KXD94 Series
Accelerometers and Inclinometers
Small Package - 5x5x1.2mm DFN
Multiplexed Analog Output
Internal 1KHz Low Pass Filter
Low Noise
Lead-free Solderability
Excellent Temperature Performance
High Shock Survivability
Low Power Consumption
User Definable Bandwidth
Factory Programmable Offset and Sensitivity
Self-test Function
FEATURES
“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
© Kionix 2010 All Rights Reserved
July 27, 2010 Rev. 1.2
Page 1 of 2
These high-performance silicon micromachined linear accelerometers and
inclinometers consist of a sensor element and an ASIC packaged in a
5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from
single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)
processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The KXD94 series is designed to provide a high signal-to-noise ratio with
excellent performance over temperature. These sensors can accept supply
voltages between 2.5 – 5.25V. Sensitivity is factory programmable for
applications requiring from ±5.0g to ±15.0g ranges. Sensor bandwidth is
user-definable.
The sensor element functions on the principle of differential capacitance.
Acceleration causes displacement of a silicon structure resulting in a
change in capacitance. An ASIC, using a standard CMOS manufacturing
process, detects and transforms changes in capacitance into an analog out-
put voltage, which is proportional to acceleration. The sense element de-
sign utilizes common mode cancellation to decrease errors from process
variation, temperature, and environmental stress.
PROPRIETARY TECHNOLOGY
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
MARKETS
APPLICATIONS
\\
Active Suspension
Stability Control
Telematics/GPS
Platform Stabilization
Drill Orientation
Event Detection
Vibration Analysis
Appliance Monitoring
Automotive
Industrial
PERFORMANCE SPECIFICATIONS
PARAMETERS UNITS KXD94-2802 KXD94-7228 CONDITION
Range g ±10 ±13 Factory programmable
0g Offset vs. Temp. mg/°C ±1.0 typical
Sensitivity vs. Temp %/°C ±0.01
Noise Density 100 typical On filter pins
Bandwidth 1 Hz 800 typical -3dB
Non-Linearity % of FS 0.1 typical % of full scale output
Ratiometric Error % ±0.2 (XY) ±0.1 (Z) ±0.5 typical 5.0V ± 5%
Cross-axis Sensitivity % 2.0 typical
Power Supply V 5.0 typical Standard
Current Consumption
mA 1.20 typical 1.10 typical Operating
µA 5 max Standby
ENVIRONMENTAL SPECIFICATIONS
PARAMETERS UNITS KXD94-2802 KXD94-7228 CONDITION
Operating Temperature °C -40 to +85 (Consumer/
Industrial) Powered
-40 to +125
(Automotive)
Storage Temperature °C -55 to 150 Unpowered
Mechanical Shock g 5000 Powered and unpowered,
0.5 msec halversine
ESD V 3000 Human body model
KXD94 Series
Accelerometers and Inclinometers
PERFORMANCE SPECIFICATIONS
The performance parameters below are programmed and tested at 5.0 volts.
NOTE
1 Internal 1 KHz low pass filter. Lower frequencies are user definable with external capacitors.
Hzg/
© Kionix 2010 All Rights Reserved
July 27, 2010 Rev. 1.2
Page 2 of 2
ORDERING GUIDE
Product Axis(es) of
Sensitivity
Range
(g)
Sensitivity
(mV/g) Offset (V) Operating Voltage
(V)
Temperature
(°C) Package
KXD94-2802 XYZ 10 200 2.5 5.0 -40 to +85 5x5x1.2 DFN
KXD94-7044 X 13 150 2.5 5.0 -40 to +125 5x5x1.2 DFN
KXD94-7138 X 5 400 2.5 5.0 -40 to +125 5x5x1.2 DFN
KXD94-7228 XYZ 13 150 2.35 (X) 2.5 (Y, Z) 5.0 -40 to +125 5x5x1.2 DFN
