D6F-P MEMS Flow Sensor A Compact, High-accuracy Flow Sensor with Superior Resistance to Environments. * Anti-dust performance is improved using the Cyclon method. * A full lineup of models with different connector types: bamboo joints, lead terminals for direct mounting on-board, and manifolds. * High accuracy of 5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information MEMS Flow Sensor Flow Port Type Connection Applicable fluid Flow rate range 0 to 0.1 L/min Lead terminals Bamboo joint D6F-P0010A1 Air 0 to 1 L/min Connector Manifold Model D6F-P0001A1 D6F-P0010A2 D6F-P0010AM2 Accessory (Sold separately) Type Model D6F-CABLE2 Cable D6F-CABLE2-L Note: Refer to Accessories for the D6F Series on page 39. Output Voltage Characteristics D6F-P0010A1/-P0010A2/-P0010AM2 3.0 3.0 2.5 2.5 Output voltage (V) Output voltage (V) D6F-P0001A1 2.0 1.5 1.0 0.5 0.0 0 0.02 0.04 0.06 Flow rate (L/min) 0.08 2.0 1.5 1.0 0.5 0.0 0.10 0 0.25 1 Flow rate L/min (normal) 0 Output voltage 0.50 0.90 1.30 1.70 2.10 2.50 Output voltage 0.50 1.60 2.10 2.31 2.50 V 0.10 0.10 0.10 0.10 0.10 0.10 V 0.10 0.10 0.10 0.10 0.10 0.02 0.04 0.06 0.08 0.10 Measurement conditions: Power supply voltage of 5.0 0.1 VDC, ambient temperature of 25 5C, and ambient humidity of 35% to 75%. Flow rate L/min (normal) 0.5 0.75 Flow rate (L/min) 0 0.25 0.50 0.75 1.00 Measurement conditions: Power supply voltage of 5.0 0.1 VDC, ambient temperature of 25 5C, and ambient humidity of 35% to 75%. 25 D6F-P MEMS Flow Sensor Characteristics/Performance Model D6F-P0001A1 Flow Range (See note 1.) 0 to 0.1 L/min Calibration Gas (See note 2.) D6F-P0010A1 D6F-P0010A2 Air Bamboo joint Flow Port Type D6F-P0010AM2 0 to 1 L/min Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm Electrical Connection Lead terminals Power Supply 4.75 to 5.25 VDC Current Consumption 15 mA max. with no load and a Vcc of 5.0 V Three-pin connector Output Voltage 0.5 to 2.5 VDC (Load resistance: 10 k) Accuracy 5% FS (25C characteristic) Repeatability (See note 3.) 1.0% FS Output Voltage (Max.) 3.1 VDC (Load resistance: 10 k) 0.4% FS Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 10 VDC Rated Output Voltage 4 VDC Case PBT Manifold Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure (See note 3.) 50 kPa Pressure Drop (See note 3.) 0.005 kPa 0.19 kPa 0.67 kPa Operating Temperature (See note 4.) -10 to +60C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -40 to +80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 5% FS for 25C characteristic at an ambient temperature of -10 to +60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 8.5 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. 8.0 g Tubing You can measure large flows by mounting the Sensor on a bypass. D6F-P Flow Sensor P1 P2 Resistance to flow Mounting Direction Bamboo joint Sensor 26 Manifold-type Sensor D6F-P MEMS Flow Sensor Connections/Dimensions (Unit: mm) Lead Terminals Label: Gives model and lot numbers. D6F-P0001A1/D6F-P0010A1 Two, 3-dia. through hole 10 23.3 Two, 4.9 dia. 2.6 dia. 11.7 7.2 4.76 Three, 1.3-dia. lands MADE IN JAPAN Three, 0.8-dia. through holes 5.04 Recommended Dimensions for Connector Mounting Holes (Bottom view) 16.2 1.2 1.7 17.2 Label 7.60.2 14 6 6 Two, 1.1 dia. 2.54 D6F 27.2 7.3 13.5 13.5 1.5 Two, R: 1.4 Connector XG8V-0344 (manufactured by OMRON) A 9.8 2.8 dia. 3. GND 7.2 2.54 13.2 1. Vcc 5.08 2. Vout Detailed View of A 4.76 Connectors D6F-P0010A2 Label: Gives model and lot numbers. 10 23.3 11.7 Two, 4.9 dia. 2.6 dia. MADE IN JAPAN D6F 27.2 A 8.5 1.Vcc 7.60.2 Label 2.Vout 16.2 3.GND 1.2 1.7 13.5 1.5 Two, R: 1.4 17.2 Two, 1.1 dia. 14 6 8.5 7.3 Detailed View of A 2.8 dia. 13.2 D6F-P0010AM2 10.1 dia., Depth: 2.40.1 Pin No. 22 18 6.70.1 *1 2 Two, 4-00.05 dia. 8 B 3.5 dia. 1+0.1 0 27.2 140.05 22.1 A 6.4 9.6 2-R6 Two, C0.3 (entire circumference) 6 3.GND 2.Vout 1.Vcc 2.70.1 0.30.1 0.30.1 Detailed View of A Detailed View of B Grooves to stop rotation Connector Details *1. Recommended Installation Dimensions Lot number label O-ring Installation Hole Dimensions Depth: 2.6 to 3.0 6.70.1 Two, 7 +0.5 dia. 0 M3 threaded 140.05 C0.4 (entire circumference) 7 +0.5 0 The recommended O-ring is JIS B 2401, nominal number P4. 1: Vcc 2: Vout 3: GND Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.) Note: Use one of the following connectors from JST Mfg. Co., Ltd. to connect to the D6F. 1) Pressure welding connector Socket: 03SR-3S Wire: AWG#30 Or 2) Crimp type connector Contact: SSH-003T-P0.2 Housing: SHR-03V-S Wire: AWG#32 to #28 Tubes Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 6 mm and an inner diameter of 4 mm are recommended. Soldering Conditions Use a soldering iron for 5 s at 350C with a pressure of 100 gf max. (This applies only to PCB-mounting Sensors.) 27