Honeywell HumidIcon™
Digital
Humidity/Temperature
Sensors: HIH6130/6131
and HIH6120/6121 Series
DESCRIPTION ( = competitive differentiator)
Honeywell HumidIcon™ Digital Humidity/Temperature
Sensors: HIH6130/6131 and 6120/6121 Series is a digital
output-type relative humidity (RH) and temperature sensor
combined in the same package. These devices offer several
competitive advantages, including:
Industry-leading long-term stability
Industry-leading Total Error Band
Industry-leading reliability
Lowest total cost solution
True temperature-compensated digital I2C or SPI output
Energy efficiency
Ultra-small package
Industry-leading long term stability (1.2 %RH over
five years): Competitive humidity sensors need to go
through a 12 hour at 75 %RH rehydration process
(which requires special equipment chambers) to correct
reflow temperature offset. Honeywell’s sensor also
experiences an offset after reflow; however, it only
requires a five hour rehydration under ambient
conditions (>50 %RH). Honeywell’s industry-leading
long term stability provides the following benefits to the
customer:
Minimizes system performance issues
Helps support system uptime by eliminating the need
to service or replace the sensor during its application
life
Eliminates the need to regularly recalibrate the sensor
in their application, which can be inconvenient and
costly
Industry-leading Total Error Band (TEB) (±5 %RH) (See
Figure 1): Honeywell specifies Total Error Bandthe
most comprehensive, clear, and meaningful measurement
—that provides the sensor’s true accuracy of ±5 %RH
over a compensated range of 5 °C to 50 °C [41 °F to
122 °F] and 10 %RH to 90 %RH. TEB includes all errors
due to:
Humidity non-linearity
Humidity hysteresis
Humidity non-repeatability
Thermal effect on zero
Thermal effect on span
Thermal hysteresis
Figure 1. Total Error Band
Thermal Hysteresis
Humidity Non-Linearity
Humidity Hysteresis
Humidity Non-Repeatability
+
+
+
+
+
Thermal Effect on Zero
Thermal Effect on Span
Total Error Band
Accuracy
Errors
=
=
Total Error Band should not be confused with “Accuracy”,
which is actually a component of Total Error Band. Many
competitors simply specify the accuracy of their device;
however, the specification may exclude hysteresis and
temperature effects, and may be calculated over a very narrow
range, at only one point in the range, or at their absolute best
accuracy level. It is then up to the customer to calibrate the
device to make sure it has the accuracy needed for the life of
the application.
Honeywell’s industry-leading Total Error Band provides the
following benefits to the customer:
Eliminates individually testing and calibrating every sensor,
which can increase their manufacturing time and process
Supports system accuracy and warranty requirements
Helps to optimize system uptime
Provides excellent sensor interchangeabilitythe customer
can remove one sensor from the tape, remove the next
sensor from the tape, and there is no part-to-part variation
in accuracy
For more information about Total Error Band, please see the
related Technical Note “Explanation of the Total Error Band
Specification for Honeywell’s Digital Humidity/Temperature
Sensors.”
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors
2 www.honeywell.com/sensing
Industry-leading reliability: Honeywell’s new
HIH6130/6131 and HIH6120/6121 Series sensors use a
laser trimmed, thermoset polymer capacitive sensing
element. The element's multilayer construction provides
resistance to most application hazards such as
condensation, dust, dirt, oils, and common
environmental chemicals which help provide industry-
leading stability and reliability.
Lowest total cost solution: Offers customers the
lowest total cost solution due to the sensor’s industry-
leading Total Error Band and its being a combined
humidity/temperature sensor.
True, temperature-compensated digital I2C or SPI
output: Typically allows the customer to remove the
components associated with signal conditioning from the
PCB to free up space and reduce costs associated with
those components (e.g., acquisition, inventory,
assembly). Often eliminates problems that could occur
from having multiple signal conditioning components
across the PCB. Simplifies integration to the
microprocessor, eliminating the need for customer-
implemented, complex signal conditioning.
Energy efficient
Low supply voltage: Can operate down to 2.3 Vdc,
which allows use in low energy and wireless-
compatible applications to enhance energy savings
and prolong system battery life.
Low power consumption: The sensor goes into
sleep mode when not taking a measurement within
the application, consuming only 1 µA of power versus
650 µA in full operation in a battery operated system.
Sleep mode helps maximize battery life, reduces
power supply size, and reduces the application’s
overall weight.
Ultra-small package: SOIC-8 SMD (Surface Mount
Device) and SIP 4 Pin packages are ultra small,
including the condensation-resistant versions with
hydrophobic filter on-board (HIH6121 and HIH6131).
Allows for flexibility of use within the application,
occupies less space on the PCB, and typically simplifies
placement on crowded PCBs or in small devices.
Combined humidity and temperature sensor: The
humidity and temperature sensors are co-located in the
same package. This allows the RH measurement to be
temperature compensated and provides a second,
standalone temperature sensor output. This allows the
user to purchase one sensor instead of two.
Tape and reel packaging: Cost-effective tape-and-reel
packaging allows for use in high volume, automated pick-
and-place manufacturing, eliminating lead misalignment to
the PCB and helping the customer to reduce
manufacturing costs.
High resolution: High 14-bit humidity sensor resolution
and 14-bit temperature sensor resolution within the
application help the user’s system detect the smallest
relative humidity or temperature change.
FEATURES AND BENEFITS
Wide operating temperature range: -25 °C to 85 °C
[-13 °F to 185 °F] allows for use in many applications
Optional one or two %RH level alarm outputs
(HIH6130/6131 only): Provide the user the ability to
monitor whether the RH level has exceeded or fallen
below pre-determined and critical levels within the
application
Multi-function ASIC: Provides flexibility within the
application by lowering or eliminating the risk and cost of
OEM calibration
Industry-standard package: Provides easy design-in
RoHS and WEEE compliant; halogen-free
Two configurations: Increase flexibility of use:
HIH6120 and HIH6130: no filter, non-condensing
HIH6121 and HIH6131: hydrophobic filter and
condensation-resistant allow use in many condensing
environments
Optional I2C or SPI digital communication formats:
Provide the user with flexibility in integrating the sensors
into existing system level architecture
POTENTIAL APPLICATIONS
HVAC/R: May be used to provide precision RH and
temperature measurement in air conditioning/air
movement systems, enthalpy sensing, thermostats,
humidifiers/de-humidifiers, and humidistats to maintain
occupant comfort and ideal storage humidity/temperature
while achieving low energy consumption, supporting
system accuracy and warranty requirements, maximizing
system uptime, and improving overall system quality.
Respiratory therapy: May be used to provide precision
RH and temperature measurement in sleep apnea
machines and ventilators, enhancing patient comfort,
safety and treatment effectiveness with warm and
humidified air.
Incubators/microenvironments: May be used to provide
optimal temperature and RH levels to support critical
processes and experiments, enhancing process efficiency
with desired climate conditions.
Air compressors: May be used to provide precision RH
measurement in compressed air lines, allowing the system
to remove any condensation; dry compressed air is critical
for customer process control measurement.
Weather stations: May be used to provide precision RH
and temperature measurement in ground-based and air-
born weather stations, allowing real time and highly
accurate monitoring/reporting of actual weather conditions.
Telecom cabinets: May be used to provide precision RH
and temperature measurement in the telecom cabinet
HVAC system; maintaining proper temperature and
humidity levels in the cabinet provides maximum system
uptime and performance.
HIH6130/6131 and HIH6120/6121 Series
Honeywell Sensing and Control 3
Table 1. Environmental Specifications
Characteristic
Condition
Min.
Typ.
Unit
Operating temperature range
-25 [-13]
C [ F]
Storage temperature range
-40 [-40]
C [ F]
Storage humidity
30
%RH
Soldering:
automated
manual
IPC/EIA/JEDEC J-STD-020D
apply heat for 4 s max. for manual soldering
C [ F]
ESD
MIL-STD 883H, Method 3015.7
kV
Latch-up immunity
mA
Shock
MIL-STD 202G, Method 213D, Test Condition C,
half-sine, 6 ms 3 perpendicular axis, 3 shock
pulses per axis
g
Vibration
MIL-STD 202G, Method 204D, Test Condition D,
10 Hz to 2000 Hz
g
Light sensitivity
exposed to 50 lumens yellow light; exhibited no change in output
Table 2. Humidity Performance Specifications
Characteristic
Condition
Typ.
Max.
Unit
Supply voltage variation
2.3 Vdc to 5.5 Vdc
0.1
0.5
%RH
Compensated humidity range1
90
%RH
Compensated temp. range1
50 [122]
C [ F]
Resolution
14 bit ADC resolution
0.04
%RH
Accuracy2
4
%RH
Total error band3
5
%RH
Response time
airflow minimum 20 l/min
6
8
s
Operating range
non-condensing
100
%RH
Long term stability
50 %RH for 5 years
0.05
1.2
%RH
Impact of soldering
IPC/EIA/JEDEC J-STD-020D, peak temp. of
260 C [500 F]
2.5
%RH
Notes:
1. Conversion formulas:
14 bit ADC output for humidity to %RH:
100
22 output_ADC_bit_14_Humidity
)RH(%Humidity 14
14 bit ADC output for temperature conversion to C:
40165
22 output_ADC_bit_14_eTemperatur
)C(eTemperatur 14
2. Accuracy is specified at the typical supply voltage of 3.3 Vdc and at 25 °C [77 °F]. It is the maximum deviation from the ideal
transfer function of relative humidity measured over the humidity range of 10 %RH to 90 %RH and includes all errors due to
humidity non-linearity, humidity hysteresis and humidity non-repeatability.
3. Total error band is the maximum deviation from the ideal transfer function of relative humidity over the compensated range of
5 °C [41 °F] to 50 °C [122 °F]. It includes all errors due to humidity non-linearity, humidity hysteresis, humidity non-repeatability,
thermal effect on zero, thermal effect on span and thermal hysteresis.
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors
4 www.honeywell.com/sensing
Table 3. Temperature Performance Specifications
Characteristic
Condition
Min.
Typ.
Max.
Unit
Supply voltage variation
2.3 Vdc to 5.5 Vdc
0.5
1.0
°C
Compensated temp. range
5 [41]
50 [122]
°C [°F]
Resolution
14 bit ADC resolution
0.025
°C
Accuracy (BFSL)1
±1.0
°C
Response time
1/e slow moving air
5
30
s
Long term stability
25 °C for 5 years
0.05
°C/yr
Impact of soldering
IPC/EIA/JEDEC J-STD-020D, peak temp.
of 260 C [500 F]
±0.1
°C
Note:
1. Accuracy is specified over the compensated temperature range.
Table 4. Current Consumption
Characteristic
VDD
Abbr.
Condition
Typ.
Max.
Sleep current
3.3
ISLEEP
0.6
1
Supply current:
I2C
SPI
3.3
3.3
IDD
IDD
14 bit fastest update, no sleep
14 bit fastest update, no sleep
0.65
0.75
1
1
Table 5. Input and Output Characteristics
Characteristic
Abbr.
Condition
Min.
Typ.
Max.
Unit
Supply voltage
VDD
2.3
3.3
5.5
Vdc
Low level output voltage
VOL
IOL = 2.8 mA min.
20%
VDD
High level output voltage
VOH
IOH = -2.8 mA min.
80%
VDD
Low level input voltage
VIL
20%
VDD
High level input voltage
VIH
80%
VDD
Pull-up resistor:
I2C
SPI (for SS only)
RP
RSS
2.2
10
kOhm
kOhm
Table 6. Measurement Timing
Characteristic
Abbr.
Condition
Min.
Typ.
Max.
Unit
Start-up time (Power-On to data
ready)
TSTA
14 bit TH and 14 bit humidity
resolution
50
60
ms
Update rate
application dependent: measurements are taken only when the application requests them
HIH6130/6131 and HIH6120/6121 Series
Honeywell Sensing and Control 5
Figure 2. I2C Timing Diagram
SDA
SCL
tLOW
tHDSTA
tHDSTA
tHIGH
tHDDAT tSUSTA tSUSTO
tBUS
tSUDAT
Characteristic
Abbr.
Min.
Typ.
Max.
Unit
SCL clock frequency
FSCL
100
400
kHz
Start condition hold time relative to SCL edge
tHDSTA
0.1
µs
Minimum SCL clock low width1
tLOW
0.6
µs
Minimum SCL clock high width1
tHIGH
0.6
µs
Start condition setup time relative to SCL edge
tSUSTA
0.1
µs
Data hold time on SDA relative to SCL edge
tHDDAT
0
0.5
µs
Data setup time on SDA relative to SCL edge
tSUDAT
0.1
µs
Stop condition setup time on SCL
tSUSTO
0.1
µs
Bus free time between stop and start condition
tBUS
1
µs
Note 1: Combined low and high widths must equal or exceed minimum SCL period.
Figure 3. SPI Timing Diagram
tBUS
tCLKD
SCLK
MISO
SS
tHIGH
tSUSS
HiZHiZ
tHDSS tLOW
tCLKD
Characteristic
Abbr.
Min.
Typ.
Max.
Unit
SCLK clock frequency
fSCL
50
800
kHz
SS drop to first clock edge
tHDSS
2.5
μs
Minimum SCLK clock low width1
tLOW
0.6
μs
Minimum SCLK clock high width1
tHIGH
0.6
μs
Clock edge to data transition
tCLKD
0
0.5
μs
Rise of SS relative to last clock edge
tSUSS
0.1
μs
Bus free time between rise and fall of SS
tBUS
2
μs
Note 1: Combined low and high widths must equal or exceed minimum SCLK period.
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors
6 www.honeywell.com/sensing
Table 7. HIH6130/6131 and HIH6120/6121 Series Maximal Accuracy1 (Performance is specified between 10 %RH and
90 %RH.)
Relative Humidity (%RH)
90
±1
±2
±2
±2
±3
±3
±3
±3
±3
±2
±1
±2
±2
±2
±3
±3
±3
±3
±3
±2
80
±1
±2
±2
±2
±2
±2
±2
±2
±2
±1
±2
±2
±2
±2
±2
±2
±2
±2
±2
±2
70
±2
±3
±3
±3
±2
±2
±2
±2
±2
±2
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
60
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
50
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
40
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
30
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
±2
±3
±3
±3
±3
±3
±3
±3
±3
±2
20
±1
±3
±3
±3
±3
±3
±3
±3
±3
±1
±1
±3
±3
±3
±3
±3
±3
±3
±3
±1
10
±1
±3
±3
±3
±3
±3
±3
±3
±3
±1
0
10
20
30
40
50
Temperature ( C)
Note 1: Maximal accuracy is the mean value between rising and falling RH points.
HIH6130/6131 and HIH6120/6121 Series
Honeywell Sensing and Control 7
Figure 4. HIH6130/6131 Series Typical Application Circuits
I2C
Digital Humidity/Temp.
Sensor
VDD
VCORE
VSS
NC
SCL
SDA
AL_L
AL_H
VSUPPLY = 2.3 Vdc to 5.5 Vdc
GND
GND
12 V
0.1 µF
0.22 µF
2.2
kOhm
8 3
4
5
6
1
2
7
LED
2.2
kOhm
SPI
Digital Humidity/Temp.
Sensor
VDD
VCORE
VSS
NC
SS
SCLK
MISO
AL_L
GND
0.1 µF
0.22 µF
10
kOhm
8 3
4
6
5
1
2
7
LED
VSUPPLY = 2.3 Vdc to 5.5 Vdc
Figure 5. HIH6130/6131 Series Mounting Dimensions, PCB Landing Pattern and Pinout [For reference only: mm/[in].)
Mounting
Landing Pattern
8X 0,61
[0.024]
8X 2,03
[0.08]
4X 4,9
[0.193]
6X 1,27
[0.05]
Pinout for I2C Versions
Pinout for SPI Versions
Pin
ASIC
Pad
Description
Pin
ASIC
Pad
Description
1
VCORE
connect via 0.1 µF to ground
1
VCORE
connect via 0.1 µF to ground
2
VSS
supply ground
2
VSS
supply ground
3
SCL
I2C clock
3
SS
slave select (Input)
4
SDA
I2C data
4
SCLK
serial clock
51
AL_H
alarm output high
5
MISO
master-in-slave-out
61
AL_L
alarm output low
61
AL_L
alarm output low
7
NC
not connected externally
7
NC
not connected externally
8
VDD
supply voltage, connect via 0.22 µF to ground
8
VDD
supply voltage, connect via 0.22 µF to ground
Note 1: Do not connect Pin(s) 5 and/or 6 if the built-in alarm
feature is not desired.
Note 1: Do not connect Pin 6 if the built-in alarm feature is not
desired.
Tape and Reel
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors
8 www.honeywell.com/sensing
Figure 6. HIH6120/6121 Series Mounting Dimensions, PCB Landing Pattern and Pinout [For reference only: mm/[in].)
Digital Humidity/Temp.
Sensor
VDD
VSS
SCL
SDA
VSUPPLY = 2.3 Vdc to 5.5 Vdc
GND
0.22 µF
2.2
kOhm
1 3
42
2.2
kOhm
Figure 7. HIH6120/6121 Series Typical Application Circuits
Mounting
Pin
ASIC Pad
Description
1
VDD
connect via 0.22 µF to ground
2
VSS
supply ground
3
SCL
I2C clock
4
SDA
I2C data
Landing Pattern
1,27
[0.05]
1,05 DIA.
[0.040] 0,65 DIA.
[0.020]
Tape and Reel1
Note 1. For orders of 250 to 1000 units.
HIH6130/6131 and HIH6120/6121 Series
Honeywell Sensing and Control 9
Figure 8. Nomenclature
HIH 6 1 _ _ - _ _ _ - _ _ _ _
Product Type
HIH = Humidity sensor
Supply Voltage
1 = 2.3 Vdc to 5.5 Vdc, calibrated at 3.3 Vdc Output
00 = SPI
21 = I2C, address 0x27
Output Type
6 = Digital
Package
3 = SOIC-8 SMD
2 = SIP 4 PIN
Filter
0 = No filter
1 = Hydrophobic filter
Accuracy
0 = ±4 %RH
Packaging
001 = SOIC-8 SMD: 1000 pieces on tape and reel
SIP 4 Pin: 100 to 249 units on tape and boxed
250 units or more on tape and reel
001S = 5 pieces on tape (sample)
Order Guide
Catalog Listing
Description
HIH6130-000-001
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, SPI, ±5 %RH total
error band, SOIC-8 SMD, no filter, non-condensing, 1000 units on tape and reel
HIH6130-000-001S
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, SPI, ±5 %RH total
error band, SOIC-8 SMD, no filter, non-condensing, five units on tape (sample)
HIH6131-000-001
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, SPI, ±5 %RH total
error band, SOIC-8 SMD, hydrophobic filter, condensation-resistant, 1000 units on tape and reel
HIH6131-000-001S
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, SPI, ±5 %RH total
error band, SOIC-8 SMD, hydrophobic filter, condensation-resistant, five units on tape (sample)
HIH6130-021-001
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, I2C, ±5 %RH total
error band, SOIC-8 SMD, no filter, non-condensing, 1000 units on tape and reel
HIH6130-021-001S
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, I2C, ±5 %RH total
error band, SOIC-8 SMD, no filter, non-condensing, five units on tape (sample)
HIH6131-021-001
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, I2C, ±5 %RH total
error band, SOIC-8 SMD, hydrophobic filter, condensation-resistant, 1000 units on tape and reel
HIH6131-021-001S
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6130/6131 Series, I2C, ±5 %RH total
error band, SOIC-8 SMD, hydrophobic filter, condensation-resistant, five units on tape (sample)
HIH6120-021-0011
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6120/6121 Series, I2C, ±5 %RH total
error band, SIP 4 Pin, no filter, non-condensing, 100 units on tape
HIH6120-021-001S
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6120/6121 Series, I2C, ±5 %RH total
error band, SIP 4 Pin, no filter, non-condensing, five units on tape (sample)
HIH6121-021-0011
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6120/6121 Series, I2C, ±5 %RH total
error band, SIP 4 Pin, hydrophobic filter, condensation-resistant, 100 units on tape
HIH6121-021-001S
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors: HIH6120/6121 Series, I2C, ±5 %RH total
error band, SIP 4 Pin, hydrophobic filter, condensation-resistant, five units on tape (sample)
Note 1: Orders of 250 units or more are packaged on tape and reel.
Honeywell HumidIcon™ Digital Humidity/Temperature Sensors
10 www.honeywell.com/sensing
SENSOR REHYDRATION
NOTICE
SENSOR REHYDRATION
Exposure to elevated temperatures, such as those
experienced during solder reflow, may dry out the sensing
element. It is recommended that the sensor be allowed
time to rehydrate after soldering or other high
temperature/dry exposures.
Exposure to these conditions will not permanently
damage the sensor. It will generally return to its factory-
calibrated value after rehydration.
If rehydration is not performed, the sensor may read a
slight offset that slowly disappears over time as the
sensor becomes exposed to ambient conditions.
Conversely, extended exposure to condensing and high
humidity environments (>90 %RH) may cause a revisable
shift in readings which will generally return to normal after
the sensor has been allowed to dry off.
To rehydrate the sensor, expose it to room temperature under
ambient conditions (>50 %RH) for a minimum of five hours.
ADDITIONAL INFORMATION
The following associated literature is available on the Web:
Product installation instructions
Product application note
Application sheets:
Humidity Sensor Performance Characteristics
Humidity Sensor Theory and Behavior
Humidity Sensor Moisture and Psychrometrics
Humidity Sensor Chemical Resistivity
Thermoset Polymer-based Capacitive Sensors
Technical Notes:
I2C Communication with the Honeywell HumidIcon™
Digital Humidity/Temperature Sensors
SPI Communication with the Honeywell HumidIcon™
Digital Humidity/Temperature Sensors
Using Alarms on the Honeywell HumidIcon™ Digital
Humidity/Temperature Sensors
Entering and Using Command Mode on the Honeywell
HumidIcon™ Digital Humidity/Temperature Sensors
Total Error Band Specification for Honeywell Digital
Humidity/Temperature Sensors
Sensing and Control
Honeywell
1985 Douglas Drive North
Golden Valley, MN 55422
www.honeywell.com/sensing
009059-4-EN
July 2012
© 2012 Honeywell International Inc. All rights reserved.
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installation guide.
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information is provided in the instructions supplied with
each product.
Failure to comply with these instructions could result
in death or serious injury.
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While we provide application assistance personally, through
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office or:
E-mail: info.sc@honeywell.com
Internet: www.honeywell.com/sensing
Phone and Fax:
Asia Pacific +65 6355-2828
+65 6445-3033 Fax
Europe +44 (0) 1698 481481
+44 (0) 1698 481676 Fax
Latin America +1-305-805-8188
+1-305-883-8257 Fax
USA/Canada +1-800-537-6945
+1-815-235-6847
+1-815-235-6545 Fax
Mouser Electronics
Authorized Distributor
Click to View Pricing, Inventory, Delivery & Lifecycle Information:
Honeywell:
HIH6131-021-001S HIH6130-021-001 HIH6130-021-001S HIH6131-021-001 HIH6130-000-001 HIH6130-000-001S
HIH6131-000-001 HIH6131-000-001S HIH6120-021-001 HIH6121-021-001 HIH6121-021-001S HIH6120-021-001S