A

–0.1A

–1.5A

+200V+5V

–5V +20V–20V 0V

+180V–180V–200V

Pulse

Models 2601B, 2602B, and 2604B I-V capability

Models 2611B, 2612B, and 2614B I-V capability

Models 2634B, 2635B, and 2636B I-V capability

In the first and third quadrants, Series 2600B SMU instruments operate as

a source, delivering power to a load. In the second and fourth quadrants,

they operate as a sink, dissipating power internally.

Model 2604B/2614B rear panel

(Single channels 2601B, 2611B, 2635B not shown)

Model 2636B rear panel

SMU INSTRUMENTS

www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Conﬁdence

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2601B,

2602B, and 2604B System SourceMeter® SMU instruments. Specifications are the standards against

which the Models 2601B, 2602B, and 2604B are tested. Upon leaving the factory, the 2601B,

2602B, and 2604B meet these specifications. Supplemental and typical values are non- warranted,

apply at 23°C, and are provided solely as useful information.

Accuracy specifications are applicable for both normal and high capacitance modes.

The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2601B,

2602B, and 2604B) or SourceMeter CHANNEL B (2602B and 2604B) terminals under the following

conditions:

1. 23°C ± 5°C, <70% relative humidity

2. After 2 hour warm-up

3. Speed normal (1 NPLC)

4. A/D auto-zero enabled

5. Remote sense operation or properly zeroed local operation

6. Calibration period = 1 year

SOURCE SPECIFICATIONS

VOLTAGE SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY1

Range

Programming

Resolution

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

Typical Noise

(peak-peak)

0.1Hz–10Hz

100 mV 5 µV 0.02% + 250 µV 20 µV

1 V 50 µV 0.02% + 400 µV 50 µV

6 V 50 µV 0.02% + 1.8 mV 100 µV

40 V 500 µV 0.02% + 12 mV 500 µV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 40.4W per channel maximum.

±40.4V @ ±1.0A, ±6.06V @ ±3.0A, four quadrant source or sink operation.

VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).

NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 6V range.

CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.

Minimum value is 10nA. Accuracy same as current source.

OV ERSHOOT: <±(0.1% + 10mV) typical. Step size = 10% to 90% of range, resistive load,

maximum current limit/compliance.

GUARD OFFSET VOLTAGE: <4mV typical. Current <10mA.

CURRENT SOURCE SPECIFICATIONS

CURRENT PROGRAMMING ACCURACY

Range

Programming

Resolution

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

Typical Noise

(peak-peak)

0.1Hz–10Hz

100 nA 2 pA 0.06% + 100 pA 5 pA

1 µA 20 pA 0.03% + 800 pA 25 pA

10 µA 200 pA 0.03% + 5 nA 60 pA

100 µA 2 nA 0.03% + 60 nA 3 nA

1 mA 20 nA 0.03% + 300 nA 6 nA

10 mA 200 nA 0.03% + 6 µA 200 nA

100 mA 2 µA 0.03% + 30 µA 600 nA

1 A

520 µA 0.05% + 1.8 mA 70 µA

3 A

520 µA 0.06% + 4 mA 150 µA

10 A

5, 6 200 µA 0.5 % + 40 mA (typical)

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 7: ±(0.15 × accuracy specification)/°C.

MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS8: 40.4W per channel maximum.

±1.01A @ ±40.0V , ±3.03A @ ±6.0V , four quadrant source or sink operation.

CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).

VOLTAGE LIMIT/COMPLIANCE 9: Bipolar voltage limit (compliance) set with a single value.

Minimum value is 10mV. Accuracy is the same as voltage source.

OV ERSHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load; see Current Source

Output Settling Time for additional test conditions).

ADDITIONAL SOURCE SPECIFICATIONS

TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%

step change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range.

100mV, 1V Ranges: <50µs typical.

6V Range: <100µs typical.

40V Range 10: <150µs typical.

CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range. Values below for Iout × Rload = 1V

unless noted.

3A Range: <80µs typical (current less than 2.5A, Rload >2W).

1A–10mA Ranges: <80µs typical (Rload >6W).

1mA Range: <100µs typical.

100µA Range: <150µs typical.

10µA Range: <500µs typical.

1µA Range: <2.5ms typical.

100nA Range: <25ms typical.

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground.

REMOTE SENSE OPERATING RANGE 11:

Maximum voltage between HI and SENSE HI = 3V .

Maximum voltage between LO and SENSE LO = 3V .

VOLTAGE OUTPUT HEADROOM:

40V Range: Max. output voltage = 42V – total voltage drop across source leads (maximum 1W

per source lead).

6V Range: Max. output voltage = 8V – total voltage drop across source leads (maximum 1W per

source lead).

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

standby mode.

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).

Overshoot into an 100kW load, 20MHz BW.

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/Rload (typical

with source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling Time

for additional test conditions.

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating

information.

4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit

accuracy specifications. Specifications apply with sink mode operation enabled.

5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating

information.

6. 10A range accessible only in pulse mode.

7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating

information.

9. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to

corresponding voltage source specification. For 100mV range add an additional 60mV of uncertainty.

10. Add 150µs when measuring on the 1A range.

11. Add 50µV to source accuracy specifications per volt of HI lead drop.

Series 2600B System SourceMeter® SMU Instruments

Series 2600B specifications

SMU INSTRUMENTS

A Greater Measure of Conﬁdence

www.keithley.com

1.888.KEITHLEY (U.S. only)

SOURCE SPECIFICATIONS (continued)

PULSE SPECIFICATIONS

Region

Maximum

Current Limit

Maximum

Pulse Width 12

Maximum

Duty Cycle 13

1 1 A @ 40 V DC, no limit 100%

1 3 A @ 6 V DC, no limit 100%

2 1.5 A @ 40 V 100 ms 25%

3 5 A @ 35 V 4 ms 4%

4 10 A @ 20 V 1.8 ms 1%

MINIMUM PROGRAMMABLE PULSE WIDTH 14, 15: 100µs. NOTE: Minimum pulse width for settled

source at a given I/V output and load can be longer than 100µs.

PULSE WIDTH PROGRAMMING RESOLUTION: 1µs.

PULSE WIDTH PROGRAMMING ACCURACY 15: ±5µs.

PULSE WIDTH JITTER: 2µs (typical).

QUADRANT DIAGRAM:

+1.5A

+3A

+5A

–3A

–5A

+10A

–10A

–1A

+1A

–1.5A

+40V+6V

–6V

+20V–20V 0V

+35V–35V–40V

Pulse

NOTES

12. Times measured from the start of pulse to the start off-time; see figure below.

Pulse Level

Bias Level

Start ton Start toff

90%

10%

ton toff

10%

13. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equa-

tions in the reference manual for more information.

14. Typical performance for minimum settled pulse widths:

Source Value Load

Source Settling

(% of range) Min. Pulse Width

6 V 2 W 0.2% 150 µs

20 V 2 W 1% 200 µs

35 V 7 W 0.5% 500 µs

40 V 27 W 0.1% 400 µs

1.5 A 27 W 0.1% 1.5 ms

3 A 2 W 0.2% 150 µs

5 A 7 W 0.5% 500 µs

10 A 2 W 0.5% 200 µs

Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more

information on pulse scripts, see the Series 2600B Reference Manual.

15. Times measured from the start of pulse to the start off-time; see figure below.

Pulse Level

Bias Level

Start ton Start toff

90%

10%

ton toff

10%

2601B, 2602B,

2604B System SourceMeter® SMU Instruments

METER SPECIFICATIONS

VOLTAGE MEASUREMENT ACCURACY 16, 17

Range

Default Display

Resolution 18

Input

Resistance

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

100 mV 100 nV >10 GW0.015% + 150 µV

1 V 1 µV >10 GW0.015% + 200 µV

6 V 10 µV >10 GW0.015% + 1 mV

40 V 10 µV >10 GW0.015% + 8 mV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 19: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

CURRENT MEASUREMENT ACCURACY 17

Range

Default Display

Resolution 20

Voltage

Burden 21

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

100 nA 100 fA <1 mV 0.05% + 100 pA

1 µA 1 pA <1 mV 0.025% + 500 pA

10 µA 10 pA <1 mV 0.025% + 1.5 nA

100 µA 100 pA <1 mV 0.02% + 25 nA

1 mA 1 nA <1 mV 0.02% + 200 nA

10 mA 10 nA <1 mV 0.02% + 2.5 µA

100 mA 100 nA <1 mV 0.02% + 20 µA

1 A 1 µA <1 mV 0.03% + 1.5 mA

3 A 1 µA <1 mV 0.05% + 3.5 mA

10 A 22 10 µA <1 mV 0.4% + 25 mA (typical)

CURRENT MEASURE SETTLING TIME (Time for measurement to settle after a Vstep) 23: Time

required to reach within 0.1% of final value after source level command is processed on a fixed

range. Values for Vout = 1V unless noted. Current Range: 1mA. Settling Time: <100µs (typical).

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 24: ±(0.15 × accuracy specification/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

CONTACT CHECK 25 (not available on Model 2604B)

Speed

Maximum Measurement

Time To Memory

For 60Hz (50Hz)

Accuracy (1 Year)

23°C ±5°C

±(%rdg. + ohms)

FAST 1 (1.2) ms 5% + 10 W

MEDIUM 4 (5) ms 5% + 1 W

SLOW 36 (42) ms 5% + 0.3 W

ADDITIONAL METER SPECIFICATIONS

MAXIMUM LOAD IMPEDANCE:

Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).

COMMON MODE VOLTAGE: 250VDC.

COMMON MODE ISOLATION: >1GW, <4500pF.

OVERRANGE: 101% of source range, 102% of measure range.

MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.

SENSE INPUT IMPEDANCE: >10GW.

NOTES

16. Add 50µV to source accuracy specifications per volt of HI lead drop.

17. De-rate accuracy specifications for NPLC setting < 1 by increasing error term.

Add appropriate % of range term using table below.

NPLC Setting

100mV

Range

1V–40V

Ranges

100nA

Range

1µA–100mA

Ranges

1A–3A

Ranges

0.1 0.01% 0.01% 0.01% 0.01% 0.01%

0.01 0.08% 0.07% 0.1% 0.05% 0.05%

0.001 0.8 % 0.6 % 1% 0.5 % 1.1 %

18. Applies when in single channel display mode.

19. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.

20. Applies when in single channel display mode.

21. Four-wire remote sense only with current meter mode selected. Voltage measure set to 100mV or 1V range only.

22. 10A range accessible only in pulse mode.

23. Compliance equal to 100mA.

24. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.

25. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.

Series 2600B specifications

SMU INSTRUMENTS

www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Conﬁdence

2601B, 2602B,

2604B System SourceMeter® SMU Instruments

GENERAL

HIGH CAPACITANCE MODE26, 27, 28

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach 0.1% of final value after

source level command is processed on a fixed range. Current limit = 1A.

Voltage Source Range Settling Time with Cload = 4.7µF

100 mV 200 µs (typical)

1 V 200 µs (typical)

6 V 200 µs (typical)

40 V 7 ms (typical)

CURRENT MEASURE SETTLING TIME: Time required to reach 0.1% of final value after voltage

source is stabilized on a fixed range. Values below for Vout = 1V unless noted.

Current Measure Range Settling Time

3 A – 1 A <120 µs (typical) (Rload > 2W)

100 mA – 10 mA <100 µs (typical)

1 mA < 3 ms (typical)

100 µA < 3 ms (typical)

10 µA < 230 ms (typical)

1 µA < 230 ms (typical)

CAPACITOR LEAKAGE PERFORMANCE USING HIGH-C SCRIPTS 29: Load = 5µF||10MW.

Test: 5V step and measure. 200ms (typical) @ 50nA.

MODE CHANGE DELAY:

100µA Current Range and Above:

Delay into High Capacitance Mode: 10ms.

Delay out of High Capacitance Mode: 10ms.

1µA and 10µA Current Ranges:

Delay into High Capacitance Mode: 230ms.

Delay out of High Capacitance Mode: 10ms.

VOLTMETER INPUT IMPEDANCE: 10GW in parallel with 3300pF.

NOISE, 10Hz–20MHz (6V Range): <30mV peak-peak (typical).

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <400mV + 0.1% of larger range (typical).

Overshoot into a 100kW load, 20MHz BW.

NOTES

26. High Capacitance Mode specifications are for DC measurements only.

27. 100nA range is not available in High Capacitance Mode.

28. High Capacitance Mode utilizes locked ranges. Auto Range is disabled.

29. Part of KI Factory scripts. See reference manual for details.

IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status

model topology.

USB CONTROL (REAR): USB 2.0 device, TMC488 protocol.

RS-232: Baud rates from 300bps to 115200bps.

ETHERNET: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.

EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments to

trigger and communicate with each other. (Not available on Model 2604B.)

Cable Type: Category 5e or higher LAN crossover cable.

Length: 3 meters maximum between each TSP enabled instrument.

LXI COMPLIANCE: LXI Class C 1.4.

LXI TIMING: Total Output Trigger Response Time: 245µs min., 280µs typ., (not

specified) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event

Delay: Unknown.

DIGITAL I/O INTERFACE: (Not available on Model 2604B)

+5VDC

5.1kΩ

100Ω

Solid State

Fuse

Read by

firmware

Written by

firmware

+5V Pins

(on DIGITAL I/O

connector)

Dig

ital I/O Pin

(on DIGITAL I/O

connector)

GND Pin

(on DIGITAL I/O

connector)

Rear Panel

Connector: 25-pin female D.

Input/Output Pins: 14 open drain I/O bits.

Absolute Maximum Input Voltage: 5.25V.

Absolute Minimum Input Voltage: –0.25V.

Maximum Logic Low Input Voltage: 0.7V, +850µA max.

Minimum Logic High Input Voltage: 2.1V, +570µA.

Maximum Source Current (flowing out of Digital I/O bit): +960µA.

Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.

Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA (not including

Model 2604B).

5V Power Supply Pins: Limited to 250mA total for all three pins, solid state fuse protected.

Output Enable: Active high input pulled down internally to ground with a 10kW resistor;

when the output enable input function has been activated, each SourceMeter channel will

not turn on unless the output enable pin is driven to >2.1V (nominal current = 2.1V/10kW

= 210µA).

USB FILE SYSTEM (FRONT): USB 2.0 Host: Mass storage class device.

POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.

COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when

rack mounted.

EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.

SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.

DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 8

⁄

in × 17½ in). Bench

Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (4

⁄

in ×

⁄

in × 17½ in).

WEIGHT: 2601B: 4.75kg (10.4 lbs). 2602B, 2604B: 5.50kg (12.0 lbs).

ENVIRONMENT: For indoor use only.

Altitude: Maximum 2000 meters above sea level.

Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.

Storage: –25°C to 65°C.

Series 2600B specifications

SMU INSTRUMENTS

A Greater Measure of Conﬁdence

www.keithley.com

1.888.KEITHLEY (U.S. only)

ADDITIONAL SOURCE SPECIFICATIONS

TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%

step change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to within reach 0.1% of final value

after source level command is processed on a fixed range.

Range Settling Time

200 mV <50 µs (typical)

2 V <50 µs (typical)

20 V <110 µs (typical)

200 V <700 µs (typical)

CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach

within

0.1% of final value after

source level command is processed on a fixed range. Values below for Iout · Rload = 2V unless noted.

Current Range Settling Time

1.5 A – 1 A <120 µs (typical) (R

load

> 6W)

100 mA – 10 mA <80 µs (typical)

1 mA <100 µs (typical)

100 µA <150 µs (typical)

10 µA <500 µs (typical)

1 µA <2 ms (typical)

100 nA <20 ms (typical)

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground.

REMOTE SENSE OPERATING RANGE 11: Maximum voltage between HI and SENSE HI = 3V .

Maximum voltage between LO and SENSE LO = 3V .

VOLTAGE OUTPUT HEADROOM:

200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum

1W per source lead).

20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum

1W per source lead).

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

standby mode.

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).

Overshoot into a 200kW load, 20MHz BW.

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/Rload (typical

– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling

Time for additional test conditions.

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.

4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit

accuracy specifications. Specifications apply with sink mode operation enabled.

5. Accuracy specifications do not include connector leakage. Derate accuracy by Vout/2E11 per °C when operating

between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15·Vout/2E11) per °C when operating <18°C and >28°C.

6. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.

7. 10A range accessible only in pulse mode.

8. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

9. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.

10. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to

corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.

11. Add 50µV to source accuracy specifications per volt of HI lead drop.

PULSE SPECIFICATIONS

Region

Maximum

Current Limit

Maximum

Pulse Width 12

Maximum

Duty Cycle 13

1 100 mA @ 200 V DC, no limit 100%

1 1.5 A @ 20 V DC, no limit 100%

2 1 A @ 180 V 8.5 ms 1%

3 14 1 A @ 200 V 2.2 ms 1%

4 10 A @ 5 V 1 ms 2.2%

MINIMUM PROGRAMMABLE PULSE WIDTH15, 16: 100µs. NOTE: Minimum pulse width for settled

source at a given I/V output and load can be longer than 100µs.

PULSE WIDTH PROGRAMMING RESOLUTION: 1µs.

PULSE WIDTH PROGRAMMING ACCURACY 16: ±5µs.

PULSE WIDTH JITTER: 2µs (typical).

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2611B, 2612B,

and 2614B System SourceMeter® SMU instruments. Specifications are the standards against which

the Models 2611B, 2612B, and 2614B are tested. Upon leaving the factory the 2611B, 2612B, and

2614B meet these specifications. Supplemental and typical values are non- warranted, apply at

23°C, and are provided solely as useful information.

Accuracy specifications are applicable for both normal and high capacitance modes.

The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2611B,

2612B, and 2614B) or SourceMeter CHANNEL B (2612B, 2614B) terminals under the following

conditions:

1. 23°C ± 5°C, <70% relative humidity.

2. After 2 hour warm-up.

3. Speed normal (1 NPLC).

4. A/D auto-zero enabled.

5. Remote sense operation or properly zeroed local sense operation.

6. Calibration period = 1 year.

SOURCE SPECIFICATIONS

VOLTAGE SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY1

Range

Programming

Resolution

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

Typical Noise

(Peak-Peak)

0.1Hz–10Hz

200 mV 5 µV 0.02% + 375 µV 20 µV

2 V 50 µV 0.02% + 600 µV 50 µV

20 V 500 µV 0.02% + 5 mV 300 µV

200 V 5 mV 0.02% + 50 mV 2 mV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 30.3W per channel maximum.

±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.

VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).

NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 20V range.

CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.

Minimum value is 10nA. Accuracy is the same as current source.

OV ERSHOOT: <±(0.1% + 10mV) (typical). Step size = 10% to 90% of range, resistive load, maxi-

mum current limit/compliance.

GUARD OFFSET VOLTAGE: <4mV (current <10mA).

CURRENT SOURCE SPECIFICATIONS

CURRENT PROGRAMMING ACCURACY 5

Range

Programming

Resolution

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

Typical Noise

(Peak-Peak)

0.1Hz–10Hz

100 nA 2 pA 0.06% + 100 pA 5 pA

1 µA 20 pA 0.03% + 800 pA 25 pA

10 µA 200 pA 0.03% + 5 nA 60 pA

100 µA 2 nA 0.03% + 60 nA 3 nA

1 mA 20 nA 0.03% + 300 nA 6 nA

10 mA 200 nA 0.03% + 6 µA 200 nA

100 mA 2 µA 0.03% + 30 µA 600 nA

1 A

620 µA 0.05% + 1.8 mA 70 µA

1.5 A

650 µA 0.06% + 4 mA 150 µA

10 A

6, 7 200 µA 0.5% + 40 mA (typical)

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 8: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS9: 30.3W per channel maximum.

±1.515A @ ±20V , ±101mA @ ±200V , four quadrant source or sink operation.

CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).

VOLTAGE LIMIT/COMPLIANCE 10: Bipolar voltage limit (compliance) set with a single value.

Minimum value is 20mV. Accuracy is the same as voltage source.

OV ERSHOOT: <±0.1% (typical). Step size = 10% to 90% of range, resistive load; see Current

Source Output Settling Time for additional test conditions.

2611B, 2612B,

2614B System SourceMeter® SMU Instruments

Series 2600B specifications

SMU INSTRUMENTS

www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Conﬁdence

METER SPECIFICATIONS

VOLTAGE MEASUREMENT ACCURACY 17, 18

Range

Default Display

Resolution 19

Input

Resistance

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

200 mV 100 nV >10 GW0.015% + 225 µV

2 V 1 µV >10 GW0.02% + 350 µV

20 V 10 µV >10 GW0.015% + 5 mV

200 V 100 µV >10 GW0.015% + 50 mV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 20: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

CURRENT MEASUREMENT ACCURACY 18, 21

Range

Default Display

Resolution 22

Voltage

Burden 23

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

100 nA 100 fA <1 mV 0.06% + 100 pA

1 µA 1 pA <1 mV 0.025% + 500 pA

10 µA 10 pA <1 mV 0.025% + 1.5 nA

100 µA 100 pA <1 mV 0.02% + 25 nA

1 mA 1 nA <1 mV 0.02% + 200 nA

10 mA 10 nA <1 mV 0.02% + 2.5 µA

100 mA 100 nA <1 mV 0.02% + 20 µA

1 A 1 µA <1 mV 0.03% + 1.5 mA

1.5 A 1 µA <1 mV 0.05% + 3.5 mA

10 A 24 10 µA <1 mV 0.4% + 25 mA (typical)

CURRENT MEASURE SETTLING TIME (Time for measurement to settle after a Vstep) 25: Time

required to reach 0.1% of final value after source level command is processed on a fixed range.

Values for Vout = 2V unless noted. Current Range: 1mA. Settling Time: <100µs (typical).

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 26: ±(0.15 × accuracy specfication)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

CONTACT CHECK 27 (not available on Model 2614B)

Speed

Maximum Measurement

Time to Memory

For 60Hz (50Hz)

Accuracy (1 Year)

23°C ±5°C

±(%rdg. + ohms)

FAST 1 (1.2) ms 5% + 10 W

MEDIUM 4 (5) ms 5% + 1 W

SLOW 36 (42) ms 5% + 0.3 W

ADDITIONAL METER SPECIFICATIONS

MAXIMUM LOAD IMPEDANCE:

Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).

COMMON MODE VOLTAGE: 250VDC.

COMMON MODE ISOLATION: >1GW, <4500pF.

OVERRANGE: 101% of source range, 102% of measure range.

MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.

SENSE INPUT IMPEDANCE: >10GW.

SOURCE SPECIFICATIONS (continued)

PULSE SPECIFICATIONS (continued)

QUADRANT DIAGRAM:

+1.5A

+10A

–10A

–1A

+1A

+0.1A

–0.1A

–1.5A

+200V+5V

–5V

+20V–20V 0V

+180V–180V–200V

Pulse

NOTES

12. Times measured from the start of pulse to the start off-time; see figure below.

Pulse Level

Bias Level

Start ton Start toff

90%

10%

ton toff

13. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C.

See power equations in the reference manual for more information.

14. Voltage source operation with 1.5 A current limit.

15. Typical performance for minimum settled pulse widths:

Source Value Load

Source Settling

(% of range) Min. Pulse Width

5 V 0.5 W1% 300 µs

20 V 200 W0.2% 200 µs

180 V 180 W0.2% 5 ms

200 V (1.5 A Limit) 200 W 0.2% 1.5 ms

100 mA 200 W1% 200 µs

1 A 200 W1% 500 µs

1 A 180 W0.2% 5 ms

10 A 0.5 W 0.5% 300 µs

Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more

information on pulse scripts, see the Series 2600B Reference Manual.

16. Times measured from the start of pulse to the start off-time; see figure below.

Pulse Level

Bias Level

Start ton Start toff

90%

10%

ton toff

2611B, 2612B,

2614B System SourceMeter® SMU Instruments

Series 2600B specifications

SMU INSTRUMENTS

A Greater Measure of Conﬁdence

www.keithley.com

1.888.KEITHLEY (U.S. only)

2611B, 2612B,

2614B System SourceMeter® SMU Instruments

GENERAL

IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status

model topology.

USB CONTROL (REAR): USB 2.0 device, TMC488 protocol.

RS-232: Baud rates from 300bps to 115200bps.

ETHERNET: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.

EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments

to trigger and communicate with each other. (Not available on Model 2614B.)

Cable Type: Category 5e or higher LAN crossover cable.

Length: 3 meters maximum between each TSP enabled instrument.

LXI COMPLIANCE: LXI Class C 1.4.

LXI TIMING: Total Output Trigger Response Time: 245µs min., 280µs typ., (not speci-

fied) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:

Unknown.

DIGITAL I/O INTERFACE: (Not available on Model 2614B)

+5VDC

5.1kΩ

100Ω

Solid State

Fuse

Read by

firmware

Written by

firmware

+5V Pins

(on DIGITAL I/O

connector)

Dig

ital I/O Pin

(on DIGITAL I/O

connector)

GND Pin

(on DIGITAL I/O

connector)

Rear Panel

Connector: 25-pin female D.

Input/Output Pins: 14 open drain I/O bits.

Absolute Maximum Input Voltage: 5.25V.

Absolute Minimum Input Voltage: –0.25V.

Maximum Logic Low Input Voltage: 0.7V, +850µA max.

Minimum Logic High Input Voltage: 2.1V, +570µA.

Maximum Source Current (flowing out of Digital I/O bit): +960µA.

Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.

Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA.

5V Power Supply Pins: Limited to 250mA total for all three pins, solid state fuse protected.

Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must

be externally applied to this pin to ensure 200V operation. This signal is pulled down

to chassis ground with a 10kW resistor. 200V operation will be blocked when the

INTERLOCK signal is <0.4V (absolute minimum –0.4V). See figure below:

10kΩ

Coil

Resistance

145Ω ±10%

Read by firmware

INTERLOCK Pin

(on DIGITAL I/O

connector)

Rear Panel

Chassis

Ground To output stage

+220V Supply

–220V Supply

USB FILE SYSTEM (FRONT): USB 2.0 Host: Mass storage class device.

POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.

COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when

rack mounted.

EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.

SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.

DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 8

⁄

in × 17½ in). Bench

Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (4

⁄

× 9

⁄

in × 17½ in).

WEIGHT: 2611B: 4.75kg (10.4 lbs). 2612B, 2614B: 5.50kg (12.0 lbs).

ENVIRONMENT: For indoor use only. Altitude: Maximum 2000 meters above sea level.

Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.

Storage: –25°C to 65°C.

METER SPECIFICATIONS (continued)

NOTES

17. Add 50µV to source accuracy specifications per volt of HI lead drop.

18. De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term

using table below.

NPLC Setting

200mV

Range

2V–200V

Ranges

100nA

Range

1µA–100mA

Ranges

1A–1.5A

Ranges

0.1 0.01% 0.01% 0.01% 0.01% 0.01%

0.01 0.08% 0.07% 0.1% 0.05% 0.05%

0.001 0.8 % 0.6 % 1% 0.5 % 1.1 %

19. Applies when in single channel display mode.

20. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

21. Accuracy specifications do not include connector leakage. De-rate accuracy by Vout/2E11 per °C when operating

between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15 * Vout/2E11) per °C when operating <18° and >28°C.

22. Applies when in single channel display mode.

23. Four-wire remote sense only and with current meter mode selected. Voltage measure set to 200mV or

2V range only.

24. 10A range accessible only in pulse mode.

25. Compliance equal to 100mA.

26. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

27. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.

HIGH CAPACITANCE MODE 28, 29, 30

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range. Current limit = 1A.

Voltage Source Range Settling Time with Cload = 4.7µF

200 mV 600 µs (typical)

2 V 600 µs (typical)

20 V 1.5 ms (typical)

200 V 20 ms (typical)

CURRENT MEASURE SETTLING TIME: Time required to reach within 0.1% of final value after

voltage source is stabilized on a fixed range. Values below for Vout = 2V unless noted.

Current Measure Range Settling Time

1.5 A – 1 A <120 µs (typical) (Rload >6W)

100 mA – 10 mA <100 µs (typical)

1 mA < 3 ms (typical)

100 µA < 3 ms (typical)

10 µA < 230 ms (typical)

1 µA < 230 ms (typical)

CAPACITOR LEAKAGE PERFORMANCE USING HIGH-C SCRIPTS 31: Load = 5µF||10MW.

Test: 5V step and measure. 200ms (typical) @ 50nA.

MODE CHANGE DELAY:

100µA Current Range and Above:

Delay into High Capacitance Mode: 10ms.

Delay out of High Capacitance Mode: 10ms.

1µA and 10µA Current Ranges:

Delay into High Capacitance Mode: 230ms.

Delay out of High Capacitance Mode: 10ms.

VOLTMETER INPUT IMPEDANCE: 30GW in parallel with 3300pF.

NOISE, 10Hz–20MHz (20V Range): <30mV peak-peak (typical).

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT (for 20V range and below): <400mV + 0.1%

of larger range (typical). Overshoot into a 200kW load, 20MHz BW.

NOTES

28. High Capacitance Mode specifications are for DC measurements only.

29. 100nA range is not available in High Capacitance Mode.

30. High Capacitance Mode utilizes locked ranges. Auto Range is disabled.

31. Part of KI Factory scripts, See reference manual for details.

Series 2600B specifications

SMU INSTRUMENTS

www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Conﬁdence

ADDITIONAL SOURCE SPECIFICATIONS

TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%

step change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range.

Range Settling Time

200 mV <50 µs (typical)

2 V <50 µs (typical)

20 V <110 µs (typical)

200 V <700 µs (typical)

CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach

within

0.1% of final value after

source level command is processed on a fixed range. Values below for Iout · Rload = 2V unless noted.

Current Range Settling Time

1.5 A – 1 A <120 µs (typical) (R

load

> 6W)

100 mA – 10 mA <80 µs (typical)

1 mA <100 µs (typical)

100 µA <150 µs (typical)

10 µA <500 µs (typical)

1 µA <2 ms (typical)

100 nA <20 ms (typical)

10 nA <40 ms (typical)

1 nA <150 ms (typical)

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC.

REMOTE SENSE OPERATING RANGE 10: Maximum voltage between HI and SENSE HI = 3V .

Maximum voltage between LO and SENSE LO = 3V .

VOLTAGE OUTPUT HEADROOM:

200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum

1W per source lead).

20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum

1W per source lead).

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

standby mode.

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).

Overshoot into a 200kW load, 20MHz BW.

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/Rload (typical

– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling

Time for additional test condtions.

PULSE SPECIFICATIONS

Region

Maximum

Current Limit

Maximum

Pulse Width 11

Maximum

Duty Cycle 12

1 100 mA @ 200 V DC, no limit 100%

1 1.5 A @ 20 V DC, no limit 100%

2 1 A @ 180 V 8.5 ms 1%

3 13 1 A @ 200 V 2.2 ms 1%

4 10 A @ 5 V 1 ms 2.2%

MINIMUM PROGRAMMABLE PULSE WIDTH 14, 15: 100µs. NOTE: Minimum pulse width for

settled source at a given I/V output and load can be longer than 100µs.

PULSE WIDTH PROGRAMMING RESOLUTION: 1µs.

PULSE WIDTH PROGRAMMING ACCURACY 15: ±5µs.

PULSE WIDTH JITTER: 50µs (typical).

QUADRANT DIAGRAM:

+1.5A

+10A

–10A

–1A

+1A

+0.1A

–0.1A

–1.5A

+200V+5V

–5V +20V–20V 0V

+180V–180V–200V

Pulse

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2634B,

2635B, and 2636B System SourceMeter® SMU instruments. Specifications are the standards against

which the Models 2634B, 2635B, and 2636B are tested. Upon leaving the factory the 2634B, 2635B,

and 2636B meet these specifications. Supplemental and typical values are non- warranted, apply at

23°C, and are provided solely as useful information.

Accuracy specifications are applicable for both normal and high capacitance modes.

The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2634B,

2635B, and 2636B) or SourceMeter CHANNEL B (2634B, 2636B) terminals under the following

conditions:

1. 23°C ± 5°C, <70% relative humidity.

2. After 2 hour warm-up

3. Speed normal (1 NPLC)

4. A/D auto-zero enabled

5. Remote sense operation or properly zeroed local sense operation

6. Calibration period = 1 year

SOURCE SPECIFICATIONS

VOLTAGE SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY1

Range

Programming

Resolution

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

Typical Noise

(peak-peak)

0.1Hz–10Hz

200 mV 5 µV 0.02% + 375 µV 20 µV

2 V 50 µV 0.02% + 600 µV 50 µV

20 V 500 µV 0.02% + 5 mV 300 µV

200 V 5 mV 0.02% + 50 mV 2 mV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 30.3W per channel maximum.

±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.

VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).

NOISE 10Hz–20MHz: <20mV pk-pk (typical), <3mV rms (typical), 20V range.

CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.

Minimum value is 100pA. Accuracy is the same as current source.

OV ERSHOOT: <±(0.1% + 10mV) typical (step size = 10% to 90% of range, resistive load,

maximum current limit/compliance).

GUARD OFFSET VOLTAGE: <4mV (current <10mA).

CURRENT SOURCE SPECIFICATIONS

CURRENT PROGRAMMING ACCURACY

Range

Programming

Resolution

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

Typical Noise

(peak-peak)

0.1Hz–10Hz

1 nA 20 fA 0.15% + 2 pA 800 fA

10 nA 200 fA 0.15% + 5 pA 2 pA

100 nA 2 pA 0.06% + 50 pA 5 pA

1 µA 20 pA 0.03% + 700 pA 25 pA

10 µA 200 pA 0.03% + 5 nA 60 pA

100 µA 2 nA 0.03% + 60 nA 3 nA

1 mA 20 nA 0.03% + 300 nA 6 nA

10 mA 200 nA 0.03% + 6 µA 200 nA

100 mA 2 µA 0.03% + 30 µA 600 nA

1 A

5 20 µA 0.05% + 1.8 mA 70 µA

1.5 A

5 50 µA 0.06% + 4 mA 150 µA

10 A

5, 6 200 µA 0.5 % + 40 mA (typical)

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 7: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS 8: 30.3W per channel maximum.

±1.515A @ ±20V, ±101mA @ ±200V, four quadrant source or sink operation.

CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).

VOLTAGE LIMIT/COMPLIANCE 9: Bipolar voltage limit (compliance) set with a single value.

Minimum value is 20mV. Accuracy is the same as voltage source.

OV ERSHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load, maximum

current limit/compliance; see Current Source Output Settling Time for additional

test conditions).

2634B, 2635B,

2636B System SourceMeter® SMU Instruments

Series 2600B specifications

SMU INSTRUMENTS

A Greater Measure of Conﬁdence

www.keithley.com

1.888.KEITHLEY (U.S. only)

METER SPECIFICATIONS

VOLTAGE MEASUREMENT ACCURACY 16, 17

Range

Default Display

Resolution 18

Input

Resistance

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

200 mV 100 nV >1014 W0.015% + 225 µV

2 V 1 µV >1014 W0.02% + 350 µV

20 V 10 µV >1014 W0.015% + 5 mV

200 V 100 µV >1014 W0.015% + 50 mV

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 19: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

CURRENT MEASUREMENT ACCURACY 17

Range

Default Display

Resolution 20

Voltage

Burden 21

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

*100 pA 22, 23 0.1 fA <1 mV 0.15% + 120 fA

1 nA 22, 24 1 fA <1 mV 0.15% + 240 fA

10 nA 10 fA <1 mV 0.15% + 3 pA

100 nA 100 fA <1 mV 0.06% + 40 pA

1 µA 1 pA <1 mV 0.025% + 400 pA

10 µA 10 pA <1 mV 0.025% + 1.5 nA

100 µA 100 pA <1 mV 0.02% + 25 nA

1 mA 1 nA <1 mV 0.02% + 200 nA

10 mA 10 nA <1 mV 0.02% + 2.5 µA

100 mA 100 nA <1 mV 0.02% + 20 µA

1 A 1 µA <1 mV 0.03% + 1.5 mA

1.5 A 1 µA <1 mV 0.05% + 3.5 mA

10 A 25 10 µA <1 mV 0.4 % + 25 mA

* 100 pA range not available on Model 2634B.

CURRENT MEASURE SETTLING TIME (Time for measurement to settle after a Vstep) 26: Time

required to reach within 0.1% of final value after source level command is processed on a fixed

range. Values for Vout = 2V unless noted. Current Range: 1mA. Settling Time: <100µs (typical).

TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 27: ±(0.15 × accuracy specfication)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

CONTACT CHECK 28 (Not available on Model 2634B)

Speed

Maximum Measurement

Time to Memory

For 60Hz (50Hz)

Accuracy (1 Year)

23°C ±5°C

±(%rdg. + ohms)

FAST 1 (1.2) ms 5% + 10 W

MEDIUM 4 (5) ms 5% + 1 W

SLOW 36 (42) ms 5% + 0.3 W

ADDITIONAL METER SPECIFICATIONS

MAXIMUM LOAD IMPEDANCE:

Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).

COMMON MODE VOLTAGE: 250VDC.

COMMON MODE ISOLATION: >1GW, <4500pF.

OVERRANGE: 101% of source range, 102% of measure range.

MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.

SENSE INPUT IMPEDANCE: >1014W.

SOURCE SPECIFICATIONS (continued)

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer

to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.

4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit

accuracy specifications. Specifications apply with sink mode operation enabled.

5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer

to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.

6. 10A range accessible only in pulse mode.

7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power

derating information.

9. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to

corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.

10. Add 50µV to source accuracy specifications per volt of HI lead drop.

11. Times measured from the start of pulse to the start off-time; see figure below.

Pulse Level

Bias Level

Start ton Start toff

90%

10%

ton toff

10%

12. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equa-

tions in the Reference Manual for more information.

13. Voltage source operation with 1.5 A current limit.

14. Typical performance for minimum settled pulse widths:

Source Value Load

Source Settling

(% of range) Min. Pulse Width

5 V 0.5 W1% 300 µs

20 V 200 W0.2% 200 µs

180 V 180 W0.2% 5 ms

200 V (1.5 A Limit) 200 W 0.2% 1.5 ms

100 mA 200 W1% 200 µs

1 A 200 W1% 500 µs

1 A 180 W0.2% 5 ms

10 A 0.5 W 0.5% 300 µs

Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more

information on pulse scripts, see the Series 2600B Reference Manual.

15. Times measured from the start of pulse to the start off-time; see figure below.

Pulse Level

Bias Level

Start ton Start toff

90%

10%

ton toff

10%

2634B, 2635B,

2636B System SourceMeter® SMU Instruments

Series 2600B specifications

SMU INSTRUMENTS

www.keithley.com

1.888.KEITHLEY (U.S. only)

A Greater Measure of Conﬁdence

2634B, 2635B,

2636B System SourceMeter® SMU Instruments

METER SPECIFICATIONS (continued)

NOTES

16. Add 50µV to source accuracy specifications per volt of HI lead drop.

17. De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term

using table below.

NPLC Setting

200mV

Range

2V–200V

Ranges

100nA

Range

1µA–100mA

Ranges

1A–1.5A

Ranges

0.1 0.01% 0.01% 0.01% 0.01% 0.01%

0.01 0.08% 0.07% 0.1% 0.05% 0.05%

0.001 0.8 % 0.6 % 1% 0.5 % 1.1 %

18. Applies when in single channel display mode.

19. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

20. Applies when in single channel display mode.

21. Four-wire remote sense only and with current meter mode selected. Voltage measure set to 200mV or

2V range only.

22. 10-NPLC, 11-Point Median Filter, <200V range, measurements made within 1 hour after zeroing. 23°C ± 1°C

23. Under default specification conditions: ±(0.15% + 750fA).

24. Under default specification conditions: ±(0.15% + 1pA).

25. 10A range accessible only in pulse mode.

26. Delay factor set to 1. Compliance equal to 100mA.

27. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

28. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.

HIGH CAPACITANCE MODE29, 30, 31

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range. Current limit = 1A.

Voltage Source Range Settling Time with Cload = 4.7µF

200 mV 600 µs (typical)

2 V 600 µs (typical)

20 V 1.5 ms (typical)

200 V 20 ms (typical)

CURRENT MEASURE SETTLING TIME: Time required to reach within 0.1% of final value after

voltage source is stabilized on a fixed range. Values below for Vout = 2V unless noted.

Current Measure Range Settling Time

1.5 A – 1 A <120 µs (typical) (Rload >6W)

100 mA – 10 mA <100 µs (typical)

1 mA < 3 ms (typical)

100 µA < 3 ms (typical)

10 µA < 230 ms (typical)

1 µA < 230 ms (typical)

CAPACITOR LEAKAGE PERFORMANCE USING HIGH-C SCRIPTS 32: Load = 5µF||10MW.

Test: 5V step and measure. 200ms (typical) @ 50nA.

MODE CHANGE DELAY:

100µA Current Range and Above:

Delay into High Capacitance Mode: 10ms.

Delay out of High Capacitance Mode: 10ms.

1µA and 10µA Current Ranges:

Delay into High Capacitance Mode: 230ms.

Delay out of High Capacitance Mode: 10ms.

VOLTMETER INPUT IMPEDANCE: 30GW in parallel with 3300pF.

NOISE, 10Hz–20MHz (20V Range): <30mV peak-peak (typical).

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT (for 20V range and below): <400mV + 0.1%

of larger range (typical). Overshoot into a 200kW load, 20MHz BW.

NOTES

29. High Capacitance Mode specifications are for DC measurements only.

30. 100nA range and below are not available in high capacitance mode.

31. High Capacitance Mode utilizes locked ranges. Auto Range is disabled.

32. Part of KI Factory scripts. See reference manual for details.

GENERAL

IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status

model topology.

USB CONTROL (REAR): USB 2.0 device, TMC488 protocol.

RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, parity

type, and flow control (RTS/CTS hardware or none).