Miniature Amplified Low Pressure Sensors Low Pressure (1" H2O to 30 " H2O) Sensors Features * 0 to 1" H2O to 0 to 30" H2O Pressure Ranges * Matched pressure port volumes * Temperature Compensated * Calibrated Zero and Span Applications * Medical Instrumentation * Environmental Controls * HVAC General Description The Miniature Amplified Output pressure sensors is based upon a proprietary technology to reduce all output offset or common mode errors. This model provides a calibrated amplified output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage between 4.5 and 5.5 volts. Physical Dimensions 0.30 (7.6) 0.50 (12.7) B-port A-port 0.380 0.62 (15.7) Pin 1 2 3 4 0.10 Typical (2.54) 0.080 O.D. (2.00) D1 version or G verison Equivalent Circuit 1-46 D2 version Pressure Sensor Characteristics Maximum Ratings Environmental Specifications +4.5 to +5.5 Vdc Supply Supply Voltage VS 10 psig Common-mode pressure 250C Lead Temperature (soldering 2-4 sec.) 1 Temperature Ranges Compensated Operating 5 to 50 C -25 to 85 C Storage -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges Operating Pressure Nominal Span Proof Pressure Burst Pressure 1 INCH-Dx-4V-MINI 1 In H2O 4V 100 In H2O 200 In H2O 1 INCH-G-4V-MINI 0 - 1 In H2O 4V 100 In H2O 200 In H2O 5 INCH-Dx-4V-MINI 5 In H2O 4V 200 In H2O 300 In H2O 5 INCH-G-4V-MINI 0 - 5 In H2O 4V 200 In H2O 300 In H2O 10 INCH-Dx-4V-MINI 10 In H2O 4V 200 In H2O 300 In H2O 10 INCH-G-4V-MINI 0 - 10 In H2O 4V 200 In H2O 300 In H2O 20 INCH-Dx-4V-MINI 20 In H2O 4V 300 In H2O 500 In H2O 20 INCH-G-4V-MINI 0 - 20 In H2O 4V 300 In H2O 500 In H2O 30 INCH-Dx-4V-MINI 30 In H2O 4V 500 In H2O 800 In H2O 30 INCH-G-4V-MINI 0 - 30 In H2O 4V 500 In H2O 800 In H2O Part Number For differential pressure D1 is the package with two pressure ports the same side, D2 has two ports the opposite sides. Equivalent Circuit 1-47 Performance Characteristics for 1 INCH-Dx-4V-MINI Parameter, note 1 Minimum Output Span, note 5 Offset Voltage @ zero differential pressure Nominal Maximum Units "H2O 1.0 Operating Range, differential pressure volt 1.90 2.0 2.10 2.15 2.25 2.35 volt 60 mvolt Offset Temperature Shift (5C-50C), note 2 Offset Warm-up Shift, note 3 10 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 10 mvolt Linearity, hysteresis error, note 4 0.05 Span Shift (5C-50C), note 2 0.25 %fs 2 %span Maximum Units Performance Characteristics for 1 INCH-G-4V-MINI Parameter, note 1 Minimum Nominal "H2O 1.0 Operating Range, gage pressure Output Span, note 5 3.90 4.0 4.10 volt Offset Voltage @ zero pressure 0.15 0.25 0.35 volt 60 mvolt Offset Temperature Shift (5C-50C), note 2 Offset Warm-up Shift, note 3 10 mvolt Offset Position Sensitivity (1g) 15 mvolt Offset Long Term Drift (one year) 10 Linearity, hysteresis error, note 4 0.05 Span Shift (5C-50C), note 2 mvolt 0.25 %fs 2 %span Maximum Units Performance Characteristics for 5 INCH-Dx-4V-MINI Parameter, note 1 Minimum Operating Range, differential pressure Output Span, note 5 Offset Voltage @ zero differential pressure Nominal 5.0 "H2O 1.90 2.0 2.10 volt 2.15 2.25 2.35 volt 40 mvolt Offset Temperature Shift (5C-50C), note 2 Offset Warm-up Shift, note 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Linearity, hysteresis error, note 4 0.05 Span Shift (5C-50C), note 2 1-48 0.25 %fs 1 %span Performance Characteristics for: 5 INCH-G-4V-MINI Parameter, NOTE 1 Minimum Nominal Maximum mbar 5.0 Operating Range, gage pressure Units Output Span, NOTE 5 3.90 4.0 4.10 volt Offset Voltage @ zero pressure 0.15 0.25 0.35 volt 40 mvolt Offset Temperature Shift (5C-50C), NOTE 2 Offset Warm-up Shift, NOTE 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Linearity, hysteresis error, NOTE 4 0.05 Span Shift (5C-50C), NOTE 2 0.25 %fs 1 %span Maximum Units Performance Characteristics for: 10 INCH-Dx-4V-MINI Parameter, NOTE 1 Minimum Nominal Output Span, NOTE 5 Offset Voltage @ zero differential pressure mbar 10.0 Operating Range, differential pressure volt 1.90 2.0 2.10 2.15 2.25 2.35 volt 20 mvolt Offset Temperature Shift (5C-50C), NOTE 2 Offset Warm-up Shift, NOTE 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Linearity, hysteresis error, NOTE 4 0.05 Span Shift (5C-50C), NOTE 2 0.25 %fs 1 %span Maximum Units Performance Characteristics for: 10 INCH-G-4V-MINI Parameter, NOTE 1 Minimum Operating Range, gage pressure Nominal 10.0 mbar Output Span, NOTE 5 3.90 4.0 4.10 Offset Voltage @ zero pressure 0.15 0.25 0.35 volt 20 mvolt Offset Temperature Shift (5C-50C), NOTE 2 volt Offset Warm-up Shift, NOTE 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Linearity, hysteresis error, NOTE 4 0.05 Span Shift (5C-50C), NOTE 2 1-49 0.25 %fs 1 %span 1 Performance Characteristics for 20 INCH-Dx-4V-MINI Parameter, note 1 Minimum Offset Voltage @ zero differential pressure Maximum Units "H2O 20.0 Operating Range, differential pressure Output Span, note 5 Nominal 1.90 2.0 2.10 volt 2.15 2.25 2.35 volt 20 mvolt Offset Temperature Shift (5C-50C), note 2 Offset Warm-up Shift, note 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Linearity, hysteresis error, note 4 0.05 Span Shift (5C-50C), note 2 0.25 %fs 1 %span Maximum Units Performance Characteristics for 20 INCH-G-4V-MINI Parameter, note 1 Minimum Nominal "H2O 20.0 Operating Range, gage pressure volt Output Span, note 5 3.90 4.0 4.1 Offset Voltage @ zero pressure 0.15 0.25 0.35 volt 20 mvolt Offset Temperature Shift (5C-50C), note 2 Offset Warm-up Shift, note 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 mvolt Linearity, hysteresis error, note 4 0.05 Span Shift (5C-50C), note 2 0.25 %fs 1 %span Maximum Units Performance Characteristics for 30 INCH-Dx-4V-MINI Parameter, note 1 Minimum Operating Range, differential pressure Output Span, note 5 Offset Voltage @ zero differential pressure Nominal 30.0 "H2O 1.90 2.0 2.10 volt 2.15 2.25 2.35 volt 20 mvolt Offset Temperature Shift (5C-50C), note 2 Offset Warm-up Shift, note 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 Linearity, hysteresis error, note 4 0.05 Span Shift (5C-50C), note 2 1-50 mvolt 0.25 %fs 1 %span Performance Characteristics for 30 INCH-G-4V-MINI Parameter, NOTE 1 Minimum Nominal Maximum "H2O 30.0 Operating Range, gage pressure Units Output Span, NOTE 5 3.9 4.0 4.1 volt Offset Voltage @ zero pressure 0.15 0.25 0.35 volt 20 mvolt Offset Temperature Shift (5C-50C), NOTE 2 Offset Warm-up Shift, NOTE 3 5 mvolt Offset Position Sensitivity (1g) 5 mvolt Offset Long Term Drift (one year) 5 Linearity, hysteresis error, NOTE 4 0.05 Span Shift (5C-50C), NOTE 2 mvolt 0.25 %fs 1 %span Pressure Response: for any pressure applied the response time to get to 90% of pressure applied is typically less than 500 useconds. Specification Notes 1: ALL PARAMETERS ARE MEASURED AT 5.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO THE B-PORT. NOTE 2: SHIFT IS RELATIVE TO 25C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. NOMINALLY THE OUTPUT VOLTAGE RANGE IS 0.25 TO 4.25 VOLTS FOR MINUS TO PLUS FULL SCALE PRESSURE. NOTE UNLESS OTHERWISE SPECIFIED. All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 1-51 1