D6F-W MEMS Flow Sensor A Compact Sensor That Uses OMRON's Unique Flow Path Structure for High-performance Flow Rate Measurement. * Anti-dust performance enhanced by OMRON's unique three-dimensional flow path structure. * High accuracy of 5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Output Voltage Characteristics Applicable fluid Flow rate range 0 to 1 m/s Air Model D6F-W01A1 0 to 4 m/s D6F-W04A1 0 to 10 m/s D6F-W10A1 D6F-W01A1 Type Model 3.0 2.0 1.0 6.0 5.0 Connections 3.0 2.0 1.0 0.0 1.00 0.0 1.0 2.0 3.0 Flow velocity (m/s) 4.0 4.0 3.0 2.0 1.0 0.0 0 D6F-W01A1 D6F-W04A1 D6F-W10A1 0.25 0.50 0.75 Flow velocity (m/s) 4.0 D6F-W10A1 D6F-W CABLE-L Note: Refer to Accessories for the D6F Series on page 39. 2. Vout. 5.0 4.0 D6F-W CABLE Output voltage (V) Cable 6.0 5.0 0.0 0.00 Accessory (Sold separately) D6F-W04A1 6.0 Output voltage (V) MEMS Flow Sensor Output voltage (V) Ordering Information 2 4 6 Flow velocity (m/s) 8 10 D6F-W01A1 Flow velocity m/s 3. GND. 1. Vcc. Output voltage V 0 1.00 0.2 0.25 0.50 1.35 0.2 0.75 2.01 0.2 3.27 0.2 1.00 5.00 0.2 D6F-W04A1 Pin No. 1: Vcc 2: Vout Enlarged View 3: GND Connector S3B-ZR-SM2-TF (made by J.S.T. Mfg. Co.) Use the following connectors from J.S.T. Mfg. Co. Ltd. to connect the D6F: Flow velocity m/s Output voltage V 0 1.00 0.2 2.0 1.58 0.2 3.0 2.88 0.2 4.11 0.2 4.0 5.00 0.2 The flow velocity is the value calculated from the mass flow rate in OMRON's specified 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 1, below. Figure 1: Wind Tunnel Housing: ZHR-3 Contacts: SZH-002T-P0.5 Wires: AWG28 to AWG26 Or Contacts: SZH-003T-P0.5 Wires: AWG32 to AWG28 1.0 Flow velocity measurement position Air volume sensor 48 dia. 20.8 60 Measurement conditions: Power supply voltage of 12 VDC, ambient temperature of 25C, and ambient humidity of 35% to 75%. D6F-W10A1 Flow velocity m/s Output voltage V 0 2.0 4.0 6.0 8.0 10.0 1.00 0.24 1.94 0.24 3.23 0.24 4.25 0.24 4.73 0.24 5.00 0.24 The flow velocity is the value calculated from the mass flow rate in OMRON's specified 155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 2, below. Figure 2: Wind Tunnel Air volume sensor Honeycomb flow grate 155 dia. 18 Flow velocity measurement position 10 100 Measurement conditions: Power supply voltage of 12 VDC and ambient temperature of 25C 31 D6F-W MEMS Flow Sensor Characteristics/Performance Model D6F-W01A1 Flow Range (See note 1.) D6F-W04A1 0 to 1 m/s D6F-W10A1 0 to 4 m/s Calibration Gas (See note 2.) Air Electrical Connection Three-pin connector 0 to 10 m/s Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 5% FS (25C characteristic) Repeatability (See note 3.) 0.4% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC 6% FS (25C characteristic) Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (except for flow inlet and outlet) Operating Temperature (See note 4.) -10 to 60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 5% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 6.3 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 25C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-W01A1 D6F-W04A1 D6F-W10A1 9 Mounting Hole Dimensions 3.20.2 1.2 Two, R: 1.6 20 2.6 8 R4 2.6 1.2 8 4.20.2 Flow inlet Flow outlet MADE IN JAPAN 5 30.50.2 Flow outlet 2 dia., Depth: 2.5 32 30.50.05 5 39 24 19.5 4 Two, M3 screws 3.2 0.2 dia. 7 R4 Lot number label