MEMS Flow Sensors D6F series Series Catalog Faster and more accurate than ever before MEMS flow sensor : the ideal means for mass flow measurement Omron flow sensor so precise even the flap of a butterfly's wings will not be missed. Realizing a highly accurate flow measurement, Omron's MEMS flow sensor accurately detects minute airflow so much as a single flap of a butterfly's butterfly butterf y s wings. win ngs. A gas flow sensor capable of "measuring mass flow" independent of temperature and pressure. re. D6F-A6 D6F-W Mass Flow Measurement Q1 There are two balloons; each having different volumes. But these balloons have the same mass. Why is that? A The volume increases/decreases according to the pressure and temperature changes. The mass, on the other hand, remains constant regardless of the environmental changes. The mass flow measurement allows measurement performance that is not affected by the changes in the environment. Q2 Why is mass flow measurement required? A An accurate measurement of the flow is required especially for combustion control. Omron's flow sensor enables measuring the gas flow based on the mass flow measurement. 2 Principles of MEMS Flow D6F Series No airflow Temperature distribution Heater Thermopile A Thermopile B Cross-sectional view of flow sensor chip During the absence of airflow, the temperature distribution around the heater is symmetrical. When there is airflow, the temperature of the upwind side cools down and the temperature of the downwind side warms up, disrupting the symmetry of the temperature distribution. sensing even a single flap of a butterfly's wings Operating characteristic Error Output voltage (V) Standard lower limit -4% -6% 0 4 6 Magnified 5 view 1.04 4 3 1.02 2 1 1.00 0 -0.2 0.0 0.2 0.4 0.6 0.8 1.0 Flow rate(SLM) Flow rate of 1L: Output corresponding to flow rate change below 1/1000 of full scale. Compact 0% -2% Ambient temperature = 25degC (Model: D6F-20A7D-000-0) High Sensitivity Standard upper limit 2% Output voltage (V) Omron's unique MEMS technology allows detection of very low air velocities 4% Output voltage (V) High Accuracy 3RD (25-100%F.S.) is realized by linear temperature correction using ASIC technology 6% 1SLM =1000sccm 8 12 Flow rate (L/min) 16 20 Output voltage characteristic 0.98 0.96 -3.2 -1.6 0.0 1.6 Flow rate (sccm) 3.2 The product size is reduced by using the world-smallest class size MEMS sensor element Dimension of D6F-V model: 24x8x14mm. Sensor Measurement Energy saving Airflow Upwind Flow of gas Downwind Cross-sectional view of flow sensor chip By detecting this temperature difference appearing as a difference in the electromotive forces developed by the thermopiles, it allows the mass flow rate and mass flow velocity to be measured without the influence of temperature and pressure. Since the thermopile generates the thermo-electromotive force, the power consumption is much lower than when using the resistivity method. Highly Resistant to Dust Pattent Built-in Dust Segregation System (cyclonic) The sensor can be placed anywhere thanks to its dust-resistant structure. Omron's unique design of 3D flow path provides a high level of reliability by separating dust particles to reduce its effect on the sensor chip. Additionally, Omron succeeded in reducing the sensor size, allowing it to be used in wider range of applications. No.453 4 526 D6F-W/-V/-P External flow Centrifugal separation chambers Dust vent MEMS sensor element = leads the flow of clean air in here Model : D6F-W 3 Applications Omron flow sensors cover wide range of applications and can be used for different purposes. Application Examples Clogging Detection For monitoring the flow of the cooling air to optimize the cooling efficiency and avoid malfunctions. Combustion Control Flow rate Flow rate Velocity Differential pressure For controlling the air/ fuel ratio by accurately measuring the mass flow rate Differential pressure Fuel cell Projector PC Server Quiet, low maintenance cost Flow measurement For recording the amount of air used, detecting even the smallest leaks Water heater Optimizing combustion efficiency Air volume measurement Flow rate Velocity Differential pressure Differential pressure Container manufacturing machine Ducts 20 Mounting machine Flow visualization, real-time detection 4 Boiler For measuring flow rate and flow velocity of a space Airflow analysis (environment) eco Air conditioner Monitoring the amount of ventilation, controlling the amount of air at the required level Selection of Products Select the most suitable sensor from many variations. Flow rate Combustible ble gas D6F-N2/-L2 D6F-N7/-L7 D6F N7/ L7 Natural gas, LP gas Types of gas D6F-A5/-A6/-A7/-A7D D6F-AB71/-AB71D Air N2, Air D6F-P D6F-P (for bypass use) D6F-A1 D6F-A3 Flow rate 1 2 3 5 10 20 50 100 Note: The pictures are re representative examples of our sensors Flow velocity 200 L / min Differential pressure Delivers high sensitivity even at low flow rate, low differential pressure Air MEMS differential pressure sensor N2, Air D6F-V D6F-PH High precision Accurate measurement Low piping effects High impedance to reduce the influence of piping variations High reliability D6F-W Flow velocity 1 2 3 4 Detect sensor anomaly 5 10 m/ s 5 List of D6F series MEMS Flow Sensor Air Minute flow Analog Air Applicable gas Items Model D6F-01A1-110 D6F-P0010A D6F-P0010AM2 D6F-P0001A1 D6F-02A1-110 D6F-03A3-000 Shape 5 4 03L/min 3 Flow rate range (L/mim) 02L/min 2 1 00.1L/min 01L/min 25 8, 25 0 Page Gas Minute to middle flow 12 Analog Natural gas (13A) Applicable gas Items 8 Model LP gas Natural gas (13A) D6F-02L2-000 D6F-02L7-000 D6F-01N2-000 D6F-05N2-000 D6F-05N7-000 Shape 05L/min 5 4 3 Flow rate range (L/mim) 02L/min 2 01L/min 1 0 10 Page Air Middle to high flow Analog Digital 10, 18 Digital type only Applicable gas Items Model 10, 16, 18 Air D6F-10A5-000 D6F-10A6-000 D6F-10A7-000 D6F-10A7D-000 D6F-20A5-000 D6F-20A6-000 D6F-20A7D-000 D6F-30A7-000 D6F-30AB71-000 D6F-50A5-000 D6F-50A6-000 D6F-50A7D-000 D6F-70AB71-000 D6F-70AB71D-000 Shape 070L/min 70 60 050L/min 50 40 Flow rate range (L/mim) 030L/min 30 20 10 020L/min 010L/min 0 Page 6 14, 16, 18, 20 14, 16, 20 18, 23 14, 16, 20 20, 23 MEMS 2-axis flow sensor/ MEMS flow sensor Air Flow velocity Analog Digital type only Digital Applicable gas Items Air Model D6F-D D6F-W01A1 D6F-V03A1 D6F-W04A1 D6F-W10A1 Shape 010m/s 10 8 Flow velocity range (m/s) 6 4 2 -11m/s 01m/s 35 31 03m/s 04m/s 33 31 0 -2 Page 31 MEMS differential pressure sensor Air Differential pressure Digital Digital type only Applicable gas Items Model Air D6F-PH0505AD3 D6F-PH0025AD1 D6F-PH5050AD3 Shape 500 250 Differential pressure range (Pa) 50 -5050Pa 0250Pa -500500Pa 0 -50 -250 -500 Page 28 7 D6F-A1 MEMS Flow Sensor A Compact, High-accuracy Sensor That Measures Low Flow Rates. * High accuracy of 3% FS. * Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01A1-110 0 to 1 L/min Air 0 to 2 L/min 6.0 6.0 D6F-01A1-110 5.0 5.0 D6F-02A1-110 Accessory (included) Type Model Cable D6F-CABLE1 Connections D6F-01A1-110 D6F-02A1-110 Pin No. Connector 1: Vcc 2: Vout 3: GND 53398-03** (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021-0300 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 Tubes Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 12 mm and an inner diameter of 8 mm are recommended. 2: Vout 1: Vcc 3: GND Enlarged View 8 D6F-02A1-110 Model Output voltage (V) Flow rate range Output voltage (V) Applicable fluid 4.0 3.0 2.0 1.0 0.0 0.0 0.2 0.4 0.6 Flow rate (L/min) 0.8 1.0 4.0 3.0 2.0 1.0 0.0 0.0 0.4 0.8 1.2 Flow rate (L/min) 1.6 2.0 D6F-01A1-110 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 0.2 0.4 0.6 0.8 1.0 2.31 0.12 3.21 0.12 3.93 0.12 4.51 0.12 5.00 0.12 0.4 0.8 1.2 1.6 2.0 2.59 0.12 3.53 0.12 4.18 0.12 4.65 0.12 5.00 0.12 D6F-02A1-110 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 Measurement conditions: Power supply voltage of 120.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. D6F-A1 MEMS Flow Sensor Characteristics/Performance Model D6F-01A1-110 Flow Range (See note 1.) D6F-02A1-110 0 to 1 L/min 0 to 2 L/min. Calibration Gas (See note 2.) Air Flow Port Type Bamboo joint Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.42 kPa Operating Temperature (See note 4.) -10 to 60C 1.06 kPa Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 12.8 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) D6F-01A1-110 D6F-02A1-110 8.6 dia. 7.4 dia. 3.5-dia. through hole 15.1 Mounting Hole Dimensions 4 R4 Two, M3 screws 8 66 300.1 41 300.05 (3.7) R1.75 4.5 (7.45) 9.5 280.05 R4.25 3.5 4 Through hole (6) 20 280.1 Cable (included): D6F-CABLE1 20035 20 10015 Brown wire Black wire 0.5 1. Vcc 2. Vout 4.5 6.5 Connector :51021 (Manufactured by Molex, LLC) Terminal :50079 (Manufactured by Molex, LLC) Wire :0.14SQ Blue wire 3. GND 9 D6F-N2/-L2 MEMS Flow Sensor A Compact, High-accuracy Sensor That Measures Low Flow Rates. * High accuracy of 3% FS. * Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01N2-000 Natural gas (13A) LP gas 6.0 6.0 0 to 1 L/min D6F-01N2-000 5.0 5.0 0 to 5 L/min D6F-05N2-000 0 to 2 L/min D6F-02L2-000 4.0 3.0 2.0 1.0 0.0 0.0 Accessory (included) Type Model D6F-CABLE1 Connections D6F-01N2-000 D6F-02N2-000 D6F-05N2-000 D6F-02L2-000 Pin No. Connector Use the following connectors for connections to the D6F: Housing 51021-0300 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 0.4 0.6 Flow rate (L/min) 1.6 2.0 1.0 0.0 0.0 1.0 2.0 3.0 Flow rate (L/min) 4.0 5.0 4.0 3.0 2.0 1.0 0.4 0.8 1.2 Flow rate (L/min) D6F-01N2-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 0.2 0.4 0.6 0.8 1.0 1.90 0.12 2.81 0.12 3.64 0.12 4.37 0.12 5.00 0.12 1.0 2.0 3.0 4.0 5.0 2.91 0.12 3.92 0.12 4.47 0.12 4.79 0.12 5.00 0.12 0.4 0.8 1.2 1.6 2.0 3.02 0.08 3.95 0.08 4.47 0.08 4.79 0.08 5.00 0.12 D6F-05N2-000 Flow rate L/min (normal) 0 1.00 0.12 D6F-02L2-000 2: Vout 3: GND Flow rate L/min (normal) Output voltage V Enlarged View 10 1.0 2.0 5.0 Output voltage V 1: Vcc 0.8 3.0 6.0 0.0 0.0 1: Vcc 2: Vout 3: GND 53398-03** (Made by Molex Japan) 0.2 4.0 D6F-02L2-000 Output voltage (V) Cable D6F-05N2-000 Model Output voltage (V) Flow rate range Output voltage (V) Applicable fluid 0 1.00 0.30 Measurement conditions: Power supply voltage of 120.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. D6F-N2/-L2 MEMS Flow Sensor Characteristics/Performance Model D6F-01N2-000 Flow Range (See note 1.) D6F-05N2-000 0 to 1 L/min Calibration Gas (See note 2.) Natural gas (13A) Flow Port Type Rc 1/4 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC 0 to 2 L/min. Propane gas Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.2% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) 2% to 7.5% F.S. (25C characteristic) 0.3% FS Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case Aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.017 kPa Operating Temperature (See note 4.) -10 to 60C D6F-02L2-000 0 to 5 L/min 0.10 kPa 0.14 kPa Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) 4% FS for 25C characteristic at -10 to 60C Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 35.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) D6F-01N2-000 D6F-05N2-000 D6F-02L2-000 Two, M3 holes with a depth of at least 5 mm 16.2 Mounting Hole Dimensions 16.20.05 Two, 3.5 dia. 37 620.5 (3.7) 370.05 (6) 21.60.5 10 3-17 10 Cable (included): D6F-CABLE1 20035 22.10.5 10015 Brown wire Black wire 8.85 1. Vcc 2. Vout Two, tapped threads 0.35 for Rc 1/4 pipe Blue wire 3. GND Connector :51021 (Manufactured by Molex, LLC) Terminal :50079 (Manufactured by Molex, LLC) Wire :0.14SQ 11 D6F-A3 MEMS Flow Sensor High-accuracy Sensing with a Thin, Compact Body. * A thin, lightweight flow sensor. * Unique flow path structure provides high precision and fast response. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-03A3-000 Flow rate range Air 0 to 3 L/min Model 6.0 D6F-03A3-000 5.0 Accessory (Sold separately) Type Model D6F-CABLE2 Cable D6F-CABLE2-L Note: Refer to Accessories for the D6F Series on page 39. Connections D6F-03A3-000 1: GND 2: Vout 3: Vcc 1: GND 2: Vout 3: Vcc Connector SM03B-SRSS-TB (Made by J.S.T. Mfg. Co.) Use the following connectors made by J.S.T. Mfg. Co. for connections to the Sensor: * Pressure-welded Connector Socket: 03SR-3S Wires: AWG30 Or * Crimp Connector Contacts: SSH-003T-P0.2 Housing: SHR-03V-S or SHR-03V-S-B Wires: AWG32 to AWG28 12 4.0 3.0 2.0 1.0 0.0 0.0 0.6 1.2 1.8 Flow rate (L/min) 2.4 3.0 D6F-03A3-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.2 0.6 2.83 0.2 1.2 3.77 0.2 1.8 4.34 0.2 2.4 4.72 0.2 3.0 5.00 0.2 Measurement conditions: Power supply voltage of 120.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. Enlarged View Pin No. Output voltage (V) Applicable fluid D6F-A3 MEMS Flow Sensor Characteristics/Performance Model D6F-03A3-000 Flow Range (See note 1.) 0 to 3 L/min Calibration Gas (See note 2.) Air Flow Port Type M5 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 5% FS (25C characteristic) Repeatability (See note 3.) 0.7% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.45 kPa Operating Temperature (See note 4.) 0 to 50C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -10 to 60C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 5% FS for 25C characteristic at an ambient temperature of 0 to 50C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-03A3-000 Mounting Hole Dimensions OUT side D6F -03A3-000 MADE IN JAPAN IN side 8 M5 threads (Effective thread depth: 3.1) +0.15 Two, 180.05 M3 screw holes 14 16.8 3.1-0.05 6.8 3.4-dia. 180.15 36.6 3.1 +0.15 -0.05 dia. through hole 13 D6F-A5 MEMS Flow Sensor High-accuracy Sensing with a Compact Body for Flow Rates Up to 50 L/min. * Accurately detects a mass flow rate of 10 to 50 L/min. * A compact size of 30 x 78 x 30 mm (H x W x D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-10A5-000 Manifold Air Flow rate range 0 to 10 L/min D6F-10A5-000 0 to 20 L/min D6F-20A5-000 0 to 50 L/min D6F-50A5-000 Accessory (Sold separately) Type Model 6.0 5.0 5.0 4.0 3.0 2.0 1.0 0.0 0.0 2.0 Model Cable D6F-CABLE1 D6F-20A5-000 6.0 Output voltage (V) Applicable fluid Output voltage (V) Flow Port Type 4.0 6.0 Flow rate (L/min) 8.0 10.0 40.0 50.0 4.0 3.0 2.0 1.0 0.0 0.0 4.0 8.0 12.0 Flow rate (L/min) 16.0 20.0 D6F-50A5-000 Note: Refer to Accessories for the D6F Series on page 39. 6.0 Connections D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 Pin No. Connector 1: Vcc 2: Vout 3: GND 53398-03** (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021-0300 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 1: Vcc 2: Vout 3: GND Output voltage (V) 5.0 4.0 3.0 2.0 1.0 0.0 0.0 10.0 20.0 30.0 Flow rate (L/min) D6F-10A5-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 2.0 4.0 6.0 8.0 10.0 1.75 0.12 2.60 0.12 3.45 0.12 4.25 0.12 5.00 0.12 4.0 8.0 12.0 16.0 20.0 1.93 0.12 2.87 0.12 3.70 0.12 4.41 0.12 5.00 0.12 10 20 30 40 50 2.45 0.12 3.51 0.12 4.20 0.12 4.66 0.12 5.00 0.12 D6F-20A5-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 D6F-50A5-000 Flow rate L/min (normal) Enlarged View Output voltage V 0 1.00 0.12 Measurement conditions: Power supply voltage of 120.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. 14 D6F-A5 MEMS Flow Sensor Characteristics/Performance Model D6F-10A5-000 Flow Range (See note 1.) D6F-20A5-000 0 to 10 L/min 0 to 20 L/min Calibration Gas (See note 2.) Air Flow Port Type Manifold Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS/aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa Pressure Drop (See note 3.) 0.8 kPa Operating Temperature (See note 4.) -10 to 60C 2.9 kPa Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -30 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) D6F-50A5-000 0 to 50 L/min 17.2 kPa Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 103 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 Mounting Hole Dimensions Lot number label Two, 1.40.1 Four, 3.2-dia. through holes Four, M3 holes (3.7) 780.5 660.1 660.05 (6) (30.05) Two, 5 dia. 6 140.05 300.5 300.5 15 D6F-A6 MEMS Flow Sensor High-accuracy Sensing with a Compact Body for Flow Rates up to 50 L/min. * Accurately measures an air mass flow rate of 10 to 50 L/min. * A compact size of 30 x 78 x 30 mm (H x W x D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor Rc 1/4 thread Air NPT 1/8 thread Flow rate range D6F-10A6-000 6.0 6.0 D6F-20A6-000 5.0 5.0 0 to 50 L/min D6F-50A6-000 0 to 10 L/min D6F-10A61-000 0 to 20 L/min D6F-20A61-000 Model Connections Connector D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 1: Vcc 2: Vout 3: GND 53398-03** (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021-0300 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 1: Vcc 2: Vout 3: GND 4.0 3.0 2.0 1.0 0.0 0.0 2.0 4.0 6.0 Flow rate (L/min) 8.0 10.0 40.0 50.0 4.0 3.0 2.0 1.0 0.0 0.0 4.0 8.0 12.0 Flow rate (L/min) 16.0 6.0 5.0 4.0 3.0 2.0 1.0 0.0 0.0 10.0 20.0 30.0 Flow rate (L/min) D6F-10A6-000/D6F-10A61-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 2.0 4.0 6.0 8.0 10.0 1.75 0.12 2.60 0.12 3.45 0.12 4.25 0.12 5.00 0.12 12 16 20 3.70 0.12 4.41 0.12 5.00 0.12 D6F-20A6-000/D6F-20A61-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 4 1.93 0.12 8 2.87 0.12 D6F-50A6-000/D6F-50A61-000 Flow rate L/min (normal) Enlarged View Output voltage V 0 1.00 0.12 10 20 30 40 50 2.45 0.12 3.51 0.12 4.20 0.12 4.66 0.12 5.00 0.12 Measurement conditions: Power supply voltage of 120.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. 16 20.0 D6F-50A6-000 D6F-50A61-000 Output voltage (V) Note: Refer to Accessories for the D6F Series on page 39. Pin No. D6F-50A61-000 D6F-CABLE1 D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 D6F-20A6-000 D6F-20A61-000 0 to 20 L/min Accessory (Sold separately) Type D6F-10A6-000 D6F-10A61-000 0 to 10 L/min 0 to 50 L/min Cable Model Output voltage (V) Applicable fluid Output voltage (V) Flow Port Type D6F-A6 MEMS Flow Sensor Characteristics/Performance Model D6F-10A6-000 Flow Range (See note 1.) D6F-20A6-000 0 to 10 L/min 0 to 20 L/min Calibration Gas (See note 2.) Air Flow Port Type Rc 1/4 thread Electrical Connection Three-pin connector D6F-50A6-000 0 to 50 L/min D6F-10A61-000 0 to 10 L/min 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10k min.) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS/aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa 0.10 kPa Operating Temperature (See note 4.) -10 to 60C Operating Humidity (See note 4.) 35% to 85% D6F-50A61-000 0 to 50 L/min 0.52 kPa 2.31 kPa NPT 1/8 thread Power Supply Pressure Drop (See note 3.) D6F-20A61-000 0 to 20 L/min 0.28 kPa 1.44 kPa 0.15 kPa Storage Temperature (See note 4.) -30 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 103 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors Lot number label 120.2 Mounting Hole Dimensions Two, 3.2-dia. Holes (3.7) 780.5 660.2 660.05 (6) (30.4) D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 Two, tapped threads for Rc 1/4 pipes 6 Two, M3 holes, Effective screw depth: 4.5 120.05 300.5 300.5 D6F-10A61-000 D6F-20A61-000 D6F-50A61-000 Two, tapped threads for NPT 1/8 pipes 300.5 300.5 17 D6F-A7/-L7/-N7 MEMS Flow Sensor Reduction of Piping time by quick joint connection * Low -flow rate of natural gas and LP gas can be measured. * 10 L/min and 30 L/min of Air can be measured. * Compact size of 30 x 84.6 x 30 mm (H x W x D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor Model Natural gas (13A) 0 to 5 L/min D6F-05N7-000 LP gas 0 to 2 L/min D6F-02L7-000 0 to 10 L/min D6F-10A7-000 Air 0 to 30 L/min Accessories (Sold separately) D6F-CABLE1 Quick fastener D6F-FASTENER-P10 Pipe fittings D6F-PLG1 Note: Refer to Accessories for the D6F Series on page 39. 5.0 4.0 3.0 2.0 1.0 1.0 2.0 3.0 4.0 4.0 3.0 2.0 1.0 0.0 0.0 5.0 0.4 0.8 1.2 1.6 2.0 24 30 Flow rate (L/min) Flow rate (L/min) D6F-10A7-000 Model Cable 6.0 5.0 0.0 0.0 Output voltage (V) Type D6F-30A7-000 D6F-02L7-000 6.0 Output voltage (V) Flow rate range D6F-30A7-000 6.0 6.0 5.0 5.0 Output voltage (V) Quick joint P10 D6F-05N7-000 Applicable fluid Output voltage (V) Flow Port Type 4.0 3.0 2.0 1.0 0.0 4.0 3.0 2.0 1.0 0.0 0 2 4 6 8 10 0 Flow rate (L/min) 6 12 18 Flow rate (L/min) Connections D6F-05N7-000 D6F-02L7-000 D6F-10A7-000 D6F-30A7-000 Pin No. Connector 1: Vcc 2: Vout 3: GND 53398-03** (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021-0300 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 1:Vcc 2:Vout 3:GND Enlarged View D6F-05N7-000 Flow rate L/min (normal) 0 1.0 2.0 3.0 4.0 5.0 Output voltage V 1.00 0.12 1.68 0.12 2.47 0.12 3.31 0.12 4.15 0.12 5.00 0.12 Flow rate L/min (normal) 0 0.4 0.8 1.2 1.6 2.0 Output voltage V 1.00 0.12 1.96 0.12 2.89 0.12 3.72 0.12 4.43 0.12 5.00 0.12 Flow rate L/min (normal) 0 2.0 4.0 6.0 8.0 10.0 Output voltage V 1.00 0.12 1.75 0.12 2.60 0.12 3.45 0.12 4.25 0.12 5.00 0.12 Flow rate L/min (normal) 0 6 12 18 24 30 Output voltage V 1.00 0.12 2.11 0.12 3.12 0.12 3.91 0.12 4.53 0.12 5.00 0.12 D6F-02L7-000 D6F-10A7-000 D6F-30A7-000 Measurement conditions: Power-supply voltage 120.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. 18 D6F-A7/-L7/-N7 MEMS Flow Sensor Characteristics/Performance Model D6F-05N7-000 D6F-02L7-000 D6F-10A7-000 Flow Range (See note 1.) 0 to 5 L/min 0 to 2 L/min 0 to 10 L/min Calibration Gas (See note 2.) Natural gas (13A) LP gas Air Flow Port Type Quick joint P10 Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k min.) Accuracy 3%F.S. (25C characteristic) Repeatability (See note 3.) 0.3%F.S. Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa Pressure Drop (See note 3.) 0.06 kPa Operating Temperature (See note 4.) -10 to +60C 0.03 kPa Operating Humidity (See note 4.) 35 to 85%RH Storage Temperature (See note 4.) -10 to +80C Storage Humidity (See note 4.) 35 to 85%RH D6F-30A7-000 0 to 30 L/min 0.32 kPa 2.19 kPa -30 to +80C Temperature Characteristics 3%F.S. for 25C characteristic at an ambient temperature of -10 to +60C Insulation Resistance Between sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 72 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-05N7-000 D6F-02L7-000 D6F-10A7-000 D6F-30A7-000 Recommended Quick joint male P10 type A Lot No. Display 9 max. A 1.6 max 2.50.05 2 min. X X 2 min. R0.4 64.5 84.60.5 66.6 60.6 R0.4 (3.7) 10 +0 -0.05 dia. 17 dia. 20 dia. max. 12.850.05 dia. (6) C0.1 (33.4) Y C0.3 2.5 +0.25 -0 C0.5 CROSS X-X 30 300.5 Note 20 dia. 17 dia. 13 +0.1 -0.05 dia. 300.5 0.9 C0.5 (circumference) R2 (circumference) Description Y If using a Rc3/8 converter joint, the following is recommended. REGAL JOINT CO., LTD eigyou@rgl.co.jp Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM10 O ring: O ring P10 fluororubber (material) C0.5 (circumference) 60.3 30.15 CROSS A-A Note. The Port type of pipe fitting based on "Quick Joint P10 Type". * P10 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P10 of JIS B 2406. * Please obtain a male joint separately. 19 D6F-A7D/-AB71D MEMS Flow Sensor Digital Compensation for High Accuracy * Temperature compensation and linear compensation produce high accuracy (3% RD (25% to 100% FS)). * Compact models for 10 to 70 L/min. * Reduced piping work with quick-fastening feature. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Characteristics MEMS Flow Sensor D6F-10A7D-000-0 Quick joint P10 Air Quick joint P14 Flow rate range Model 0 to 10 L/min D6F-10A7D-000-0 0 to 20 L/min D6F-20A7D-000-0 0 to 50 L/min D6F-50A7D-000-0 0 to 70 L/min D6F-70AB71D-000-0 70000 60000 60000 50000 40000 30000 20000 10000 0 Quick fastener D6F-FASTENER-P10 Pipe fittings D6F-PLG1 Note: Refer to Accessories for the D6F Series on page 39. 4 6 8 30000 20000 10 0 5 Connector 1: Vcc 2: SDA 3: SCL 4: GND BM04B-GHS (made by J.S.T. Mfg. Co.) Use the following connectors for connections to the D6F: Housing GHR-04V-S (made by J.S.T. Mfg. Co.) Terminals SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.) Wires AWG26 to AWG30 3: SCL 4: GND 20 50000 60000 50000 40000 30000 20000 10000 0 40000 30000 20000 10000 0 0 10 20 30 40 0 50 10 20 30 40 50 60 70 Flow rate (L/min) D6F-10A7D-000-0 D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 D6F-70AB71D-000-0 Pin No. 15 D6F-70AB71D-000-0 70000 Flow rate (L/min) Connections 10 Flow rate (L/min) Output (Count) D6F-CABLE3 2 D6F-50A7D-000-0 Model Cable 40000 Flow rate (L/min) Output (Count) Type 50000 10000 0 0 Accessories (Sold separately) D6F-20A7D-000-0 70000 Output (Count) Applicable fluid Output (Count) Joint 2: SDA 1: Vcc Enlarged View Flow rate L/min (normal) 0 2 4 6 8 10 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 10 D6F-20A7D-000-0 Flow rate L/min (normal) 0 4 8 12 16 20 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 20 D6F-50A7D-000-0 Flow rate L/min (normal) 0 10 20 30 40 50 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 49024 (BF80) 61024 (EE60) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 50 D6F-70AB71D-000-0 Flow rate L/min (normal) 0 20 40 60 70 Output (HEX) 1024 (0400) 13024 (32E0) 25024 (61C0) 37024 (90A0) 43024 (A810) Measurement conditions: Power-supply voltage 3.30.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. Flow rate = (Output value - 1,024)/60,000 x 100 20 D6F-A7D/-AB71D MEMS Flow Sensor Characteristics/Performance Model D6F-10A7D-000-0 Flow Range (See note 1.) 0 to 10L/min D6F-20A7D-000-0 0 to 20 L/min D6F-50A7D-000-0 0 to 50 L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P10 Electrical Connection Four-pin connector Power Supply 3.0 to 3.6 VDC Current Consumption 10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25C Quick joint P14 Resolution 15 bit Accuracy (See note 3.) 5%RD (10%F.S. Flow rate < 25%F.S.) 3%RD (25%F.S. Flow rate 100%F.S.) Response time 90 ms max. Repeatability (See note 4.) 0.3 %RD Interface (See note 5.) I2C 0.3%RD Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 100 kPa Pressure Drop (See note 4.) 0.034 kPa Operating Temperature (See note 6.) -10 to +60C Operating Humidity (See note 6.) 35 to 85%RH Storage Temperature (See note 6.) -30 to +80C D6F-70AB71D-000-0 0 to 70 L/min 0.083 kPa 5%RD (10L/min Flow rate < 20L/min) 3%RD (20L/min Flow rate 70L/min) 0.5%RD 1.3%RD 0.28 kPa 0.57 kPa Storage Humidity (See note 6.) 35 to 85%RH Insulation Resistance Between sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 57.3 g Note: 1. Note: 2. Note: 3. Note: 4. Note: 5. Note: 6. Note: 7. 64.4 g Volumetric flow rate at 0C, 101.3 kPa. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) -10 Operating Temperature 60C Reference (typical) Refer to the D6F-@@@@D-000-@ Application Notes for details. With no condensation or icing. The following custom options are available. Ask your OMRON representative for details. - Temperature measurement - Address settings (up to four addresses) - Fault detection - Threshold setting Communication Serial Interface Master/Slave Speed mode I2C Slave / Address: HEX : 0x6C BIN : 110_1100 (7bit) Fast Mode 400kHz Signal SCL Serial Clock SDA Data Signal 21 D6F-A7D/-AB71D MEMS Flow Sensor Dimensions (Unit: mm) MEMS Flow Sensors D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 Lot No. Display A Recommended Quick joint male P10 type 9 max. A 1.6 max 2.50.05 2 min. (4.4) 84.60.5 X X 2 min. R0.4 R0.4 (60.6) (66.6) 10 +0 -0.05 dia. 17 dia. 20 dia. max. 12.850.05 dia. C0.1 (34.9) Y B 2.5 C0.3 +0.25 -0 C0.5 CROSS X-X B If using a Rc3/8 converter joint, the following is recommended. REGAL JOINT CO., LTD eigyou@rgl.co.jp Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM10 O ring: O ring P10 fluororubber (material) (7.9) 30 200.5 dia. 300.5 170.5 dia. Description Y +0.1 6 13 -0.05 dia. 30.15 0.90.5 Note C0.5 (circumference) R2 (circumference) Note 1. Note . The Port type of pipe fitting based on "Quick Joint P10 Type". * P10 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P10 of JIS B 2406. * Please obtain a male joint separately. 300.5 C0.5 (circumference) Note 2. Use the following connectors to connect to the Sensor. Connector :GHR-04V-S (JST) Terminals :SSHL-002T-P0.2 (JST) Wires :AWG26 to AWG30 Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND CROSS A-A (B-B) D6F-70AB71D-000-0 Lot No. Display 20.50.2 A Recommended Quick joint male P14 type 2-2.6 dia. Depth 6.5 9 max. A 20.50.2 25.80.2 1.6 max 2.50.05 2 min. 22 dia. 26 dia. max. Two, X R0.4 (4.4) 84.60.5 (64.5) (66.6) (60.6) 25.80.2 X 2 min. 14 R0.4 +0 -0.05 dia. 17.850.05 dia. 40.1 dia. C0.1 30.90.5 (34.8) Recommended Installation Dimensions from back side (See note 2.) B Y B 300.5 220.5 dia. +0.1 18 -0.05dia. 30.15 0.90.5 Note 1 C0.5 (circumference) R2 (circumference) C0.5 (circumference) 6 CROSS A-A (B-B) +0.25 -0 Description Y If using a Rc3/8 converter joint, the following is recommended. REGAL JOINT CO., LTD eigyou@rgl.co.jp Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14 O ring: O ring P14 fluororubber (material) (7.9) 260.5 dia. 2.5 C0.5 CROSS X-X 30 C0.3 320.5 300.5 Note 1. The Port type of pipe fitting based on "Quick Joint P14 Type". * P14 shows the name of an O-ring prescribed by JIS B 2401. * The port of O-ring ditch is based on P14 of JIS B 2406. * Please obtain a male joint separately. Note 2. To mount the Sensor with 2.6-dia. holes, use P-type self-tapping screws with a nominal diameter of 3 mm and tighten them to a torque of 1.2 N*m max. The screw threads must engage for 5.5 mm min. Note 3. Use the following connectors to connect to the Sensor. Connector :GHR-04V-S (JST) Terminals :SSHL-002T-P0.2 (JST) Wires :AWG26 to AWG30 Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND 22 D6F-AB71 MEMS Flow Sensor Reduction of Piping time by quick joint connection * Reduce the influence of pulsation flow by bypass flow path * 30 L/min and 70 L/min of Air can be measured. * Compact size of 30 x 84.6 x 32 mm (H x W x D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor Quick joint P14 D6F-30AB71-000 Applicable fluid Air Flow rate range Model 0 to 30 L/min D6F-30AB71-000 0 to 70 L/min D6F-70AB71-000 Accessory (Sold separately) Type 6.0 Output voltage (V) Flow Port Type D6F-CABLE1 Pin No. Connector 1.0 6 12 18 24 30 56 70 D6F-70AB71-000 6.0 5.0 4.0 3.0 2.0 1.0 0.0 0 1: Vcc 2: Vout 3: GND 53398-03** (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021-0300 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 1:Vcc 2:Vout 2.0 Flow rate (L/min) Output voltage (V) D6F-30AB71-000 D6F-70AB71-000 3.0 0 Note: Refer to Accessories for the D6F Series on page 39. Connections 4.0 0.0 Model Cable 5.0 3:GND Enlarged View 14 28 42 Flow rate (L/min) D6F-30AB71-000 Flow rate L/min (normal) 0 6 12 18 24 30 Output voltage V 1.00 0.12 1.25 0.12 1.91 0.12 2.75 0.12 3.78 0.12 5.00 0.12 D6F-70AB71-000 Flow rate L/min (normal) 0 14 28 42 56 70 Output voltage V 1.00 0.12 1.43 0.12 2.25 0.12 3.14 0.12 4.06 0.12 5.00 0.12 Measurement conditions: Power-supply voltage 120.1 VDC, ambient temperature 255C and ambient humidity 35 to 75%RH. 23 D6F-AB71 MEMS Flow Sensor Characteristics/Performance Model D6F-30AB71-000 Flow Range (See note 1.) D6F-70AB71-000 0 to 30 L/min 0 to 70 L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P14 Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k min.) Accuracy 3%F.S. (25C characteristic) Repeatability (See note 3.) 0.3%F.S. Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 100 kPa Pressure Drop (See note 3.) 0.88 kPa Operating Temperature (See note 4.) -10 to +60C Operating Humidity (See note 4.) 35 to 85%RH Storage Temperature (See note 4.) -30 to +80C Storage Humidity (See note 4.) 35 to 85%RH 3.49 kPa Temperature Characteristics 3%F.S. for 25C characteristic at an ambient temperature of -10 to +60C Insulation Resistance Between sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 75 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-30AB71-000 D6F-70AB71-000 Lot No. Display 20.5 Recommended Quick joint male P14 type A A 84.6 25.8 9 max. 1.6 max 2.50.05 2 min. (64.5) (66.6) (60.6) X X 2 min. R0.4 (3.7) R0.4 B 22 dia. 26 dia. max. 14 +0 -0.05 dia. 17.850.05 dia. (6) (33.4) 30.9 C0.1 Y C0.3 2.5 +0.25 -0 C0.5 CROSS X-X 2-2.6 dia Depth 6.5 (See note 2.) 26 dia. 22 dia. 18 +0.1 -0.05 dia. 30.15 See note 1. 0.9 C0.5 (circumference) R2 (circumference) C0.5 (circumference) 6 CROSS A-A 30 32 Note 1. The flow path inlet and outlet ports conform to P14-type female quick-connect joints. (The tube inlet and outlet ports have the same shape.) * P14 is the number of an O-ring specified in JIS B 2401. * The O-ring groove in the male joint must conform to P14 in JIS B 2406. * Please obtain a male joint separately. Note 2. To mount the Sensor with 2.6-dia. holes, use P-type self-tapping screws with a nominal diameter of 3 mm and tighten them to a torque of 1.2 N*m max. The screw threads must engage for 5.5 mm min. Note 3: Use the following connectors to connect to the Sensor. Connector : GHR-04V-S (JST) Terminals : SSHL-002T-P0.2 (JST) Wires : AWG26 to AWG30 Circuit numbers : 1. Vcc, 2. SDA, 3. SCL, and 4. GND. 24 Description Y If using a Rc3/8 converter joint, the following is recommended. REGAL JOINT CO., LTD eigyou@rgl.co.jp Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14 O ring: O ring P14 fluororubber (material) 30 30 D6F-P MEMS Flow Sensor A Compact, High-accuracy Flow Sensor with Superior Resistance to Environments. * Anti-dust performance is improved using the Cyclon method. * A full lineup of models with different connector types: bamboo joints, lead terminals for direct mounting on-board, and manifolds. * High accuracy of 5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information MEMS Flow Sensor Flow Port Type Connection Applicable fluid Flow rate range 0 to 0.1 L/min Lead terminals Bamboo joint D6F-P0010A1 Air 0 to 1 L/min Connector Manifold Model D6F-P0001A1 D6F-P0010A2 D6F-P0010AM2 Accessory (Sold separately) Type Model D6F-CABLE2 Cable D6F-CABLE2-L Note: Refer to Accessories for the D6F Series on page 39. Output Voltage Characteristics D6F-P0010A1/-P0010A2/-P0010AM2 3.0 3.0 2.5 2.5 Output voltage (V) Output voltage (V) D6F-P0001A1 2.0 1.5 1.0 0.5 0.0 2.0 1.5 1.0 0.5 0.0 0 0.02 0.04 0.06 Flow rate (L/min) 0.08 0.10 0 0.25 1 Flow rate L/min (normal) 0 Output voltage 0.50 0.90 1.30 1.70 2.10 2.50 Output voltage 0.50 1.60 2.10 2.31 2.50 V 0.10 0.10 0.10 0.10 0.10 0.10 V 0.10 0.10 0.10 0.10 0.10 0.02 0.04 0.06 0.08 0.10 Measurement conditions: Power supply voltage of 5.00.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. Flow rate L/min (normal) 0.5 0.75 Flow rate (L/min) 0 0.25 0.50 0.75 1.00 Measurement conditions: Power supply voltage of 5.00.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. 25 D6F-P MEMS Flow Sensor Characteristics/Performance Model D6F-P0001A1 Flow Range (See note 1.) 0 to 0.1 L/min Calibration Gas (See note 2.) Air D6F-P0010A1 D6F-P0010A2 Bamboo joint Flow Port Type Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm Electrical Connection Lead terminals Power Supply 4.75 to 5.25 VDC Current Consumption 15 mA max. with no load and a Vcc of 5.0 V 0.5 to 2.5 VDC (Load resistance: 10 k) Accuracy 5% FS (25C characteristic) Repeatability (See note 3.) 1.0% FS Output Voltage (Max.) 3.1 VDC (Load resistance: 10 k) 0.4% FS Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 10 VDC 4 VDC Case PBT Manifold Three-pin connector Output Voltage Rated Output Voltage D6F-P0010AM2 0 to 1 L/min Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure (See note 3.) 50 kPa Pressure Drop (See note 3.) 0.005 kPa 0.19 kPa 0.67 kPa Operating Temperature (See note 4.) -10 to +60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to +80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 5% FS for 25C characteristic at an ambient temperature of -10 to +60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 8.5 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. 8.0 g Tubing You can measure large flows by mounting the Sensor on a bypass. D6F-P Flow Sensor P1 P2 Resistance to flow Mounting Direction Bamboo joint Sensor 26 Manifold-type Sensor D6F-P MEMS Flow Sensor Connections/Dimensions (Unit: mm) Lead Terminals Label: Gives model and lot numbers. D6F-P0001A1/D6F-P0010A1 Two, 3-dia. through hole 10 23.3 Two, 4.9 dia. 2.6 dia. 11.7 7.2 Two, 1.1 dia. 4.76 Three, 1.3-dia. lands Label 2.54 MADE IN JAPAN D6F 27.2 7.3 13.5 Three, 0.8-dia. through holes 5.04 7.60.2 14 Recommended Dimensions for Connector Mounting Holes (Bottom view) 16.2 6 1.2 1.7 17.2 13.5 1.5 Two, R: 1.4 Connector XG8V-0344 (manufactured by OMRON) A 9.8 6 2.8 dia. 3. GND 7.2 2.54 13.2 1. Vcc 5.08 2. Vout Detailed View of A 4.76 Connectors D6F-P0010A2 Label: Gives model and lot numbers. 10 23.3 11.7 Two, 4.9 dia. 2.6 dia. MADE IN JAPAN D6F 27.2 A 7.3 Two, 1.1 dia. 1.Vcc 7.60.2 14 Label 2.Vout 16.2 8.5 6 3.GND 1.2 Detailed View of A 1.7 8.5 13.5 1.5 Two, R: 1.4 17.2 2.8 dia. 13.2 D6F-P0010AM2 10.1 dia., Depth: 2.40.1 Pin No. 1: Vcc 2: Vout 3: GND Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.) 22 18 6.70.1 *1 8 2 0 Two, 4-0.05 dia. B 3.5 dia. 1+0.1 0 27.2 140.05 22.1 A 6.4 9.6 2-R6 Two, C0.3 (entire circumference) 6 3.GND 2.Vout 1.Vcc 2.70.1 0.30.1 0.30.1 Detailed View of A Detailed View of B Grooves to stop rotation Connector Details Lot number label *1. Recommended Installation Dimensions O-ring Installation Hole Dimensions Depth: 2.6 to 3.0 6.70.1 C0.4 (entire circumference) Two, 7 +0.5 dia. 0 M3 threaded 140.05 7 +0.5 0 The recommended O-ring is JIS B 2401, nominal number P4. Note: Use one of the following connectors from JST Mfg. Co., Ltd. to connect to the D6F. 1) Pressure welding connector Socket: 03SR-3S Wire: AWG#30 Or 2) Crimp type connector Contact: SSH-003T-P0.2 Housing: SHR-03V-S Wire: AWG#32 to #28 Tubes Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 6 mm and an inner diameter of 4 mm are recommended. Soldering Conditions Use a soldering iron for 5 s at 350C with a pressure of 100 gf max. (This applies only to PCB-mounting Sensors.) 27 D6F-PH MEMS Differential pressure Sensor A Compact, High-accuracy Differential Pressure Sensor with Superior Resistance to Environments. * High accuracy of 3% RD * Linearized and temperature compensated * Digital output (I2C communication) * High flow impedance to reduce the influence of bypass configuration * Lineup of 4 types of slave address models RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Applicable fluid (See note 1.) Measurement range (See note 3.) 0 to 250 Pa Air (See note 2.) -50 to 50 Pa -500 to 500 Pa slave address (7 bit) 0b110_1100, 0x6C 0b110_1101, 0x6D 0b110_1110, 0x6E 0b110_1111, 0x6F 0b110_1100, 0x6C 0b110_1101, 0x6D 0b110_1110, 0x6E 0b110_1111, 0x6F 0b110_1100, 0x6C 0b110_1101, 0x6D 0b110_1110, 0x6E 0b110_1111, 0x6F Model D6F-PH0025AD1 D6F-PH0025AD1-1 D6F-PH0025AD1-2 D6F-PH0025AD1-3 D6F-PH0505AD3 D6F-PH0505AD3-1 D6F-PH0505AD3-2 D6F-PH0505AD3-3 D6F-PH5050AD3 D6F-PH5050AD3-1 D6F-PH5050AD3-2 D6F-PH5050AD3-3 Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative. Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist. Note: 3. At standard atmospheric pressure (1013.25 hPa) Output Characteristics D6F-PH0505AD3-@ 70000 70000 60000 60000 Output (count) Output (count) D6F-PH0025AD1-@ 50000 40000 30000 20000 10000 0 0 50 100 150 200 50 13024 (32E0) 40000 30000 20000 10000 0 -50 250 Differential pressure (Pa) Differential pressure (Pa) 0 Output 1024 (HEX) (0400) 50000 -30 -10 10 30 50 Differential pressure (Pa) 100 25024 (61C0) 150 37024 (90A0) 200 49024 (BF80) 250 61024 (EE60) Measurement conditions: Power supply voltage of 3.3 0.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. Differential pressure conversion formula: Dp = (Op - 1024) / 60000 x 250 Dp = Differential pressure, Op = Output Differential pressure (Pa) -50 -30 -10 0 10 30 50 Output 1024 13024 25024 31024 37024 49024 61024 (HEX) (0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60) Measurement conditions: Power supply voltage of 3.3 0.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. Differential pressure conversion formula: Dp = (Op - 1024) / 60000 x 100 - 50 Dp = Differential pressure, Op = Output D6F-PH5050AD3-@ 70000 Output (count) 60000 50000 40000 30000 20000 10000 0 -500 -300 -100 100 300 500 Differential pressure (Pa) Differential pressure (Pa) -500 -300 -100 0 100 300 500 Output 1024 13024 25024 31024 37024 49024 61024 (HEX) (0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60) Measurement conditions: Power supply voltage of 3.3 0.1 VDC, ambient temperature of 255C, and ambient humidity of 35% to 75%. Differential pressure conversion formula: Dp = (Op - 1024) / 60000 x 1000 - 500 Dp = Differential pressure, Op = Output 28 Note. Change of gas density affects the sensor output. Change of atmospheric pressure is compensated by the following formula. Dpeff = Dp x (Pstd / Pamb) Dpeff: Effective differential pressure Dp: Differential pressure of the sensor output Pstd: Standard atmospheric pressure (1013.25 hPa) Pamb: Actual ambient atmospheric pressure (hPa) D6F-PH MEMS Differential pressure Sensor Characteristics/Performance Model D6F-PH0025AD1-@ Differential pressure range (See note 1) 0 to 250 Pa D6F-PH0505AD3-@ 50 Pa D6F-PH5050AD3-@ 500 Pa Calibration Gas (See note 2.) Air Port Type Bamboo joint, Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm Power Supply 2.3 to 3.6 VDC Current Consumption 6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25C Resolution 12 bit Zero point tolerance (See note 3.) 0.2 Pa Span tolerance (See note 3.) 3% RD Span shift due to temperature variation < 0.5% RD per 10C 33 ms typical at 12 bit resolution (50 ms max.) Response time The processing time is 6 ms typical at 12 bit resolution. Gas flow through sensor (See note 5.) 63 mL/min Interface I2C Case material PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 10 kPa Operating temperature (See note 4.) -20 to +80C Operating humidity (See note 4.) 35 to 85 %RH Storage temperature (See note 4.) -40 to +80C 23 mL/min Storage humidity (See note 4.) 35 to 85 %RH Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) 100 mL/min Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.2 g Note: 1. Note: 2. Note: 3. Note: 4. Note: 5. At standard atmospheric pressure (1013.25 hPa) Dry gas must not contain large particles, e.g., dust, oil, or mist. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation. With no condensation or icing. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow by differential pressure is below. Relation between pressure and flow rate Flow rate (mL/min) 60 40 20 0 -20 -40 -60 -500 -300 -100 100 300 500 Differential pressure (Pa) 29 D6F-PH MEMS Differential pressure Sensor Connections/Dimensions (Unit: mm) 18 7.05 High pressure side 26 Mounting Direction Install the Sensor so that the joints are facing upward. 20 16.5 10 Low pressure side Two, through hole 2 dia 22 Two, 4 dia. Recommendation size for pin header installation (tolerrances: 0.1) Two, 4.9 dia 6.5 Two, 4 dia. 12 10.5 Two, through h Two, through ole 2.2 dia hole 2 dia. 4 16.5 10 5 Two, R2 3.37 Pin Header 3.7 Four, 0.48 dia. Three, 2 5.25 Four, through hole 0.8 dia. Three, 2 3.1 1.2 4:SCL 3:VCC 7.2 2:GND 1:SDA Tubes Install tubes made of materials such as rubber, urethane or nylon so that they will not come out. For urethane tubes, tubes with an outer diameter of 6 mm and an inner diameter of 4 mm are recommended. Soldering Conditions Use a soldering iron for 5 s at 350C with a pressure of 100 gf max. Electrical connection Vcc pull-up resister 2.2 k SDA Sensor (slave) GND Vcc 3.3 V Master SCL pull-up resister 2.2 k Vcc Communication D6F-PH0025AD1 D6F-PH0505AD3 D6F-PH5050AD3 Serial Interface Master/Slave 30 D6F-PH0025AD1-2 D6F-PH0505AD3-2 D6F-PH5050AD3-2 D6F-PH0025AD1-3 D6F-PH0505AD3-3 D6F-PH5050AD3-3 I2C HEX 0x6C 0x6D 0x6E 0x6F BIN (7bit) 0b110_1100 0b110_1101 0b110_1110 0b110_1111 SCL Serial Clock SDA Data Signal Speed mode Signal D6F-PH0025AD1-1 D6F-PH0505AD3-1 D6F-PH5050AD3-1 Max. 400kHz (Fast Mode) D6F-W MEMS Flow Sensor A Compact Sensor That Uses OMRON's Unique Flow Path Structure for High-performance Flow Rate Measurement. * Anti-dust performance enhanced by OMRON's unique three-dimensional flow path structure. * High accuracy of 5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Output Voltage Characteristics Applicable fluid Flow rate range 0 to 1 m/s Air Model D6F-W01A1 0 to 4 m/s D6F-W04A1 0 to 10 m/s D6F-W10A1 D6F-W01A1 Type Model 5.0 4.0 3.0 2.0 1.0 6.0 D6F-W CABLE-L 5.0 Note: Refer to Accessories for the D6F Series on page 39. Connections 2. Vout. 3.0 2.0 1.0 0.0 0.25 0.50 0.75 Flow velocity (m/s) 0.0 1.00 1.0 2.0 3.0 Flow velocity (m/s) 4.0 4.0 3.0 2.0 1.0 0.0 0 D6F-W01A1 D6F-W04A1 D6F-W10A1 4.0 D6F-W10A1 D6F-W CABLE Output voltage (V) Cable 6.0 5.0 0.0 0.00 Accessory (Sold separately) D6F-W04A1 6.0 Output voltage (V) MEMS Flow Sensor Output voltage (V) Ordering Information 2 4 6 Flow velocity (m/s) 8 10 D6F-W01A1 Flow velocity m/s 3. GND. 1. Vcc. Output voltage V 0 1.000.2 0.25 0.50 1.350.2 0.75 2.010.2 3.270.2 1.00 5.000.2 D6F-W04A1 Pin No. 1: Vcc 2: Vout Enlarged View 3: GND Connector S3B-ZR-SM2-TF (made by J.S.T. Mfg. Co.) Use the following connectors from J.S.T. Mfg. Co. Ltd. to connect the D6F: Flow velocity m/s Output voltage V 0 1.000.2 2.0 1.580.2 3.0 2.880.2 4.110.2 4.0 5.000.2 The flow velocity is the value calculated from the mass flow rate in OMRON's specified 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 1, below. Figure 1: Wind Tunnel Flow velocity measurement position Air volume sensor Housing: ZHR-3 Contacts: SZH-002T-P0.5 Wires: AWG28 to AWG26 Or Contacts: SZH-003T-P0.5 Wires: AWG32 to AWG28 1.0 48 dia. 20.8 60 Measurement conditions: Power supply voltage of 12 VDC, ambient temperature of 25C, and ambient humidity of 35% to 75%. D6F-W10A1 Flow velocity m/s Output voltage V 0 2.0 4.0 6.0 8.0 10.0 1.000.24 1.940.24 3.230.24 4.250.24 4.730.24 5.000.24 The flow velocity is the value calculated from the mass flow rate in OMRON's specified 155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 2, below. Figure 2: Wind Tunnel Air volume sensor Honeycomb flow grate 155 dia. 18 Flow velocity measurement position 10 100 Measurement conditions: Power supply voltage of 12 VDC and ambient temperature of 25C 31 D6F-W MEMS Flow Sensor Characteristics/Performance Model D6F-W01A1 Flow Range (See note 1.) 0 to 1 m/s Calibration Gas (See note 2.) Air Electrical Connection Three-pin connector D6F-W04A1 D6F-W10A1 0 to 4 m/s 0 to 10 m/s Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 5% FS (25C characteristic) Repeatability (See note 3.) 0.4% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC 6% FS (25C characteristic) Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (except for flow inlet and outlet) Operating Temperature (See note 4.) -10 to 60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 5% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 6.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 25C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-W01A1 D6F-W04A1 D6F-W10A1 9 Mounting Hole Dimensions 20 3.20.2 1.2 2.6 8 Two, R: 1.6 2.6 1.2 R4 Two, M3 screws 8 4.20.2 Flow inlet Flow outlet MADE IN JAPAN 5 30.50.2 19.5 Flow outlet 2 dia., Depth: 2.5 4 32 30.50.05 5 39 24 3.2 0.2 dia. 7 R4 Lot number label D6F-V MEMS Flow Sensor A Compact Sensor That Uses OMRON's Unique Flow Path Structure for High-performance Flow Rate Measurement. * Anti-dust performance enhanced by OMRON's unique three-dimensional flow path structure. * Extremely compact, measuring only 24 x 14 x 8 mm. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-V03A1 Flow velocity range Air 0 to 3 m/s Model D6F-V03A1 Accessory (Sold separately) Type Model D6F-CABLE2 Cable D6F-CABLE2-L Note: Refer to Accessories for the D6F Series on page 39. Connections D6F-V03A1 2. Vout. 1. Vcc. 3. GND. 2.5 Output voltage (V) Applicable fluid 2.0 1.5 1.0 0.5 0.0 0.0 0.75 1.5 2.25 Flow velocity (m/s) 3.0 D6F-V03A1 Flow velocity m/s 0 0.75 Output voltage V 0.50.15 0.70.15 1.5 2.25 1.110.15 1.580.15 3 20.15 The flow velocity is the value calculated from the mass flow rate in OMRON's specified 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 1 below. Figure 1: Wind Tunnel Flow velocity Air volume sensor measurement position Enlarged View Pin No. 48 dia. 1: Vcc 2: Vout 3: GND Connector Mesh SM03B-SRSS-TB (made by J.S.T. Mfg. Co.) 23.6 60 Measurement conditions: Power supply voltage of 3.3 VDC, ambient temperature of 25C, and dry air. Use the following connectors from J.S.T. Mfg. Co. Ltd. to connect the D6F: * Pressure-welded Connectors Socket: 03SR-3S Wires: AWG30 Or * Crimp Connectors Contact: SSH-003T-P0.2 Housing: SHR-03V-S * Wires: AWG32 to AWG28 33 D6F-V MEMS Flow Sensor Characteristics/Performance Model D6F-V03A1 Flow Range (See note 1.) 0 to 3 m/s Calibration Gas (See note 2.) Air Electrical Connection Three-pin connector Power Supply 3.15 to 3.45 VDC Current Consumption 15 mA max. with no load, with a Vcc of 3.3 VDC, and at 25C Output Voltage 0.5 to 2 VDC (non-linear output, load resistance of 10 k) Accuracy 10% FS (25C characteristic) Repeatability (See note 3.) 1.5% FS Output Voltage (Max.) 2.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 12 VDC Rated Output Voltage 3 VDC Case PBT Degree of Protection IEC IP40 (except for flow inlet and outlet) Operating Temperature (See note 4.) -10 to 60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 20% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 25C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-V03A1 Lot number label Three, R0.5 22 21 3.1 0.1 dia. 3.6 0.1 dia. 16 4 (3.7) 13 11 2 14 0.8 4.4 1.6 Flow inlet 34 15.2 18.2 24 Three, R1.8 8 Flow outlet D6F-D MEMS 2-Axis Flow Sensor Save energy with airflow sensing. Optimize air conditioning control without sacrificing quality. * Two-axis sensing to detect not only the airflow speed but also the airflow direction. * Link up to 32 Sensors to achieve visualization over a wide range. * Compact package for greater installation flexibility. RoHS Compliant Refer to the Safety Precautions on page 38 and Common Precautions for the D6F Series on page 40. Ordering Information Applicable Medium Air (See note.) Flow Range Model 1.0m/s D6F-D010A32-00 Note: Dry gas must not contain large particles, eg dust, oil, mist. Characteristics/Performance Characteristics Item Rating Power-supply Voltage 4.5 to 5.5 VDC Storage Temperature -10 to 55C (without freezing and condensation) Operating Temperature 0 to 40C Storage Humidity 30 to 85% Operating Humidity 30 to 80% Note: With no condensation or icing. Performance Item Flow Velocity Flow Direction Characteristic Range 1.0m/s in each axis Accuracy 3%F.S. in each axis Range 0 to 360 Accuracy 15 (at 0.3m/s) Note: 1. Flow velocity is determined by our standard wind tunnel (300 mm square), and this does not indicate the flow velocity specified in Measurement law. (Fig.1 shows our standard wind tunnel) Fig. 1. Wind Tunnel Fan Laminar Element Flow velocity measurement point Laminar element 2-Axis Flow Sensor @300 200 300 300 300 200 (Unit: mm) 2500 35 D6F-D MEMS 2-Axis Flow Sensor Connection Fig. 2. Block Diagram Sensing Element Signal Processing MCU RS485 Interface RJ-45 Connector 1. VCC 2. GND 3. NC 4. TRD(-) 5. TRD(+) 6. NC 7. GND 8. VCC X-Axis Flow Sensor Y-Axis Flow Sensor 1. VCC 2. GND 3. NC 4. TRD(-) 5. TRD(+) 6. NC 7. GND 8. VCC Pin Symbol 1 VCC 2 GND 3 NC Function Power Supply Voltage Ground Non-Connection 4 TRD(-) Serial Interface 5 TRD(+) Serial Interface 6 NC Non-Connection 7 GND Ground 8 VCC Power Supply Voltage The sensor has two port of RJ-45 connectors (8 pins), and all the pair of each pin is connected internally. These connectors can be used for daisy chain wiring when using multiple devices on the same bus (multi-drop connection). The standard CAT5e straight LAN cable can be used for the electrical connection. Interface Item Interface Specifications RS-485 Wire Connection Multi-drop connection with daisy chain wiring (32 devices max.) Communication system 2 wires : Half duplex Baud rate 9600bps or 38400bps : DIP switch* selectable Protocol Modbus-RTU Transmission code Binary Data length 8 bit Stop bit 1 bit Parity None Response time 250 ms max. Command interval 10 ms min. (Minimum wait time after receiving the response from the device to the consecutive command transmission) Slave address 1 to 32 (0x01 to 0x20) : DIP switch* selectable Termination resistor Built-in termination resistor : DIP switch* selectable * The communication settings of this device can be set by DIP switch configuration as shown in Fig. 3. All bits are switched off before shipment. Fig. 3. DIP Switches Circuits 8 8 1 ON OFF Function Built-in termination resistor ON OFF Enable Disable 38400bps 9600bps 7 Baud rate 6 None - - 5 Slave Address : bit 4 1 0 4 Slave Address : bit 3 1 0 3 Slave Address : bit 2 1 0 2 Slave Address : bit 1 1 0 1 Slave Address : bit 0 1 0 Note: Slave address of the device = 1 + (5 bit of integer consisting of circuit number 1 to 5). 36 D6F-D MEMS 2-Axis Flow Sensor Fig. 4. Connection Example to Link Three Sensors Fig. 4 shows an example of multi-drop connection when connecting three devices on the same bus. In this case, slave address, baud rate and built-in termination resistor of each device must be set properly. SlaveAddress 0x01 Termination: Disable SlaveAddress 0x02 Termination: Disable SlaveAddress 0x03 Termination: Enable Master Dimensions (Unit: mm) D6F-D010A32-00 Y axis (-) 60 dia. X axis (+) X axis (-) Y axis (+) Description A A 34.7 LED Display Green: Power Indicator Yellow: Lit when communication Cross B-B 30 7 B 3 dia. Depth1.5 Power switch Knob position LEFT: ON (default) Right: OFF 3.6 3.2 * 2.5 6.3 dia. 7 22 3.2 8 B * When using the fixing hole, Please do not exceed the depth (3.6 mm) of the shaded portion. 37 D6F-D MEMS 2-Axis Flow Sensor Safety Precautions Caution The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Please do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen. * Places where the device receives strong electric field effect or magnetic field effect. Noise Countermeasures * Please check electrical noise condition before actual use. The device may not perform as intended by the effect from electrical noise. * The voltage input that exceeds absolute maximum ratings Precautions for Correct Use Applicable medium and Device mounting * Depending on the mounting position and the ambient environment, the foreign object such as dust can adhere to the inside of the device and can cause clogging of the part of flow path. As a result, the device may not perform as intended. And, the characteristic specified in this document may not be maintained. Please use the device after enough ex-ante evaluation under the condition of actual use in order to confirm the performance and safety in the application. * For the gasses other than the applicable medium, please use the device in your responsibility after the confirmation of its performance and safety. However, do not use in the presence of inflammable gases, such as hydrogen, methane, ethane, and a liquefied petroleum gas. In addition, do not use with corrosive gases (such as chlorine, sulfur, acid, alkali, ammonia etc.) must not be applied. This can damage the electrical circuit of the device. Place the protection circuit as needed, so that the voltage to the lines will not exceed absolute maximum ratings. * Take particular care to install away from AC power transformers, live mains power lines and high power magnetic circuits. * The device may not operate properly where the place with the equipment that generates strong high-frequency wave or surge. * Please attach surge absorber or noise filter to the peripheral equipment that generates noise. * In order to prevent inductive noise, wiring of the device must be separated from the power line with the high voltage and large current. * When using with a switching regulator or DC-DC convertor, switching noise may affect the device operation. Handling * Please handle with countermeasure against static electricity. * The direction of the arrow on top of the body shows the posi- * Do not make a direct solder connection to the integral termi- tive direction of the device output in each axis. Please install nals; this may result in damage, and possibly cause failure. It the device in a correct direction corresponding to the direction is recommended to use the standard straight CAT5e LAN of the flow. With the wrong installation, the device cannot measure flow direction correctly. * After installation, the device may not perform as intended by the presence of a flow obstacle around the device. * After Installation, the device operation and its performance should be checked before actual use in the application. cable and to ensure correct connection. * Do not mix up the wiring. This can damage the device and cause the failure. * Power must be supplied from the single source. And, do not apply different voltage to the device from each connector. This may damage the device and also the host equipment (master). * Horizontal device orientation (top cover side up) is recom- * After wiring cables, please do not apply excessive pulling force mended. If the device orientation is not horizontal, the output to the connector. Tensile force of 12N or more can cause the may shift as an offset more than +/3%F.S.. For more details of offset compensation features, please refer to the communication specification. * The device may not operate properly, if a foreign object or a flow obstacle is placed around the entrance of the flow path. failure. * Changing DIP switch setting must be done when in power off state. Communication * When using the multiple devices on the same bus, please Use environment make sure that there is no device that has the same slave Please do not use the device in the following environments: address, please refer to the communication specification * Places where the device directly receives radiant heat from an apparatus. * Places where the device is exposed to water, salt water, water droplets and oil splash. * Places where the device is exposed to direct sunlight. * Places with volatile gas, inflammable gas or corrosive gas (such as chlorine, sulfur, acid, alkali, ammonia etc.) * Places where frequent temperature changes. * Places where dusty condition. * Places with the possibility of freezing and dew condensation. * Places where the device receives large magnitudes of vibration and shock. 38 (No.MDPE-12-0146). * When using built-in termination resistor, please enable it only to one device at the end of the bus. * Please make sure that there are no multiple devices with termination resistors enabled. * Please make sure that baud rate setting must be same for the host equipment (master) on the same bus. Accessories for the D6F Series Dimensions (Unit: mm) Cable (Sold separately) D6F-CABLE1 Brown wire Black wire 1. Vcc 2. Vout 3. GND 10015 Blue wire 20035 Connector :51021 (Manufactured by Molex, LLC) Terminal :50079 (Manufactured by Molex, LLC) Wire :0.14SQ D6F-CABLE2 D6F-CABLE2-L White wire Black wire 153 Red wire 18010 (5) 6-(9) 3: GND 2: Vout 1: Vcc Contact :SSH-003T-P0.2 (Manufactured by J.S.T. Mfg. Co., Ltd.) Housing :SHR-03V-S (Manufactured by J.S.T. Mfg. Co., Ltd.) Wire :AWG#30 Red wire (300) 5-(300) 1980200 (15) (5) White wire Black wire 3: GND 2: Vout 1: Vcc Contact :SSH-003T-P0.2 (Manufactured by J.S.T. Mfg. Co., Ltd.) Housing :SHR-03V-S (Manufactured by J.S.T. Mfg. Co., Ltd.) Wire :AWG#30 D6F-CABLE3 Black wire Red wire Blue wire 153 1. Vcc 2. SDA 3. SCL 4. GND Yellow wire 66010 73010 (5) 75035 Contact :SSHL-002T-P0.2 (Manufactured by J.S.T. Mfg. Co., Ltd.) Housing :GHR-04V-S (Manufactured by J.S.T. Mfg. Co., Ltd.) Wire :AWG#28 D6F-W CABLE-L D6F-W CABLE Blue wire Black wire 51 GND: Blue Vout: Black Vcc: Brown 5010 3010 10010 Contact :SZH-002T-P0.5 (Manufactured by J.S.T. Mfg. Co., Ltd.) Housing :ZHR-3 (Manufactured by J.S.T. Mfg. Co., Ltd.) Wire :AWG#26 Brown wire 153 (50) (1900) (15) 1980200 (5) Contact :SZH-002T-P0.5 (Manufactured by J.S.T. Mfg. Co., Ltd.) Housing :ZHR-3 (Manufactured by J.S.T. Mfg. Co., Ltd.) Wire :AWG#26 Quick fastener (Sold separately) Pipe fittings (Sold separately) D6F-FASTENER-P10 D6F-PLG1 Return direction 321 2.5 16.52 11.51 Rolling direction Contact 1 Contact 2 Contact 3 (17.7) 3.3 1 2-R2 4-R1.5 10 dia. R8.5 R8.5 11 200.5 dia. 11 dia. 17 dia. 1 14 2-R2 "10" is engraved here. 3 60.15 120.15 30.15 8-R2.5 80.3 151 2-R1 t=0.80.04 39 Common Precautions for the D6F Series Safety Precautions Precautions for Correct Use Sensor Applications The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections. *Safety devices for ensuring safety for persons *Transportation equipment control (such as applications to stop operation) *Aviation and space equipment *Nuclear power equipment Do not use the D6F for applications in which D6F operation would directly affect human life. Fluids, Pipe Mounting and Sensor Installation All D6F Models (1) Use clean fluids. Install a filter or mist separator on the inflow pipe. Failure to do so may result in malfunction or changes in characteristics due to dust or mist. This does not apply to the D6F-W, D6F-V, D6F-P and D6F-PH. (2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so may cause product failure. (3) The specified performance may not be obtained if the D6F is used for fluids other than the specified applicable fluids. (4) After removing the Sensor from the package, do not allow foreign particles to enter the piping. Foreign particles in the piping may cause product failure. (5) Install the Sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. This does not apply to the D6F-V, D6F-P and D6F-PH. (6) It is recommended that the Sensor (except for the D6F-A3) be mounted horizontally. If it is not mounted horizontally, an error of 1% FS or higher may result. (7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements. (8) Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation. (9) Always check operation after installation. (10) Do not drop the Sensor or disassemble the cover. D6F-A1 (1) Make sure that pipes with bamboo joints are airtight. Correct measurements cannot be obtained if there is leakage from joints. (2) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N*m. 40 D6F-N2/-L2 (1) Use the Rc 1/4 tapped threads for the pipes, and tighten the threads to a maximum torque of 5 N*m. Tightening beyond this value may result in fractures, which can cause leaks. Apply a suitable amount of pipe sealer. Do not apply sealer on the first two threads from the end of the threaded section. When you tighten the pipes, do not allow foreign matter or oil on the joint area. (2) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N*m. D6F-A3 (1) When installing the pipes, use M5 screws for the joints and tighten to a torque of 1.5 N*m maximum. Use sealing tape to make the joints airtight. Incorrect installation may make it impossible to obtain correct measurements. (2) It is recommended that the Sensor be mounted either horizontally or vertically. Mounting the Sensor at an angle may make it impossible to obtain correct measurements. (3) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N*m. D6F-A5 (1) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N*m. (2) Install O-rings to seal the fluid inlet and outlet points. The recommended O-ring is JIS B 2401, nominal number P5. Installation Example OUTLET O-ring INLET D6F-A6 (1) Use the appropriate threads (R1/4, NPT1/8 or NPT1/2) for the pipes, and tighten the pipes to a maximum torque of 5 N*m. Tightening beyond this value may result in fractures, which can cause leaks. When you tighten the pipes, do not allow foreign matter or oil on the joint area. Use a spanner or adjustable wrench to turn the connecting section (aluminum alloy) and connect the pipe. Do not place the spanner or wrench on the Sensor (PPS). Doing so may damage the Sensor or result in leaks. Apply a suitable amount of pipe sealer. Do not apply sealer on the first two threads from the end of the threaded section. When you tighten the pipes, do not allow foreign matter or oil on the joint area. (2) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N*m. Common Precautions for the D6F Series D6F-A7/-L7/-N7/-A7D/-AB71/-AB71D D6F-P0010AM2 (1) Use male quick couplings for the piping, and secure them with the applicable quick fasteners. (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. (2) Do not apply excessive force to the adapter section when connecting the pipes. If strong force is applied to the connected pipes, or if strong force is applied directly to the adapter section while holding the Sensor, it may damage the Sensor or cause leakage. Installation Example Use male, P10-type quick-connect joints for the D6F-A7/-L7/N7/-A7D and P14-type quick-connect joints for the D6F-AB71/AB71D. (2) Attach all tubes so that the fluid flows only in the direction from the positive side (+) to the negative side (-). Install the Sensor with the manifold facing downward. Refer to the figure on page 26 for the installation direction. (3) Use M3 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.59 N*m. Quick fastener (4) Install O-rings to seal the fluid inlet and outlet points. The recommended O-ring is JIS B 2401, nominal number P4. Installation Example Male quick couplings M3 panhead screw or a tappin screw with the same diameter Applicable male quick coupling dimensions (Unit: mm) X Symbol P10 model P14 model A +0 10 -0.05 dia. +0 14 -0.05 dia. B 12.85 0.05 dia. 17.85 0.05 dia. C 20 dia. 26 dia. D 17 dia. max. 22 dia. max. X 9 max. 1.6 max. 2.50.05 2 min. 2 min. R0.4 C D A R0.4 B C0.1 Y C0.3 2.5 +0.25 -0 C0.5 CROSS X-X Description Y Note. There is a possibility that leak damage or faulty of the body occurs when static load of more than 40 N is applied to 300 mm from the center of product as fulcrum point. D6F-P0001A1/-P0010A1/-P0010A2 (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. (2) Attach all tubes so that the fluid flows only in the direction from the positive side (+) to the negative side (-). Refer to the figure on page 26 for the installation direction. (3) For PCB-mounting Sensors, perform terminal soldering only after the Sensor is secured into place on the PCB. Use a soldering iron for 5 s at 350C with a pressure of 100 gf max. (This applies only to PCB-mounting Sensors.) O-ring D6F-PH (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. (2) Attach all tubes so that the fluid flows only in the direction from the high pressure side (+) to the low pressure side (-). (3) Use M1.8 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.36 N*m. (4) The sensor output is affected with the length of a tube. The error is less than 1% with a tube (ID:4mm) length up to 800mm. (5) Connection *Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components. *Do not use flow soldering. *Please solder after fixed on the circuit board by screw. *Use a soldering iron: Soldering condition Pressure Max.100gf Temperature 350 degree C Time Max. 5s (4) Use M2.6 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.59 N*m. 41 Common Precautions for the D6F Series D6F-W Countermeasures against Noise (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. Noise may make it impossible to obtain correct measurements. Consider the following countermeasures. *Allow as much space as possible between the Sensor and devices that generates high frequencies (such as highfrequency welders and high-frequency sewing machines) or surges. *Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils). (It also helps to separate pipes and ducts, and to use shielded cables.) (2) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N*m. D6F-V (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment. Power Supply *Force of connector terminal is 20 N max. Do not add strength more than tension of wire bending to connector at wiring. Install the connector coaxially to the fitting axis with holding all wires. And pulling angle should be within 15 degrees. *Use the applicable connectors. Directly soldering the connection terminals will cause product failure. (except for the D6F-PH) *Check the terminal names and polarity and wire the power supply correctly. Incorrect wiring will cause failure of internal components. *When using a commercially available switching regulator, ground the FG (frame ground) and G (ground) terminals. (2) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N*m. (3) This Sensor does not contain any protective circuits. Never allow the electrical load to exceed the maximum ratings. Doing so may damage the circuits. Install protective circuits if required. (4) Mount the Sensor so that the flow inlet side (the side with the logo) is perpendicular to the windward side and ensure that the flow inlet and flow outlet are not blocked in any way. If the Sensor is not mounted correctly, accurate measurements cannot be made. Installation Example Handling The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Please do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen. *The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions Downwind RoHS Directive The RoHS mark is displayed on the packing of products for Upwind which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic compo- Operating Environment Do not use the Sensor in the following locations: *Locations directly subject to heat radiated from heating equipment *Locations subject to water or oil *Locations subject to direct sunlight *Locations subject to intense temperature changes *Locations subject to icing or condensation *Locations subject to excessive vibration or shock 42 nents mounted to the PCBs). * RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts. RoHS Compliance Criteria The following standards are used to determine RoHS compliance for the six banned substances. (Items to which the RoHS Directive is not applicable are not given.) *Lead: 1,000 ppm max. *Hexavalent chromium: 1,000 ppm max. *Mercury: 1,000 ppm max. *PBB: 1,000 ppm max. *Cadmium: 100 ppm max. *PBDE: 1,000 ppm max. Terms and Conditions Agreement Read and understand this catalog. Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have any questions or comments. Warranties. (a) Exclusive Warranty. Omron's exclusive warranty is that the Products will be free from defects in materials and workmanship for a period of twelve months from the date of sale by Omron (or such other period expressed in writing by Omron). Omron disclaims all other warranties, express or implied. (b) Limitations. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OF THE PRODUCTS. BUYER ACKNOWLEDGES THAT IT ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the Products or otherwise of any intellectual property right. (c) Buyer Remedy. Omron's sole obligation hereunder shall be, at Omron's election, to (i) replace (in the form originally shipped with Buyer responsible for labor charges for removal or replacement thereof) the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer an amount equal to the purchase price of the non-complying Product; provided that in no event shall Omron be responsible for warranty, repair, indemnity or any other claims or expenses regarding the Products unless Omron's analysis confirms that the Products were properly handled, stored, installed and maintained and not subject to contamination, abuse, misuse or inappropriate modification. Return of any Products by Buyer must be approved in writing by Omron before shipment. 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Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the combination of the Product in the Buyer's application or use of the Product. At Buyer's request, Omron will provide applicable third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself is not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product with respect to Buyer's application, product or system. Buyer shall take application responsibility in all cases. NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE QUANTITIES WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT(S) IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. Programmable Products. Omron Companies shall not be responsible for the user's programming of a programmable Product, or any consequence thereof. Performance Data. Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of Omron's test conditions, and the user must correlate it to actual application requirements. Actual performance is subject to the Omron's Warranty and Limitations of Liability. Change in Specifications. Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change part numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be assigned to fix or establish key specifications for your application. Please consult with your Omron's representative at any time to confirm actual specifications of purchased Product. Errors and Omissions. Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical or proofreading errors or omissions. Please check each region's Terms & Conditions by region website. OMRON Corporation Electronic and Mechanical Components Company Regional Contact Americas https://www.components.omron.com/ Asia-Pacific https://ecb.omron.com.sg/ Korea https://www.omron-ecb.co.kr/ Europe http://components.omron.eu/ China https://www.ecb.omron.com.cn/ Japan https://www.omron.co.jp/ecb/ (c) OMRON Corporation 2016-2018 All Rights Reserved. In the interest of product improvement, specifications are subject to change without notice. Cat. No. X211-E1-09 1118(0316)(O)