4-43
4
This sensors is comprises a silicon micromachined silicon sensor in a low cost pc board mountable package. This sensor
has an internal vacuum reference and provides an output signal proportional to absolute pressure. This sensor has no
temperature compensation or calibration. This sensor is intended for the user seeking a low cost sensor where the user
will provide all the compensation.
Vacuum Pressure Sensor
• 0 to 15 PSIA
• 0.5 % linearity version
Physical Dimensions
• Medical Instrumentation
• Environmental Controls
• HVAC
General Description
Applications
Features
Basic Pressure Sensor
0.10
Typical
(2.54)
Pin 1 234
NOTES:
1) Dimensions in inches (millimeters)
2) Pin Out:
pin 1: Vsupply
pin 2: Vout minus
pin 3: Ground
pin 4: Vout plus
0.62
(15.7)
0.50
(12.7)
0.154
(3.9)
0.080 O.D.
(2.00)
4-44
Minimum
2.8
2200
Parameter, note 1
Operating Range
Output Sensitivity
Offset Voltage @ zero pressure
Temperature Coefficient of Resistance, note 2
Linearity, hysteresis error, note 3
Temperature Coefficient of Sensitivity, note 2
Nominal
15
3.6
2800
-2200
Maximum
4.4
±20
3400
0.5
-2800
Units
psia
mV/V/psi
mV
mV
%fs
%fs
Specification Notes
NOTE 1: ALL PARAMETERS ARE MEASURED AT 5.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE
UNLESS OTHERWISE SPECIFIED. PRESSURE MEASUREMENTS ARE WITH VACUUM TO THE PRESSURE PORT.
NOTE 2: SHIFT IS RELATIVE TO 25°C. SPECIFICATION NOTS FIRST ORDER TERM OF A SECOND ORDER EQUATION. THE SECOND ORDER TER
IS LESS THAN 10 PPM/DEGREE C SUARED AND IS POSITIVE.
NOTE 3: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT.
All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any
product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
+Vsupply
3
+ Voutput
2
-Vsupply
1
-Voutput
4
Supply Supply Voltage VS
Lead Temperature
(soldering 2-4 sec.)
6 Vdc
250°C
Pressure Sensor Characteristics Maximum Ratings
Temperature Ranges
Operating
Storage
Humidity Limits
-25 to 85° C
-40 to 125° C
0 to 95% RH
(non condensing)
Environmental Specifications
Performance Characteristics for 15 PSI-A-BASIC
Equivalent Circuit
Input Resittance
Output Resistance
3.0 k ohm
3.0 k ohm
-1600