14
D6F-A5
MEMS Flow Sensor
High-accuracy Sensing with a Compact
Body for Flow Rates Up to 50 L/min.
•Accurately detects a mass flow rate of 10 to 50 L/min.
•A compact size of 30 × 78 × 30 mm (H × W × D).
Ordering Information
MEMS Flow Sensor
Accessory (Sold separately)
Note: Refer to Accessories for the D6F Series on page 39.
Connections
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Output Voltage Characteristics
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Flow Port Type Applicable fluid Flow rate range Model
Manifold Air
0 to 10 L/min D6F-10A5-000
0 to 20 L/min D6F-20A5-000
0 to 50 L/min D6F-50A5-000
Type Model
Cable D6F-CABLE1
Enlarged View
3: GND
2: Vout
1: Vcc
Pin No. 1: Vcc
2: Vout
3: GND
Connector 53398-03** (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing 51021-0300 (Made by Molex Japan)
Terminals 50079 (Made by Molex Japan)
Wires AWG28 to AWG26
Flow rate
L/min (normal) 02.0 4.0 6.0 8.0 10.0
Output voltage
V
1.00
±0.12
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
Flow rate
L/min (normal) 04.0 8.0 12.0 16.0 20.0
Output voltage
V
1.00
±0.12
1.93
±0.12
2.87
±0.12
3.70
±0.12
4.41
±0.12
5.00
±0.12
Flow rate
L/min (normal) 010 20 30 40 50
Output voltage
V
1.00
±0.12
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
6.0
5.0
4.0
3.0
2.0
1.0
2.00.0 8.0 10.06.04.0
0.0
Output voltage (V)
Flow rate (L/min)
4.00.0 16.0 20.012.08.0
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Output voltage (V)
Flow rate (L/min)
10.00.0 40.0 50.030.020.0
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Output voltage (V)
Flow rate (L/min)
D6F-10A5-000 D6F-20A5-000
D6F-50A5-000
15
D6F-A5 MEMS Flow Sensor
Characteristics/Performance
Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Note: 4. With no condensation or icing.
Dimensions (Unit: mm)
MEMS Flow Sensors
Model D6F-10A5-000 D6F-20A5-000 D6F-50A5-000
Flow Range (See note 1.) 0 to 10 L/min 0 to 20 L/min 0 to 50 L/min
Calibration Gas (See note 2.) Air
Flow Port Type Manifold
Electrical Connection Three-pin connector
Power Supply 10.8 to 26.4 VDC
Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 k)
Accuracy ±3% FS (25°C characteristic)
Repeatability (See note 3.) ±0.3% FS
Output Voltage (Max.) 5.7 VDC (Load resistance: 10 k)
Output Voltage (Min.) 0 VDC (Load resistance: 10 k)
Rated Power Supply Voltage 26.4 VDC
Rated Output Voltage 6 VDC
Case PPS/aluminum alloy
Degree of Protection IEC IP40 (Excluding tubing sections.)
Withstand Pressure 500 kPa
Pressure Drop (See note 3.) 0.8 kPa 2.9 kPa 17.2 kPa
Operating Temperature (See note 4.) 10 to 60°C
Operating Humidity (See note 4.) 35% to 85%
Storage Temperature (See note 4.) 30 to 80°C
Storage Humidity (See note 4.) 35% to 85%
Temperature Characteristics ±3% FS for 25°C characteristic at an ambient temperature of 10 to 60°C
Insulation Resistance Between Sensor outer cover and lead terminals: 20 M min. (at 500 VDC)
Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight 103 g
(30.05)
30
±0.5
66
±0.1
66
±0.05
14
±0.05
Four, M3 holes
Two, 1.4
±0.1
Four, 3.2-dia. through holes Lot number label
Two, 5 dia.
30
±0.5
78
±0.5
(6)
(3.7)
6
Mounting Hole
Dimensions
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000