Honeywell ZephyrTM
Digital Airflow Sensors
HAF Series–High Accuracy
±50 SCCM to ±750 SCCM
Datasheet
2sensing.honeywell.com
What makes our sensors better?
Fast response time
Wide range of airflows
Customizable flow ranges and configurable package styles
Linear output
High stability
Low pressure drop
Honeywell ZephyrTM Digital Airflow Sensors
HAF Series - High Accuracy
Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and
compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors
provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are
available at ±50, ±100, ±200, ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated
and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).
The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a
temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C)
outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge
Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films
of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully-designed airflow channel to
provide repeatable response to flow.
Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability
to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable
substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.
TIGHT TOTAL ERROR BAND • fAsT REspONsE TIME • WIDE RANGE Of AIRfLOWs
3
sensing.honeywell.com
TOTAL ERROR BAND (TEB) AS LOW AS 0.25%FSS*
Allows for precise airflow measurement, often ideal for demanding applications with
high accuracy requirements.
FAST RESPONSE TIME*
Allows a customer’s application to respond quickly to airflow change, important in
critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications.
WIDE RANGE OF AIRFLOWS*
Zephyr measures mass flow at standard flow ranges of ±50, ±100 ±200, ±400
or ±750 SCCM, or custom flow ranges, increasing the options for integrating the
sensor into the application.
CUSTOMIZABLE FLOW RANGES AND CONFIGURABLE PACKAGE
STYLES*
Meet specific end-user needs.
FULL CALIBRATION AND TEMPERATURE COMPENSATION
Typically allow customer to remove additional components associated with signal
conditioning from the PCB, reducing PCB size as well as costs often associated
with those components (e.g., acquisition, inventory, assembly).
*Competitive Differentiator
Features
and Benefits
Figure 1. Total Error Band vs. Accuracy
Other airflow sensor manufacturers only report on accuracy, while Honeywell reports Total Error Band.
+
+
+
+
+
Linearity
Flow Hysteresis
Repeatability
All Possible Errors
+
+
Offset
Full Scale Span
Temperature Offset
Temperature Span
Thermal Hysteresis
Total
Error Band
Accuracy
=
=
4sensing.honeywell.com
LINEAR OUTPUT*
Provides more intuitive sensor signal than the raw output of basic airflow sensors,
which can help reduce production costs, design, and implementation time.
LOW PRESSURE DROP*
Typically improves patient comfort in medical applications, and reduces noise and
system wear on other components such as motors and pumps.
HIGH 12-BIT RESOLUTION
Increases ability to sense small airflow changes, allowing customers to more precisely
control their application.
LOW 3.3 VDC OPERATING VOLTAGE OPTION AND LOW POWER
CONSUMPTION
Allow for use in battery-driven and other portable applications.
ASIC-BASED I2C DIGITAL OUTPUT COMPATIBILITY
Eases integration to microprocessors or microcontrollers, reducing PCB complexity
and component count.
INSENSITIVITY TO ALTITUDE
Eliminates customer-implemented altitude adjustments in the system, easing
integration and reducing production costs by not having to purchase additional
sensors for altitude adjustments.
SMALL SIZE
Occupies less space on PCB, allowing easier fit and potentially reducing production
costs; PCB size may also be reduced for easier fit into space-constrained
applications.
ROHS-COMPLIANT MATERIALS
Meet Directive 2002/95/EC.
Features
and Benefits
*Competitive Differentiator
5
sensing.honeywell.com
MEDICAL
ANESTHESIA DELIVERY MACHINES
VENTRICULAR ASSIST DEVICES (HEART PUMPS)
NEBULIZERS
OXYGEN CONCENTRATORS
PATIENT MONITORING SYSTEMS (RESPIRATORY MONITORING)
SLEEP APNEA MACHINES
SPIROMETERS
VENTILATORS
LAPAROSCOPY
INDUSTRIAL
AIR-TO-FUEL R ATIO
FUEL CELLS
GAS LEAK DETECTION
VAV SYSTEM ON HVAC SYSTEMS
GAS METERS
HVAC FILTERS
Potential Applications
6sensing.honeywell.com
Honeywell ZephyrTM Digital Airflow Sensors
HAF SeriesHigh Accuracy
CAUTION
IMPROPER USE
Do not use these products to sense liquid flow.
Failure to comply with these instructions may result in
product damage.
Table 1. Absolute Maximum Ratings1
Characteristic Parameter
Supply voltage -0.3 Vdc to 6.0 Vdc
Voltage on I/O output pin -0.3 Vdc to Vsupply
Storage temperature range -40 °C to 125 °C [-40 °F to 257 °F]
Maximum flow change 5.0 SLPM/s
Maximum common mode pressure 25 psi at 25 °C [77 °F]
Maximum flow 10 SLPM
1Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not
guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings.
CAUTION
PRODUCT DAMAGE
Do not disassemble these products.
Failure to comply with these instructions may result in
product damage.
Table 2. Operating Specifications
Characteristic Parameter Notes
Supply voltage
3.3 Vdc
5.0 Vdc
3.3 Vdc ±10%
5.0 Vdc ±10%
Power:
3.3 Vdc
5.0 Vdc
40 mW max.
65 mW max.
1
Compensated temperature range 0 °C to 50 °C [32 °F to 122 °F] 2
Operating temperature range -20 °C to 70 °C [-4 °F to 158 °F]
Accuracy See Table 3. 3, 4
Total Error Band (TEB) See Table 3. 4, 5
Null accuracy 0.1 %FS S 4, 6
Response time 1 ms typ. 7
Resolution 12 bit min.
Start-up time 17 ms 8
Warm-up time 30 ms 9
Calibration media gaseous nitrogen 10
Bus standards I2C fast mode (up to 400 kHz) 11
Null stability Null will not deviate beyond the specified TEB.
Reverse polarity protection no
1Maximum Power: Is measured under the conditions of the highest supply voltage Vsupply + 10%, 70° C, full scale flow and with the minimum pull-up resistors for SDA and SCL
according to the I2C specification.
2Custom and extended compensated temperature ranges are possible. Contact Honeywell for details.
3Accuracy: The maximum deviation from the nominal digital output over the compensated flow range at a reference temperature of 25 °C. Errors include offset, span, non-linearity,
hysteresis and non-repeatability.
4Full Scale Span (FSS): The algebraic difference between the digital output at the forward Full Scale (FS) flow and the digital output at the reverse FS flow. Forward flow is defined as
flow from P1 to P2 as shown in Figure 4. The references to mass flow (SCCM) refer to gas flows at the standard conditions of 0 °C and atmospheric pressure 760 (101.3 kPa).
5Total Error Band (TEB): The maximum deviation in output from ideal transfer function over the entire compensated temperature and flow range. Includes all errors due to offset, full
scale span, flow hysteresis, flow repeatability, thermal effect on offset, thermal effect on span and thermal hysteresis.
6Null accuracy: The the maximum deviation in output at 0 SCCM from the ideal transfer function over the compensated temperature range. This includes offset errors, thermal airflow
hysteresis and repeatability errors.
7Response time: The time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected by the pneumatic
interface).
8Start-up time: The time to first valid reading of serial number proceeding streaming 14-bit flow measurements.
9Warm-up time: The time to the first valid flow measurement after power is applied.
10Default calibration media is dry nitrogen gas. Please contact Honeywell for other calibration options.
11Refer to the Technical Note “I2C Communications with Honeywell Digital Airflow Sensors” for I2C protocol information.
7
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±50 SCCM to ±750 SCCM
Table 3. Bidirectional Forward Flow Optimization
Sensor
Range
(SCCM)
Accuracy Error Band Total Error Band
Applied Flow
(SCCM)
Accuracy Error
(%FSS) Applied Flow (SCCM) TEB
(%FSS)
±50
-50 to -16.7 ±6% reading -50 to -14.3 ±7% reading
-16.7 to 0 ±1 -14.3 to 0 ±1
00±0.16 00± 0.16
0 to 20 ±1 0 to 14.3 ±1
20 to 50 ±5% reading -14.3 to 50 ±7% reading
±10 0
-100 to -14.3 ±7% reading -100 to -14.3 ±7% reading
-14.3 to 0 ±0.5 -14.3 to 0 ±0.5
00±0.12 00± 0.12
20 ±0.5 0 to 16.7 ±0.5
20 to 100 ±5% reading 16.7 to 100 ±6% reading
±2001
-20 0 to -11.1 ±9% reading -20 0 to -11.1 ±9% reading)
-11.1 to - 0 ±0.25 -11.1 to - 0 ±0.25
00±0.01 00± 0.1
0 to 40 ±0.25 0 to 22.2 ±0.25
40 to 200 ±2.5% reading 22.2 to 200 ±4.5% reading
±400
-400 to -26.7 ±9% reading -400 to -32 10% reading
-26.7 to -0 ±0.3 -32 to -0 ±0.4
00±0.1 00± 0.1
0 to 68.6 ±0.3 0 to 71.1 ±0.4
68.6 to 400 ±3.5% reading 71.1 to 400 ±4.5% reading
±750
-750 to -31.3 ±12% reading -750 to -31.25 ±12% reading
-31.3 to -0 ±0.25 -31.25 to -0 ±0.25
00±0.1 00± 0.1
0 to 68.2 ±0.25 0 to 50 ±0.25
68.2 to 750 ±5.5% reading 50 to 750 ±7.5 reading
1The short port sensors are only specified down to -100 SCCM.
Error (%FSS)
Airflow (SCCM)
See table below for null accuracy.
Error (%FSS)
Airflow (SCCM)
See table below for null accuracy.
8sensing.honeywell.com
Honeywell ZephyrTM Digital Airflow Sensors
HAF SeriesHigh Accuracy
Table 4. Environmental Characteristics
Characteristic Parameter
Humidity 0% to 95% RH, non-condensing
Shock 100 g, 11 ms
Vibration 15 g at 20 Hz to 2000 Hz
ESD Class 3B per MIL-STD 883G
Table 5. Wetted Materials
Characteristic Parameter
Covers high temperature polymer
Substrate PCB
Adhesives epoxy
Electronic
components silicon, gold
Compliance RoHS, WEEE
Figure 2. Nominal Digital Output
-150.00%
Flow (%FS)
Digital Output (Counts)
-100.00% -50.00%0.00% 50.00% 100.00% 150.00%
-2000
0
2000
4000
6000
8000
10000
12000
14000
16000
18000
CAUTION
LARGE PARTICULATE DAMAGE
Use a 5-micron filter upstream of the sensor to keep media
flow through the sensor free of condensing moisture and
particulates. Large, high-velocity particles or conductive
particles may damage the sensing element.
Failure to comply with these instructions may result in
product damage.
Table 6. Recommended Mounting and Implementation
Characteristic Parameter
Mounting screw:
size
torque
5-40
0,68 N m [6 in-lb]
Silicon tubing for long port style 70 durometer; size 0.125 in inside diameter, 0.250 in outside diameter silicone tubing
O-ring:
for short port style
for long port style
AS568A, Size 7, Silicone, Shore A 70
AS568A, Size 10, Silicone, Shore A 70
Filter 5-micron filter upstream of the sensor
9
sensing.honeywell.com
±50 SCCM to ±750 SCCM
Figure 3. ideal Transfer Function
Figure 4. Nomenclature and Order Guide
Figure 5. All Available Standard Configurations
LF: Long port, fastener mount SF: Short port, fastener mount SS: Short port, snap mount
HAF
Product Series
0200
Flow Range2
B
S
Bidirectional
forward flow
optimized
Bidirectional
symmetric
Flow
Direction
B
For example, a HAFBLF0200C4AX5 part number defines a Honeywell ZephyrTM Digital Airflow Sensor, bidirectional forward flow optimized, long port, fastener mount, 200 SCCM,
I2C output with address 0x49, 10% to 90% transfer function, 5.0 Vdc supply voltage.
HAF Series
High Accuracy
Airflow Sensor S
F
F
Housing Style
Fastener
mount
Snap
mount1
S
L
L
Port Style
Long port1
Short port
C
C
Unit
SCCM X
X
Reserved for
Future Use
XXXXX
A
A
Transfer
Function
10% to 90% of
Full Scale Output
(FSO) 5
3
5
Supply
Voltage
3.3 Vdc
5.0 Vdc
0050
0100
50 long port
style only
100 long port
style only
0200 200 long or
short port
0400 400 long port
style only
0750 750 long port
style only
4
Output Format
4Digital I2C address:
0x49
5Digital I2C address:
0x59
6Digital I2C address:
0x69
7Digital I2C address:
0x79
1The Long Port Port Style with the Snap Mount Housing Style is not a valid configuration.
2The 200 SCCM Flow Range is available in the Long and Short Port Styles.
Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell.
Digital Output Code = 16384 * [0.5 + 0.4 * (Flow Applied/Full Scale Flow)]
Flow Applied = Full Scale Flow * [(Digital Output Code/16384) - 0.5]/0.4
10 sensing.honeywell.com
Honeywell ZephyrTM Digital Airflow Sensors
HAF SeriesHigh Accuracy
Figure 7. Long Port Style Flow vs Pressure
N
Flow
(SCCM)
Typical Pressure Drop
mbar inH2OPa
-750 -0. 2517 - 0 .1011 -25 .17
-550 - 0 .14 99 -0.0602 -14.99
-400 -0.0891 -0.0358 -8.91
-300 -0.0578 -0.0232 -5.78
-200 -0.0321 -0.0129 -3.21
-10 0 - 0 .0114 -0.0046 -1.14
-50 -0.0035 -0.0014 -0.35
-20 -0.0007 -0.0003 -0.07
00.0000 0.0000 0.0000
20 0.0007 0.0003 0.07
50 0.0035 0.0014 0.35
100 0.0014 0.0046 0.14
200 0.0321 0.0129 3.21
300 0.0578 0.0232 5.78
400 0.0891 0.0358 8.91
550 0.14 99 0.0602 14.99
750 0.2517 0.1011 25.17
Figure 8. Short Port Style Flow vs Pressure
N
Flow
(SCCM)
Typical Pressure Drop
mbar inH2O Pa
-200 -1.1707 -0.470 -117.07
-150 -0.7074 -0.284 -70.74
-10 0 -0.3562 - 0.14 3 -35.62
-50 - 0.1120 -0.045 -11.20
00.0000 0.000 0.0000
50 0.1196 0.048 11.9 6
100 0.3462 0.139 34.62
150 0.7149 0.287 71.49
200 1.2589 0.452 125.89
-750 -600 -150-450 -300 75
0
600150 4503000
-0.12
-0.06
0
0.06
0.12
Flow (SCCM)
Pressure Drop (inH
2
O)
Pressure Drop (inH
2
O)
Flow (SCCM)
20
0
-200
-0.6
-0.4
-0.2
0
0.2
0.4
0.6
0-505
01
50-150 100-100
Figure 6. Wave Solder Profile
020406080100
0
50
100
150
200
250
300
Time (s)
Temperature (°C)
Max. temp. = 243 °C
Max. temp. = 205 °C
Housing temp. (top of device)
Pin temp. (bottom of device)
11
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±50 SCCM to ±750 SCCM
Dlgital Interface
For additional details on the use of Zephyr with digital output see the Technical Note “I2C Communications with Honeywell Digital Airflow
Sensors”.
The sensor uses the I2C standard for digital communication with a slave address specified in the Nomenclature and Order Guide in Figure
4. Following sensor power-up, each of the first two read sequences shown in Figure 9 will respond with 2 bytes of the unique 4-byte Serial
Number. The first read after power-up will respond with the two most significant bytes of the Serial Number, while the second read will respond
with the two least significant bytes of the Serial Number. For reliable performance, allow sensor to be powered for the sensor start-up time
before performing the first read, then allow a 10 ms command response time before performing the second read.
After the power-up read sequence described above, the sensor will respond to each I2C read request with a 16-bit (2 byte) digital flow reading.
Read requests taken faster than the Response Time (1 ms) are not guaranteed to return fresh data. The first two bits of each flow reading will be
0 0’.
The maximum sink current on SCL or SDA is 2 mA. Therefore, if the pull-up resistors are biased by VDD, and if VDD reaches the maximum supply
voltage of 6 V, then the pull-up resistors for SCL and SDA must be greater than 3.0 kΩ to limit the sink current to 2 mA. The typical value for SCL
and SDA pull-up resistors is 4.7 kΩ (this value depends on the bus capacitance and the bus speed).
Figure 9. Sensor I2C Read and Write Sequences
Start condition
SA6 A5 A4 A3 A0A2 A1 1SA D7 D6 D5 D3 D2 D1 D0 MA D6 D4 D3 D2 D1 D0 MN SD4 D5D7
SD
A
SC
L
SA6 A5 A4 A3 A0A2 A1 1SA D7 D6 D5 D3 D2 D1 D0 MA SD4
SD
A
SC
L
Stop condition
Address bit
Read/write bit
Data bit
Slave ACK
Master ACK
Master NACK
S
S
D7
A6
1
SA
MA
MN
Master pulls SDA from high to low while SCL remains high
Master allows SDA to float from low to high while SCL remains high
I2C Slave Address is the 7 Most Significant Bits for the first transmitted byte
Read = 1, Write = 0
Slave pulls SDA low
Master pulls SDA low
Master allows SDA to float high
I
2
C Read: Slave responds to Master with data
Data Byte 0 (Most Significant) Data Byte 1 (Least Significant)
Command Byte
I
2
C Read: Master sends data to Slave
Bit Name Description
12 sensing.honeywell.com
Honeywell ZephyrTM Digital Airflow Sensors
HAF SeriesHigh Accuracy
Figure 10. Mounting Dimensions (For reference only: mm [in].)
LF: Long port, fastener mount
SF: Short port, fastener mount
Mounting Footprint
Mounting Footprint
7(50,1$/6,'(

3,0
[0.12]
2,00 TYP.
[0.079]
MODEL NUMBER
LOT CODE
10,3
[0.40]
10,00
[0.39]
3,50
[0.14]
6,50
[0.26]
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
36,00
[1.42]
7,20
[0.28]
12,70
[0.50]
AIRFLOW DIRECTION, PORT SIDE
2X DIA. 3,40
[0.13]
1,00
[0.04]
7,20
[0.28]
2X DIA. 5,35
[0.21]
Honeywell Zephyr™
HAFBLFXXXXXXXXX
0x123456789
6(1625)22735,17
9,(:(')5207(50,1$/6,'(
;32576
4X DIA. 0,812
[0.032]
7,20
[0.28]
18,00
[0.71]
36,00
[1.42]
2X DIA. 3,40
[0.134]
7(50,1$/6,'(
1234
3,0
[0.12]
2,00 TYP.
[0.079]
MODEL NUMBER
LOT CODE
10,3
[0.40]
2,50
[0.10]
3,50
[0.14]
6,50
[0.26]
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
36,00
[1.42]
7,20
[0.28]
12,70
[0.50]
AIRFLOW DIRECTION, PORT SIDE
1,00
[0.04]
7,20
[0.28]
Honeywell Zephyr™
HAFBSFXXXXXXXXX
0x123456789
2X DIA. 4,00
[0.16]
6(1625)22735,17
9,(:(')5207(50,1$/6,'(
;32576
4X DIA. 0,812
[0.032]
7,20
[0.28]
18,00
[0.71]
36,00
[1.42]
2X DIA. 3,40
[0.134]
13
sensing.honeywell.com
±50 SCCM to ±750 SCCM
Figure 10. Mounting Dimensions (For reference only: mm [in], continued.)
SS: Short port, snap mount
10
Table 8. Pinout
Pin 1 Pin 2 Pin 3 Pin 4
SCL Vsupply ground SDA
Mounting Footprint
;32576
6(1625)22735,17
9,(:(')5207(50,1$/6,'(
26,00
[1.024]
22,0
[0.866]
2X DIA. 2,2 [0.086] THRU
HOLES FOR MOUNTING
3,80
[0.150]
4,00
[0.157]
2X 2,50
[0.098]
2X 7,20
[0.28]
0,65
[0.026]
4X DIA. 0,812
[0.032]
7(50,1$/6,'(

MODEL NUMBER
LOT CODE
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
12,70
[0.50]
10,3
[0.40]
2,50
[0.10]
4,80
[0.19]
3,3
[0.13]
2,00 TYP.
[0.079]
1,00
[0.04]
3,00
[0.12]
12,8
[0.50]
26,00
[1.02]
1,80
[0.071]
6,50
[0.26]
10,40
[0.41]
7,20
[0.28] 4,60
[0.18]
AIRFLOW DIRECTION, PORT SIDE
22,00
[0.87]
Honeywell Zephyr™
HAFBSSXXXXXXXXX
0x123456789
DIA. 2,30
[0.09]
ADDITIONAL INFORMATION
The following associated literature is available at sensing.
honeywell.com:
•Productlineguide
•Productpartlisting/nomenclaturetree
•Productrangeguide
•TechnicalInformation:
– I2C Communications with Honeywell Digital Airflow
Sensors
Gas Media Compatibility and Correction Factors
•Installationinstructions
•Application-specificinformation
32308684-A-EN
June 2015
2015 Honeywell International Inc. All rights reserved.
WARRANTY/REMEDY
Honeywell warrants goods of its manufacture as being free of
defective materials and faulty workmanship. Honeywell’s standard
product warranty applies unless agreed to otherwise by Honeywell
in writing; please refer to your order acknowledgement or consult
your local sales office for specific warranty details. If warranted
goods are returned to Honeywell during the period of coverage,
Honeywell will repair or replace, at its option, without charge
those items it finds defective. The foregoing is buyer’s sole
remedy and is in lieu of all other warranties, expressed or
implied, including those of merchantability and fitness for
a particular purpose. In no event shall Honeywell be liable
for consequential, special, or indirect damages.
While we provide application assistance personally, through our
literature and the Honeywell website, it is up to the customer to
determine the suitability of the product in the application.
Specifications may change without notice. The information we
supply is believed to be accurate and reliable as of this printing.
However, we assume no responsibility for its use.
WARNING
PERSONAL INJURY
DO NOT USE these products as safety or emergency stop
devices or in any other application where failure of the product
could result in personal injury.
Failure to comply with these instructions could result in
death or serious injury.
WARNING
MISUSE OF DOCUMENTATION
• Theinformationpresentedinthisproductsheetisfor
reference only. Do not use this document as a product
installation guide.
• Completeinstallation,operation,andmaintenance
information is provided in the instructions supplied with each
product.
Failure to comply with these instructions could result in
death or serious injury.
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HAFBSS0200C4AX3 HAFBSS0200C4AX5 HAFBLF0100CAAX3 HAFBLF0750C4AX3 HAFBLF0100C4AX5
HAFBLF0100C4AX3 HAFBLF0750CAAX3 HAFBLF0100CAAX5 HAFBLF0400CAAX3 HAFBLF0400C4AX5
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