Datasheet SFM3000 Low Pressure Drop Digital Flow Meter Low pressure drop Flow range: +/- 200 slm (bidirectional) Accuracy 1.5% m.v. (typical) Very fast update time (0.5ms) Fully calibrated & temperature compensated Zero offset, no drift Product Summary The SFM3000 sensor is Sensirion's digital flow meter designed for high-volume applications. It measures the flow rate of air, oxygen and other non-aggressive gases with superb accuracy. A special design of the flow channel results in the very low pressure drop through the flow body of the sensor making it extremely suitable for very demanding applications, such as medical ventilation and respiratory applications. The SFM3000 operates from a 5 Volt supply voltage and features a digital 2-wire I2C interface. The measurement results are internally linearized and temperature compensated. The outstanding performance of this sensor is based on Sensirion's patented CMOSens(R) sensor technology, which combines the sensor element, signal processing and digital calibration on a single microchip. The flow rate of the gas is measured by a thermal sensor element which assures very fast signal processing time and bidirectional measurement with best-in-class accuracy. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications. Applications Medical Process automation Burner control Fuel cell control Spectroscopy Environment monitoring Laboratory Sensor chip The SFM3000 flow meter features a fifth-generation silicon sensor chip SF05. In addition to a thermal mass flow sensor element, the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and interface. Due to seamless integration of signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved. OEM options A variety of custom options can be implemented for highvolume OEM applications (custom flow rates, calibration for other gases, different body form factor etc.). Contact Sensirion for more information. Connection diagram VDD 5V Micro controller (master) SDA SFM3000 (slave) SCL GND SFM3000 with bidirectional digital communication (I2C bus) www.sensirion.com Version 2.2 - July 2016 1/7 1. Sensor performance 1.1 Physical specifications 1 Parameter Flow Ranges Update Time Accuracy 4,5,6,7 Repeatability 4,7 Noise Level 4,7 Accuracy Shift Due to Temperature Variation 9 Position sensitivity 10 Pressure Drop 1.2 span offset span offset span offset span offset non-horizontal position @60slm @200slm Value -200 ... +200 2 0.5 Max. 2.5 0.1 1 0.05 1 0.1 0.75 0.0 Unit slm 3 ms Typ. 1.5 0.05 0.5 0.02 0.5 0.05 0.25 0.0 < 0.05 < 100 / < 0.4 < 600 / < 2.4 % m.v. 8 slm % m.v. slm % m.v. slm % m.v./10C slm slm Pa / inH2O Media compatibility and materials Parameter Calibration 11 Media Compatibility Wetted Materials RoHS, REACH Sensor Weight with Cap 1.3 Condition Air/N2/O2 14 bit Value Air, N2, O2 Air (non-condensing), N2, O2, non- aggressive gases PPE+PS blend (medical grade: biocompatible; ISO 10993 or USP Class VI), Si, Si3N4, SiOx, Gold, Epoxy, Polyurethane, stainless steel (annealed) RoHS and REACH compliant < 18 gram Temperature and pressure conditions Parameter Condition Value Unit Calibrated Temperature Range11 T(environment) = T(gas) -20 ... +80 C Operating Temperature Range11 Non-condensing -20 ... +80 C Storage Temperature Operating Pressure Range Operating Overpressure Non-condensing absolute gauge -20 ... +80 0.7 - 1.3 0.2 C bar bar gauge >1 bar Burst Overpressure Unless otherwise noted, all sensor specifications are valid at 25C with Vdd = 5V and absolute pressure = 966 mbar. Other calibration ranges are available for large volume projects 3 In standard liter per minute at 20C and 1013 mbar 4 With ideal inlet and outlet conditions, at VDD = 5V, 25C, absolute pressure = 966 mbar 5 Including offset, non-linearity, hysteresis 6 Sensor position horizontal (see Section 4.1) 7 Span or offset value, whichever is larger 8 In % of measured value (m.v.) = of rate = of reading 9 Shift due to temperature variation compared to calibration temperature 10 See Section 4.1 11 Contact Sensirion for information about other gases, wider calibrated and operating temperature ranges 1 2 www.sensirion.com Version 2.2 - July 2016 2/7 2. Electrical specifications 2.1 Electrical characteristics Electrical properties Interface Default Sensor Address Soft Reset Time Start-up Time 12 Supply Voltage (VDD) Condition I2C Communication Level High Low Max. I2C Bus clock frequency Power Consumption Electrical Connector Output signal resolution Scale Factor Flow Max. Air, N2 O2 Offset Flow 12 13 Value I2C 64 (0x40) 80 100 5V +/-5% Min. 2.5 GND Unit ms ms V Max. VDD 1.1 400 < 50 2 mm pitch, 4 pins in a row 1413 140 142.8 32'000 V kHz mW bit 1/slm After 4.75V is reached 16 bit with two least significant bits always zero 2.2 Pin layout and mechanical concept of the electrical connection connection please order the SFM3000 with a cap (according to the ordering information in Chapter 5). Diverse 4-core flat ribbon cables with crimp fittings can be used for electrical connection. 2.2.2 PCB soldering Standard selective soldering systems may be used for soldering SFM3000 sensors. Reflow soldering is not feasible and may damage the sensor. The sensor ports must be protected from solder splash and flux during soldering. The characteristics of selective soldering machines vary, so any soldering setup must be tested before production use. 2.3 In order to obtain the measured flow in [slm], the measured value needs to be converted using the following formula: Positive flow direction (as marked on the sensor body) The SFM3000 is designed for both connector attachment and through-hole technology hand-soldering to a PCB. 2.2.1 Connector attachment The SFM3000 sensor's 4-pin 2 mm pitch electrical connector is compatible with Molex DuraClikTM socket (Molex product number: 502351-0400). For this type of www.sensirion.com Conversion to physical values [slm] = - Please note that the first measurement performed directly after chip initialization is not valid. Version 2.2 - July 2016 3/7 3. Mechanical specifications All dimensions are in millimeters (mm). 3.1 SFM3000 without cover (PCB mount) 3.2 Footprint 3.3 Please refer to the mask given below for reliable PCB attachment using the dedicated snap-in feet. Consider using the screw holes of the SFM3000 for a sturdy integration of the sensor. www.sensirion.com SFM3000 with cover If used with cover, sensor height is 34.4 mm instead of 33 mm. All the other dimensions are the same Version 2.2 - July 2016 4/7 3.4 Mechanical fitting Fittings of the SFM3000 sensor correspond to the international standard ISO5356-1:2004. Details about this type of connection can be found in the description of the standard. To minimize the risk of connectors being accidentally disconnected, latching connectors can be suggested. It is also possible to insert O-rings in the grooves and attach tubes with an inner diameter of 23 mm to the SFM3000. d1 = 19mm d2 = 2mm Cross section of recommended O-ring 4.4 4. Instructions for use 4.1 Calibration orientation The sensors are calibrated horizontally as depicted in the following graph: The SFM3000 sensor is designed to be robust and shock resistant. Nevertheless, the accuracy of the high-precision SFM3000 can be degraded by rough handling. Sensirion does not guarantee proper operation in case of improper handling. Note: avoid applying any mechanical stress to the solder joints of the sensor during or as a result of PCB assembly. 4.5 4.2 Inlet flow conditions In order to provide good flow conditions, the inner diameter of the connecting tube has to be approximately the same as the inner diameter of the SFM3000 main flow channel. The inlet tube has to be straight and at least 10 cm in length. The SFM3000 is equipped with meshes on the in- and outlets of the flow channel to reduce turbulences and thus improve the stability. Please refer to the application note "Inlet conditions for the SFM3000 Mass flow meters" for more information. 4.3 Temperature compensation The SFM3000 sensor features digital temperature compensation. The temperature is measured on the CMOSens(R) chip by an on-chip temperature sensor. This data is fed to a compensation circuit that is also integrated on the CMOSens(R) sensor chip. Thus, no external temperature compensation is necessary. www.sensirion.com Sensor handling ESD The electronics of the SFM3000 sensor consist of a single automotive qualified chip. It complies with the following ESD norms: - AEC Q 100 002 (4kV HBM) - AEC Q 100 003 (200V MM) Although the sensor complies with these norms, it does not mean the sensor is immune against ESD. The sensor is shipped in an antistatic tray to prevent electrostatic discharge. To avoid damage to the sensor, ground yourself using a grounding strap or by touching a grounded object before touching the sensor. Furthermore, store the parts in an antistatic package when not in use. 4.6 I2C Interface and communication Due to I2C interface restrictions, the cable length from the sensor to the microprocessor is recommended to be as short as possible and certainly not above 30 cm. For wires longer than 10 cm it is mandatory to shield the SDA and SCL. In case data is read from the sensor, the first data byte of the transaction must always be acknowledged by the master. It must be possible to reset the sensor through a hard reset, i.e. powering off and on the sensor, in case the sensor freezes. I2C Communication details are given in the application note "I2C Functional Description for SFM3000". Version 2.2 - July 2016 5/7 5. Ordering information Use the part names and product numbers shown in the table below when ordering SFM3000 sensors. For the latest product information and local distributors, visit www.sensirion.com. Part name Cap Product Number 1-100xxx-xx SFM3000-200-C With 932-02 Without 934-02 SFM3000-200 Packaging units: 20 items/tray. Every sensor is traceable by a unique Serial Number. Revision history Date Author Version Changes July 2013 ANB 1 First release February 2014 ANB 2 Updated material to Noryl December 2015 ANB 2.1 Updated temperature ranges Clarified max/min pressures Updated product picture. July 2016 2.2 Change of potting material. Product number post-fix updated ANB www.sensirion.com Version 2.2 - July 2016 6/7 Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application, Buyer shall defend, indemnify and hold harmless SENSIRION and its officers, employees, subsidiaries, affiliates and distributors against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if SENSIRION shall be allegedly negligent with respect to the design or the manufacture of the product. ESD Precautions The inherent design of this component causes it to be sensitive to electrostatic discharge (ESD). To prevent ESD-induced damage and/or degradation, take customary and statutory ESD precautions when handling this product. See application note "Handling Instructions" for more information. Warranty SENSIRION warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in SENSIRION's published specifications of the product. Within such period, if proven to be defective, SENSIRION shall repair and/or replace this product, in SENSIRION's discretion, free of charge to the Buyer, provided that: notice in writing describing the defects shall be given to SENSIRION within fourteen (14) days after their appearance; such defects shall be found, to SENSIRION's reasonable satisfaction, to have arisen from SENSIRION's faulty design, material, or workmanship; the defective product shall be returned to SENSIRION's factory at the Buyer's expense; and the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period. This warranty does not apply to any equipment which has not been installed and used within the specifications recommended by SENSIRION for the intended and proper use of the equipment. EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH HEREIN, SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED. SENSIRION is only liable for defects of this product arising under the conditions of operation provided for in the datasheet and proper use of the goods. SENSIRION explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in accordance with the technical specifications. SENSIRION does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. All operating parameters, including without limitation recommended parameters, must be validated for each customer's applications by customer's technical experts. Recommended parameters can and do vary in different applications. SENSIRION reserves the right, without further notice, (i) to change the product specifications and/or the information in this document and (ii) to improve reliability, functions and design of this product. Copyright (c) 2016, SENSIRION. CMOSens(R) is a trademark of Sensirion All rights reserved Headquarters and Subsidiaries SENSIRION AG Laubisruetistr. 50 CH-8712 Staefa ZH Switzerland Sensirion Inc., USA phone: +1 805 409 4900 info-us@sensirion.com www.sensirion.com Sensirion Korea Co. Ltd. phone: +82 31 337 7700~3 info-kr@sensirion.com www.sensirion.co.kr phone: +41 44 306 40 00 fax: +41 44 306 40 30 info@sensirion.com www.sensirion.com Sensirion Japan Co. Ltd. phone: +81 3 3444 4940 info-jp@sensirion.com www.sensirion.co.jp Sensirion China Co. Ltd. phone: +86 755 8252 1501 info-cn@sensirion.com www.sensirion.com.cn Sensirion Taiwan Co. Ltd. phone: +41 44 306 40 00 info@sensirion.com To find your local representative, please visit www.sensirion.com/contact www.sensirion.com Version 2.2 - July 2016 7/7