SLQ-HC60 - Sensirion - Datasheet.Live

Datasheet

SLQ-HC60

Milliliter Flow Meter for Hydrocarbons

www.sensirion.com April 2012 V2 1/6

1 Introduction SLQ-HC60

The SLQ-HC60 Liquid Flow Meter enables fast, non invasive measurements of liquid flow up to 80 ml/min. This

product line is especially suited for process monitoring applications in automation technology which require high

sensitivity in the milliliter range. It is suited for use with almost all hydrocarbons, as for example, alcohols, oils,

gasoline, diesel, etc. and many other chemicals. Excellent chemical resistance is ensured: The flow path of the SLQ-

HC60 Liquid Flow Meters is formed by a simple, straight glass capillary. This Swiss made, non invasive flow meter is

based on Sensirion’s patented CMOSens® Technology (US Patent 6,813,944 B2). An internal fourth generation

MEMS sensor chip combines a thermal high precision sensor element with amplification circuits and digital

intelligence for linearization and temperature compensation on one single microchip – the product’s core element.

2 Sensing Performance

In Table 1 the flow sensor’s performance for use with Isopropyl Alcohol (IPA) is given. For other hydrocarbons the

values will be slightly different as the performance depends on the medium used. Due to the optimized output signal

the repeatability is nearly constant over a wide flow range. The repeatability depends on the integration timea of the

analog signal acquisition. Longer integration time leads to better repeatability of the flow measurement (see table 1).

The temperature compensation is optimized for use with IPA and shows very good performance for most

hydrocarbons and other media.

Table 1: Model specific performance of SLQ-HC60 for IPA (all data at 20°C, 1 barabs unless otherwise noted)

Parameter Condition SLQ-HC60 Units

Maximum Flow Rate Best Performance 80 ml/min

Reduced Performance

Repeatabilityb

(whichever is greater)

0.2 sec integration time

1.5

% m.v.

0.2

% F.S.

2 sec integration time

% m.v.

0.07

% F.S.

Flow Detection Response Time

< 50

Accuracy

% m.v.

Response Time On Power

120

Mounting Orientation Sensitivity

For IPA

0.25

ml/

min

Operating Temperature

Temperature Compensated

+10…+40

°C

Functional +0 ... +55 °C

Ambient storage T

emperature

(

empty flow channel

)

10…+60

°C

a This refers to the time over which the analog acquisition device averages the input signal. Refer to the datasheet of your

device.

b For medium IPA using 1 σ standard deviation of consecutive flow measurements.

c With IPA, 2.5-80 ml/min, after conversion of the Vout signal via the exponential relation. See section 3.1

d Normal position: Horizontal Flow channel, connector horizontally.

 Maximum flows up to 80 ml/min

 Sensitive to lowest flows

 Straight flow path, no moving parts

 Fast response time: < 50 ms

 Optimized for hydrocarbons

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3 Output Signal and Media Compatibility

3.1 Output Signal

The SLQ-HC60 flow meter comes with

an analog output (0…10V). Depending

on the media used, the output will be

about 5 Volt at zero flow. For positive

flow rates the output signal increases

logarithmicallya with the flow rate for

IPA (see figure 1). This signal

characteristic has the advantage that

the flow meter can be used at various

flow rates with a constant relative error

and makes measurements for a wide

spectrum of liquids possible.

3.2 Signal for Other Media

For other media but IPA the form of the

sensor signal will differ slightly as is

demonstrated in figure 2. When using

the sensor with other media but IPA,

ask Sensirion for advice on how to

handle the sensor signal to suit your

requirements.

Because of the drastically different

sensor response the sensor is not

suited for use with water or aqueous

solutions.

3.3 Maximum Flow Rate for

Common Media

Due to the measurement principle, the

thermal properties of the medium

determine the sensor characteristics

and the dynamic range of the device.

For most hydrocarbons and most other

media this range extends to about 80

ml/min. With reduced performance even

rates of 100 ml/min or higher can be

reached for some media. For low viscosity (< 1

centipoise) media the dynamic range can be limited

by turbulence.

The dynamic ranges for various media are given in

Table 2. For other media similar values can be

expected.

Attention: If unsure about your medium please

contact Sensirion for assistance.

a The flow rate for IPA is given by Flow[ml/min] = (Exp[(Vout-5)/0.729]-1)/3 for positive flow rates, i.e. above 5V. For negative

flow rates the signal is symmetric: Flow[ml/min] = - (Exp[(5-Vout)/0.729]-1)/3. In Excel or when programming one can use the

following formula for the full flow range: Flow[ml/min] = SIGN(Vout -5)*(EXP[SIGN(Vout -5)*( Vout -5)/ 0.729)]-1)/3 where SIGN

is -1 if the argument is negative and +1 if the argument is positive.

b At reduced requirements on accuracy (repeatability for other media but IPA) and exchangeability of sensors.

Conversion: Signal to Flow (for positive flow rates)a

Flow[ml/min] = (Exp[(Vout-5)/0.729]-1)/3

= 1/3 * (e(Vout-5)/0.729-1)

Table 2: Examples for common media

Medium Maximum Flow Rate Units

IPA 80 (100b)

ml/min

Ethanol, Methanol, Gasoline ~50

Acetone ~ 40

Diesel, Petroleoum, Veg. Oils 80 (100b)

Silicon Oil, Ether < 100

Figure 1: Sensor Signal for IPA

-120 -100 -80 -60 -40 -20 0 20 40 60 80 100 120

Flow [ml/min] (IPA)

Vout [Volt]

Figure 2: Sensor Signal for Various Media

0 20 40 60 80 100

Flow [ml/min]

Vout [Volt]

Ethanol

IPA

Diesel

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3.4 Exchangeability

Every SLQ-HC60 is calibrated for IPA. This makes the sensors also exchangeable for use with other media, meaning

that once the sensors are characterized for a particular medium the same values can be used for further sensors.

Depending on the media, variations between sensors of 6– 20% are typical.

4 Cleaning

Due to the measurement principle the sensor is sensitive to deposits on the inside of the sensor’s capillary.

Especially when changing from one liquid to another sufficient cleaning steps have to be performed to avoid non-

soluble remainders on the capillary wall. Inadequate cleaning can lead to an offset and low repeatability. The

cleaning procedure has to efficiently remove contaminations from the borosilicate glass surfaces. This is the material

which is used for the straight flow channel inside the flow meter.

Any form of mechanical cleaning has to be avoided. This will easily damage the internal capillary.

5 Electrical and Mechanical Specifications

5.1 Electrical Specifications

Table 2: DC Characteristics.

Parameter Conditions Min. Typ. Max. Units

Power Supply DC, VDD 16 24 26 V

Operating Current VDD = 24 V ---- , no load 3 4 mA

Analog Out Voltage Range 0 10 V

Load at Analog Out 10  k

Capacitive Load at Analog out Tbd pF

5.2 Electrical Connector and Pinout

Connector Type: Lumberg Pico (M8) male, 8-pole, threaded lock.

Function

Connect to

Color (pigtail cable)

Power Supply 24V

(

)

of Power Supply

white

Do not use.a

brown

green

yellow

gre

Analog Out 0

10 V

(

)

of Signal Acquisi

tion

pink

GND

Connect to ground/(

−

) of Power

Supply and Signal Acquisition

blue

GND

red

Note: Pins 7 and 8 have to be connected to ground of the Power Supply and the Signal Acquisition. Pins 2-5 are

used in the calibration procedure, they have no functionality in normal use. Pins 2-5 cannot be used “as” the ground;

they are not connected with Pins 7 and 8 inside the sensor.

5.3 Fluidic Connections

The repeatability of the measurement depends on a laminar flow of the liquid. Especially with low viscosity media

improper connections to the sensor can unnecessarily reduce the maximum flow rate. Tubing with an inner diameter

of less than 1.8 mm should be avoided. Make sure that the tubing has been cut properly.

a Or connect to common ground with Pin 7 and 8. Never connect to (+) of Power Supply!

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5.4 Mechanical Specifications and Pressure Rating

Table 3: Mechanical Specifications and Pressure Rating

Parameter SLQ-HC60

Fluid Connector Standard (Fittings) ¼-28 flat bottom port for 1/8”, 3mm OD tubing

Wetted Materials:

 Internal Sensor Capillary Material Duran® (borosilicate glass 3.3)

 Fitting Material 100% PEEK™ (polyetheretherketone)

 Additional Sealing Material Tefzel® (ETFE)

Overpressure Resistance

3 bar

45 psi

Maximum Pressure Drop

(at 80 ml/min flow rate for IPA) 40 mbar

Internal Sensor Capillary, Inner Diameter 1.8 mm

Protection Class IP 65

tal Mass

53 g

6 Physical Dimensions

7 Ordering Info

The SLQ-HC60 can be ordered in the Flow Meter Kit

at quantities up to 3 units. The Flow Meter Kit

contains the sensor, the suitable connecting cable, a

set of compression fittings for 1/8’’ OD tubing and a

set of various barb connectors for easy setup for

testing.

When ordering the SLQ-HC60 alone without the Flow

Meter Kit it comes only with the cables but without

fitting material.

Product

Article

Number

Flow Meter Kit

SLQ-HC60 1-100870-01

SLQ-HC60

100605

Attention

Mechanical shocks and connecting to the fitti

ngs with excessive force can lead

to stress on the

internal

thin walled glass capillary and can cause it to break. Test for leakage after every time new connections

are made.

Refer to Handling Instructions for precise information. !

SLQ-HC60 Milliliter Flow Sensor

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8 Important Notices

8.1 Warning, personal injury

Do not use this product as safety or emergency stop devices or in

any other application where failure of the product could result in

personal injury. Do not use this product for applications other than

its intended and authorized use. Before installing, handling, using

or servicing this product, please consult the data sheet and

application notes. Failure to comply with these instructions could

result in death or serious injury.

If the Buyer shall purchase or use SENSIRION products for any

unintended or unauthorized application, Buyer shall defend, indemnify

and hold harmless SENSIRION and its officers, employees,

subsidiaries, affiliates and distributors against all claims, costs, damages

and expenses, and reasonable attorney fees arising out of, directly or

indirectly, any claim of personal injury or death associated with such

unintended or unauthorized use, even if SENSIRION shall be allegedly

negligent with respect to the design or the manufacture of the product.

8.2 ESD Precautions

The inherent design of this component causes it to be sensitive to

electrostatic discharge (ESD). To prevent ESD-induced damage and/or

degradation, take customary and statutory ESD precautions when

handling this product.

See application note “ESD, Latchup and EMC” for more information.

8.3 Warranty

SENSIRION warrants solely to the original purchaser of this product for

a period of 12 months (one year) from the date of delivery that this

product shall be of the quality, material and workmanship defined in

SENSIRION’s published specifications of the product. Within such

period, if proven to be defective, SENSIRION shall repair and/or replace

this product, in SENSIRION’s discretion, free of charge to the Buyer,

provided that:

 notice in writing describing the defects shall be given to

SENSIRION within fourteen (14) days after their appearance;

 such defects shall be found, to SENSIRION’s reasonable

satisfaction, to have arisen from SENSIRION’s faulty design,

material, or workmanship;

 the defective product shall be returned to SENSIRION’s

factory at the Buyer’s expense; and

 the warranty period for any repaired or replaced product shall

be limited to the unexpired portion of the original period.

This warranty does not apply to any equipment which has not been

installed and used within the specifications recommended by

SENSIRION for the intended and proper use of the equipment. EXCEPT

FOR THE WARRANTIES EXPRESSLY SET FORTH HEREIN,

SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS OR

IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL

WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES

OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR

PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED.

SENSIRION is only liable for defects of this product arising under the

conditions of operation provided for in the data sheet and proper use of

the goods. SENSIRION explicitly disclaims all warranties, express or

implied, for any period during which the goods are operated or stored

not in accordance with the technical specifications.

SENSIRION does not assume any liability arising out of any application

or use of any product or circuit and specifically disclaims any and all

liability, including without limitation consequential or incidental damages.

All operating parameters, including without limitation recommended

parameters, must be validated for each customer’s applications by

customer’s technical experts. Recommended parameters can and do

vary in different applications.

SENSIRION reserves the right, without further notice, (i) to change the

product specifications and/or the information in this document and (ii) to

improve reliability, functions and design of this product.

CMOSens® is a trademark of Sensirion

Trademarks where mentioned. E.g.

PEEK™ is a trademark of Victrex PLC

Tefzel® is a registered trademark of DuPont Corporation

Duran® is a trademark of the SCHOTT-Group

FCC and CE Statement

This product has been tested and found to comply with the limits for a

Class B digital device, pursuant to part 15 of the FCC Rules (FCC CFR

47). These limits are designed to provide reasonable protection against

harmful interference in a residential installation. This equipment

generates, uses and can radiate radio frequency energy and, if not

installed and used in accordance with the instructions, may cause

harmful interference to radio communications. However, there is no

guarantee that interference will not occur in a particular installation. If

this equipment does cause harmful interference to radio or television

reception, which can be determined by turning the equipment off and on,

the user is encouraged to try to correct the interference by one of more

of the following measures:

 Reorient or relocate the receiving antenna.

 Increase the separation between the equipment and the

receiver

 Connect the equipment into an outlet on a circuit different

from that to which the receiver is connected.

 Consult a dealer or an experienced radio/TV technician for

help.

The devices fully comply with norm EN 50081-2 (Emission Test Series)

as well as EN 50082-2 (Immunity Test Series). ESD protection up to

2kVolt.

8.4 RoHS and WEEE Statement

The SLQ product family complies with requirements of the following

directives:

 EU Directive 2002/96/EC on waste electrical and electronic

equipment(WEEE), OJ13.02.2003; esp. its Article 6 (1) with

Annex II.

 EU Directive 2002/95/EC on the restriction of the use of

certain hazardous substances in electrical and electronic

equipment (RoHS), OJ 13.02.2003; esp. its Article 4.

SLQ-HC60 Milliliter Flow Sensor

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Headquarter and Sales Office

SENSIRION AG

Phone:

+41 44 306 40 00

Laubisruetistr. 50 Fax: +41 44 306 40 30

CH-8712 Staefa ZH info@sensirion.com

Switzerland http://www.sensirion.com

SENSIRION Korea Co. Ltd.

Phone:

+82

440

9925~27

#1414, Anyang Construction Tower B/D, Fax: +82-31-440-9927

1112-1, Bisan-dong, Anyang-city, info@sensirion.co.kr

Gyeonggi-Province, South Korea http://www.sensirion.co.kr

SENSIRION Inc

Phone:

805

409 4900

Westlake Pl. Ctr. I, suite 204 Fax: +1 805 435 0467

2801 Townsgate Road michael.karst@sensirion.com

Westlake Village, CA 91361 http://www.sensirion.com

USA

SENSIRION China Co. Ltd.

Phone

+86 755 8252 1501

Room 2411, Main Tower Fax: +86 755 8252 1580

Jin Zhong Huan Business Building, info@sensirion.com.cn

Futian District, Shenzhen, PR China http://www.sensirion.com.cn

Postal Code 518048

SENSIRION Japan

Phone

+81 3

3444

4940

Sensirion Japan Co. Ltd. Fax: +81 3-3444-4939

Shinagawa Station Bldg. 7F info@sensirion.co.jp

4-23-5 Takanawa http://www.sensirion.co.jp

Minato-ku, Tokyo, Japan

Find your local representative at: http://www.sensirion.com/reps

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