Agilent 5529A Dynamic Calibrator Data Sheet System Specifications Environmental Operating Temperature: 0 - 40C (32 - 104F) Optics temperature must be stabilized to 2C to achieve accuracy specifications. Power Requirements Laser Head: 100 - 120 Vac, 48 - 66 Hz, and 400 Hz 220 - 240 Vac, 48 - 66 Hz 50 W (during warmup) 33 W (after warmup) Laser Characteristics Type: Helium-Neon with automatically tuned Zeeman-split two-frequency output Warm-up Time: Less than 10 minutes (4 minutes typical) Vacuum Wavelength: 632.991354 nm Wavelength Accuracy: 0.1 ppm (0.02 ppm of measured wavelength if calibrated with factory calibration, Option UK6) Electronics (from PC): 2.6 A at 5 Vdc,15 mA at 12 Vdc Short Term (1 hour) Wavelength Stability: 0.002 ppm typical Sample Rate Depends on computer type and setup. Typical rates are listed below. Computer Typical rate 486/33 6.7 kHz 486/66 12 kHz Pentium 90 33 kHz1 Long Term (Lifetime) Wavelength Stability: 0.02 ppm typical 1. Start Timer: invoked from computer (not from remote). Beam Centerline Spacing: 11.0 mm (0.44 in) (input to output aperture) CAUTION LASER LIGHT DO NOT STARE INTO BEAM MAXIMUM OUTPUT: 1mw PULSE SPEC: continuous wave LASER MEDIUM: helium neon CLASS I I LASER PRODUCT Output Power: 180 W (<1 mW per Class 11 Laser Product) Beam Diameter: 6 mm (0.24 in) Safety Classification: Class II Laser Product conforming to U.S. National Center for Devices and Radiological Health Regulations 21CFR 1040.10 and 1040.11. Linear Distance, Diagonal, and Velocity Measurement Specifications X Angular Measurement Specifications Y X Y Measurement Range Up to 40 m (130 ft) with Linear Optics; Up to 80 m (260 ft) with Long Range Option Angle Measurement Accuracy 0.2% of displayed value 0.05 arc-seconds per meter of distance traveled by the linearly moving optic. Linear Distance and Diagonal Measurement Accuracy Temperature Range, C [F] 10751C/D Air Sensor In Vacuum 20 0.5 15 - 25 [59 - 77] 0 - 40 [32 - 104] 1.5 ppm 1.7 ppm 3.0 ppm* 0.1 (0.02) ppm 0.1 (0.02) ppm 0.1 (0.02) ppm Measurement Type Pitch and yaw Angle Measurement Resolution 0.05 arc-seconds (standard) 0.005 arc-seconds (extended) * Typical accuracy is 1.0 ppm with 5 month calibration cycle on Air Sensor. Vacuum accuracy is 0.02 ppm if the laser head is calibrated to MIL-STD 45662A. Velocity Measurement Accuracy Sample Rate (Hz) 10 mm/s x ( -------- +1)] % of displayed value [0.015 + ---------------- 10 kHz Velocity Linear Distance and Diagonal Measurement Performance Maximum Axis Velocity Optics Standard Extended Resolution Resolution 5519A 5519B Linear Optics (10766A) 10 nm (0.4 in) 1 nm (0.04 in) 0.7 m/s (28 in/s) 1 nm/s (40 in/s) Plane Mirror Optics (10706A/B)* 5 nm (0.2 in) 0.5 nm (0.02 in) 0.35 m/s (14 in/s) 0.5 m/s (20 in/s) High Resolution Plane Mirror Optics (10716A)* 2.5 nm (0.1 in) 0.25 nm (0.01 in) 0.18 m/s (7 in/s) 0.25 m/s (10 in/s) * Requires the 10724A Plane Mirror Reflector. Since alignment of these optics is much more sensitive than for linear optics, linear optics are recommended for general use. Aperture distance of 10716A is 12.7 mm, whereas 5519A is 160 mm. 2 Measurement Range 10 (rotated about base of optic) 20 (rotated about center of optic) Maximum Distance Between Laser Head and Reflector Up to 15 m (50 ft) Angular Position Measurement Specifications Flatness Measurement Resolution (per step) 270 0 180 90 Measurement Type Rotary and indexing tables or spindles Indexing Mode (This is a zero-reference measurement using the 55290A Angular Position Measurement Kit.) Accuracy: 0.5 sec band +0.2% of displayed reading Step Size (resolution): 1 Range: multiple rotations or partial arcs Setup Requirements Travel (using +2 mm, -1 mm machine axis, or manual from zero reference) Indexing Mode (Interferometer in fixture) Maximum Lift: 15 mm (2 mm required for fixture) 0.03 micron (1.0 in) 0.05 micron (2.0 in) 0.08 micron (3.0 in) Metric Units Mode: 0.03 M2 m English Units Mode: 0.12 F2 in Where: M = length of the surface diagonal in meters F = length of the surface diagonal in feet Lateral Offset and Flatness Range The combination of lateral offset and maximum flatness deviation must not displace the reflector more than 1.0 mm from the beam path in any direction. 0.2% of displayed value 0.05 arc seconds per meter of distance traveled by the moving optics C B G 50.8 mm (2 in) 101.6 mm (4 in) 152.4 mm (6 in) Way Straightness Accuracy Flatness and Way Straightness Measurement Specifications H Resolution Reference Plane Accuracy The uncertainty of a surface plate flatness measurement is bounded by two parallel planes separated by the values below: Laser Measurement Mode Accuracy: 0.2% of displayed reading. Accuracy can be improved to 0.5 sec by calibrating laser optics with the indexing table (55290A). Range: 10 A Footspacing Dimension D F Note: Values do not include effects of surface cleanliness or operator positioning repeatability. Range: up to 15 m (50 ft) Flatness Measurement Accuracy 0.2% of displayed value 0.05 arc-seconds per meter of distance traveled by the moving optic E Straightness and Parallelism Measurement Specifications X Y X Straightness Measurement Accuracy1 Overall Accuracy = Optical Reference Accuracy + Measurement Accuracy 1. This is analogous to the traditional straightedge and indicator method of measuring straightness, where Optical Reference Accuracy corresponds to the straightedge accuracy, and Measurement Accuracy corresponds to the indicator accuracy. 3 Optical Reference Accuracy Optical reference inaccuracy can be eliminated by using straightedge (mirror) reversal techniques. Straightness Measurement Range (Orthogonal to Axial Travel) 1.5 mm (0.060 in) Short Range Optics: Metric units mode: 0.15 M2 m English units mode: 0.5 F2 in Axial Separation (Travel) (distance between the interferometer and the reflector, typical, with proper alignment, 15 - 25C): Long Range Optics: Metric units mode: 0.015 M2 m English units mode: 0.05 F2 in Where: M = distance of travel of the moving optic in meters F = distance of travel of the moving optic in feet Measurement Accuracy* Short Range Optics: Temperature Range 0 - 10 m (0 - 400 in) 10 - 1,500 m (400 - 60, 000 in) 15 - 25C 3.5% 1% 0.25 m (10 in) 0 - 40C 6% 1% 0.5 m (20 in) Long Range Optics: Displayed Value Temperature Range 0 - 100 m (0 - 4,000 in) 100 - 1,500 m (4,000 - 60,000 in) 15 - 25C 5% 2.5% 2.5 m (100 in) 7.5% Long Range Optics: 1 - 30 m (3 - 100 ft) Squareness Measurement Specifications X Y Displayed Value 0 - 40C Short Range Optics: 0.1 - 3 m (4 - 120 in) 2.5% 5 m (200 in) Straightness* Measurement Resolution 5519A 5519B 5518A Short Range 0.01 m (0.4 in) 0.04 m (1.4 in) Long Range 0.1 m (4 in) (36 m) (14 in) Squareness Measurement Accuracy Short Range Optics: Metric Units Mode: (1.0 + 0.1 M) arc-seconds 0.01 English Unit Mode: (1.0 + 0.03 F) arc-seconds 0.01 Long Range Optics: Metric Units Mode: (1.0 + 0.01 M) arc-seconds 0.025 English Units Mode: (1.0 + 0.003 F) arc-seconds +0.025 Where: = calculated out-of-square angle in arc-seconds M = distance of travel of the moving optic in meters F = distance of travel of the moving optic in feet A-Quad-B Input Differential Input Threshold 0.5 V minimum 7.0 V maximum Differential Input Impedance 100 or High-Z Input Rate >100 ns edge-to-edge, or <10 MHz information rate Example: At maximum speed, A and B both must be <2.5 MHz. * These specs are not applicable to Timebase Straightness Measurements. 4 Environmental Compensation Maximum Compensation Update Rate 0.5 Hz (combined WOL and material temperature compensation) Wavelength of Light (WOL) Compensation, 10751C/D Manual: Compensation factor is entered via keyboard Material Temperature Compensation, 10757D/E/F Manual: User-entered via keyboard Range: 0 - 50C (32 - 122F) Automatic: Requires 1 to 3 Agilent 10757D/E/F Material Temperature Sensors. Display of individual readings and average of all connected sensors are provided on display. Range: 0.1 to 1.0 ppm Automatic: Requires 10751C/D Air Sensor. Display of pressure, temperature, relative humidity setting, and computed WOL are provided on the display. Cable Lengths: 10751C--5 m (16 ft) 10751D--15 m (49 ft) 10757D/E/F Material Temperature Sensor: Integrated Circuit type. Mounted in remote, oil immersible "button" with magnetic base. Cable Lengths: 10757D--5 m (16 ft) 10757E--15 m (49 ft) 10757E--25 m (82 ft) Operating Range Temperature: 0 - 40C (32 - 104F) Maximum Sensor Error (12 month calibration intervals) 0.35C, 0.10C with calibration matching to Agilent 10886A. Absolute Pressure: 517.2 - 775.7 mmHg (10 - 15 psia) Time Constant: 15 s typical Heat Dissipation: 2 W typical Time Constants: Temperature: 3 min. typical Pressure: <1s typical Material Expansion Coefficient: Range: -100.0 to +100.0 ppm per C or F, manually entered. Personal Computer The Agilent 5529A requires an IBM PC-compatible computer with the following minimum configuration: * 486/33 MHz processor * 8 MB RAM * 112 ISA slots * 312" floppy disk drive * Windows(R) 3.1 and/or Windows 95 A faster, more powerful computer enhances 5529A operation. 5 System Component Dimensions and Weights Power requirements: Included: one switching mode power supply input 100-240V, 47-63Hz,1A Environmental: Operating Range: 0-40C Minimum Requirements: IBM compatible Computer with Windows 98 or Windows 2000 Installed * 64Mb of RAM * CD-ROM Drive * USB version 1.1, 12Mb/sec internal port note: add on adapters are not supported Agilent 55292A USB Expansion Module Dedicated Host for Agilent 10887A PC Calibrator Board and 10886A PC Compensation Board Only!! Shipping Weight: 2.1 Kgs For more information on USB, visit http://www.usb.org/index.html. Head/Tripod 92.7 mm (3.65 in) 168.0 mm 192.0 mm (6.61 in) (7.56 in) 360.0 mm (14.17 in) M8 x 1.25 thread (3 places) 118.0 mm (4.65 in) 479.0 mm (18.86 in) Net Wt: 5.5 kg (12 lb) Agilent 5519A/B Laser Head 6 44.0 mm (1.73 in) 55.0 mm (2.17 in) 508 mm CrossAdjustable Slide 686 mm (27 in) Minimum 1650 mm (65 in) Maximum Net Wt.: 17.6 lbs 692 mm (27.25 in) Max. Radius 330 mm Min. (13.0 in) Agilent 10753B laser Tripod Angular Optics Linear Optics Aperture Dia 20.0 mm (0.79 in) AN GU LA R INTER FE 1A0101 40.0 mm (1.57 in) M3 x 0.5 (4 Places) 25.0 mm (0.98 in) 40.0 mm (1.57 in) ER MET 30.0 mm (1.18 in) RO 40.0 mm (1.57 in) M3 x 0.5 (24 Places) 10770A 40.0 mm (1.57 in) Captive Screw (2 Places) 30.0 mm (1.18 in) 72.6 mm (2.86 in) Net Wt: 224 g (0.5 lb) Agilent 10767A Linear Retroreflector 30.0 mm (1.18 in) 90.0 mm (3.54 in) M10 x 1.5 30.0 mm (1.18 in) Net Wt: 553 g (1.3 lb) 50.0 mm (1.97 in) 30.0 mm (1.18 in) 30.0 mm (1.18 in) Agilent 10770A Angular Interferometer Top Captive Screw (2 Places) 107.8 mm (4.24 in) M3 x 0.5 (4 Places) Aperture Dia 18.0 mm (0.71 in) (4 Places) M3 x 0.5 (19 Places) 19.0 mm (0.75 in) TO R 1077 1A EC 11.7 mm (0.46 in) A GUL R REF L AN 1A0101 M10 x 1.5 Side Front 40.0 mm (1.57 in) 40.0 mm (1.57 in) Agilent 10785A Height Adjuster/Post, 10784A Base 32.61 mm (1.284 in) M3 x 0.5 (24 Places) 72.6 mm (2.86 in) 30.0 mm (1.18 in) AR INTERF ER ETER 10766A E IN OM L 30.0 mm (1.18 in) 40.0 mm (1.57 in) 30.0 mm (1.18 in) 30.0 mm (1.18 in) 30.0 mm (1.18 in) 27.0 mm (1.06 in) 40.0 mm (1.57 in) Net Wt: 650 g (1.5 lb) Agilent 10771A Angular Reflector 65.0 mm (2.56 in) Net Wt: 5.36 g (1.2 lb) Note Dotted outline shows possible 10767A retroreflector mounting positions. Agilent 10766A/10767A Interferometer Combination 7 Flatness Accessories 63.5 mm (2.50 in) 50.8 mm (2.00 in) 114.3 mm (4.50 in) 152.5 mm (6.00 in) 101.6 mm (4.00 in) Pattern to Match 10771A (M3 x 0.5) Clearance Holes 1.65 mm (6.50 in) 50.0 mm (1.97 in) 39.0 mm (1.53 in) 50.0 mm (1.97 in) 50.0 mm (1.97 in) 12.7 mm (0.50 in) Net Wt: 661 g (1.5 lb) Agilent 10759A Foot Spacing Kit 30.0 mm (1.18 in) 50.0 mm (1.97 in) To Match 10770A Clears M3 x 0.5 30.0 mm (1.18 in) Mirror Turns 110.0 mm (4.33 in) 12.2 mm (0.48 in) 45.7 mm (1.80 in) Net Wt: 661 g (1.5 lb) Agilent 10773A Flatness Mirror 8 Straightness/Squareness Optics 30.0 mm (1.18 in) 40.0 mm (1.57 in) M3 x 0.5 (4 Places) Aperture Dia 20.0 mm (0.79 in) (2 Places) 40.0 mm 30.0 mm (1.57 in) (1.18 in) 40.0 mm (1.57 in) Captive Screw (2 Places) Net Wt: 510 g (1.2 lb) w/Mount Agilent 10772A Tuning Mirror 30.0 mm (1.18 in) 30.0 mm (1.18 in) 32.0 mm (1.26 in) 40.0 mm (1.57) 32.0 mm (1.26 in) Aperture Dia 7.9 mm (0.31 in) M3 x 0.5 (2 Places) L R 1A0101 21.0 mm (0.83 in) 110.0 mm (4.33 in) Aperture Dia 8.0 x 98.0 mm (0.31 x 3.66 in) A GUL R REF TO 25.0 mm (0.98 in) AN EC 40.0 mm (1.57 in) 1077 5A M3 x 0.5 (16 Places) Net Weight: 800 g (28.2 oz) Angular Reflector 20.0 mm (0.79 in) Net Weight: 164 g (5.8 oz) Straightness Interferometer Agilent 10774A Short Range Straightness Optics/10775A Long Range Straightness Optics 90.0 mm (3.54) 36.0 mm (1.42) 18.0 mm (0.71) 86.2 mm (3.39 in) Aperture Dia 63.5 mm (2.5 in) 51.0 mm (2.01) 76.2 mm (3.00 in) 25.5 mm (1.00) 19.1 Dia Thru (.75 Dia) 11.0 Dia C'Sink Tap M10 x 1.5 (6H) Thru M10 x 1.5 99.1 mm (3.90 in) Clears M3 x 0.5 (2 Places) Net Wt: 374 g (0.82 lb) M10 x 1.5 55.0 mm (2.17) 38.0 mm (1.50) Agilent 10776-67001 Straightness Retroreflector 11.7 mm (0.46 in) Agilent 10776A Straightness Mount 9 Straightness/Squareness Optics, continued M10 x 1.5 (4 Places) 139.6 mm (5.50) 20.0 mm (0.79) 8.0 mm (0.31 in) (2 Places) 49.5 mm (1.95 in) 15.0 mm (0.59) 25 145.0 mm (5.71 in) 71.0 mm (2.80 in) (2 Places) OPTICAL SQUARE 10777A 28.0 mm (1.10 in) (2 Places) 50.9 mm (2.01 in) 15.0 mm (0.59) 14.0 mm (0.55 in) (2 Places) Net Wt: 4.0 kg (8.9 lb) w/Mount 133.5 mm (5.26) 154.0 mm (6.06) 34 36.5 mm (1.44) 43.0 mm (1.69 in) 145.0 mm (5.71 in) 75.5 mm (1.26) 32.0 mm (1.26) 49.5 mm (1.95 in) 49.5 mm (1.95 in) 9.5 mm (0.37) 27.5 mm (1.08) 29.3 mm (1.15) 20.0 mm (0.70) 12.0 mm (0.47) 20.0 mm (0.70) Agilent 10777A Optical Square 20.0 mm (0.70) 32.0 mm (1.26) 77.0 mm (3.03) 59.5 mm (2.34) 67.0 mm (2.64) 4 x R5 Agilent 10777-20007 Optical Square Base 1/4-20 UNC 2B English Thread (2 Places) 0 10.0 mm (0.39 in) 10.0 mm (0.39 in) 48.0 mm (1.89 in) 150.0 mm (5.91 in) 110.0 mm (4.33 in) (4 Places) Chamfer 45 x 0.5 Both sides of Part 48.0 mm (1.89 in) 0 14.5 mm (0.57 in) 55.5 mm (2.19 in) 35.0 mm (1.38 in) M5 x 0.8 6H Thru (2 Places) 10.4 mm (0.41 in) (4 Places) 70.0 mm (2.76 in) 2Places 65.3 mm (2.57 in) 10.0 mm (0.39 in) 10.8 Thru C-Sink 90 x 11.8 Both Sides (2 Places) 29.3 mm (1.15 in) 65.0 mm (2.56 in) 100.7 mm (3.96 in) 130.0 mm (5.12 in) 10.0 mm (0.39 in) Agilent 10768-20214 Base - Large 10 4.7 mm (0.19 in) M10 x 1.5 6H Thru (7 Places) 90.0 mm (3.54 in) 20.0 mm (0.70) 40.00 mm (1.57 in) 5.0 mm (0.20 in) 20.0 mm (0.79 in) mm (0.20 in) 30.0 mm (1.18 in) f 3.3 mm Thru C'Bore 6.5 mm f x 3.8 DP 25.70 (4 Places) (1.01 in) 20.0 mm (0.79 in) 30.0 mm (1.18 in) 26.4 mm (1.04 in) 58.0 mm (2.28 in) 40.00 mm (1.57 in) 62.4 mm (2.46 in) 48.0 mm (1.89 in) M10 x 1.5 mm Thru (2 Places) 20.0 mm (0.79 in) 98.0 mm (3.86 in) 108.6 mm (4.28 in) 8.0 mm (0.31 in) 17.7 mm (0.70 in) From Agilent 10768A/10769A Measurement Kit Agilent 10769B Turning Mirror (Base Block Only) Agilent 55290A Angular Position Measurement Kit .25 SOC HD CAP SCR equally spaced on 6.125 B.C. (3 Places) 10-32 x .34 DP equally spaced on 1.750, 2.750 & 4.750 B.C. (24 Places) 69.85 mm TYP TO FLAT (2.75 in) 98.3 mm (3.87 in) 41.24 mm (1.62 in) 16.00 mm (0.63 in) 4.90 mm (0.19 in) 6.00 mm (0.24 in) 43.20 mm 32.00 mm (1.70 in) (1.26 in) 90.4 mm (3.56 in) 31.20 mm (1.23 in) 35.46 mm (1.40 in) 82.49 mm (3.25 in) R 3.38 7.92 mm (0.31 in) 103.78 mm (4.09 in) 139.70 mm (5.50 in) 66.43 mm (2.62 in) 52.21 mm (2.06 in) 54.15 mm (2.25 in) 9.11 mm (0.36 in) Rotary Indexing Table Fixture, Angle Position Measurement 50.80 mm x 1.3 mm deep (2.00 in x 0.05 in) 171.5 mm (6.75 in) 38.10 mm (1.50 in) 73.0 mm (2.87 in) 63.5 mm (2.50 in) 171.5 mm (6.75 in) Adapter Plate 4 x 1/4-20 UNC thru equally spaced 90 apart 73.0 mm (2.87 in) Flanged Shaft 8.6 mm (0.34 in) thru 9.505 mm (0.37 in) press fit for item 2 6.4 mm (0.25 in) 11 Agilent Technologies' Test and Measurement Support, Services, and Assistance Agilent Technologies aims to maximize the value you receive, while minimizing your risk and problems. 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