FEATURES
• Fast response time (1 ms) allows the customer’s application
to respond quickly to a change in airflow, important in
critical medical (e.g., anesthesia) and industrial (e.g., fume
hood) applications.
• High stability reduces errors due to thermal effects and
null shift, providing accurate readings over time and often
eliminating the need for system calibration after PCB mount
and periodically over time.
• High sensitivity at very low flows provides a fast response
time at the onset or cessation of flow.
• High 12-bit resolution increases the ability to sense small
airflow changes, allowing customers to more precisely
control their application.
• Wide airflow range: The industry’s broadest airflow range
measures mass flow with standard flow ranges of 0 to10,
0 to 15, 0 to 20, 0 to 50, 0 to 100, 0 to 200 and 0 SLPM to
300 SLPM, or custom flow ranges, increasing the options to
integrate the sensor into the application.
• Choice of port styles: Manifold mount, 22 mm OD tapered
male fitting, and G 3/8 female threaded fitting provide
flexibility to choose the pneumatic connection that is best
for the customer’s application.
• Linear output provides a more intuitive sensor signal than
the raw output of basic airflow sensors, which can help
reduce production costs, design, and implementation time.
• Wide supply voltage range (3 Vdc to 10 Vdc) provides a
flexible regulated power circuit which allows the designer the
flexibility to choose the supply voltage that works best in the
system.
• ASIC-based I2C digital output simplifies integration
to microprocessors or microcontrollers, reducing PCB
complexity and component count.
• RoHS-compliant materials Meet Directive 2002/95/EC.
POTENTIAL APPLICATIONS
• Medical: Anesthesia delivery machines, ventilators,
ventricular assist devices (heart pumps), spirometers,
laparoscopy
• Industrial: Analytic instrumentation (spectrometry,
chromatrography), air-to-fuel ratio, fuel cells, fume hoods,
gas leak detection, process control gas monitoring, vacuum
pump monitoring
PORTFOLIO
The Honeywell Zephyr Digital Airflow Sensors join an
extensive line of airflow sensors for potential use in medical,
industrial, and consumer applications.
Sensing and Internet of Things
DESCRIPTION
Honeywell Zephyr™ HAF Series sensors provide a digital
interface for reading airflow over specified full-scale flow and
compensated temperature ranges. The thermally isolated
heater and temperature sensing elements help these sensors
provide a fast response to air or gas flow. Zephyr sensors are
designed to measure mass flow of air and other non-corrosive
gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20
SLPM, 50 SLPM, 100 SLPM, 200 SLPM and 300 SLPM,
with custom flow ranges available. The sensors are fully
calibrated and temperature compensated with an onboard
Application Specific Integrated Circuit (ASIC). The HAF Series
>10 SLPM is compensated over the calibrated temperature
range of 0°C to 50°C [32°F to 122°F]. The state-of-the-art
ASIC-based compensation provides digital (I2C) outputs with
a response time of 1 ms. These sensors operate on the heat
transfer principle to measure mass airflow. They consist of
a microbridge Microelectronic and Microelectromechanical
System (MEMS) with temperature-sensitive resistors
deposited with thin films of platinum and silicon nitride.
The MEMS sensing die is located in a precise and carefully
designed airflow channel to provide repeatable response to
flow. Zephyr sensors provide the customer with enhanced
reliability, high accuracy, repeatable measurements and the
ability to customize sensor options to meet many specific
application needs. The combination of rugged housings with
a stable substrate makes these products extremely robust.
They are designed and manufactured according to ISO 9001
standards.
VALUE TO CUSTOMERS
• Precise measurement: The industry’s smallest Total Error
Band, fast response time, and high accuracy provide precise
measurement and high performance in the customer’s
application.
• Saves time: Configurable and customizable with a choice of
port styles simplifies design and reduces production time.
• Cost-effective: Reduces printed circuit board (PCB) size and
overall design and production costs.
Datasheet
Honeywell ZephyrTM Digital Airflow Sensors
HAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,
50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
008268
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