Features Applications
PHOTODIODE
Si photodiode
Highly reliable quartz window photodiode for VUV detection
S9089
S9089 is a VUV (vacuum ultraviolet) sensitive Si photodiode ideal for ArF (λ=193 nm) excimer laser detection. Compared to conventional types,
S9089 offers improved sensitivity stability against VUV irradiation. The package is hermetically sealed by a newly developed quartz window that
keeps it fully airtight and highly reliable. This package is also easier to handle than S8551 windowless type photodiode.
l
Highly reliable quartz window
l
High reliable detection of ArF excimer laser (λ=193 nm)
l
Active area: 5.8 × 5.8 mm
l
TO-8 metal package
l
ArF (λ=193 nm), KrF (λ=248 nm) excimer laser
measurement
l
UV light detection, etc.
1
■ Absolute maximum ratings (Ta=25 °C)
Parameter Symbol Value Unit
Reverse voltage VR Max. 5 V
Operating temperature Topr -40 to +100 °C
Storage temperature Tstg -55 to +125 °C
■ Electrical and optical characteristics (Ta=25 °C)
Parameter Symbol Condition Min. Typ. Max. Unit
Spectral response range l- 190 to 1000 - nm
Peak sensitivity wavelength lp-780 -nm
l=193 nm 0.04 0.06 - A/W
Photo sensitivity S l=800 nm 0.4 0.5 - A/W
Dark current IDVR=10 mV -0.02 0.5 nA
Rise time tr VR=0 V, RL=1 kW
l=655 nm, 10 to 90 % - 2 - µs
Terminal capacitance Ct VR=0 V, f=10 kHz -0.7 -nF
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Hamamatsu City, 435-8558 Japan, Telephone: (81) 053-434-3311, Fax: (81) 053-434-5184, http://www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2004 Hamamatsu Photonics K.K.
Si photodiode S9089
Cat. No. KSPD1062E01
Jan. 2004 DN
2
■ Spectral response
■ Dimensional outline (unit: mm)
KSPDA0157EA
WAVELENGTH (nm)
PHOTO SENSIVITY (A/W)
0
190 400 600 800 1000 1200
0.1
0.2
0.3
0.4
0.6
0.5
(Typ. Ta=25 ˚C)
COMMON TO CASE
1.9
(15.0)
4.45 ± 0.2
1.4 DEPTH 0.15
ANODE TERMINAL MARK
PHOTOSENSITIVE
SURFACE
QUARTZ GLASS
0.5 MAX.
LEAD
13.9 ± 0.2
12.35 ± 0.1
9.1 ± 0.1
0.45
7.5 ± 0.2
ACTIVE AREA
5.83 × 5.83
KSPDB0225EA
