PHOTODIODE Si photodiode S9089 Highly reliable quartz window photodiode for VUV detection S9089 is a VUV (vacuum ultraviolet) sensitive Si photodiode ideal for ArF (=193 nm) excimer laser detection. Compared to conventional types, S9089 offers improved sensitivity stability against VUV irradiation. The package is hermetically sealed by a newly developed quartz window that keeps it fully airtight and highly reliable. This package is also easier to handle than S8551 windowless type photodiode. Features Applications l Highly reliable quartz window l High reliable detection of ArF excimer laser (=193 nm) l Active area: 5.8 x 5.8 mm l TO-8 metal package Absolute maximum ratings (Ta=25 C) Parameter Reverse voltage Operating temperature Storage temperature Symbol VR Max. Topr Tstg Symbol l lp Photo sensitivity S Dark current ID Rise time tr Terminal capacitance Ct measurement l UV light detection, etc. Value 5 -40 to +100 -55 to +125 Electrical and optical characteristics (Ta=25 C) Parameter Spectral response range Peak sensitivity wavelength l ArF (=193 nm), KrF (=248 nm) excimer laser Condition l=193 nm l=800 nm VR=10 mV VR=0 V, RL=1 kW l=655 nm, 10 to 90 % VR=0 V, f=10 kHz Unit V C C Min. 0.04 0.4 - Typ. 190 to 1000 780 0.06 0.5 0.02 Max. 0.5 Unit nm nm A/W A/W nA - 2 - s - 0.7 - nF 1 Si photodiode S9089 Spectral response (Typ. Ta=25 C) 0.6 PHOTO SENSIVITY (A/W) 0.5 0.4 0.3 0.2 0.1 0 190 400 600 800 1000 1200 WAVELENGTH (nm) KSPDB0225EA Dimensional outline (unit: mm) 13.9 0.2 12.35 0.1 9.1 0.1 ACTIVE AREA 5.83 x 5.83 1.9 0.5 MAX. 0.45 LEAD (15.0) 4.45 0.2 PHOTOSENSITIVE SURFACE QUARTZ GLASS 7.5 0.2 ANODE TERMINAL MARK 1.4 DEPTH 0.15 COMMON TO CASE KSPDA0157EA Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. (c)2004 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Hamamatsu City, 435-8558 Japan, Telephone: (81) 053-434-3311, Fax: (81) 053-434-5184, http://www.hamamatsu.com U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvagen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 2 Cat. No. KSPD1062E01 Jan. 2004 DN