D6F-A7D/-AB71D MEMS Flow Sensor Digital Compensation for High Accuracy * Temperature compensation and linear compensation produce high accuracy (3% RD (25% to 100% FS)). * Compact models for 10 to 70 L/min. * Reduced piping work with quick-fastening feature. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Characteristics MEMS Flow Sensor D6F-10A7D-000-0 0 to 10 L/min Quick joint P10 Air Quick joint P14 Model D6F-10A7D-000-0 0 to 20 L/min D6F-20A7D-000-0 0 to 50 L/min D6F-50A7D-000-0 0 to 70 L/min D6F-70AB71D-000-0 Accessories (Sold separately) D6F-CABLE3 Quick fastener D6F-FASTENER-P10 Pipe fittings D6F-PLG1 Note: Refer to Accessories for the D6F Series on page 39. 60000 50000 40000 30000 20000 0 2 4 6 8 50000 40000 30000 20000 10000 0 10 0 5 Flow rate (L/min) 50000 40000 30000 20000 0 10 20 30 40 40000 30000 20000 10000 0 50 0 10 20 Connector 1: Vcc 2: SDA 3: SCL 4: GND BM04B-GHS (made by J.S.T. Mfg. Co.) Use the following connectors for connections to the D6F: Housing GHR-04V-S (made by J.S.T. Mfg. Co.) Terminals SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.) Wires AWG26 to AWG30 3: SCL 4: GND 30 40 50 60 70 Flow rate (L/min) D6F-10A7D-000-0 D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 D6F-70AB71D-000-0 Pin No. 20 50000 60000 Flow rate (L/min) Connections 15 D6F-70AB71D-000-0 70000 10000 0 10 Flow rate (L/min) D6F-50A7D-000-0 Model Cable 70000 60000 10000 0 Output (Count) Type D6F-20A7D-000-0 70000 Output (Count) Flow rate range Output (Count) Applicable fluid Output (Count) Joint 2: SDA 1: Vcc Enlarged View Flow rate L/min (normal) 0 2 4 6 8 10 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 10 D6F-20A7D-000-0 Flow rate L/min (normal) 0 4 8 12 16 20 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 20 D6F-50A7D-000-0 Flow rate L/min (normal) 0 10 20 30 40 50 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 50 D6F-70AB71D-000-0 Flow rate L/min (normal) 0 20 40 60 70 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 43024 (A810) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 100 20 D6F-A7D/-AB71D MEMS Flow Sensor Characteristics/Performance Model D6F-10A7D-000-0 Flow Range (See note 1.) 0 to 10L/min D6F-20A7D-000-0 0 to 20 L/min D6F-50A7D-000-0 0 to 50 L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P10 Electrical Connection Four-pin connector Power Supply 3.0 to 3.6 VDC Current Consumption 10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25C Quick joint P14 Resolution 15 bit Accuracy (See note 3.) 5%RD (10%F.S. Flow rate < 25%F.S.) 3%RD (25%F.S. Flow rate 100%F.S.) Response time 90 ms max. Repeatability (See note 4.) 0.3 %RD Interface (See note 5.) I2C 0.3%RD Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 100 kPa Pressure Drop (See note 4.) 0.034 kPa Operating Temperature (See note 6.) -10 to +60C Operating Humidity (See note 6.) 35 to 85%RH Storage Temperature (See note 6.) -30 to +80C D6F-70AB71D-000-0 0 to 70 L/min 0.083 kPa 5%RD (10L/min Flow rate < 20L/min) 3%RD (20L/min Flow rate 70L/min) 0.5%RD 1.3%RD 0.28 kPa 0.57 kPa Storage Humidity (See note 6.) 35 to 85%RH Insulation Resistance Between sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 57.3 g Note: 1. Note: 2. Note: 3. Note: 4. Note: 5. Note: 6. Note: 7. 64.4 g Volumetric flow rate at 0C, 101.3 kPa. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) -10 Operating Temperature 60C Reference (typical) Refer to the D6F-@@@@D-000-@ Application Notes for details. With no condensation or icing. The following custom options are available. Ask your OMRON representative for details. - Temperature measurement - Address settings (up to four addresses) - Fault detection - Threshold setting Communication Serial Interface Master/Slave Speed mode I2C Slave / Address: HEX : 0x6C BIN : 110_1100 (7bit) Fast Mode 400kHz Signal SCL Serial Clock SDA Data Signal 21 D6F-A7D/-AB71D MEMS Flow Sensor Dimensions (Unit: mm) MEMS Flow Sensors D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 Lot No. Display A Recommended Quick joint male P10 type 9 max. A 1.6 max 2.50.05 2 min. (4.4) 84.60.5 X X 2 min. R0.4 R0.4 (60.6) (66.6) 17 dia. 20 dia. max. B 10 +0 -0.05 dia. 12.850.05 dia. C0.1 (34.9) Y 2.5 C0.3 +0.25 -0 C0.5 CROSS X-X B 200.5 dia. 300.5 170.5 dia. 6 If using a Rc3/8 converter joint, the following is recommended. REGAL JOINT CO., LTD eigyou@rgl.co.jp Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM10 O ring: O ring P10 fluororubber (material) (7.9) 30 +0.1 13 -0.05 dia. 30.15 0.90.5 Note C0.5 (circumference) R2 (circumference) Description Y Note 1. Note . The Port type of pipe fitting based on "Quick Joint P10 Type". * P10 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P10 of JIS B 2406. * Please obtain a male joint separately. 300.5 C0.5 (circumference) Note 2. Use the following connectors to connect to the Sensor. Connector :GHR-04V-S (JST) Terminals :SSHL-002T-P0.2 (JST) Wires :AWG26 to AWG30 Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND CROSS A-A (B-B) D6F-70AB71D-000-0 Lot No. Display 20.50.2 A 2-2.6 dia. Depth 6.5 Recommended Quick joint male P14 type 9 max. A 20.50.2 25.80.2 X 2 min. (4.4) 84.60.5 (64.5) (66.6) (60.6) 25.80.2 Two, 30.90.5 1.6 max 2.50.05 2 min. 22 dia. 26 dia. max. 14 X R0.4 R0.4 +0 -0.05 dia. 17.850.05 dia. 40.1 dia. C0.1 Recommended Installation Dimensions from back side (See note 2.) B Y (34.8) C0.5 CROSS X-X B 30 300.5 220.5 dia. +0.1 18 -0.05dia. 30.15 0.90.5 Note 1 C0.5 (circumference) R2 (circumference) C0.5 (circumference) 6 CROSS A-A (B-B) 2.5 +0.25 -0 Description Y If using a Rc3/8 converter joint, the following is recommended. REGAL JOINT CO., LTD eigyou@rgl.co.jp Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14 O ring: O ring P14 fluororubber (material) (7.9) 260.5 dia. C0.3 320.5 300.5 Note 1. The Port type of pipe fitting based on "Quick Joint P14 Type". * P14 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P14 of JIS B 2406. * Please obtain a male joint separately. Note 2. To mount the Sensor with 2.6-dia. holes, use P-type self-tapping screws with a nominal diameter of 3 mm and tighten them to a torque of 1.2 N*m max. The screw threads must engage for 5.5 mm min. Note 3. Use the following connectors to connect to the Sensor. Connector :GHR-04V-S (JST) Terminals :SSHL-002T-P0.2 (JST) Wires :AWG26 to AWG30 Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND 22