D6F-A5 MEMS Flow Sensor High-accuracy Sensing with a Compact Body for Flow Rates Up to 50 L/min. * Accurately detects a mass flow rate of 10 to 50 L/min. * A compact size of 30 x 78 x 30 mm (H x W x D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-10A5-000 Manifold Air Flow rate range 0 to 10 L/min D6F-10A5-000 0 to 20 L/min D6F-20A5-000 0 to 50 L/min D6F-50A5-000 Accessory (Sold separately) Type Model 6.0 5.0 5.0 4.0 3.0 2.0 1.0 0.0 0.0 2.0 Model Cable D6F-CABLE1 D6F-20A5-000 6.0 Output voltage (V) Applicable fluid Output voltage (V) Flow Port Type 4.0 6.0 Flow rate (L/min) 8.0 10.0 40.0 50.0 4.0 3.0 2.0 1.0 0.0 0.0 4.0 8.0 12.0 Flow rate (L/min) 16.0 20.0 D6F-50A5-000 Note: Refer to Accessories for the D6F Series on page 39. 6.0 Connections D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 Pin No. Connector 1: Vcc 2: Vout 3: GND 53398-03** (Made by Molex Japan) Use the following connectors for connections to the D6F: Housing 51021-0300 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Wires AWG28 to AWG26 1: Vcc 2: Vout 3: GND Output voltage (V) 5.0 4.0 3.0 2.0 1.0 0.0 0.0 10.0 20.0 30.0 Flow rate (L/min) D6F-10A5-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 2.0 4.0 6.0 8.0 10.0 1.75 0.12 2.60 0.12 3.45 0.12 4.25 0.12 5.00 0.12 4.0 8.0 12.0 16.0 20.0 1.93 0.12 2.87 0.12 3.70 0.12 4.41 0.12 5.00 0.12 10 20 30 40 50 2.45 0.12 3.51 0.12 4.20 0.12 4.66 0.12 5.00 0.12 D6F-20A5-000 Flow rate L/min (normal) Output voltage V 0 1.00 0.12 D6F-50A5-000 Flow rate L/min (normal) Enlarged View Output voltage V 0 1.00 0.12 Measurement conditions: Power supply voltage of 12 0.1 VDC, ambient temperature of 25 5C, and ambient humidity of 35% to 75%. 14 D6F-A5 MEMS Flow Sensor Characteristics/Performance Model D6F-10A5-000 Flow Range (See note 1.) D6F-20A5-000 0 to 10 L/min 0 to 20 L/min Calibration Gas (See note 2.) Air Flow Port Type Manifold Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k) Accuracy 3% FS (25C characteristic) Repeatability (See note 3.) 0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k) Output Voltage (Min.) 0 VDC (Load resistance: 10 k) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS/aluminum alloy Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 500 kPa Pressure Drop (See note 3.) 0.8 kPa Operating Temperature (See note 4.) -10 to 60C 2.9 kPa Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) -30 to 80C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics 3% FS for 25C characteristic at an ambient temperature of -10 to 60C Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC) D6F-50A5-000 0 to 50 L/min 17.2 kPa Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 103 g Note: 1. Note: 2. Note: 3. Note: 4. Volumetric flow rate at 0C, 101.3 kPa. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Reference (typical) With no condensation or icing. Dimensions (Unit: mm) MEMS Flow Sensors D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 Mounting Hole Dimensions Lot number label Two, 1.40.1 Four, 3.2-dia. through holes Four, M3 holes (3.7) 780.5 660.1 660.05 (6) (30.05) Two, 5 dia. 6 140.05 300.5 300.5 15