Miniature Amplified Low Pressure Sensors Low Pressure (0.5" H2O to 30 " H2O) Sensors Features * 0 to 0.5" H2O to 0 to 30" H2O Pressure Ranges * Temperature Compensated * Calibrated Zero and Span mode errors. This model provides a calibrated amplified output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage between 4.5 and 5.5 Equivalent Circuit Product Label Placement on Backside Lid 7.17 0.282 1.78 0.070 2.12 0.084 Vs 12.70 0.500 0.64 0.025 2.09 0.082 10.79 0.425 2.12 0.084 Port B - 2.04 0.080 2.14 0.084 2.73 0.108 [9.65] 0.380 (nom) D1 version, D2 version, G verison Gnd Port A 0.51 0.020 0.25 0.010 NOTES 1) Dimensions are in inches [mm]. 2) For suggested pad layout, see drawing: PAD-01 Vout + 6.45 0.254 9.81 0.386 1.01 0.040 10.79 0.425 15.75 0.620 1.16 0.046 2.54 0.100 Pin 1 2 3 4 Pin 1: Vs Pin 2: Gnd Pin 3: Vout Pin 4: Do Not Connect Approvals MKT As Is All Sensors DATE With Change MFG As Is DATE ENG With Change DS-0101 Rev B As Is DATE With Change QA As Is DATE With Change a 16035 Vineyard Blvd. Morgan Hill, CA 95037 Physical Dimensions e www.allsensors.com all The Miniature Amplified Output pressure sensor is based upon a proprietary technology to reduce all output offset or common f 408 225 2079 General Description p 408 225 4314 * Medical Instrumentation * Environmental Controls * HVAC sensors Applications Pressure Sensor Characteristics Maximum Ratings +4.5 to +5.5 Vdc Supply Voltage, Vs 10 psig Common-mode pressure 250C Lead Temperature (soldering 2-4 sec.) Environmental Specifications Temperature Ranges Compensated 5 to 50 C Operating -25 to 85 C Storage -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges Part Number Operating Pressure Nominal Span Proof Pressure Burst Pressure 0.5 inH2O 4V 100 inH2O 200 inH2O 1 INCH-Dx-4V-MINI 1 inH2O 4V 100 inH2O 200 inH2O 1 INCH-G-4V-MINI 0 - 1 inH2O 4V 100 inH2O 200 inH2O 5 INCH-Dx-4V-MINI 5 inH2O 4V 200 inH2O 300 inH2O 5 INCH-G-4V-MINI 0 - 5 inH2O 4V 200 inH2O 300 inH2O 10 INCH-Dx-4V-MINI 10 inH2O 4V 200 inH2O 300 inH2O 10 INCH-G-4V-MINI 0 - 10 inH2O 4V 200 inH2O 300 inH2O 20 INCH-Dx-4V-MINI 20 inH2O 4V 300 inH2O 500 inH2O 20 INCH-G-4V-MINI 0 - 20 inH2O 4V 300 inH2O 500 inH2O 30 INCH-Dx-4V-MINI 30 inH2O 4V 500 inH2O 800 inH2O 30 INCH-G-4V-MINI 0 - 30 inH2O 4V 500 inH2O 800 inH2O 0.5 INCH-Dx-4V-MINI For differential pressure D1 is the package with two pressure ports the same side, D2 has two ports the opposite sides. Performance Characteristics for 0.5 INCH-Dx-4V-MINI Parameter, note 1 Minimum Nominal Maximum Units - 0.5 - inH2O Output Span, note 5 1.90 2.0 2.10 V Offset Voltage @ zero differential pressure 2.15 2.25 2.35 V Offset Temperature Shift (5C-50C), note 2 - - 120 mV Offset Warm-up Shift, note 3 - 10 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 10 - mV Linearity, hysteresis error, note 4 - 0.05 0.25 %FSS Span Shift (5C-50C), note 2 - - 2 %FSS Operating Range, differential pressure Miniature Amplified Low Pressure Sensors Performance Characteristics for 1 INCH-Dx-4V-MINI Nominal Maximum Units - 1.0 - inH2O Output Span, note 5 1.90 2.0 2.10 V Offset Voltage @ zero differential pressure 2.15 2.25 2.35 V Offset Temperature Shift (5C-50C), note 2 - - 60 mV Offset Warm-up Shift, note 3 - 10 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 10 - mV Linearity, hysteresis error, note 4 - 0.05 0.25 %FSS Span Shift (5C-50C), note 2 - - 2 %FSS Minimum Nominal Maximum Units - 1.0 - inH2O Output Span, note 5 3.90 4.0 4.10 V Offset Voltage @ zero pressure 0.15 0.25 0.35 V Offset Temperature Shift (5C-50C), note 2 - - 60 mV Offset Warm-up Shift, note 3 - 10 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 10 - mV Linearity, hysteresis error, note 4 - 0.05 0.25 %FSS Span Shift (5C-50C), note 2 - - 2 %FSS Minimum Nominal Maximum Units - 5.0 - inH2O Output Span, note 5 1.90 2.0 2.10 V Offset Voltage @ zero differential pressure 2.15 2.25 2.35 V Offset Temperature Shift (5C-50C), note 2 - - 40 mV Offset Warm-up Shift, note 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, note 4 - 0.05 0.25 %FSS Span Shift (5C-50C), note 2 - - 1 %FSS Operating Range, gage pressure Performance Characteristics for 5 INCH-Dx-4V-MINI Parameter, note 1 Operating Range, differential pressure All Sensors DS-0101 Rev B e www.allsensors.com all Parameter, note 1 p 408 225 4314 Performance Characteristics for 1 INCH-G-4V-MINI f 408 225 2079 Operating Range, differential pressure sensors Minimum a 16035 Vineyard Blvd. Morgan Hill, CA 95037 Parameter, note 1 Performance Characteristics for: 5 INCH-G-4V-MINI Parameter, NOTE 1 Minimum Nominal Maximum Units - 5.0 - inH2O Output Span, NOTE 5 3.90 4.0 4.10 V Offset Voltage @ zero pressure 0.15 0.25 0.35 V Offset Temperature Shift (5C-50C), NOTE 2 - - 40 mV Offset Warm-up Shift, NOTE 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, NOTE 4 - 0.05 0.25 %FSS Span Shift (5C-50C), NOTE 2 - - 1 %FSS Minimum Nominal Maximum Units - 10.0 - inH2O Output Span, NOTE 5 1.90 2.0 2.10 V Offset Voltage @ zero differential pressure 2.15 2.25 2.35 V Offset Temperature Shift (5C-50C), NOTE 2 - - 20 mV Offset Warm-up Shift, NOTE 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, NOTE 4 - 0.05 0.25 %FSS Span Shift (5C-50C), NOTE 2 - - 1 %FSS Minimum Nominal Maximum Units - 10.0 - inH2O Output Span, NOTE 5 3.90 4.0 4.10 V Offset Voltage @ zero pressure 0.15 0.25 0.35 V Offset Temperature Shift (5C-50C), NOTE 2 - - 20 mV Offset Warm-up Shift, NOTE 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, NOTE 4 - 0.05 0.25 %FSS Span Shift (5C-50C), NOTE 2 - - 1 %FSS Operating Range, gage pressure Performance Characteristics for: 10 INCH-Dx-4V-MINI Parameter, NOTE 1 Operating Range, differential pressure Performance Characteristics for: 10 INCH-G-4V-MINI Parameter, NOTE 1 Operating Range, gage pressure Miniature Amplified Low Pressure Sensors Units - 20.0 - inH2O Output Span, note 5 1.90 2.0 2.10 V Offset Voltage @ zero differential pressure 2.15 2.25 2.35 V Offset Temperature Shift (5C-50C), note 2 - - 20 mV Offset Warm-up Shift, note 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, note 4 - 0.05 0.25 %FSS Span Shift (5C-50C), note 2 - - 1 %FSS Minimum Nominal Maximum Units - 20.0 - inH2O Output Span, note 5 3.90 4.0 4.1 V Offset Voltage @ zero pressure 0.15 0.25 0.35 V Offset Temperature Shift (5C-50C), note 2 - - 20 mV Offset Warm-up Shift, note 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, note 4 - 0.05 0.25 %FSS Span Shift (5C-50C), note 2 - - 1 %FSS Minimum Nominal Maximum Units - 30.0 - inH2O Output Span, note 5 1.90 2.0 2.10 V Offset Voltage @ zero differential pressure 2.15 2.25 2.35 V Offset Temperature Shift (5C-50C), note 2 - - 20 mV Offset Warm-up Shift, note 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, note 4 - 0.05 0.25 %FSS Span Shift (5C-50C), note 2 - - 1 %FSS Operating Range, differential pressure Performance Characteristics for 20 INCH-G-4V-MINI Parameter, note 1 Operating Range, gage pressure Performance Characteristics for 30 INCH-Dx-4V-MINI Parameter, note 1 Operating Range, differential pressure All Sensors DS-0101 Rev B e www.allsensors.com all Maximum f 408 225 2079 Nominal p 408 225 4314 Minimum a 16035 Vineyard Blvd. Morgan Hill, CA 95037 Parameter, note 1 sensors Performance Characteristics for 20 INCH-Dx-4V-MINI Performance Characteristics for 30 INCH-G-4V-MINI Parameter, NOTE 1 Minimum Nominal Maximum Units - 30.0 - inH2O Output Span, NOTE 5 3.9 4.0 4.1 V Offset Voltage @ zero pressure 0.15 0.25 0.35 V Offset Temperature Shift (5C-50C), NOTE 2 - - 20 mV Offset Warm-up Shift, NOTE 3 - 5 - mV Offset Position Sensitivity (1g) - 5 - mV Offset Long Term Drift (one year) - 5 - mV Linearity, hysteresis error, NOTE 4 - 0.05 0.25 %FSS Span Shift (5C-50C), NOTE 2 - - 1 %FSS Operating Range, gage pressure Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 500 useconds. Specification Notes 1: ALL PARAMETERS ARE MEASURED AT 5.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS OTHERWISE SPECIFIED. PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO THE B-PORT. NOTE 2: SHIFT IS RELATIVE TO 25C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. NOMINALLY THE OUTPUT VOLTAGE RANGE IS 0.25 TO 4.25 VOLTS FOR MINUS TO PLUS FULL SCALE PRESSURE. NOTE All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. Miniature Amplified Low Pressure Sensors