MS54XX Miniatur e SMD Pressure Sens o r
DA54XX_020 www.meas-spec.com Nov. 20, 2012
000054XX280 ECN1882 1/9
• 1, 7, 12, and 70 bar absol ut e pressu re range
• Uncompensated
• Piezoresistive silicon micromachined sensor
• Miniature surface mou n t
• Ceramic carrier
• Low noise, high sensiti vity, high li n earity
DESCRIPTION
The MS54XX SMD pressure sensor series is designed for pressure sensor systems with highest demands on
resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a
6.2 x 6.4 mm ceramic carrier. The MS54XX can be delivered in a high sensitivity version giving a maximal
output voltage or in a high linearity version. Both versions provide an output voltage directly proportional to the
applied pressure.
Carrier
Full
scale
pressure
High Sensitivity Versions
High Linearity Versions
Product code
Full scale
span
Linearity Product code
Full scale
span
Linearity
Ceramic
1 bar
MS5401-AM
240 mV
±0.20 % FS
MS5401-BM
150 mV
±0.05 % FS
7 bar
MS5407-AM
392 mV
±0.20 % FS
12 bar
MS5412-BM
150 mV
±0.05 % FS
70 bar
MS5470-AM
310 mV
±0.25 % FS
FEATURES APPLICATIONS
•
Low cost SMD package
•
Brake systems
•
Small size
•
High resolution altimeters, variometers
•
High rel ia b il ity, low dr if t
•
Barometers
•
-40 °C to +125 °C operation range
•
Engine management
• Gel protection against humidity and water • W aterproof watches and diving computers
MS54XX Miniatur e SMD Pressure Sens o r
DA54XX_020 www.meas-spec.com Nov. 20, 2012
000054XX280 ECN1882 2/9
PIN CONFIGURATION
PIN DESCRIPTION
Pin Name
Pin No
Function
OUT-
1
Negative output voltage of Wheatstone bridge
GND
2
Ground
VS+
3
Supply voltage of Wheatstone bridge
OUT+
4
Positive output voltage of Wheatstone bridge
ABSOL UTE MAXIMUM RATINGS
Parameter
Symbol
Conditions
Min
Max
Unit
Supply voltage
VS+
Ta = 25 °C
-
20
V
Storage temperature
TS
-40
+125
°C
Overpressure MS5401-AM
MS5401-BM (1)
MS5407-AM (2)
MS5412-BM
MS5470-AM
P Ta = 25 °C
-
-
-
-
-
5
10
21
30
180
bar
NOTES
1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11
bar in salt water or 100 m water respectively.
2) The MS5407-AM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 21
bar in salt water or 200 m water specifically.
3: VS+
1: OUT-
4: OUT+
2: GND
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ELECTRICAL CHARACTERISTICS
HIGH SENSITIVITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)
Parameter
Min
Typ
Max
Unit
Notes
MS5401-AM
Operating pressure range
0
-
1
bar
Full-scale span (FS)
190
240
290
mV
Sensitivity
190
240
290
mV/bar
Linearity
-
±0.15
±0.40
% FS
1, 6
MS5407-AM
Operating pressure range
0
-
7
bar
Full-scale span (FS)
322
392
462
mV
Sensitivity
46
56
66
mV/bar
Linearity
±0.15
±040
% FS
1, 6
MS5470-AM
Operating pressure range
0
-
70
bar
Full-scale span (FS)
250
310
370
mV
Sensitivity
3.6
4.4
5.3
mV/bar
Linearity
±0.25
±0.50
% FS
1, 6
All Ranges
Operating temperature range
-40
-
125
°C
Zero pressure offs et
-40
0
40
mV
Pressure hysteresis
-
-
±0.20
% FS
2, 6
Temperature hysteresis
-
0.3
0.8
% FS
3, 6
Repeatability
-
-
±0.20
% FS
4, 6
Bridge resistance
3.0
3.4
3.8
kΩ
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
+2'400
-1'500
-80
2'900
-1'900
-
+3'300
-2'300
+80
ppm/°C
ppm/°C
µV/°C
5, 6
5, 6
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating
pressure range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
MS54XX Miniatur e SMD Pressure Sens o r
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000054XX280 ECN1882 4/9
ELECTRICAL CHARACTERISTICS (CONT.)
HIGH LINEARITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)
Parameter
Min
Typ
Max
Unit
Notes
MS5401-BM
Operating pressure range
0
-
1
bar
8
Full-scale span (FS)
120
150
180
mV
Sensitivity
120
150
180
mV/bar
Linearity
-
±0.05
±0.20
% FS
1, 6
MS5412-BM
Operating pressure range
0
-
12
bar
8
Full-scale span (FS)
120
150
180
mV
Sensitivity
10
12.5
15
mV/bar
Linearity
±0.05
±0.15
% FS
1, 6
All Ranges
Operating temperature range
-40
-
125
°C
Zero pressure offs et
-40
0
40
mV
Pressure hysteresis
-
-
±0.20
% FS
2, 6
Temperature hysteresis
-
0.3
0.8
% FS
3, 6
Repeatability
-
-
±0.20
% FS
4, 6, 7
Bridge resistance
3.0
3.4
3.8
kΩ
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
+2'400
-1'500
-80
2'900
-1'900
-
+3'300
-2'300
+80
ppm/°C
ppm/°C
µV/°C
5, 6
5, 6
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating
pressure range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
7) MS5412-BM : Max. 0.3% FS
8) This sensor f amily is optim ized for the l inearit y; it is sui table for app lications with high er pressur e where
the linearity requirement is less critical.
MS54XX Miniatur e SMD Pressure Sens o r
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APPLICATION INFORMATION
GENERAL
The MS54XX is a miniaturized absolute pressure sensor series which has been designed as a surface mount
device (SMD). Its main advantages are the high perform ance of the semiconductor sensor and a design which
makes it suitable for applications requiring small dimensions and cost efficiency.
The sensor element of the MS54XX consists of a micromachined silicon membrane with borosilicate glass
wafer-bonde d un der v acuum to the b ac k side for ref erence pressure. I mplanted r es is tors make us e of the pi e zo-
resistive effect to sense pressure applied to the membrane. The sensor is mounted using a special process
allowing best offset stability making the device suitable for direct PCB assembly.
Typical applications for this miniaturized pressure sensor MS54XX are altitude measurements and the
measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive
and household applications, consumer electronics and pneumatics.
Full Scale
Pressure
High Sensitivity Versions
(MS54XX-AX)
High Linearity Versions
(MS54XX-BX)
1 bar
Variometer, Altimeter, Barometer
High End Altimeter, Medical Instrumentation
7 bar
Divers Watch, Tire Pressure, Electronic Scale
High End Electronic Scale
12 bar
Pneumatic Brake, Diving Computer
70 bar
Engine Control, Diving Computer
HUMIDITY, WATER PROTECTION
MS54XX-XM WITH METAL CAP
The MS54XX-AM / - BMXXBA has an anticorrosive and antimagnetic metallic protection ca p filled with silicone
gel for e nha nc ed protec t ion aga ins t humidity. T he pr op erties of th is ge l e nsur e f un c tion of the s ensor ev en wh en
in direct water contact. This feature can be useful for waterproof watches or other applications, where direct
water contact cannot be avoided. Nevertheless the user should avoid drying of hard materials like for example
salt partic les on the si licone gel surf ace. In this case it is adv isable to r inse with c lean water af terwards. S pecial
care has to be taken not to mechanically damage the gel. Damaged gel may lead to air entrapment and
consequently to unstable sensor signal, especially if the damage is close to the sensor surface.
The metal cap is fabricated of special anticorrosive alloy in order to avoid any galvanic effects within the end
product. The MS5401-BM is qualified referring to the ISO Standard 2281 and can withstand a pressure of 11 bar
in salt water. The concentration of the sea water used for the qualification is 41 g of sea salt per 1 litre of DI
water. The MS5407-BM satisfies salt-water testing with a pressure capability of 21 bar.
For under water operat ions as s pecified in I SO Stand ard 2281 i t is impor tant to se al the sensor with a rub ber O -
ring around t he m etal cap. An y salt water reac hing t he c ontact side ( ceram ic and pads ) of the sensor could l ead
to permanent damage. Especially for "water-resistant 100 m" watches and for diving computers, it is
recommended to provide a stable mechanical pusher from the backside of the sensor; otherwise the
overpressure may push the sensor backwards and even deform the electronic board on which the sensor is
mounted.
LIGHT SENSITIVITY
The MS54XX is sensitive to sunlight ( visible and near-infrared spectrum). This is due to the strong photo ef fect
of silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final
product the sensor c annot be ex posed t o dir ect ligh t d ur ing o perat ion as it ef f ec ts the measurem ent. This c an be
achieved for instance by placing mechanical parts with holes in such that light cannot pass.
MS54XX Miniatur e SMD Pressure Sens o r
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000054XX280 ECN1882 6/9
CONNECTION TO PCB
The package outline of the module enables the use of a flexible PCB to connect it. This can be important for
applications in watches and other special devices, and will also reduce mechanical stress on the device.
For applicat ions subjected to m echanical shock, it is recommended to enhance the mechanical reliability of the
solder junctions by covering the rim or the corners of MS54XX ceramic substrate with glue or globtop-like
material.
SOLDERING
Please refer to the application note AN808 for all soldering issues.
CLEANING
The MS54XX has been manufactured under clean-room conditions. Each device is inspected for homogeneity
and cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10 000 or
better con ditions . Shoul d this not be poss ible, it is reco mm ended to prot ect the se nsor openin g during as sembl y
from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean” must be used.
Cleani n g m ight damage the sensor.
RECOMMENDED PAD LAYOUT
Recommended pad layout for soldering of the MS54XX on a printed circuit board
MS54XX Miniatur e SMD Pressure Sens o r
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000054XX280 ECN1882 7/9
PACKAGE OUTLINES
CERAMIC CARRIER AND METAL CAP
Device package outlines of MS54XX-AM and MS54XX-BM
(M = anticorrosive and antimagnetic stainless ste el cap)
MS54XX Miniatur e SMD Pressure Sens o r
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000054XX280 ECN1882 8/9
PACKING
The MS54XX is pack ed in 51 cm (20-inch) antistatic plastic tubes with rubber en d-plugs of diff erent colors : one
green and one black. The dot on the carrier next to Pin 1 is facing the green end-plug. Each tube contains 80
sensors. The tubes are marked "ANTISTATIC" and have an information label.
See the drawings below for more details.
PACKING TUBE OUTLINES
All measures in mm
510
4.4
8.2
Information l abel
MS54XX Miniatur e SMD Pressure Sens o r
DA54XX_020 www.meas-spec.com Nov. 20, 2012
000054XX280 ECN1882 9/9
ORDERING INFORMATION
Product code
Product
Art. No
Package
Delivery Form
MS5401-AM Miniature pressure sensor 1 bar, High
sensitivity
325401001-00
Ceramic carrier
Tube
325401001-50
Ceramic carrier
Tape and Reel
325401006-00
Ceramic carrier,
without
transparent gel
Tube
MS5401-BM Pressure sensor 1 bar, High linearity
325401000-00
Ceramic carrier
Tube
325401000-50
Ceramic carrier
Tape and Reel
325401002-00
Ceramic carrier,
without
transparent gel
Tube
MS5407-AM Miniature pressure sensor 7 bar, High
sensitivity
325407000-00
Ceramic carrier
Tube
325407000-50
Ceramic carrier
Tape and Reel
325407001-00
Ceramic carrier,
without
transparent gel
Tube
MS5412-BM Pressure sensor 12 bar, High linearity 325412000-00 Ceramic carrier
Tube
325412000-50
Ceramic carrier
Tape and Reel
MS5470-AM Miniature pressure sensor 70 bar,
High sensitivity
325470000-00 Ceramic carrier
Tube
AX = high sensitivity
BX = high linearity
XM = anticorrosive and antimagnetic metallic cap
FACTORY CONTACT
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Measurement Specialties
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spec.com
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CH-2022 Bevaix
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Fax: + 41 32 847 9569
e-mail: sales.chameas-spec.com
Website: www.meas-spec.com
Measurement Specialties (China), Ltd.
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Shenzhen High-Tech Park (North)
Nanshan District, Shenzhen, 518057
China
Tel: +86 755 3330 5088
Fax: +86 755 3330 5099
e-mail: pfg.cs.asiaameas-spec.com
Website: www.meas-spec.com
The information i n this sheet has been carefully reviewed and is believed to be accurate; however, no respons i bi lit y is assum ed for
inaccuracies. Furtherm ore, this i nformation does not convey to the purchaser of such devices any license under the patent rights to the
manufacturer. Measurem ent Specialt i es, Inc. reserves the right to make changes without furt her notice to any product herein. Measurement
Specialti es, Inc. makes no warranty, represent ation or guarant ee regarding the sui t abi lit y of its product for any particular purpose, nor does
Measurement Specialti es, Inc. assume any liabilit y arising out of the applicati on or use of any product or circuit and specifically disclaims
any and all liabilit y, includi ng without limitation consequential or incidental damages. Typical parameters can and do vary in different
applicat i ons. All operat i ng parameters must be validated for each customer application by customer’s technical experts. Measurem ent
Specialti es, Inc. does not convey any lic ense under its patent rights nor the rights of others.
