MPXV4006
Rev 3, 1/2009
Freescale Semiconductor
© Freescale Semiconductor, Inc., 2006-2009. All rights reserved.
Pressure
+Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
The MPXV4006 series piezoresistive transducers are state-of-the-art
monolithic silicon pressure sensors designed for the applian c e, consumer,
health care and industrial market. The analog output can be read directly into
the A/D input of Freescale microcontrollers. This transducer combines
advanced micromachining techniques, thin-film metallization, and bi polar
processing to provide an accurate, high level analog output signal that is
proportional to the applied pressure. The axial port has been modified to
accommodate industrial grade tubing.
Features
2.5% Maximum Error over +10°C to +60°C with Auto Zero
5% Maximum Error over +10°C to +60°C without Auto Zero
Durable Thermoplastic (PPS) Package
Available in Surface Mount (SMT) or Through-Hole (DIP) Configurations
Available with Standard Fluorosilicone Gel or Media Resistant Gel
ORDERING INFORMATION
Device Name Package
Options Case
No.
# of Ports Pressure Type Option Device
Marking
None Single Dual Gauge Differential Absolute Surface
Mount Through-
Hole
Small Outline Package (Media Resistant Gel) (MPVZ4006 Series)
MPVZ4006GW6U Rail 1735 MZ4006GW
MPVZ4006GW7U Rail 1560 MZ4006GW
MPVZ4006G6U Rail 482 MPVZ4006G
MPVZ4006G6T1 Tape and
Reel 482 MPVZ4006G
MPVZ4006G7U Rail 482B MPVZ4006G
Small Outline Package (MPXV4006 Series)
MPXV4006GC6U Rail 482A MPXV4006G
MPXV4006GC6T1 Tape and
Reel 482A MPXV4006G
MPXV4006GC7U Rail 482C MPXV4006G
MPXV4006GP Tray 1369 MPXV4006GP
MPXV4006DP Tray 1351 MPXV4006DP
MPXV4006
0 to 6 kPa (0 to 0.87 psi)
0.2 to 4.8 V Output
Integrated
Pressure Sensor
Series
Application Examples
Washing Machine W ater Level
Measurement (Reference AN1950)
Ideally Suited for Microprocessor or
Microcontroller-Based Systems
Appliance Liquid Level an d Pressure
Measurement
Respiratory Equ i pment
MPXV4006
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2Freescale Semiconductor
Pressure
SMALL OUTLINE PACKAGE SURFACE MOUNT
SMALL OUTLINE PACKAGE THROUGH-HOLE
MPVZ4006GW6U
CASE 1735-01 MPVZ4006G6U/T1
CASE 482-01
J
MPVZ4006G7U
CASE 482B-03
MPVZ4006GW7U
CASE 1560-02
MPXV4006GC6U/C6T1
CASE 482A-01
MPXV4006GC7U
CASE 482C-03
MPXV4006DP
CASE 1351-01 MPXV4006GP
CASE 1369-01
MPXV4006
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Freescale Semiconductor 3
Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic Symbol Min Typ Max Unit
Pressure Range POP 0—6.0
612 kPa
mm H2O
Supply Voltage(1)
1. Device is ratiometric within this specified excitation range.
VS4.75 5.0 5.25 Vdc
Supply Current IS 10 mAdc
Full Scale Span(2)
2. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
VFSS —4.6— V
Offset(3)(5)
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
Voff 0.152 0.265 0.378 V
Sensitivity V/P 766
7.511 —mV/kPa
mV/mm H2O
Accuracy(4)(5) (10 to 60°C)
4. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure, at 25°C.
Offset Stability: Output deviation, after 1000 temperature cycles, -30 to 100°C, and 1.5 million pressure cycles, with
minimum rated pressure applied.
TcSpan: Output deviation over the temperature range of 10° to 60°C, relative to 25°C.
TcOffset: Output deviation with minimum pressure applied, over the temperature range of 10° to 60°C, relative to 25°C.
5. Auto Zero at Factory Installation: Due to the sensitivity of the MPXV4006, external mechanical stresses and mounting position can affect the
zero pressure output reading. To obtain the 2.46% FSS accuracy, the device output must be “autozeroed'' after installation. Autozeroing is
defined as storing the zero pressure output reading and subtracting this from the device's output during normal operations. The specified
accuracy assumes a maximum temperature change of ±5°C between autozero and measurement.
±2.46
±5.0
%VFSS with
auto zero
%VFSS without
auto zero
MPXV4006
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4Freescale Semiconductor
Pressure
Maximum Ratings
Figure 1. Fully Integ rated Pressure Sensor Schematic
Table 2. Maximum Ratings(1)
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Parametrics Symbol Value Units
Maximum Pressure (P1 > P2) Pmax 24 kPa
Storage Temperature Tstg -30° to +100°°C
Operating Temperature TA+10° to +60°°C
Sensing
Element
GND
Vout
VS
Pins 1, 5, 6, 7, and 8 are NO CONNECTS
Thin Film
Temperature
Compensation
and
Gain Stage #1
Gain Stage #2
and
Ground
Reference
Shift Circuitry
for small outline package device
2
4
3
MPXV4006
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Freescale Semiconductor 5
Pressure
On-Chip Temperature Compensation and Calibration
The performance over temperature is achieved by
integrating the shear-stress strain gauge, temperature
compensation, calibration and signal condi tioning circuitry
onto a single mo no l i thic chip.
Figure 2 illustrates the Differential or Gauge configuration
in the basic chip carrier (Case 482). A gel die coat isolates the
die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPXV4006/MPVZ4006 series sensor operating
characteristics are based on use of dry air as pressure media.
Media, other than dry air, may have adverse effects on sensor
performance and long-term reliability. Internal reliability and
qualification test for dry air, and other media, are available
from the factory . Contact the factory for information regarding
media tolerance in your application.
Figure 3 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D input
of a microprocessor or microcontroller . Proper decoupling of
the power supply is recommended.
Figure 4 and Figure 5 shows the sensor output signal
relative to pressure input. Typical, minimum and maximum
output curves are shown for operation over a temperature
range of 10°C to 60°C using the decoupling circuit shown in
Figure 3. The output will saturate outside of the specified
pressure range.
Figure 2. Cross Sectional Diagram SOP
(not to scale)
Figure 3. Recommended Power Supply Decoupling
and Output Filtering Recommendations
(For additional output filterin g, please refer to
Application Note AN1646.)
Figure 4. Output versus Pressure Differential
at ±5.0% VFSS (without auto zero, Note 5 in
Operating Charac teristics)
Figure 5. Output versu s Pressure Differential
at ±2.46% VFSS (with auto zero, Note 5 in
Operating Characteristics)
Fluorosilicone
Gel Die Coat
Wire
Bond
Differential Sensing
Element
Thermoplastic
Case
Stainless
Steel Cap
Lead
Frame
P1
P2 Die Bond
Die
1.0 μF
IPS
470 pF
OUTPUT
Vs
+5 V
0.01 μFGND
Vout
Differential Pressure (kPa)
4.0
3.0
2.0
1.0
002.0
4.5
4.0 6.0
5.0
3.5
2.5
1.5
0.5
VS = 5.0 Vdc
TEMP = 10 to 60°C
Transfer Function (kPa):
Vout = VS*[(0.1533*P) + 0.053] ± 5.0% VFSS
Differential Pressure (kPa)
Output (V)
4.0
3.0
2.0
1.0
002.0
4.5
4.0 6.0
MAX
MIN
5.0
3.5
2.5
1.5
0.5
VS = 5.0 Vdc
TEMP = 10 to 60°C
TYPICAL
Output (V)
Transfer Function (kPa):
Vout = VS*[(0.1533*P ) + 0.053] ± 2.46% VFSS
MAX
MIN
TYPICAL
MPXV4006
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6Freescale Semiconductor
Pressure PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing a gel die coat which
isolates the die from the environment. The pressure sensor is
designed to operate with positive differential pressure
applied, P1 > P2.
The Pressure (P1) side may be identified by using the
tab l e below:
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS
Surface mount board layout is a critical portion of the total
design. The footprint for the surface mount packages must be
the correct size to ensure proper solder connection interface
between the board and the package. With the correct
footprint, the packages will self align when subjected to a
solder reflow process. It is always recommende d to design
boards with a solder mask layer to avoid bridging and
shorting between solder pads.
Figure 6. SOP Footprint (Case 482)
Table 3. Pressure (P1)/Vacuum (P2) Side Identification Table
Part Number Case Type Pressure (P1) Side Identifier
MPVZ4006GW6U 1735-01 Vertical Port Attached
MPVZ4006GW7U 1560-02 Vertical Port Attached
MPVZ4006G6U/T1 482-01 Stainless Steel Cap
MPVZ4006G7U 482B-03 Stainless Steel Cap
MPXV4006GC6U/T1 482A Vertical Port Attached
MPXV4006GC7U 482C-03 Vertical Port Attached
MPXV4006GP 1369-01 Side with Port Attached
MPXV4006DP 1351-01 Side with Part Marking
0.660
16.76
0.060 TYP 8X
1.52
0.100 TYP 8X
2.54
0.100 TYP
2.54
0.300
7.62
inch
mm
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Pressure
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ISSUE B
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PACKAGE DIMENSIONS
S
D8 PL
G
4
5
8
1
S
B
M
0.25 (0.010) A S
T
-A-
-B-
N
C
M
J
K
PIN 1 IDENTIFIER
H
SEATING
PLANE
-T-
DIM MIN MAX MIN MAX
MILLIMETERSINCHES
A10.540.4250.415 10.79
B10.540.4250.415 10.79
C5.380.2300.212 5.84
D0.960.0420.038 1.07
G0.100 BSC 2.54 BSC
H0.002 0.010 0.05 0.25
J0.009 0.011 0.23 0.28
K0.061 0.071 1.55 1.80
M
N0.405 0.415 10.29 10.54
S0.709 0.725 18.01 18.41
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
MILLIMETERSINCHES
0.100 BSC 2.54 BSC
DIM
A
B
C
D
G
J
K
M
N
S
MIN
0.415
0.415
0.210
0.026
0.009
0.100
0.405
0.540
MAX
0.425
0.425
0.220
0.034
0.011
0.120
15˚
0.415
0.560
MIN
10.54
10.54
5.33
0.66
0.23
2.54
10.29
13.72
MAX
10.79
10.79
5.59
0.864
0.28
3.05
15˚
10.54
14.22
PIN 1 IDENTIFIER
K
SEATING
PLANE
-T-
DETAIL X
S
G
4
5
8
1
-A-
-B-
C
M
J
N
D8 PL
S
B
M
0.25 (0.010) A S
T
DETAIL X
NOTES:
1.
2.
3.
4.
5.
6.
DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
CONTROLLING DIMENSION: INCH.
DIMENSION A AND B DO NOT INCLUDE
MOLD PROTRUSION.
MAXIMUM MOLD PROTRUSION 0.15 (0.006).
ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
CASE 482-01
ISSUE O
SMALL OUTLINE PACKAGE
CASE 482B-03
ISSUE B
SMALL OUTLINE PACKAGE
MPXV4006
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12 Freescale Semiconductor
Pressure PACKAGE DIMENSIONS
DIM MIN MAX MIN MAX
MILLIMETERSINCHES
A10.540.4250.415 10.79
B10.540.4250.415 10.79
C12.700.5200.500 13.21
D0.960.0420.038 1.07
G0.100 BSC 2.54 BSC
H0.002 0.010 0.05 0.25
J0.009 0.011 0.23 0.28
K0.061 0.071 1.55 1.80
M0 7 0 7
N0.444 0.448 11.28 11.38
S0.709 0.725 18.01 18.41
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5
_
TYPICAL DRAFT.
____
S
D
G
8 PL
4
5
8
1
S
B
M
0.25 (0.010) A S
T
–A–
–B–
C
M
J
K
PIN 1 IDENTIFIER
H
SEATING
PLANE
–T–
N
V
W
V0.245 0.255 6.22 6.48
W0.115 0.125 2.92 3.17
CASE 482A-01
ISSUE A
SMALL OUTLINE PACKAGE
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PACKAGE DIMENSIONS
CASE 1560-02
ISSUE C
SMALL OUTLINE PACKAGE
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14 Freescale Semiconductor
Pressure PACKAGE DIMENSIONS
CASE 1560-02
ISSUE C
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PACKAGE DIMENSIONS
CASE 1560-02
ISSUE C
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CASE 1735-01
ISSUE A
SMALL OUTLINE PACKAGE
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PACKAGE DIMENSIONS
CASE 1735-01
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CASE 1735-01
ISSUE A
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Pressure
PACKAGE DIMENSIONS
DIM MIN MAX MIN MAX
MILLIMETERSINCHES
A10.540.4250.415 10.79
B10.540.4250.415 10.79
C12.700.5200.500 13.21
D0.660.0340.026 0.864
G0.100 BSC 2.54 BSC
J0.009 0.011 0.23 0.28
K0.100 0.120 2.54 3.05
M0 15 0 15
N0.444 0.448 11.28 11.38
S0.540 0.560 13.72 14.22
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5
_
TYPICAL DRAFT.
6. DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
____
PIN 1
K
SEATING
PLANE
–T–
S
G
4
5
8
1
–A–
–B–
C
N
V
W
M
J
V0.245 0.255 6.22 6.48
W0.115 0.125 2.92 3.17
IDENTIFIER
D8 PL
S
B
M
0.25 (0.010) A S
T
DETAIL X
DETAIL X
CASE 482C-03
ISSUE A
SMALL OUTLINE PACKAGE
MPXV4006
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20 Freescale Semiconductor
Pressure PACKAGE DIMENSIONS
NOTES:
1.
2.
3.
4.
CONTROLLING DIMENSION: INCH.
INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M, 1994.
DIMENSIONS "D" AND "E1" DO NOT INCLUDE
MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR
PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152)
PER SIDE.
DIMENSION "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR
PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM.
N
A
C
0.004 (0.1)
DETAIL G
SEATING
PLANE
8X
P
D
E
e/2
e
A
M
0.004 (0.1) BC
E1
A
B
A0.006 (0.15) B
C
8Xb
2 PLACES 4 TIPS
1
4
8
5
F
MIN MAX MIN MAX
MILLIMETERSINCHES
0.370 0.390 9.39 9.91
0.002 0.010 0.05 0.25
0.038 0.042 0.96 1.07
0.465 0.485 11.81 12.32
0.680 0.700 17.27 17.78
0.465 0.485 11.81 12.32
0.270 0.290 6.86 7.37
0.160 0.180 4.06 4.57
0.009 0.011 0.23 0.28
0.110 0.130 2.79 3.30
0.100 BSC 2.54 BSC
0.240 0.260 6.10 6.60
0.115 0.135 2.92 3.43
0.040 0.060 1.02 1.52
DIM
A
A1
b
D
E
E1
e
M
N
P
T
F
K
L
θ
K
M
T
GAGE
PLANE
DETAIL G
LA1
θ
.014 (0.35)
STYLE 1:
PIN 1. GND
2. +Vout
3. Vs
4. -Vout
5. N/C
6. N/C
7. N/C
8. N/C
STYLE 2:
PIN 1. N/C
2. Vs
3. GND
4. Vout
5. N/C
6. N/C
7. N/C
8. N/C
CASE 1351-01
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PACKAGE DIMENSIONS
NOTES:
1.
2.
3.
4.
CONTROLLING DIMENSION: INCH.
INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M, 1994.
DIMENSIONS "D" AND "E1" DO NOT INCLUDE
MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR
PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152)
PER SIDE.
DIMENSION "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR
PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM.
N
A
C
0.004 (0.1)
DETAIL G
SEATING
PLANE
8X
P
T
D
E
e/2
e
A
M
0.004 (0.1) BC
E1
A
B
A0.008 (0.20) B
C
8Xb
2 PLACES 4 TIPS
1
4
8
5
F
DIM MIN MAX MIN MAX
MILLIMETERSINCHES
A0.300 0.330 7.11 7.62
A1 0.002 0.010 0.05 0.25
b0.038 0.042 0.96 1.07
D0.465 0.485 11.81 12.32
E
E1 0.465 0.485 11.81 12.32
e
M0.270 0.290 6.86 7.36
N0.080 0.090 2.03 2.28
P0.009 0.011 0.23 0.28
T0.115 0.125 2.92 3.17
0.100 BSC 2.54 BSC
F0.245 0.255 6.22 6.47
K0.120 0.130 3.05 3.30
L0.061 0.071 1.55 1.80
θ
0.717 BSC 18.21 BSC
K
M
GAGE
PLANE
DETAIL G
LA1
θ
.014 (0.35)
CASE 1369-01
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MPXV4006
Rev. 3
1/2009
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