MiCS-6814 1143 rev 8 Data Sheet The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package. The MiCS-6814 is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors. 10.00 10.00 Ethanol CO CO Hydrogen Features 1.00 1.00 Rs/R0 Rs/R0 * Smallest footprint for compact designs (5 x 7 x 1.55 mm) * Robust MEMS sensor for harsh environments * High-volume manufacturing for low-cost applications * Short lead-times H2S Methane Methane Ammonia Ammonia Ethanol 0.10 0.10 Propane Propane Hydrogen Iso-butane Iso-butane 0.01 0.01 0.1 0.1 1 10 10 1 100 1000 100 1000 Concentration [ppm] Concentration [ppm] 10000 10000 100000 100000 RED sensor, continuous power ON, 25C, 50% RH 100.00 10.00 Detectable gases CO NO2 C2H5OH H2 NH3 CH4 C3H8 C4H10 Hydrogen 1 - 1000ppm 0.05 - 10ppm 10 - 500ppm 1 - 1000ppm 1 - 500ppm >1000ppm >1000ppm >1000ppm Rs/R0 * Carbon monoxide * Nitrogen dioxide * Ethanol * Hydrogen * Ammonia * Methane * Propane * Iso-butane NO2 1.00 NO 0.10 0.01 0.01 0.1 1 10 100 Concentration [ppm] OX sensor, continuous power ON, 25C, 50% RH 10.0 1.0 For more information please contact: Rs/R0 Propane Hydrogen 0.1 Iso-butane Ethanol info.em@sgxsensortech.com Ammonia 0.0 SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondreche Switzerland 1 10 100 1000 10000 Concentration [ppm] NH3 sensor, continuous power ON, 25C, 50% RH www.sgxsensortech.com Page 1 of 5 100000 MiCS-6814 1143 rev 8 Data Sheet Performance RED sensor Characteristic RED sensor Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 100 1500 k Typical CO detection range FS 1 1000 ppm Sensitivity factor (see note 2) S60 - 1.2 50 - Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 0.8 20 k Typical NO2 detection range FS 0.05 10 ppm Sensitivity factor (see note 3) SR - 2 - - Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 10 1500 k Typical NH3 detection range FS 1 300 ppm Sensitivity factor (see note 4) SR 1.5 15 - Performance OX sensor Characteristic OX sensor Performance NH3 sensor Characteristic OX sensor - Notes: 1. Sensing resistance in air R0 is measured under controlled ambient conditions, i.e. synthetic air at 23 5C and 50 10% RH for RED sensor and synthetic air at 23 5C and 5% RH for OX sensor. Sampling test. 2. Sensitivity factor is defined as Rs in air divided by Rs at 60 ppm CO. Test conditions are 23 5C and 50 10% RH. Indicative values only. Sampling test. 3. Sensitivity factor is defined as Rs at 0.25 ppm NO2, divided by Rs in air. Test conditions are 23 5C and 5% RH . Indicative values only. Sampling test. 4. Sensitivity factor is defined as Rs in air divided by Rs at 1 ppm of NH3. Test conditions are 23 5C and 50 10% RH. Indicative values only. Sampling test. Page 2 of 5 Data Sheet Power circuit and measurement circuit MiCS-6814 1143 rev 8 MiCS-6814 with recommended supply circuit (top view) MiCS-6814 with measurement circuit (top view) R1 is 130 Ohms, R2 is 820 Ohms and R3 is 27 Ohms. These resistors are necessary to obtain the right temperatures on the three independent heaters while using a single 5 V power supply. The resulting voltages are typically VhRED = 2.4 V, VhOX = 1.7 V and VhNH3 = 2.2 V. The example above shows the principle to read a resistance between 1 kOhms and 2MOhms with a 8bit A/D converter. Depending on the application and on the precision of the A/D converter, a single load resistor of 56 kOhms may be sufficient. Rload must be 820 Ohms at the lowest in order not to damage the sensitive layer. Parameter RED sensor/OX sensor/NH3 sensor Symbol Typ Min Max Unit Heating power PH 76/43/66 71/30/60 81/50/73 mW Heating voltage VH 2.4/1.7/2.2 - - V Heating current IH 32/26/30 - - mA Heating resistance at nominal power RH 74/66/72 66/59/64 82/73/80 Rating Symbol Value / Range Unit Maximum heater power dissipation PH 88 mW Maximum sensitive layer power dissipation Ps 8 mW Vsupply 4.9 - 5.1 V RH 5 - 95 %RH Ambient operating temperature Tamb -30 - 85 C Storage temperature range Tsto -40 - 120 C RHsto 5 - 95 %RH Voltage supplyHeating current Relative humidity range Storage humidity range Page 3 of 5 Data Sheet MiCS-6814 1143 rev 8 Package outline dimensions The package is compatible with SMD assembly process. Pin Connection A Rs2 B Rh1 RED, Rs1 RED C Rh1 NH3 Rs1 NH Operating Dconditions 3 E Rh2 NH3 F Rs2 NH3 G Rh2 RED H Rs2 RED J Rh1 OX, Rs1 OX K Rh2 OX MiCS-6814 configuration (bottom view) Sensor configuration The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top. The MiCS-6814 includes three sensor chips with independent heaters and sensitive layers. One sensor chip detects oxidising gases (OX) , the other sensor detects reducing gases (RED) and the other detects NH3. The internal connections are shown above. Page 4 of 5 Data Sheet MiCS-6814 1143 rev 8 Packaging Power circuit The sensors are packaged in a tape and reel for expedition. The two resistors (82 ohm for RED and 51+82 The are necessary placed in atocarrier The ohmsensors for OX) are obtaintype. the right dimensions ofon thethe cavity 5.5 x 7.5 xheaters 2.55 mm temperatures two are independent (the tolerance is +/- 0.2 mm). while using a 5V power supply. The outside dimension of the reel is either 178 +- mm (for a maximum of 700 sensors ) or 330 + 0.25 / -4 mm (for a maximum of 2000 sensors). IMPORTANT PRECAUTIONS: Read the following instructions carefully before using the MiCS-6814 described here to avoid erroneous readings and to prevent the device from permanent damage. *The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours. *The sensor must not be exposed to high concentrations of organic solvents, silicone vapours or cigarettesmoke in order to avoid poisoning the sensitive layer. *Heater voltage above the specified maximum rating will destroy the sensor due to overheating. *This sensor is to be placed in a filtered package that protects it against water and dust projections. *SGX sensortech strongly recommends using ESD protection equipment to handle the sensor. For more information please contact: info.em@sgxsensortech.com SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondreche Switzerland www.sgxsensortech.com Whilst SGX sensortech has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences of any use thereof and also reserves the right to change the specification of goods without notice. SGX sensortech accepts no liability beyond the set out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance with information contained herein. Page 5 of 5