A
Pentium® Processor wit h Voltage Reduction Technology
PRELIMINARY 15
2.0 IN TEL DIE PRODUCTS
PROCESSING
2.1 Test Proced ure
Intel has instituted full-speed functional testing at the
die level for all SmartDie products. This level of
testing is ordinarily performed only after assembly
in to a package . Each die is tested to the same elec-
trical limits as the equivalent packaged unit.
2 . 2 Waf er Pr obe
Wa fer probing is performed on every wafer produced
in Intel Fabs. The process consists of specific elec-
trical tests and device-spe cifi c functio na lity tests.
At the wafer l evel, b ui lt-i n test stru cture s are pro be d
to verify that device electrical characteristics are in
control and meet specifications. Measurements are
made of transistor threshold voltages and current
characteristics; poly and contact resistance; gate
oxid e a nd junctio n inte grity; an d spe ci fic para me ters
critical to the particular technology and device type.
Wafer-t o-wa fe r, across-th e-wa fe r run -to- run varia tion
and conform ance to spec limits are checked .
The actual devices on each wafer are then probed
for both functionality and performance to specifica-
tions. Additional reliability tests are also included in
the prob e steps .
2 . 3 Waf er Saw
Probed wafers are transferred to Intel’s assembly
sites to be sawed. The saw cuts totally through the
wafer.
2.4 Die Inspection
Upon completion of the wafer saw, the die are
moved to pick and place equipment that removes
reject die. The remaining die are submitted to the
same visual inspection as standard packaged
product. The compliant die are then transferred to
GEL-PAKs for shipment.
2.5 Packing Procedure
Intel will ship all Intel die products in GEL-PAKs.
GEL-PAKs eliminate the die edge damage usually
associated with die cavity plates or chip trays.
The backside of each die adheres to the gel
membrane in the GEL-PAK, eliminating the risk of
damage to the active die surface. A simple vacuum
release mechanism allows for pick and place
removal at the customer's site.
Only die from the same wafer lot are packaged
tog ether i n a GEL-PAK, a nd a ll die a re pla ced in the
GEL-PAKs with a consistent orientation. The GEL-
PAKs are then sealed and lab eled with th e foll owing
information:
• I nte l Sm art Die
• Intel Part Number
• Assembly Process Order / Spec
• ROM Cod e ( if applicable)
• Customer Part Number (if applicable)
• Assem b ly Lot Traveler Num b er
• Fin ishe d Prod uct Orde r Number
• Quantity
• Seal Date
• Country of Origin
NOTE:
GEL-PAKs require a Vacuum Release Station.
Contact Vichem* Corporation for more information.
2.6 Inspection Steps
Multiple inspection steps are performed during the
die fabrication and packing flow. These steps are
perf orme d ac co rding to t he sam e spe cifica tio ns a nd
criteria established for Intel’s standard packaged
product. Specific inspection steps include a wafer
saw visual as well as a f inal die visu al just before die
are sealed in moisture barrier bags.
2.7 S tor age Req ui rem en ts
Intel die products will be shipped in GEL-PAKs and
sealed in a moisture-barrier anti-static bag with a
desiccant. No special storage procedures are
required while the bag is still unopened. Once
opened, the GEL-P AK should be stored in a dry, inert
atmosphere to prevent corrosion of the bond pads.
2.8 Electro-Static Discharge (ESD)
Components are ESD sensitive.