System Specifications
Environmental
Operating Temperature: 0 – 40°C (32 – 104°F)
Optics temperature must be stabilized to ±2°C to
achieve accuracy specifications.
Power Requirements
Laser Head:
100 – 120 Vac, 48 – 66 Hz, and 400 Hz
220 – 240 Vac, 48 – 66 Hz
50 W (during warmup)
33 W (after warmup)
Electronics (from PC):
2.6 A at 5 Vdc,15 mA at ±12 Vdc
Sample Rate
Depends on computer type and setup. Typical
rates are listed below.
Computer Typical rate
486/33 6.7 kHz
486/66 12 kHz
Pentium 90 33 kHz1
1. Start Timer: invoked from computer (not from remote).
Laser Characteristics
Type: Helium-Neon with automatically tuned
Zeeman-split two-frequency output
Warm-up Time: Less than 10 minutes
(4 minutes typical)
Vacuum Wavelength: 632.991354 nm
Wavelength Accuracy: ±0.1 ppm (±0.02 ppm of
measured wavelength if calibrated with factory
calibration, Option UK6)
Short Term (1 hour) Wavelength Stability:
±0.002 ppm typical
Long Term (Lifetime) Wavelength Stability:
±0.02 ppm typical
Output Power: ≥180 µW
(<1 mW per Class 11 Laser Product)
Beam Diameter: 6 mm (0.24 in)
Beam Centerline Spacing:
11.0 mm (0.44 in) (input to output aperture)
Safety Classification:
Class II Laser Product conforming to U.S. National
Center for Devices and Radiological Health
Regulations 21CFR 1040.10 and 1040.11.
Agilent 5529A
Dynamic Calibrator
Data Sheet
CAUTION
LASER LIGHT
DO NOT STARE INTO BEAM
MAXIMUM OUTPUT: 1mw
PULSE SPEC: continuous wave
LASER MEDIUM: helium neon
CLASS I I LASER PRODUCT
2
Linear Distance, Diagonal,
and Velocity Measurement
Specifications
Measurement Range
Up to 40 m (130 ft) with Linear Optics;
Up to 80 m (260 ft) with Long Range Option
Linear Distance and Diagonal Measurement Accuracy
Temperature 10751C/D
Range, °C [°F] Air Sensor In Vacuum†
20° ±0.5° ±1.5 ppm ±0.1 (±0.02) ppm
15 – 25° [59° – 77°] ±1.7 ppm ±0.1 (±0.02) ppm
0 – 40° [32° – 104°] ±3.0 ppm* ±0.1 (±0.02) ppm
*Typical accuracy is ±1.0 ppm with 5 month calibration cycle on Air Sensor.
†Vacuum accuracy is ±0.02 ppm if the laser head is calibrated to MIL-STD 45662A.
Linear Distance and Diagonal Measurement Performance
Standard Extended
Maximum Axis Velocity
Optics Resolution Resolution 5519A 5519B
Linear Optics 10 nm 1 nm ±0.7 m/s ±1 nm/s
(10766A) (0.4 µin) (0.04 µin) (±28 in/s) (±40 in/s)
Plane Mirror 5 nm 0.5 nm ±0.35 m/s ±0.5 m/s
Optics (0.2 µin) (0.02 µin) (±14 in/s) (±20 in/s)
(10706A/B)*
High Resolution 2.5 nm 0.25 nm ±0.18 m/s ±0.25 m/s
Plane Mirror (0.1 µin) (0.01 µin) (±7 in/s) (±10 in/s)
Optics (10716A)*‡
*Requires the 10724A Plane Mirror Reflector. Since alignment of these optics
is much more sensitive than for linear optics, linear optics are recommended
for general use.
‡ Aperture distance of 10716A is 12.7 mm, whereas 5519A is 160 mm.
Angular Measurement
Specifications
Angle Measurement Accuracy
±0.2% of displayed value
±0.05 arc-seconds per meter of distance traveled
by the linearly moving optic.
Measurement Type
Pitch and yaw
Angle Measurement Resolution
0.05 arc-seconds (standard)
0.005 arc-seconds (extended)
Measurement Range
±10° (rotated about base of optic)
±20° (rotated about center of optic)
Maximum Distance Between Laser Head and Reflector
Up to 15 m (50 ft)
Velocity Measurement Accuracy
Sample Rate (Hz) 10 mm/s
0.015 + ———————— x ———— +1 % of displayed value
10 kHz Velocity
[ ( )]
Y
X
Y
X
3
Angular Position Measurement
Specifications
Measurement Type
Rotary and indexing tables or spindles
Indexing Mode
(This is a zero-reference measurement using the
55290A Angular Position Measurement Kit.)
Accuracy: 0.5 sec band +0.2% of displayed reading
Step Size (resolution): 1°
Range: multiple rotations or partial arcs
Laser Measurement Mode
Accuracy: 0.2% of displayed reading. Accuracy can
be improved to 0.5 sec by calibrating laser optics
with the indexing table (55290A).
Range: ±10°
Setup Requirements
Travel (using +2 mm, –1 mm machine axis, or
manual from zero reference)
Indexing Mode
(Interferometer in fixture)
Maximum Lift: 15 mm (2 mm required for fixture)
Flatness and Way Straightness
Measurement Specifications
Note: Values do not include effects of surface
cleanliness or operator positioning repeatability.
Range: up to 15 m (50 ft)
Flatness Measurement Accuracy
±0.2% of displayed value
±0.05 arc-seconds per meter of distance traveled
by the moving optic
Flatness Measurement Resolution (per step)
Footspacing Dimension Resolution
50.8 mm (2 in) 0.03 micron (1.0 µin)
101.6 mm (4 in) 0.05 micron (2.0 µin)
152.4 mm (6 in) 0.08 micron (3.0 µin)
Reference Plane Accuracy
The uncertainty of a surface plate flatness measure-
ment is bounded by two parallel planes separated
by the values below:
Metric Units Mode: 0.03 M2µm
English Units Mode: 0.12 F2µin
Where:
M = length of the surface diagonal in meters
F = length of the surface diagonal in feet
Lateral Offset and Flatness Range
The combination of lateral offset and maximum
flatness deviation must not displace the reflector
more than ±1.0 mm from the beam path in any
direction.
Way Straightness Accuracy
±0.2% of displayed value
±0.05 arc seconds per meter of distance traveled
by the moving optics
Straightness and Parallelism
Measurement Specifications
Straightness Measurement Accuracy1
Overall Accuracy = Optical Reference Accuracy
+ Measurement Accuracy
1. This is analogous to the traditional straightedge and indicator method of measuring
straightness, where Optical Reference Accuracy corresponds to the straightedge
accuracy, and Measurement Accuracy corresponds to the indicator accuracy.
0
270
90
180
A
H
G
B
F
C
D
E
Y
X
X
4
Optical Reference Accuracy
Optical reference inaccuracy can be eliminated by
using straightedge (mirror) reversal techniques.
Short Range Optics:
Metric units mode: 0.15 M2µm
English units mode: 0.5 F2µin
Long Range Optics:
Metric units mode: ±0.015 M2µm
English units mode: ±0.05 F2µin
Where:
M = distance of travel of the moving optic in
meters
F = distance of travel of the moving optic in feet
Measurement Accuracy*
Short Range Optics:
Displayed Value
Temperature 0 – 10 µm 10 – 1,500 µm
Range (0 – 400 µin) (400 – 60, 000 µin)
15 – 25°C ±3.5% ±1% ±0.25 µm
(10 µin)
0 – 40°C ±6% ±1% ±0.5 µm
(20 µin)
Long Range Optics:
Displayed Value
Temperature 0 – 100 µm 100 – 1,500 µm
Range (0 – 4,000 µin) (4,000 – 60,000 µin)
15 – 25°C ±5% ±2.5% ±2.5 µm
(100 µin)
0 – 40°C ±7.5% ±2.5% ±5 µm
(200 µin)
Straightness* Measurement Resolution
5519A
5519B 5518A
Short Range 0.01 µm 0.04 µm
(0.4 µin) (1.4 µin)
Long Range 0.1 µm (36 µm)
(4 µin) (14 µin)
Straightness Measurement Range
(Orthogonal to Axial Travel)
±1.5 mm (0.060 in)
Axial Separation (Travel)
(distance between the interferometer and the
reflector, typical, with proper alignment,
15 – 25°C):
Short Range Optics: 0.1 – 3 m (4 – 120 in)
Long Range Optics: 1 – 30 m (3 – 100 ft)
Squareness Measurement
Specifications
Squareness Measurement Accuracy
Short Range Optics:
Metric Units Mode:
±(1.0 + 0.1 M) arc-seconds ±0.01
English Unit Mode:
±(1.0 + 0.03 F) arc-seconds ±0.01
Long Range Optics:
Metric Units Mode:
±(1.0 + 0.01 M) arc-seconds ±0.025
English Units Mode:
±(1.0 + 0.003 F) arc-seconds +0.025
Where:
= calculated out-of-square angle in arc-seconds
M = distance of travel of the moving optic in meters
F = distance of travel of the moving optic in feet
A-Quad-B Input
Differential Input Threshold
±0.5 V minimum
±7.0 V maximum
Differential Input Impedance
100Ωor High-Z
Input Rate
>100 ns edge-to-edge, or <10 MHz information rate
Example: At maximum speed, A and B both must
be <2.5 MHz.
*These specs are not applicable to Timebase Straightness Measurements.
Y
X
5
Environmental Compensation
Maximum Compensation Update Rate
0.5 Hz (combined WOL and material temperature
compensation)
Wavelength of Light (WOL) Compensation, 10751C/D
Manual: Compensation factor is entered via
keyboard
Range: 0.1 to 1.0 ppm
Automatic: Requires 10751C/D Air Sensor. Display
of pressure, temperature, relative humidity setting,
and computed WOL are provided on the display.
Cable Lengths:
10751C—5 m (16 ft)
10751D—15 m (49 ft)
Operating Range
Temperature: 0 – 40°C (32 – 104°F)
Absolute Pressure: 517.2 – 775.7 mmHg
(10 – 15 psia)
Heat Dissipation: 2 W typical
Time Constants:
Temperature: 3 min. typical
Pressure: <1s typical
Material Temperature Compensation, 10757D/E/F
Manual: User-entered via keyboard
Range: 0 – 50°C (32 – 122°F)
Automatic: Requires 1 to 3 Agilent 10757D/E/F
Material Temperature Sensors. Display of individual
readings and average of all connected sensors are
provided on display.
10757D/E/F Material Temperature Sensor:
Integrated Circuit type. Mounted in remote, oil
immersible “button” with magnetic base.
Cable Lengths:
10757D—5 m (16 ft)
10757E—15 m (49 ft)
10757E—25 m (82 ft)
Maximum Sensor Error
(12 month calibration intervals) ±0.35°C, ±0.10°C
with calibration matching to Agilent 10886A.
Time Constant: 15 s typical
Material Expansion Coefficient:
Range: –100.0 to +100.0 ppm per °C or °F,
manually entered.
Personal Computer
The Agilent 5529A requires an IBM PC-compatible
computer with the following minimum configuration:
• 486/33 MHz processor
• 8 MB RAM
•1
1⁄2ISA slots
•3
1⁄2" floppy disk drive
• Windows® 3.1 and/or Windows 95
A faster, more powerful computer enhances 5529A
operation.
6
System Component Dimensions and Weights
Head/Tripod
Agilent 5519A/B Laser Head Agilent 10753B laser Tripod
168.0 mm
(6.61 in) 192.0 mm
(7.56 in)
360.0 mm
(14.17 in)
479.0 mm
(18.86 in)
Net Wt: 5.5 kg (12 lb)
M8 × 1.25 thread (3 places)
44.0 mm
(1.73 in)
118.0 mm (4.65 in)
55.0 mm
(2.17 in)
Power requirements:
Included: one switching mode power supply input
100-240V, 47-63Hz,1A
Environmental:
Operating Range: 0-40˚C
Minimum Requirements:
IBM compatible Computer with Windows 98 or
Windows 2000 Installed
• 64Mb of RAM
• CD-ROM Drive
• USB version 1.1, 12Mb/sec internal port
note: add on adapters are not supported
Dedicated Host for Agilent 10887A PC Calibrator
Board and 10886A PC Compensation Board Only!!
Shipping Weight: 2.1 Kgs
For more information on USB, visit
http://www.usb.org/index.html.
Agilent 55292A USB Expansion Module
M3 × 0.5
(19 Places)
30.0 mm
(1.18 in)
30.0 mm
(1.18 in)
27.0 mm
(1.06 in)
72.6 mm
(2.86 in)
32.61 mm
(1.284 in)
30.0 mm
(1.18 in)
1 A 0 1 0 1
1
0
7
7
1
A
A
N
G
U
L
A
R
R
E
F
L
E
C
T
O
R
40.0 mm
(1.57 in)
40.0 mm
(1.57 in)
40.0 mm
(1.57 in) Net Wt: 650 g (1.5 lb)
30.0 mm
(1.18 in)
M3 × 0.5
(24 Places)
40.0 mm
(1.57 in)
Net Wt: 5.36 g (1.2 lb)
1
0
7
6
6
A
L
I
N
E
A
R
I
N
T
E
R
F
E
R
O
M
E
T
E
R
65.0 mm
(2.56 in)
30.0 mm
(1.18 in)
Note
Dotted outline shows possible 10767A
retroreflector mounting positions.
107.8 mm
(4.24 in)
90.0 mm
(3.54 in)
Captive
Screw
(2 Places)
30.0 mm
(1.18 in)
50.0 mm
(1.97 in)
11.7 mm
(0.46 in)
30.0 mm
(1.18 in)
M10 1.5
M3 0.5
(4 Places)
Front Side
19.0 mm
(0.75 in)
Top
M10 × 1.5
×
×
7
Linear Optics
Agilent 10767A Linear Retroreflector
Agilent 10785A Height Adjuster/Post, 10784A Base
Agilent 10766A/10767A Interferometer Combination
30.0 mm
(1.18 in)
M3 × 0.5
(4 Places)
40.0 mm
(1.57 in)
40.0 mm
(1.57 in)
25.0 mm
(0.98 in)
Aperture Dia
20.0 mm
(0.79 in)
Captive Screw
(2 Places)
30.0 mm
(1.18 in)
Net Wt: 224 g (0.5 lb)
Angular Optics
Agilent 10770A Angular Interferometer
Net Wt: 553 g (1.3 lb)
M3 × 0.5
(24 Places)
40.0 mm
(1.57 in)
Aperture Dia
18.0 mm
(0.71 in)
(4 Places)
30.0 mm
(1.18 in)
30.0 mm
(1.18 in)
72.6 mm
(2.86 in)
1 A 0 1 0 1
1
0
7
7
0
A
A
N
G
U
L
A
R
I
N
T
E
R
F
E
R
O
M
E
T
E
R
40.0 mm
(1.57 in)
Agilent 10771A Angular Reflector
8
Flatness Accessories
Agilent 10773A Flatness Mirror
Agilent 10759A Foot Spacing Kit
1.65 mm
(6.50 in)
152.5 mm
(6.00 in)
114.3 mm
(4.50 in) 101.6 mm
(4.00 in)
Pattern to Match
10771A (M3 × 0.5)
Clearance Holes
50.0 mm
(1.97 in) 12.7 mm
(0.50 in)
39.0 mm
(1.53 in)
50.0 mm
(1.97 in)
50.0 mm
(1.97 in)
50.8 mm
(2.00 in)
63.5 mm
(2.50 in)
Net Wt: 661 g (1.5 lb)
30.0 mm
(1.18 in)
30.0 mm
(1.18 in)
50.0 mm
(1.97 in)
45.7 mm
(1.80 in)
12.2 mm
(0.48 in)
Mirror
Turns
110.0 mm
(4.33 in)
To Match 10770A
Clears M3 × 0.5
Net Wt: 661 g (1.5 lb)
9
Straightness/Squareness Optics
Agilent 10772A Tuning Mirror
Agilent 10774A Short Range Straightness Optics/10775A Long Range Straightness Optics
Agilent 10776A Straightness Mount
Agilent 10776-67001 Straightness Retroreflector
M3 ×0.5
(4 Places)
40.0 mm
(1.57 in)
40.0 mm
(1.57 in)
Aperture Dia
20.0 mm
(0.79 in)
(2 Places)
Captive Screw
(2 Places)
30.0 mm
(1.18 in)
40.0 mm
(1.57 in)
30.0 mm
(1.18 in)
Net Wt: 510 g (1.2 lb) w/Mount
M3 × 0.5
(16 Places)
Aperture Dia
7.9 mm
(0.31 in)
30.0 mm
(1.18 in)
30.0 mm
(1.18 in)
25.0 mm
(0.98 in)
110.0 mm
(4.33 in)
Aperture Dia
8.0 98.0 mm
(0.31 × 3.66 in)
20.0 mm
(0.79 in)
32.0 mm
(1.26 in)
21.0 mm
(0.83 in)
M3 0.5
(2 Places)
Net Weight: 164 g (5.8 oz)
Straightness Interferometer
Net Weight: 800 g (28.2 oz)
Angular Reflector
1 A 0 1 0 1
1
0
7
7
5
A
A
N
G
U
L
A
R
R
E
F
L
E
C
T
O
R
40.0 mm
(1.57)
40.0 mm
(1.57 in)
32.0 mm
(1.26 in)
×
×
M10 1.5
Clears M3 0.5
(2 Places)
86.2 mm
(3.39 in)
M10 1.5
Aperture Dia
63.5 mm
(2.5 in)
99.1 mm
(3.90 in)
76.2 mm
(3.00 in)
Net Wt: 374 g (0.82 lb)
×
×
×
90.0 mm
(3.54)
51.0 mm
(2.01)
25.5 mm
(1.00)
11.7 mm
(0.46 in)
19.1 Dia Thru
(.75 Dia)
36.0 mm
(1.42)
18.0 mm
(0.71)
55.0 mm
(2.17)
38.0 mm
(1.50)
11.0 Dia C'Sink
Tap M10 x 1.5
(6H) Thru
10
Straightness/Squareness Optics, continued
M10 1.5
(4 Places)
145.0 mm
(5.71 in)
49.5 mm
(1.95 in)
43.0 mm
(1.69 in)
71.0 mm
(2.80 in)
(2 Places)
49.5 mm
(1.95 in)
49.5 mm
(1.95 in)
14.0 mm
(0.55 in)
(2 Places)
8.0 mm
(0.31 in)
(2 Places)
28.0 mm
(1.10 in)
(2 Places)
145.0 mm
(5.71 in)
50.9 mm
(2.01 in)
OPTICAL SQUARE
10777A
Net Wt: 4.0 kg (8.9 lb) w/Mount
×
Agilent 10777A Optical Square
67.0 mm
(2.64)
12.0 mm
(0.47)
77.0 mm
(3.03)
20.0 mm
(0.70)
20.0 mm
(0.70)
4 x R5
20.0 mm
(0.70)
20.0 mm
(0.70)
32.0 mm
(1.26)
59.5 mm
(2.34)
139.6 mm
(5.50)
32.0 mm
(1.26)
20.0 mm
(0.79)
15.0 mm
(0.59) 34∞
75.5 mm
(1.26)
29.3 mm
(1.15)
27.5 mm
(1.08)
9.5 mm
(0.37)
154.0 mm
(6.06)
15.0 mm (0.59)
36.5 mm
(1.44)
25∞
133.5 mm
(5.26)
Agilent 10768-20214 Base – Large
10.0 mm
(0.39 in) 29.3 mm
(1.15 in)
35.0 mm
(1.38 in)
65.0 mm
(2.56 in)
100.7 mm
(3.96 in)
130.0 mm
(5.12 in)
0
55.5 mm
(2.19 in)
10.0 mm
(0.39 in)
10.4 mm
(0.41 in)
(4 Places)
48.0 mm
(1.89 in)
110.0 mm
(4.33 in)
(4 Places)
48.0 mm
(1.89 in)
150.0 mm
(5.91 in)
10.0 mm
(0.39 in)
0
4.7 mm
(0.19 in)
14.5 mm
(0.57 in)
Chamfer 45° × 0.5
Both sides of Part
1/4-20 UNC 2B
English Thread
(2 Places)
M5 × 0.8 6H
Thru
(2 Places)
10.8 Thru
C-Sink 90° × 11.8
Both Sides
(2 Places)
M10 × 1.5 6H
Thru
(7 Places)
10.0 mm
(0.39 in)
65.3 mm
(2.57 in)
70.0 mm
(2.76 in)
2Places
90.0 mm
(3.54 in)
Agilent 10777-20007 Optical Square Base
171.5 mm
(6.75 in)
171.5 mm
(6.75 in)
11
40.00 mm
(1.57 in)
40.00 mm
(1.57 in)
62.4 mm
(2.46 in)
108.6 mm
(4.28 in)
58.0 mm
(2.28 in)
8.0 mm
(0.31 in)
17.7 mm
(0.70 in)
26.4 mm
(1.04 in)
48.0 mm
(1.89 in)
25.70
(1.01 in)
20.0 mm
(0.79 in)
20.0 mm
(0.79 in)
30.0 mm
(1.18 in)
5.0 mm
(0.20 in)
mm (0.20 in)
30.0 mm
(1.18 in)
f 3.3 mm Thru C'Bore
6.5 mm f × 3.8 DP
(4 Places)
M10 × 1.5 mm Thru
(2 Places)
20.0 mm
(0.79 in)
98.0 mm
(3.86 in)
From Agilent 10768A/10769A Measurement Kit
54.15 mm
(2.25 in)
69.85 mm TYP
TO FLAT
(2.75 in)
.25 SOC HD CAP SCR
equally spaced on 6.125 B.C.
(3 Places)
10-32 × .34 DP equally spaced
on 1.750, 2.750 & 4.750 B.C.
(24 Places)
R 3.38
139.70 mm
(5.50 in)
Rotary Indexing Table
Adapter Plate
98.3 mm
(3.87 in)
90.4 mm
(3.56 in)
43.20 mm
(1.70 in)
103.78 mm
(4.09 in)
52.21 mm
(2.06 in)
66.43 mm
(2.62 in)
9.11 mm
(0.36 in)
35.46 mm
(1.40 in)
82.49 mm
(3.25 in)
7.92 mm
(0.31 in)
41.24 mm
(1.62 in)
31.20 mm
(1.23 in)
32.00 mm
(1.26 in)
4.90 mm
(0.19 in)
16.00 mm
(0.63 in)
6.00 mm
(0.24 in)
Fixture, Angle Position Measurement
6.4 mm
(0.25 in)
63.5 mm
(2.50 in)
73.0 mm
(2.87 in)
73.0 mm
(2.87 in)
50.80 mm × 1.3 mm deep
(2.00 in × 0.05 in) 4 × 1/4-20 UNC thru
equally spaced 90 ° apart
38.10 mm
(1.50 in)
8.6 mm (0.34 in) thru
9.505 mm (0.37 in)
press fit for item 2
Flanged Shaft
Agilent 55290A Angular Position Measurement Kit
Agilent 10769B Turning Mirror (Base Block Only)
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(fax) (31 20) 547 2390
Japan:
(tel) (81) 426 56 7832
(fax) (81) 426 56 7840
Latin America:
(tel) (305) 269 7500
(fax) (305) 269 7599
Australia:
(tel) 1 800 629 485
(fax) (61 3) 9210 5947
New Zealand:
(tel) 0 800 738 378
(fax) (64 4) 495 8950
Asia Pacific:
(tel) (852) 3197 7777
(fax) (852) 2506 9284
Product specifications and descriptions in this
document subject to change without notice.
Copyright © 1997, 2001 Agilent Technologies
Printed in U.S.A. March 16, 2001
5964-9307E