Optics and Laser Heads for
Laser-Interferometer Positioning Systems
Product Overview
Choose from a large selection of optical components
for system design flexibility
Table of Contents
Design Your System for Peak Performance
Laser Head Specifications
Directing Optics Specifications
Measurement Optics Specifications
Linear Optics
Single Beam Optics
Plane Mirror Optics
Differential Interferometer
Multiaxis Optics
Wavelength Tracker
Accessory Specifications
Receiver Specifications
Optics and Laser Head Configuration Guide
Example Configurations
How to Use This Product Overview
This product overview provides details on the laser heads, receivers, and
optics used by all Agilent Technologies laser interferometer positioning sys-
tems. Together with the electronics information contained in companion data
sheets, this information will enable you to specify your entire laser positioning
system. Select from the following companion data sheets:
• Agilent 5527B Laser Interferometer Positioning System
• High Performance Laser Interferometer Positioning Systems for VMEbus
• Complete, PC-compatible, Closed-loop Laser Positioning
3
4
6
8
8
9
10
12
14
22
23
24
26
28
Measurement
Compensa
Laser Head
Optics
• Directing
• Measurement
Object Under
Control
• Power Amplifier
• Drive Motor
• Servo-Loop
Compensation
Host Computer
Compensa
Laser Head
Optics
• Directing
• Measurement
Object Under
Control
• Power Amplifier
• Drive Motor
• Servo-Loop
Compensation
Host Computer
Ele
Measurement
Compensation
Measurement
Receivers
Environmental
Sensors
tion
Measurement
Receivers
ctronics
Environmental
Sensors
tion
Power
Supply
3
The wide variety of optics and laser
heads from Agilent gives you maxi-
mum design flexibility to achieve your
performance goals.
In addition to a full range of con-
ventional optics, multiaxis optics pro-
vide new possibilities for extremely
accurate positioning system designs.
Several laser heads offer different
sizes and axis velocities to meet your
requirements. Remote receivers with
fiber-optic pickups allow maximum
layout flexibility while removing elec-
tronics heat from the measurement
area for superior repeatability. Optical
wavelength tracking also assists you
in achieving unsurpassed measure-
ment repeatability.
This product overview covers laser
head specifications. Then, the major
part of the product overview is devoted
to the many optics Agilent has devel-
oped for directing the laser beam and
making a wide variety of measure-
ments. Accessories and receivers are
covered next. Finally, an extensive
configuration guide illustrates a num-
ber of optical layouts for specific appli-
cations. These examples are provided
to help you design an optical layout
that meets your measurement needs.
Configuring Your System
All laser-interferometer positioning
systems use a laser head, optics, and
electronics. After investigating the
choices in this product overview and
its companion electronics data sheets,
you can configure your system by:
1. First choosing a backplane based
on the other system electronics
you want to use or the outputs
you need,
2. then choosing a laser head based
on size and velocity requirements,
3. selecting the optics that best match
your application needs, and
4. finally, selecting the environmental
compensation that meets your
accuracy needs.
Design Your System for Peak Performance
4
Four laser heads are available for
different size, velocity, and interface
requirements.
The Agilent 5517 series of laser
heads provides choices for all avail-
able size and velocity requirements
in a consistent interface. The 5517A
is the basic laser head. The 5517B
offers 25% greater axis velocity in
a smaller package. The 5517C offers
still higher velocity, 75% higher than
the 5517A. The 5517D offers the high-
est axis velocity and is the same size
as the 5517B.
Standard beam diameter is 6 mm.
In addition, there are two beam
size options available for the 5517C.
Option 003 provides a 3-mm beam
diameter for use with the Agilent
10719A and 10721A differential inter-
ferometers and 10737L/R compact
three-axis interferometers. Option
009 provides a 9-mm beam diameter
for use with the 10735A and 10736A
three-axis interferometers. The larger
beam allows these interferometers a
larger angular range of measurement.
Finally, the Agilent 5501B laser head
is available to replace the previous
5501A laser head in existing applica-
tions that require the same polariza-
tion, cabling, and electrical power
as the 5501A. The 5501B also offers
improved accuracy, reliability, and
serviceability compared to the previ-
ous 5501A.
All laser heads use a proven long-life
laser tube with a demonstrated Mean
Time Between Failure greater than
50,000 hours of operation, making
them the most reliable lasers of their
type available.
Agilent 5501B and 5517A/B/C/D
Laser Heads
Physical Characteristics
Weight:
5517A: 5.5 kg (12 lb)
5517B/C/D: 3.4 kg (7.5 lb)
5501B: 3.4 kg (7.5 lb)
Warm-Up Time: less than 10 minutes
(5 minutes typical)
Magnetic Field Strength (Non-Operating):
Does not exceed 5.25 milli-Gauss at a dis-
tance of 4.6 m (15 ft) from any point on the
surface of the packaged Laser Head.
Clearance required for cabling:
5517A: 12.0 cm (4.72 in)
beyond back of unit
5517B/C/D: 10.16 cm (4.0 in)
beyond back of unit
5501B: 7.5 cm (3.0 in)
beyond back of unit
Power
Power Requirements:
(5517A)
+15V ±0.3V at 2.5A max
–15V ±0.3V at 0.02A max
(5517B/C/D)
+15V ±0.3V at 2.2A max
–15V ±0.3V at 0.02A max
(5501B)
+15V ±0.3V at 0.79A max
–15V ±0.3V at 0.67A max
Power Dissipation (nominal):
Warm-Up: 35W (5517A/B/C/D)
Operation: 23W (5517A/B/C/D)
Maximum: 21.9W (5501B)
Laser Characteristics
Type: Helium-Neon, Continuous Wave,
Two-Frequency
Minimum Beam Power Output: 180 µW
Maximum Beam Power Output: 1 mW
Std. Beam Diameter: 6 mm (0.25 in) typical
5517C Opt 003:3 mm (0.125 in)
5517C Opt 009:9 mm (0.375 in)
Vacuum Wavelength Accuracy
(3 , lifetime):
±0.1 ppm (±0.02 ppm with factory calibration
to MIL-STD 45662)
Nominal Vacuum Wavelength:
632.991372 nm (5501B, 5517A/B)
632.991354 nm (5517C/D)
Vacuum Wavelength Stability (one hour):
±0.002 ppm typical
Vacuum Wavelength Stability (lifetime):
±0.02 ppm typical
Safety Classification:
Class 2 Laser Product conforming to
U.S. National Center for Devices and
Radiological Health Regulations 21 CFR
1040.10 and 1040.11.
Reference Frequency:
5517A: 1.5–2.0 MHz
5517B: 1.9–2.4 MHz
5517C: 2.4–3.0 MHz
5517D: 3.4–4.0 MHz
5501B: 1.5–2.0 MHz
Laser Head Specifications
5
Note: Dimensions of all drawings in this product overview are given in millimeters,
with corresponding dimensions in inches given in parentheses.
Agilent 5517A
Agilent 5501B, 5517B, 5517C, 5517D
Agilent 5517B/C/D
Rear Panel
Agilent 5501B
Rear Panel
192.0 mm
(7.56)
25.0 mm
(0.98)
83.0 mm
(3.27)
435.0 mm
(17.13)
22.3 mm DIA
(0.88)
118.0 mm
(4.65)
BEAM
55.1 mm
(2.17)
83.7 mm
(3.30)
118.0 mm
(4.65)
49.5 mm
(1.95)
120.0 mm MIN CLEAR
(4.72)
360.0 mm
(14.17)
458.0 mm
(18.03)
479.0 mm
(18.85)
167.5 mm
(6.59)
83.7 mm
(3.30)
M8 X 1.25 THREAD
(3 PLACES)
142.0 mm
(5.59)
13.0 mm
(0.51)
6 mm
(0.24)
DIA
BEAM
128.3
(5.05)
128.3
(5.05)
3.2 (0.13 DIA
L.E.D.
8 PLACES
53.3
(2.30 in)
34.6
(1.36)
17.7
(0.70)
70.1
(2.76)
45.6
(1.80 in)
20.2
(.80 in)
19.3
(0.76)
3.2 (0.13) DIA
L.E.D.
8 PLACES
70.1
(2.76)
34.6
(1.36)
17.7
(0.70)
19.3
(0.76)
78.6
(3.1)
25.4 MAX
(1.00)
DETAIL
3 PLACES
FULL
RADIUS
13.7
(0.54)
7.11
(0.28)
11.43
(0.45) BEAM
79.5 ±1.0
(3.13 ±0.04)
325.2 ±1
(12.80 ±0.04) 6 (0.24)
DIA BEAM
6.55
(0.26)
10.7
(0.42)
208.3
(8.20)
139.6
(5.50)
132.0
(5.20)
CL
358.6
(14.12)
68.0
(2.68)
106.4
(4.19)
128.3
(5.05)
CL
43.4 DIA
(1.71)
101.6
(4.0)
LASER LIGHT
DO NOT STARE INTO BEAM
MAXIMUM OUTPUT 1mw
PULSE SPEC continuous wave
LASER MEDIUM helium neon
CLASS II LASER PRODUCT
CAUTION
6
10700A 33% Beam Splitter
Use: Reflects 1
/3of the total incoming laser
beam, transmits 2/3
Weight: 62 g (2.2 oz)
10701A 50% Beam Splitter
Use: Reflects 1
/2of the total incoming laser
beam, transmits 1
/2
Weight: 62 g (2.2 oz)
10707A Beam Bender
Use: Bends incoming beam at a 90°angle
Weight: 58 g (2.1 oz)
Directing Optics Specifications
19.6 mm
(0.77)
#6-32 UNC (2 PLC’S) THRU CLEARANCE
FOR #4 OR 2.5 mm
0.8 mm (0.03)
OFFSET
19.6 mm
(0.77 TYP)
10.16 mm APERTURE
(0.40 DIA)
#4-40
(0.15 DEEP)
(2 SIDES)
19.6 mm
(0.77)
25.4 mm
(1.0)
25.4 mm
(1.0) C
LC
L
19.6 mm
(0.77)
25.4 mm
(1.0)
25.4 mm
(1.0)
A variety of beam splitting and direct-
ing optics allows maximum flexibility
in optical layouts. Unless otherwise
noted, all optics are designed for beam
diameters of 6 mm or less. These
optics all have housings for standard
mounting techniques.
Beams of 9-mm diameter can be used
with the Agilent 10735A/10736A to
provide greater angular range. For
directing 9-mm beams, the 10725A,
10726A, and 10728A must be used.
These are bare optics that require
user-supplied mounts.
RETURN
ENTRANCE
RETURN
53.3 mm
(2.10)
50.8 mm
(2.00)
21.6 mm
(0.85)
12.7 mm
(0.50)
12.7 mm
(0.50) 12.7 mm
(0.50)
19.1 mm
(0.75)
12.7 mm
(0.50)
19.1 mm
(0.75)
TYP
35.6 mm
(1.40)
EXIT
RETURN
4 HOLES
8/32 UNC
ALL FACES
EXIT
RETURN
7
10567A Dual Beam Beam Splitter
Use: 50% beam splitter which allows both
of the split beams to return through the
splitter parallel to the incoming beam. Use-
ful when it is necessary to minimize the
number of optical ports (for example in a
vacuum chamber), or when both receivers
must be mounted in the same area.
Weight: 317 g (11.3 oz)
10725A 9-mm Laser Beam Splitter
Use: 50% beam splitter; divides the beam
into equal parts, transmits one part straight
through and bends the other part at a 90
degree angle. It is designed for use with
beams of 9-mm diameter and smaller. This
bare optic requires a user-supplied mount.
Weight: 2 g (0.07 oz)
10726A 9-mm Laser Beam Bender
Use: Bends incoming beam at a 90 degree
angle. Like the 10725A, it is designed for
use with beams of 9-mm diameter and
smaller and is a bare optic that requires
a user-supplied mount.
Weight: 10 g (0.35 oz)
10728A 9-mm Laser Beam Plane Mirror
Use: Normal incidence plane mirror. Like
the 10725A, it is designed for use with
beams of 9-mm diameter and smaller
and is a bare optic that requires a user-
supplied mount.
Weight: 21 g (0.74 oz)
2.41± 0.25
019.3 ± 0.13
22
30.48
1
45ϒ
5.59
7.62
1
Minimum clear aperture: central 10.05 x 26.92 mm ellipse
4 x R 4
34
34
38
38
6.35
Minimum clear aperture: central 34 x 34 mm
8
Linear Optics
10702A Linear Interferometer
Use: For general-purpose, single-axis meas-
urements. If the interferometer is the mov-
ing component, then 10702A Opt. 001
Windows MUST be ordered, and the inter-
ferometer cannot be used to bend the
beam.
Weight:
10702A: 232 g (8.2 oz)
10702A Opt. 001: 246 g (8.7 oz)
Measurement Optics Specifications
A variety of optics allows maximum
measurement flexibility. Unless other-
wise noted, all optics are designed
for beam diameters of 6 mm or less.
The Agilent 10702A Linear Interfer-
ometer is the basic interferometer for
linear measurements, while the small
10705A Single-beam Interferometer is
designed for use in confined spaces.
For multiaxis stages, plane mirror
interferometers such as the Agilent
10706B are commonly used (see pages
10 and 11). The 10716A high-resolution
plane-mirror interferometer provides
twice the resolution of the 10706B
for the most precise applications (see
page 13). The 10715A is a plane-mirror
interferometer designed for differen-
tial measurements (see page 12). The
10724A Plane Mirror Reflector may
be used with these plane mirror inter-
ferometers for single-axis measure-
ments (see page 11).
The Agilent 10719A one-axis and
10721A two-axis differential interfer-
ometers are designed to optimize
the accuracy and repeatability of
IC-fabrication equipment by referenc-
ing the position of the wafer stage
directly to the optics column. The
Agilent 10735A and 10736A three-
axis interferometers make three
measurements simultaneously (linear,
yaw, and pitch or roll) for precise
wafer positioning in IC-fabrication
equipment and other precision stage
applications. See pages 14 through
21 for details on these optics.
The Agilent 10717A Wavelength
Tracker monitors changes in the
index of refraction of air to optically
compensate for environmental
changes (see page 22).
BEAM
SPACING
#4-40 SCREWS (2)
12.7 mm
(0.50)
28.5 mm
(1.12 DIA)
32 mm
(1.26 TYP)
38.2 mm
(1.50)
38.2 mm
(1.50)
20.83 mm
APERTURE
(0.82 DIA)
#6-32 UNC (4 PLC'S)
THRU CLEARANCE
FOR #4 OR 2.5 mm
33.3 mm
(1.31)
(4 SIDES)
#4-40 x 0.25 DEEP
62.0 mm
(2.44)
C
L
C
L
9
3 mm
(0.12) 33.3 mm
(1.31)
20.3 mm APERTURE
(0.80 DIA)
37.6 mm
(1.48 DIA) 28.4 mm
(1.12 DIA)
2.5 mm
(0.10)
23.9 mm
(0.94)
2.5 mm
(0.10)
10.2 mm APERTURE
(0.40 DIA)
19.5 mm
(0.77)
BOLT CIRCLE
20.5 mm
(0.81 DIA) 15.2 mm
(0.60)
2.5 mm
(0.10)
14.3 mm
(0.56)
8.9 mm
APERTURE
(0.35)
25.4 mm
(1.00)
25.4 mm
(1.00)
#2-56 SCREWS (2)
19.6 mm
(0.77 TYP)
#6-32 UNC (4 PLC’s) THRU
CLEARANCE FOR #4 OR 2.5 mm
19.5 mm
(0.77)
#2-56
(4 PLACES)
19.5 mm
(0.77)
39.6 mm
(1.56)
15.2 mm DIA
(0.60)
C
L
C
L
8.9 mm
APERTURE
(0.35)
25.4 mm
(1.00)
25.4 mm
(1.00)
#2-56 SCREWS (2)
19.6 mm
(0.77 TYP)
#6-32 UNC (4 PLC’s) THRU
CLEARANCE FOR #4 OR 2.5 mm
19.5 mm
(0.77)
#2-56
(4 PLACES)
19.5 mm
(0.77)
39.6 mm
(1.56)
15.2 mm DIA
(0.60)
C
L
C
L
10703A Reflector
Use: Paired with 10702A (or 10702A Opt. 001)
Linear Interferometer. Cube corner reflector
simplifies alignment. If mass is extremely
critical, this component is available without
housing (10713B). Weight of the bare cube
corner is 11.4 g (0.4 oz).
Weight: 42 g (1.5 oz)
Single Beam Optics
10704A Reflector
Use: Paired with the 10705A Single Beam
Interferometer. Cube corner reflector simpli-
fies alignment. If mass is extremely critical,
this component is available without housing
(10713C). Weight of the bare cube corner
is 1.4 g (0.05 oz).
Weight: 10.5 g (0.4 oz)
10705A Single Beam Interferometer
Use: Low mass/limited space single-axis
measurements such as disk-drive applica-
tions. Can be used to bend the beam, but
cannot be used as the moving component.
Weight: 85.5 g (3 oz)
10
Plane Mirror Optics
10706B High-Stability Plane Mirror
Interferometer
Use: Multiple axis applications such as X-Y
stage. Can be used to bend the beam, but
cannot be used as the moving component.
This thermally stable optic is an exact func-
tional replacement for the 10706A Plane
Mirror Interferometer. The 10706B design
improves measurement stability during tem-
perature changes that affect the optics by
reducing measurement drift to 1
/12 the value
typically achieved by conventional plane-
mirror interferometers such as the 10706A.
Weight: 323 g (11.4 oz)
Thermal Drift Coefficient (Change of indi-
cated distance per °C temperature change):
0.04 µm/°C (1.6 µin/°C) typical. Other spec-
ifications same as 10706A.
Typical Measurement Mirror Alignment
Requirements for 10706A and B (as a
function of distance):
152 mm (6 in): ±6 arc-min from normal
305 mm (12 in): ±3 arc-min from normal
508 mm (20 in): ±1.5 arc-min from normal
Measurement Optics Specifications, continued
11
Interferometer Thermal Drift
This plot shows the measurement drift
during optics temperature changes
for a conventional plane-mirror inter-
ferometer compared with the 10706B
High Stability Plane Mirror Inter-
ferometer, the 10715A Differential
Interferometer, and the 10716A High
Resolution Interferometer. The 10706B
is nearly as stable as the more expen-
sive 10715A and far more stable than
the conventional plane-mirror inter-
ferometer. The 10716A has the same
stability as the 10706B with two times
better resolution. For example, with
±0.5°C temperature control, measure-
ment drift with the 10706B and 10716A
is typically ±0.02 microns (±0.8 µin)
compared with ±0.25 microns (±10 µin)
with a conventional plane-mirror
interferometer.
10724A Plane Mirror Reflector
Use: This reflector may be used with the
10706A and B, 10715A, and 10716A interfer-
ometers for single-axis measurements.
Weight: 50 g (1.8 oz)
Adjustment Range: ±1°(Alignment hard-
ware included)
Reflectance: 98% at normal incidence
Recommended Plane Mirror Specifications
(for 10706A and B, 10715A, and 10716A
reflectors)
Reflectance: 98% at 633 nm at normal
incidence
Flatness: Flatness deviations will appear
as measurement errors when the mirror
is scanned perpendicular to the beam.
Recommended range is /4 (0.16 µm or
6 µin) to /20 (0.03 µm or 1.2 µin) depend-
ent on accuracy requirements.
Optical Surface Quality: 60–40 per Mil
0-13830
+1.75
+1.50
+1.25
+1.00
+.75
+.50
+.25
+0.00
-.25
0 2.4 4.8 7.2 12 14.4 16.8 19.2 21.6 249.6
DRIFT AND TEMPERATURE vs. TIME
TIME (Hrs.)
MEASUREMENT DRIFT (Microns)
TEMPERATURE (ϒC)
27.00
26.50
26.00
25.50
25.00
24.50
24.00
23.50
23.00
INTERFEROMETER
TEMPERATURE
CONVENTIONAL
PLANE-MIRROR
INTERFEROMETER
10715A
10706B & 10716A
INTERFEROMETER TEMPERATURE
MEASUREMENT DRIFT
2X ø 3.556 mm
(0.140) THRU
ø 36.068 mm
(1.420)
ø 32.766 mm
(1.290)
ø 22.860 mm
(0.900) APERTURE
3X 2-56 NC-CLASS 3 THRU
120ϒ APART
28.388 mm
(1.118 DIA)
42.164 mm
(1.660 DIA)
3.810 mm
(0.150)
20.066 mm
(0.790)
12
Differential Interferometer
10715A Differential Interferometer
Use: Performs differential measurements
between the supplied reference mirror and
a measurement plane mirror. Provides the
best long-term stability of any plane mirror
interferometer in plane mirror applications.
Minimizes deadpath. The Agilent 10715A
eliminates thermal drift in measurements
because the entire optical path through the
interferometer is common mode. Alignment
is slightly more complex than the 10706A/B.
For optical layouts requiring the interferom-
eter to turn the beam, the 10715A Opt. 001
must be used.
Weight:
Interferometer: 594 g (1.31 lb)
Reference Mirror: 3.2 g (0.1 oz)
Typical Measurement and Reference
Mirror Alignment Requirements
(as a function of distance):
±2.5 arc-min for 152 mm (6 in)
±1.3 arc-min for 305 mm (12 in)
±0.7 arc-min for 508 mm (20 in)
For complete dimensions see drawing on
next page.
Measurement Optics Specifications, continued
8.1 mm
5.1 mm
EITHER BOTH
REFERENCE OR
MEASUREMENT
BEAMS
2 X R 3.6 mm
2 X R 3.2 mm
6.3 mm
12.7 mm
EITHER BOTH
REFERENCE OR
MEASUREMENT
BEAMS
18.3 mm
5.1 mm
3.4 mm
9.9 mm
22.9 mm
57ϒ 23'
PART NUMBER: 10715-20205
WEIGHT: 3.2 GRAMS
Reference Mirror for Agilent 10715A
13
10716A High Resolution Interferometer
Use: Single and multiple axis high resolu-
tion applications such as precision X-Y
stages. The Agilent 10716A High Resolution
Interferometer improves the system meas-
urement accuracy and repeatability by pro-
viding two times better measurement reso-
lution along with the same thermal stability
as the 10706B.
For optical layouts requiring the interferom-
eter to turn the beam, the 10716A Opt. 001
must be used.
Weight: 502 g (1.11 lb)
Thermal Drift Coefficient (Change of indi-
cated distance per °C temperature change):
0.04 µm/°C (1.6 µin/°C) typical
Typical Measurement Mirror Alignment
Requirements:
Depends on the distance between the
interferometer and plane mirror. Typical
mirror pitch/yaw angles are:
±6 arc-min for 152 mm (6 in)
±3 arc-min for 305 mm (12 in)
±2 arc-min for 508 mm (20 in)
TO RECEIVER
FROM LASER
90.2 mm*
(3.55)
12.7 mm
(0.50) SYM @ CL
38.9 mm
(1.53)
28.4 mm
(1.12)
6-32 UNC
(4 PLC’S)
THRU
CLEARANCE
FOR #4 OR
2.5 mm
32.0 mm
(1.26)
32.0 mm
(1.26)
8.1 mm
(0.32)
85.9 mm
(3.38)
12.7 mm
(0.50)
TO MIRRORS
28.4 mm
(1.12)
14.0 mm
(0.55)
38.1 mm
(1.50)
12.7 mm
(0.50)
23.9 mm
(0.94)
AB
*FOR 10715A OPTION 001 and 10716A Option 001
THIS DIMENSION IS 100.1 mm (3.94)
Agilent 10715A and 10716A
14
Multiaxis Optics
Improve Positioning Accuracy for Sub-0.5-
micron Lithography and Other Applications
Agilent offers three styles of multiaxis
interferometers that make linear and
angular measurements. This gives you
greater control of multiaxis stages and
allows better overall system accuracy.
Each style is available in two models.
These six interferometers provide
linear and angular measurements for
up to five degrees of stage freedom
(X, Y, pitch, roll, and yaw). This gives
you the capability to measure and
position an object with higher preci-
sion than linear measurements alone.
Finer linewidths in ICs and more
accurate parts can result from the
additional angular measurement and
control available with these interfer-
ometers.
The Agilent 10719A and 10721A per-
form one- and two-axis differential
measurements respectively. Differen-
tial measurements provide highly
accurate position information using
an object such as an optical column
as a position reference. This reduces
system errors in those applications.
The Agilent 10737R, 10737L, 10735A,
and 10736A each perform three
measurements, one linear and two
angular. These three measurement
paths have built-in interaxis align-
ment to give high system accuracy.
The 10737R and 10737L use a 3-mm
laser beam for a compact optic pack-
age. The 10735A and 10736A can
use a 9-mm laser beam to provide
the widest angle range available.
Increase system accuracy and reduce costs
•Maximize system accuracy. Multiaxis
optics provide measurement and
control of stage rotations for
improved overlay accuracy.
•Maximize thermal stability. Monolithic
optics and equal glass path lengths
minimize errors due to thermal drift.
•Maximize mechanical stability. Mono-
lithic optics provide tight interaxis
coupling and minimize errors due
to vibration.
•Minimize error due to interaxis mis-
alignment. Optical design provides
guaranteed interaxis parallelism, no
longer dependent on installation.
•Lower installation costs. Referenced
optics, kinematic installation, pre-
aligned fiber-optic receiver mounts,
and no interaxis adjustments make
installation easy.
•Lower manufacturing costs. Multiaxis
optics reduce the number of com-
ponents to install.
•Lower service cost. Fiber-optic
receivers are mounted in a con-
venient location, and Agilent mul-
tiaxis interferometers are easy to
remove or install.
Measurement Optics Specifications, continued
Agilent 10719A and 10721A
Agilent 10735A and 10736A Option 001
15
Applications
• Lithography
• Precision machining
• Advanced metrology
• R & D on multiaxis stage control
• Stage travel characterization
• Stage or tool alignment
Multiaxis measurements allow smaller
linewidths, wider fields, and higher
throughputs
Small linewidths and stage motion
errors due to imperfect ways generally
require state-of-the-art wafer steppers
to control rotational misalignment
about the Z axis (Yaw). This has typi-
cally been done with two discrete
interferometers that require careful
alignment during installation.
Agilent now offers multiaxis interfer-
ometers that make linear and rotational
measurements in a single compact
package, conserving valuable space.
The interferometers were designed
for excellent built-in parallelism, pro-
viding an interaxis alignment superior
to a careful alignment of discrete
interferometers. This helps improve
the grid accuracy needed for smaller
linewidths.
Internal optics are referenced to their
housings, allowing the interferome-
ters to be kinematically located, then
bolted into a precision mount without
adjustment. Built-in parallelism and
referenced optics save the manufac-
ture and service time due to difficult
multiaxis alignments. These features
also help achieve better overlay accu-
racy than typically possible with dis-
crete interferometers.
Pitch and roll measurements enhance
wide field optical lithography
To reduce linewidths, optical lithogra-
phy systems such as i-line and deep
UV are moving toward larger numeri-
cal apertures. The shallower depth of
field resulting from a larger numeri-
cal aperture can require site-by-site
wafer leveling about the X and Y axis
(pitch and roll) to achieve focus over
a wide field. Unfortunately, X-Y align-
ment accuracy suffers because the
Abbé error, neutralized during the
global alignment, changes during
wafer leveling.
Agilent multiaxis interferometers can
measure the pitch and roll of the mul-
tiaxis stage due to leveling and stage
movement errors, making it possible
to calculate and compensate for the
change in Abbé error. The quick cor-
rection saves the time of performing
a site-by-site alignment, thus improv-
ing throughput.
Mirror mapping improves multiaxis stage
performance
The yaw of a multiaxis stage is meas-
ured using a two- or three-axis inter-
ferometer located on either the X or
Y axis. When yaw is measured redun-
dantly (on both the X and Y axes), the
system has the additional capability
of mirror mapping. Mirror mapping
allows you to measure and compensate
the flatness deviations in the stage
mirrors. This improves total system
accuracy.
Multiaxis interferometric measurements of stage angles enhance the
accuracy and throughput of fine-line, wide-field lithography systems.
Y
A
W
R
O
L
L
PITCH
16
The 10719A and 10721A allow column-
referenced measurements
The Agilent 10719A and 10721A
One-axis and Two-axis Differential
Interferometers measure the linear
distance between two objects, instead
of the distance between the interfer-
ometer and an object. This offers a
high degree of immunity to unwanted
interferometer displacement such
as the thermal expansion between the
optical column and the interferome-
ter. Errors common to the reference
and measurement path are removed
because both are equally affected. This
improves overlay accuracy in some
lithography systems. The Abbé offset
error is also decreased by using a
small 3-mm beam.
Both interferometers are modular
and compact, making it easier
to build customized measurement
systems with one to six axes.
The 10719A makes either a differen-
tial linear or angular measurement.
The linear measurement gauges the
displacement between two objects
such as an optical column and a
stage. Alternatively, the 10719A
measures either pitch or roll.
The 10721A simultaneously performs
two differential measurements, linear
and angular (yaw) displacement. Both
measurements reference an external
mirror mounted to an object such as
a column.
Column referencing enhances semicon-
ductor inspection
Mask and IC inspection typically
require the stage to be moved linearly
by small increments with respect to
an inspection instrument such as a
microscope. This is required in order
to compare a desired image with the
newly created image. The 10719A was
designed to make linear measurements
referencing an object such as an
inspection tool.
X-ray systems benefit from column
referencing
X-rays provide finer linewidth lithog-
raphy because the wavelengths are
shorter than optical wavelengths.
Slight yaw misalignment reduces the
capability even more in these systems
than optical lithography systems,
because of the finer linewidths. A
method to achieve the required accu-
racy is to reference the multiaxis stage
movement to the mask holder. The
10719A and 10721A have been opti-
mized to perform these measurements.
Additional features that increase accuracy
and decrease cost
• Monolithic optics
• Guaranteed interaxis parallelism
• Prealigned fiber-optic remote
receiver mounting
• Referenced optics
• Kinematic Installation
Improve overlay accuracy with the Agilent
10719A/10721A by referencing the image-
making column.
Measurement Optics Specifications, continued
Column
Stage
10719A
or
10721A
Measurement
Mirror
Reference
Mirror
Wafer Ref. Beam
Meas. Beam
17
10719A One-axis Differential
Interferometer
Use: Single- and multiple-axis applications
where the stage must be linearly positioned
with respect to an external object such as
a column or inspection tool. Alternatively,
an angle is measured when both reference
and measurement beams measure to the
same mirror.
Specifications
Weight: 300 g (11 oz)
Axes: Linear, pitch, or roll
Available Beam Size: 3 mm
Thermal Drift Coefficient (Average):
150 nm (5.9 µin) /°C
Resolution*
Linear: 0.6 nm
Pitch/roll: 0.03 µrad (0.007 arc-sec)
Angular Range** (at 300 mm):
Pitch/roll: ±0.44 mrad (±1.5 arc-min)
Parallelism (Input to output beams):
<0.1 mrad (20 arc-sec)
10721A Two-axis Differential
Interferometer
Use: Multiaxis applications where the stage
must be positioned linearly and angularly
with respect to an external object such as
a column or inspection tool.
Specifications
Weight: 300 g (11 oz)
Axes: Linear and yaw
Available Beam Size: 3 mm
Thermal Drift Coefficient (Average):
150 nm (5.9 µin) /°C
Resolution*
Linear: 0.6 nm
Yaw: 0.05 µrad (0.01 arc-sec)
Angular Range** (at 300 mm):
Yaw: ±0.44 mrad (±1.5 arc-min)
Parallelism (Input to output beams):
<0.1 mrad (20 arc-sec)
10719A/10721A Installation
Requirements/Recommendations
Installation and Alignment: Kinematic
installation requires a referenced surface.
See “Laser and Optics Users Manual”
for complete installation procedure.
Interaxis Alignment: All internal optics
are referenced to mounting surface and
prealigned.
Receivers: Agilent 10780F fiber optic
remote receivers.
Receiver Alignment: Self aligning when
mounted to interferometer.
Measurement and Reference (Plane)
Mirror Recommendations: Same as
10706A/B; see page 11.
NOTE: Flatness deviations will appear as
measurement errors when the mirror is
translated across the beam. The mirror
mount should not bend the mirror. If accu-
racy requirements demand it, mirror flat-
ness may be calibrated (scanned and stored
in the system controller) to be used as a
correction factor.
10721A
28.98 mm
(1.141) 19.05 mm
(0.750)
9.12 mm
(0.359)
Output
Aperture #1 Output
Aperture #2
Input
Aperture
for 3 mm
input beam
Fiber Optic
sensor head
mounting pins
Four mounting holes
on top and bottom
surfaces. (6-32)
57.15 mm
(2.250)
9.12 mm
(0.359)
7.16 mm
(0.282)
3.18 mm
(0.125)
9.53 mm
(0.375)
12.70 mm
(0.500)
19.86 mm
(0.782)
7.16 mm
(0.282)
31.75 mm
(1.250)
Ref
Meas
31.75 mm
(1.250)
31.75 mm
(1.250)
31.75 mm
(1.250)
Four beams to
reference mirror
Four beams to
measurement mirror
12.70 mm (0.500)
spacing between
linear measurements
19.05 mm
(0.750)
60.33 mm
(2.375)
38.10 mm
(1.500)
Two beams to
reference mirror
Two beams to
measurement mirror
10719A/10721A
10719A
Input
Aperture
for 3 mm
input beam
31.75 mm
(1.250)
12.70 mm
(0.500)
12.70 mm
(0.500)
Output
Aperture
(or Input)
Rear View Front View
10719A 10721A
NOTE:
Dimensions given
in millimeters
and (inches)
*Resolution is dependent on the electronics used.
These specifications are for the 10897B electronics.
** Angular range is the maximum measurement mirror
angle due to all components (i.e., yaw and pitch
or yaw and roll) between the measurement mirror
and the interferometer for a 6-axis system. Angular
range is dependent on the measurement distance.
Angular range is reduced when the reference mirror
is misaligned.
18
10737L and 10737R Compact Three-Axis
Interferometers
Improve positioning accuracy of
precision equipment with lower-
cost, multiaxis laser measurements.
Multiaxis measurements improve
accuracy by providing greater control
of multiaxis stages. Each linear and
angular degree of freedom can be
measured and controlled to compen-
sate for mechanical imperfections
in the stage’s motion. The new Agilent
10737L and 10737R Compact Three-
axis Interferometers provide this
capability in a more compact, lower-
cost package than the 10735A and
10736A Three-axis Interferometers.
This allows higher accuracy from
multiaxis measurements to be achieved
in smaller, lower-cost equipment
than was previously possible.
Each 10737L and 10737R makes three
linear measurements. Two angular
measurements can be calculated from
this data. Two of these interferome-
ters used together provide redundant
yaw measurements, which allow mir-
ror mapping. Mirror mapping improves
accuracy by compensating for mirror
flatness deviations.
The 10737L and 10737R also reduce
installation time and cost. All three
axes are aligned simultaneously in
a process similar to alignment of the
10706B High Stability Plane Mirror
Interferometer. Both interferometers
include built-in remote pickups for
10780F Option 001 Remote Receivers,
which simplifies installation and align-
ment. A simple snap connection for
the fiber optic cable quickly connects
the receiver to the remote pickups.
The 10737L and 10737R differ only
in measurement beam direction; the
10737L turns the beam to the left and
the 10737R turns the beam to the right.
Both interferometers use the 3-mm
beam diameter from the Agilent 5517C
Option 003 Laser Head.
Improve positioning accuracy with more
compact, lower-cost multiaxis measure-
ments with the 10737L and 10737R compact
three-axis interferometers.
Measurement Optics Specifications, continued
Specifications
10737L & 10737R Specifications Comparison to 10735A & 10736A
Linear Resolution 5 nm* 5 nm*
0.6 nm** 0.6 nm**
Yaw Resolution 0.35 µrad (0.07 arc-sec)* 0.2 µrad (0.04 arc-sec)*
0.04 µrad (0.01 arc-sec)** 0.025 µrad (0.005 arc-sec)**
Pitch & Roll Resolution 0.7 µrad (0.14 arc-sec)* 0.24 µrad (0.05 arc-sec)*
0.1 µrad (0.02 arc-sec)** 0.03 µrad (0.006 arc-sec)**
Yaw Range††† ±0.44 mrad (±1.5 arc-min) ±1 mrad (±3.4 arc-min)†
±1.5 mrad (±5.1 arc-min)††
Pitch & Roll Range††† ±0.44 mrad (±1.5 arc-min) ±1 mrad (±3.4 arc-min)†
*Using 5527A/B, 10885A, 10895A electronics.
** Using 108978 electronics.
†Using 6-mm beam diameter.
†† Using 9-mm beam diameter.
††† At a distance of 300 mm, maximum measurement mirror angle due to all components
(i.e., yaw and pitch or yaw and roll) between the measurement mirror and the interferometer.
A six-axis system is assumed.
19
Linear Range: 10 m (33 ft) total for all
three axes
Operating Temperature: 0–40°C (17–23°C
to ensure system non-linearity specification)
Thermal Drift Coefficient: 0.1 µm/°C
(40 µin/°C) typical average for each axis
Weight: 490 g (18 oz)
Materials Used:
Housing: stainless steel and aluminum
Optics: optical grade glass
Adhesives: vacuum grade
Receiver inserts: urethane foam, acetal,
15% glass fill polyester
Installation:
Uses 3-mm beam available from 5517C
Option 003. Requires three 10780F Option 001
Remote Receivers. Compatible with the
10710A Mount.
Measurement (Plane) Mirror
Recommendations
Reflectance: 98% at 633 nm at normal
incidence.
Flatness: Flatness deviations will appear
as measurement errors when the mirror
is scanned perpendicular to the beam.
Recommended range /4 (0.16 µm or 6 µin)
to /20 (0.03 µm or 1.2 µin) dependent
on accuracy requirements.
Optical Surface Quality:
60–40 per Mil 0-13830.
Input
Apeture.
22.63 mm
(0.891)
38.2 mm
(1.50)
17.3 mm
(0.68)
64.1mm
(2.53)
3.0 mm
(0.12)
119 mm
(4.69)
76.11 mm
(3.00)
7.19 mm
(0.283)
7.19 mm
(0.283)
7.19 mm
(0.283)
7.19 mm
(0.283)
32 mm
(1.26)
32 mm
(1.26)
60.1 mm
(2.37)
17.3 mm
(0.68)
TOP VIEW
From Laser
To Plane Mirror
3x Fiber-Optic Connectors
for 10780F Option 001 Receivers
4x drilled for clearance of 4-40 screw
and tapped 6-32 UNC-2B X .250 deep
4X this side and 4x far side
Dimensions
The Agilent 10737L. The dimensions of the 10737R are identical.
20
Additional features that increase accuracy
and decrease cost
• Wide angle range
• Monolithic optics
• Guaranteed interaxis parallelism
• Prealigned fiber-optic remote
receiver mounting
• Referenced optics
• Kinematic Installation
The 10735A and 10736A are three-axis
optical benches in single packages
The 10735A and 10736A Three-axis
Interferometers put the functionality
of an optical bench with multiple
beam benders, beam splitters, and
three interferometers in a single high-
performance package. This eliminates
expensive, time-consuming interaxis
setup and alignment. The interferom-
eters split an incoming laser beam
into three beams to measure linear
distance, pitch, and yaw; or linear
distance, roll, and yaw. Custom Agilent
factory fixtures and measuring equip-
ment align and lock the parallel
beams to guaranteed specifications
for greater stability and accuracy
than is practical with discrete compo-
nents. This gives you greater overall
system performance.
Multiaxis installation simplified
All axes are referenced to the inter-
ferometer’s mounting surface for easy
kinematic installation onto a user-
supplied reference surface. This
makes installation as easy as sliding
the interferometer into place and
bolting it down. The interferometers
differ in the beam pattern they pro-
duce on the measurement mirror,
providing flexibility in system design.
Three-axis interferometers provide the
highest angular performance available
The 10735A and 10736A provide the
highest resolution, widest angular
range, and most accurately aligned
three-axis interferometers available
off-the-shelf. The high angular resolu-
tion gives you greater control over
your multiaxis stage, enabling superior
grid accuracy in lithography applica-
tions. The wide angular measurement
range, with a 9-mm laser beam, allows
both global and site-by-site stage cor-
rection under interferometric control.
This helps to achieve high positioning
accuracy without degrading throughput.
Measurement Optics Specifications, continued
The Agilent 10735A and 10736A replace three interferometers and multiple beam benders
and beam splatters with a rigid, high-performance package.
21
10735A/10736A Three-axis
Interferometers
Use: Multiaxis applications where linear
and angular control of the stage is required.
The Agilent 10735A and 10736A provide
three linear measurements. Two angular
measurements can be calculated from this
data. When an interferometer is placed
along the X axis, yaw (q Z), and pitch (q Y)
can be derived in addition to linear (X) dis-
placement. When it is placed on the Y axis,
yaw (q Z), and roll (q X) can be derived in
addition to linear (Y) displacement. Redundant
yaw is useful when mapping measurement
mirrors, which provides improved accuracy.
The 10735A and 10736A differ in their
measurement beam patterns (see drawing).
Agilent 10736A Option 001 provides a beam
bender for fixed compensation axis.
Specifications
Weight: 5.5 kg (12 lbs)
Axes: 3 linear axes which provide linear (X),
pitch, and yaw; or linear (Y), roll, and yaw.
Available Beam Diam.: 3/6/9 mm
Thermal Drift Coefficient (Average):
Axes 1 & 2: 40 nm (1.6 µin) /°C
Axis 3: 100 nm (3.9 µin) /°C
Resolution*
Linear: 0.6 nm
Yaw: 0.024 µrad (0.005 arc-sec)
Pitch/roll: 0.03 µrad (0.006 arc-sec)
Angular Range (at 300 mm displacement)**
Pitch/roll: ±1 mrad (±3.4 arc-min)
Yaw (for 6-mm beams): ±1 mrad
(±3.4 arc-min)
Yaw (for 9-mm beams): ±1.5 mrad
(±5.1 arc-min)
Parallelism (Measurement beams):
Axes 1 & 2: <40 µrad (8 arc-sec)
Axes 1 & 3: <50 µrad (11 arc-sec)
10735A/10736A Installation
Recommendations
Installation and Alignment: Kinematic
installation procedure requires three refer-
enced pins mounted onto a referenced sur-
face. See “Laser and Optics Users Manual”
for complete installation procedure.
Interaxis Alignment: All internal optics
are referenced to the mounting surface
and prealigned.
Receivers: Agilent 10780F Fiber Optic
Remote Receivers.
Receiver Alignment: Self aligning when
mounted to interferometer.
Measurement (Plane) Mirror
Recommendations: Same as 10706A/B;
see page 11.
*Resolution is dependent on the electronics used.
These specifications are for the Agilent 10897B
electronics.
** Angular range is the maximum angle between
the measurement mirror and the interferometer
for a 6-axis system. Angular range is dependent
on the measurement distance. Both angles (pitch
and yaw or roll and yaw) can be at the angular
limit concurrently.
3 Axis Interferometer
10735A
3 Axis Interferometer
10736A
31.25 mm
(1.23)
42.5 mm
(1.67)
Axis 1 Axis 2 Axis 1 Axis 2
Axis 3
10735A 10736A
10735A
10736A
3X 13.11 mm
(0.52)
21.0 mm
(0.83)
26.0 mm
(1.02)
Measurement Beam Patterns
105.0 mm
(4.13)
179.0 mm
(7.05)
203.5 mm
(8.01)
88.5 mm
(3.48)
5.5 mm
(0.22)
11.0 mm
(0.43)
4X Mounting Holes
51.3 mm
(2.02)
60.0 mm
(2.36)
Input Aperture
Axis 3
NOTE:
Dimensions given
in millimeters and (inches)
22
Wavelength Tracker
10717A Wavelength Tracker
Use: Tracks changes in the air’s index
of refraction to optically compensate for
environmental changes.
Weight: 1.7 kg (3.7 lb)
Kinematic Mounting:
Angular Adjustment Range (at nominal
position):
Pitch: ±1°
Yaw: ±1°
Translation Adjustment Range (at nominal
position):
Vertical: ±3 mm (0.12 in)
Horizontal: ±3 mm (0.12 in)
Mounting Hardware Quantity:
3,10-32 UNF2A Screws
Minimum Mounting Clearance Required:
3 mm (0.12 in) around perimeter.
Calibration: Not Required.
Interface: Measurement receiver, cable,
and appropriate electronics required.
Measurement Optics Specifications, continued
AB
LASER MOUNTING SURFACE
INPUT BEAM FROM LASER
OUTPUT BEAM TO RECEIVER
15.88 mm
(0.625)
177.80 ± 0.25 mm
(7.000 ± .010)
MOUNTING HOLES
3 X 10-32 UNF 2A X 13 (0.5) DP
12.70 m
(0.500)
32 mm
(1.25)
67 mm
(2.63)
CENTERLINE OF
LASER BEAM
8.13 mm
(0.320) MAX
260.35 mm
(10.25)
30.10 ± 0.13 mm
(1.185 ± .005) 39.62 mm
(1.560)
79.25 mm
(3.120)
30.10 ± 0.13 mm
(1.185 ± .005)
23
Optics mounts can make alignment
faster and easier, and are available
for most optics. Detailed specifica-
tions are below.
Optics Mounts
10710A Adjustable Mount
Use: Mount for Agilent 10700A, 10701A,
10705A, and 10707A
Weight: 88.2 g (3.2 oz)
Angular Adjustment Range:
Yaw: ±8°
Tilt: ±8°
10711A Adjustable Mount
Use: Mount for Agilent 10702A, 10706A/B,
10715A, and 10716A
Weight: 141.1 g (5 oz)
Angular Adjustment:
Yaw: ±5°
Tilt: ±5 °
10722A Plane Mirror Converter
Use: With an additional 10703A, the 10722A
can be used to convert a 10702A Linear
Interferometer into a 10706A Plane Mirror
Interferometer. With an additional 10723A,
the 10722A can be used to convert a 10702A
into a 10706B.
Weight: 35.5 g (1.3 oz)
10723A High Stability Adapter
Use: If you already use the 10706A, you
can easily convert it to a 10706B with the
10723A High Stability Adapter. With the
10723A you can obtain the much higher
thermal stability of the 10706B at nominal
cost and effort.
Weight: 49 g (1.7 oz)
Accessory Specifications
#4-40
THRU
4 PLC’S
CLEARANCE FOR
#4 SCREW (3 mm)
41.66 mm
(1.64)
47.0 mm
(1.85)
19.6 mm
(0.77)
CLEARANCE FOR
#4-40 CAP SCREW
OPPOSITE SIDE
19.56 mm
(0.77)
12.7 mm DIA
THRU
(0.50)
YAW
27.9 mm
(1.10)
12.7 mm
(0.50)
25.4 mm
(1.00)
BEAM CENTER LINE
10700A
10701A
10705A
10707A
TILT
32.0 mm
(1.26)
59.7 mm
(2.35)
64.77 mm
(2.55)
32.0 mm
(1.26)
CLEARANCE FOR
#4-40 CAP SCREW
2 PLC’S
38.1 mm
(1.50)
CLEARANCE FOR
#4 SCREW
(2.5 mm SCREW)
33.27 mm
(1.31)
25.4 mm DIA
THRU
(1.00)
#4-40
THRU
4 PLC’S
YAW
TILT
31.75 mm
(1.25) 12.7 mm
(0.50)
25.4 mm
(1.00)
12.7 mm
(0.50)
BEAM SPACING
10702A
10706A/B
10715A
10716A
10710A
10711A
24
Two different measurement receivers
are available to give you design flexi-
bility and maximum system perform-
ance. One receiver is required for each
measurement axis (including wave-
length tracker). The Agilent 10780C
affords the highest sensitivity and low-
est cost. The 10780F provides slightly
less sensitivity, but can improve sys-
tem performance by enabling you to
mount heat-dissipating receiver elec-
tronics away from the measurement
area. Hence, higher measurement sta-
bility and the resulting accuracy and
repeatability are obtained. The fiber-
optic cable used to attach the remote
sensor to the receiver electronics
allows design flexibility and easier
access to the receiver gain adjustment.
Receiver Specifications
Agilent 10780C Receiver
Photodetector
Insulating
Mounting Pads
Beam Diameter
6 mm
(0.24)
107.8 mm
(4.25)
114.8 mm
(4.52)
76.0 mm
(3.0)
38.1 mm
(1.50)
11.4 mm
(0.45)
15.2 mm
(0.60)
9.9 mm
(0.39)
7.6 mm
(0.30)
12.7 mm
(0.50)
2.3 mm
(0.09 TYP)
Clearance hole
for M3 (6-32) Screw
(2 PLC)
Use Only Nylon Mounting Screw
2360-0369 to Avoid Ground Loop
Beam
Spacing
LED
1.8 mm (0.070)
Gain
Adjustment
54.7 mm
(2.15)
24.0 mm (0.945)
25
10780C Receiver and 10780F Remote
Receiver Specifications
Typical Power Requirements:
+15 volts at 136 mA
Maximum Sensitivity:
1.5 µW (10780C)
2.2 µW (10780F with 2-m cable)
(10780F becomes 5.0 µW with a 10-m
fiber cable.)
Heat Dissipation:
0.0 W for remote sensor
2.0 W typical for receiver
Output Signal:
Differential square wave at Doppler-shifted
split frequency (100 kHz to 7.2 MHz).
Fiber-optic Cable Length (10780F):
2 m standard
10 m maximum recommended
Alignment Tolerances:
Roll: ±3 degrees
Pitch: ±1 degree
Yaw: ±1 degree
(10780F is self aligning when mounted
to the 10715A, 10716A, 10717A, 10719A,
10721A, 10735A, and 10736A.)
Weight:
136 g (4.8 oz) for 10780C
126 g (4.5 oz) for 10780F
26 g (0.9 oz) for remote sensor with
2-m cable
Agilent 10780F Remote Receiver
114.8 mm
(4.52)
7.6 mm
(0.30)
76 mm
(3.0)
R35 mm Minimum
(1.4) Bend Radius
43.1 mm
(1.70)
22.4 mm
(0.88)
15.5 mm
(0.61)
3.5 mm
(0.14)
19.1 mm
(0.75)
23.8 mm
(0.94)
107.8 mm
(4.25)
19.1 mm
(0.75)
38.1 mm
(1.50)
6.0 mm
(0.24) 7.6 mm
(0.30) 9.9 mm
(0.39)
7.6 mm
(0.30)
Clearance hole
for M3 (6-32) Screw
(2 PLC)
Clearance hole
for M3 (6-32) Screw
(2 PLC)
Beam
Diameter
Beam
Spacing
Photodetector
12.7
(0.50)
1.8 mm (0.070)
24.0 mm
(0.945)
54.7 mm
(2.15)
LED
26
Use this configuration guide to
design your Agilent laser interferom-
eter positioning system. Generally
you will first refer to the appropriate
electronics data sheet and choose
the electronics accordingly. Then
you select your laser head based on
size and axis velocity requirements.
Next, sketch your optical configura-
tion. From this layout, determine
your optics needs.
Two additional years of return-
to-Agilent service are available at
purchase for all laser heads and elec-
tronics as Option W30. Contact your
local Agilent sales representative
for details.
0ptics and Laser Head Configuration Guide
Component Needs Comments
Laser Head One required per system
5517A Laser Head, lowest velocity, largest size
5517B Laser Head, 25% more velocity, small size
5517C Laser Head, 75% more velocity, small size
Opt. 003 3-mm beam diameter for use with 10719A and 10721A
Opt. 009 9-mm beam diameter
5517D Laser Head, highest velocity, small size
5501B Laser Head, lowest velocity, small size, interface same as 5501A
Factory Calibration to MIL-STD 45662 is available at extra cost, and may be specified in the order.
Directing Optics Order as required to manipulate beam path to your configuration
10700A 33% Beam Splitter
10701A 50% Beam Splitter
10707A Beam Bender
10567A Dual Beam Splitter—useful in vacuum
10725A 9-mm Laser Beam Splitter
10726A 9-mm Laser Beam Bender
10728A 9-mm Laser Beam Plane Mirror
Measurement Optics 1 interferometer-plus-reflector pair required per axis
10702A Linear Interferometer
Opt. 001 Windows—required if interferometer is the moving component
10703A Reflector—paired with 10702A
10704A Reflector—paired with 10705A
10705A Single Beam Interferometer
10706B High Stability Plane Mirror Interferometer
10713B One-inch bare cube corner
10713C 0.5-inch bare cube corner
10713D 0.25-inch bare cube corner
10715A Differential Interferometer
Opt. 001 Turned Configuration
10716A High Resolution Interferometer
Opt. 001 Turned Configuration
10724A Plane Mirror Reflector
10719A One-axis Differential Interferometer, requires 3-mm beam
10721A Two-axis Differential Interferometer, requires 3-mm beam
10735A Three-axis Interferometer
10736A Three-axis Interferometer
Opt. 001 Adds beam bender
10737L Compact Three-axis Interferometer (Left)
10737R Compact Three-axis Interferometer (Right)
27
*When used with the Agilent 5527B Laser Positioning Transducer System, 10885A PC Axis Board, or 10895A Laser Axis Board for VMEbus.
System resolution is improved by a factor of 2 when using the Agilent 10889B PC Servo Axis Card. The 10897B improves system resolution by a factor of 8.
Specifications throughout this document describe warranted performance. Supplemental characteristics (indicated by
TYPICAL or AVERAGE) are intended to provide nonwarranted performance information useful in general application.
Measurement Optics Summary
10702A 10705A 10706B 10715A 10716A
Application General Low-mass, Plane High Accuracy High Resolution
Purpose Limited Space Mirror Plane Mirror Plane Mirror
Optics Resolution /2 (316.5 nm) /2 (316.5 nm) /4 (158.25 nm) /4 (158.25 nm) /8 (79 nm)
System Resolution*/64 (10 nm) /64 (10 nm) /128 (5 nm) /128 (5 nm) /256 (2.5 nm)
Beam Separation 12.7 mm N/A 12.7 mm 12.7 mm 12.7 mm
(1
/2in) single beam (1
/2in) (1
/2in) (1
/2in)
Reflector 10703A 10704A 10724A 10724A 10724A
Reflector Weight 42 g 10.5 g 50 g 50g 50g
(1.5 oz) (0.4 oz) (1.8 oz) (1.8 oz) (1.8 oz)
Mount Used 10711A 10710A 10711A 10711A 10711A
10717A 10719A 10721A 10735A 10736A
Application Wavelength One-axis Two-axis Three-axis Three-axis
of Light Differential Differential Measurements Measurements
Compensation Measurements Measurements (distance, pitch, yaw) (distance, pitch, yaw)
(Plane Mirror) (Plane Mirror) (Plane Mirror) (Plane Mirror)
Optics Resolution
Linear /4 (158.25 nm) /4 (158.25 nm) /4 (158.25 nm) /4 (158.25 nm) /4 (158.25 nm)
System Resolution*
Linear /128 (5 nm) /128 (5 nm) /128 (5 nm) /128 (5 nm) /128 (5 nm)
Pitch 0.26 µrad 0.4 µrad 0.24 µrad 0.24 µrad
(0.054 arc-sec) (0.08 arc-sec) (0.05 arc-sec) (0.05 arc-sec)
Yaw N/A 0.2 µrad 0.2 µrad
(0.04 arc-sec) (0.04 arc-sec)
Beam Separation N/A see drawing see drawing see drawing see drawing
Reflector Integral Custom Custom Custom Custom
Reflector Weight N/A Custom Custom Custom Custom
Mount Used Integral Custom Custom Custom Custom
28
Example 1—Single Axis System
for Servo-Track Writing
1- 5517B/C Laser Head
1- 10705A Single Beam
Interferometer
1- 10704A Reflector (or use bare
corner cube)
1- 10780C/F Receiver
1- 10710A Optics Mount
Example 2—Multiaxis System for
a Coordinate Measuring Machine
1- 5517B Laser Head
3- 10702A Linear Interferometer
3- 10703A Rttroreflector
2- 10700A 33% Beamsplitter
1- 10701A 50% Beamsplitter
3- 10707A Beam Bender
1- 10717A Wavelength Tracker
4- 10780C/F Receiver
6- 10710A Adjustable Mount
3- 10711A Adjustable Mount
Example Configurations
5517A/B
10705A
10780C/F
10704A
10703A
10703A
10702A
10780C/F
10702A
10707A
10707A
10701A
10780C/F
10780C/F
10717A
10703A
10707A
10700A
10700A
10780C/F
10702A
10707A
5517B
Z
X
Y
29
Example 3—Multiaxis System for
a Precision X-Y Stage
1- 5517C Laser Head
3- 10701A 50% Beam Splitter
3- 10706B High-Stability Plane Mirror
Interferometer
1- 10707A Beam Bender
1- 10717A Wavelength Tracker
4- 10780C/F Remote Receiver
4- 10710A Optics Mount
3- 10711A Optics Mount
10706B
X-axis
10780C/F
10717A
10701A
10780C/F
10707A
5517C
10701A
10780C/F
Y-yaw
10701A
Y-axis
10780C/F
10706B
10706B
Yaw
Multiaxis System for a Precision X-Y Stage as Used in IC Fabrication
30
Example 4—Three-axis X-Y Stage
Laser Positioning System with
Column Referencing
1- 5517C Opt. 003 3-mm Laser Head
1- 10701A 50% Beam Splitter
1- 10707A Beam Splitter
1- 10719A One-axis Differential
Interferometer
1- 10721A Two-axis Differential
Interferometer
3- 10780F Remote Receiver
3- 10710A Adjustable Mount
Example 5—Five-axis X-Y Stage
Laser Positioning System
1- 5517C Opt. 009 9-mm Laser Head
1- 10725A 9-mm Laser Beam Splitter
2- 10726A 9-mm Laser Beam Bender
2- 10736A Three-axis Interferometer
6- 10780F Remote Receiver
Example Configurations, continued
5517C Opt. 003
10707A
To 10780F
Remote
Receiver
Multiaxis
Stage
10719A
10701A
10707A
To 10780F
Remote
Receivers
Column
10721A
5517C Opt. 009
10736A
To Fiber-optic
Receivers
Multiaxis
Stage
10725A
To Fiber-optic
Receivers
10726A
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